Abstract: A position control system includes a PID controller for generating a current target value of a linear motor from a difference between a positional detected value and a positional command value, and a disturbance observer. The disturbance observer includes a signal processing unit comprising a filter for filtering a torque command value for a motor drive and an input torque estimating filter carrying out estimation for obtaining an estimated input load torque from the detected positional value. An inverse model of a motor torque constant calculates an estimated disturbance load torque from the difference between the filtered torque command value and the estimated input load torque and generates a correction value for the current target value so as to cancel a disturbance torque on the basis of the estimated disturbance load torque being calculated.

Abstract: A discrete Kalman filter 12 and a disturbance estimating unit 13 are added to a feedback loop for feeding back a detected value of position from a position detector 6. The Kalman filter estimates position and velocity of an object to be controlled, thereafter outputting an estimated value of position and an estimated value of velocity. The disturbance estimating unit estimates from a command value of current and the estimated value of velocity the disturbance that is added to a load 5. The estimated value of position is fed back to a position controller 1, and the estimated value of velocity is fed back to a velocity controller 2. Further, a difference between a target value of current outputted from the velocity controller and the estimated value of disturbance is output as the command value of current.

Abstract: The present invention provides a vacuum stage device that moves a substrate to be processed in a vacuum environment. In a substrate transfer device in accordance with the present invention, a wafer mounted to a wafer platen is moved in a vacuum processing chamber. This substrate transfer device includes a first driving mechanism for moving the wafer platen in a Y1 direction, and a second driving mechanism that is provided in the vacuum processing chamber and linearly reciprocates the wafer platen in X1 and X2 directions at a high speed.

Abstract: A double side grinding apparatus and a double side polishing apparatus, with a narrow tolerance range, reduces pitching errors, and ensures a sufficient level of rigidity against the force of reaction to machining, while enhancing positioning accuracy. The double side grinding apparatus or a double side polishing apparatus includes a plurality of guideways for supporting and shifting main spindles, and these plural guideways on end define a geometric center matched with the center of gravity of the main spindles. The number of the guideways is preferably three in order not to obstruct the mounting and removal of a workpiece.

Abstract: In an apparatus for use in carrying out decoupling control of a T-die which has a pair of lip portions with a gap extended between the lip portions and with the lip portions divided into a plurality of zones individually driven by driving devices, respectively, a processing circuit individually controls the driving devices by the use of a predetermined decoupling control algorithm. The predetermined decoupling algorithm is given by a plurality of desired displacement vectors of the gap for the respective zones and a decoupling control matrix defined by inverse numbers of products of a command value/driving pressure converting matrix (Kp) and a driving pressure/displacement converting matrix (K.alpha.). Alternatively, the decoupling control matrix is repeatedly modified with time to decrease a difference between the desired gap displacement (.DELTA.y) and the measured gap displacement (.DELTA.y.sub.m). Each command voltage value vector .DELTA.

Abstract: A lip drive structure for a T-die including a main body structure member having an elongated nozzle orifice defined by a pair of lip portion facing each other, a nozzle structure portion including one of the lip portions and formed at the lower end of the main body structure member so as to be integrally connected to the same through an elastically deformable portion, a plurality of bellows disposed on a side surface of the main body structure member on the side of the nozzle structure portion, and a drive section structure member fastened to the bellows at its upper portion and fastened to the lip structure portion at its lower portion. Air supply holes are formed in the drive section structure member to enable the bellows to be supplied with compressed air. The drive section structural member is divided into a plurality of elements in the longitudinal direction.