Abstract: A substrate processing apparatus includes: a holding unit, a processing cup, a first supply unit, a second supply unit, a drain unit, and a first measurement unit. The holding unit holds a substrate. The processing cup is provided around the holding unit. The first supply unit supplies a chemical liquid to the substrate held by the holding unit. The second supply unit supplies a rinse liquid or a drying liquid to the substrate held by the holding unit. The drain unit is provided at the bottom of the processing cup, and is connected to a drain line and a recovery line via a line switch. The first measurement unit is provided in the drain unit, and measures the purity of the rinse liquid or the drying liquid.

Abstract: A control device controls operation of a power conversion apparatus including a converter, a smoothing capacitor, and an inverter. The control device includes a voltage command calculation unit, a torque ripple compensation command calculation unit, and a beat component compensation command calculation unit. The voltage command calculation unit calculates a voltage command including a first compensation command to reduce a first torque ripple pulsating at twice a frequency of a power-supply voltage. The torque ripple compensation command calculation unit calculates a second compensation command to reduce a second torque ripple pulsating at a rotational frequency of a motor. The beat component compensation command calculation unit calculates a third compensation command to reduce a third torque ripple caused by the first torque ripple and by the second torque ripple.

Abstract: A power converter includes a converter that rectifies an alternating-current voltage applied from an alternating-current power supply, a capacitor connected to output ends of the converter, an inverter connected both ends of the capacitor, and a controller that controls an operation of the inverter. A voltage output from the converter includes a ripple component due to a voltage fluctuation of the alternating-current voltage. When the controller performs acceleration and deceleration control on the motor, the controller changes a rotational speed command from a command value during the normal control, in a first period in which a rotational speed of the motor is in a first speed range.

Abstract: In sensorless control for a rotary machine, when variations in inductances for U, V, W phases due to manufacturing error are great, imbalance occurs among detected currents for the respective phases. Thus, estimation error of a magnetic pole position of a rotor increases, so that positioning accuracy is reduced. Correction filters for imparting gains in accordance with rotary machine constants for the respective phases are provided to control means or magnetic pole position calculation means, thereby correcting the imbalance occurring among the detected currents for the respective phases.

Abstract: A substrate processing apparatus comprises a holder configured to hold a substrate; a processing liquid supply configured to supply a processing liquid onto the substrate held by the holder; and a resistance value varying mechanism configured to vary an electrical resistance of the holder in contact with the substrate.

Abstract: In sensorless control for a rotary machine, when variations in inductances for U, V, W phases due to manufacturing error are great, imbalance occurs among detected currents for the respective phases. Thus, estimation error of a magnetic pole position of a rotor increases, so that positioning accuracy is reduced. Correction filters for imparting gains in accordance with rotary machine constants for the respective phases are provided to control means or magnetic pole position calculation means, thereby correcting the imbalance occurring among the detected currents for the respective phases.

Abstract: A machine learning device includes: a state observer that observes, as a state variable, at least one of driving noise of a synchronous rotating machine and an error with respect to a preset position of a rotational position of the synchronous rotating machine determined by driving voltage; and a learner that determines a value of a parameter on a basis of the state variable observed by the state observer. The learner includes: a reward calculator that calculates a reward on a basis of the state variable; and a function updater that determines the value of the parameter on a basis of the reward that has been calculated. The reward calculator increases the reward when the driving noise is smaller than a target value of driving noise.

Abstract: A machine learning device includes: a state observer that observes, as a state variable, at least one of driving noise of a synchronous rotating machine and an error with respect to a preset position of a rotational position of the synchronous rotating machine determined by driving voltage; and a learner that determines a value of a parameter on a basis of the state variable observed by the state observer. The learner includes: a reward calculator that calculates a reward on a basis of the state variable; and a function updater that determines the value of the parameter on a basis of the reward that has been calculated. The reward calculator increases the reward when the driving noise is smaller than a target value of driving noise.

Abstract: A substrate processing apparatus comprises a holder configured to hold a substrate; a processing liquid supply configured to supply a processing liquid onto the substrate held by the holder; and a resistance value varying mechanism configured to vary an electrical resistance of the holder in contact with the substrate.

Abstract: A control device for an AC rotating machine includes: a current detection unit; a command generation unit for generating a voltage command, using a moment of inertia J; a speed estimation unit for calculating an estimated speed ?0 on the basis of the voltage command and detected current; an output torque computing unit for calculating output torque on the basis of the detected current; and an inertia moment computing unit for calculating the moment of inertia J. The output torque computing unit gives a delay characteristic corresponding to an estimation delay of the estimated speed ?0, to the output torque, and the inertia moment computing unit calculates the moment of inertia J on the basis of the estimated speed ?0 and the output torque having the delay characteristic.

Abstract: A control device for an AC rotary machine includes a magnetic-pole-position correction amount calculation device that calculates a magnetic-pole-position correction amount based on a detection-current vector detected when a voltage application device applies a voltage to the AC rotary machine according to a voltage command and on the voltage command, and stores in a storage device the magnetic-pole-position correction amount as it is associated with the detection-current vector. At normal operation of the AC rotary machine, a voltage-vector command generation device generates a voltage command for normal operation based on the detection-current vector detected by a current vector detection device and the magnetic-pole-position correction amount associated with the detection-current vector.

Abstract: Disclosed is a substrate liquid processing apparatus. The substrate liquid processing apparatus includes a processing unit, a nozzle, a silylation liquid supply mechanism, and a blocking fluid supply mechanism. The processing unit performs a water repellency imparting processing on a substrate by supplying a silylation liquid to the substrate. The nozzle includes an ejection port configured to supply the silylation liquid to the substrate positioned in the processing unit, and a silylation liquid flow path in which the silylation liquid flows toward the ejection port. The silylation liquid supply mechanism supplies the silylation liquid to the silylation liquid flow path in the nozzle through a silylation liquid supply line. The blocking fluid supply mechanism supplies a blocking fluid that blocks the silylation liquid within the silylation liquid flow path in the nozzle from an atmosphere outside the ejection port.

Abstract: A liquid treatment apparatus includes a substrate holder (21) that holds a substrate horizontally and rotates the substrate, a treatment liquid nozzle (82) that supplies a treatment liquid to the substrate held by the substrate holder, a cup (40) that is arranged outside of a peripheral edge of the substrate held by the substrate holder and receives the treatment liquid which has been supplied to the substrate by the treatment liquid nozzle, a top plate (32) that covers the substrate held by the substrate holder from above, a top plate rotation driving mechanism that rotates the top plate, and a liquid receiving member (130) that surrounds a peripheral edge of the top plate and has a circular liquid receiving space (132).

Abstract: A control device for an AC rotary machine includes a magnetic-pole-position correction amount calculation device that calculates a magnetic-pole-position correction amount based on a detection-current vector detected when a voltage application device applies a voltage to the AC rotary machine according to a voltage command and on the voltage command, and stores in a storage device the magnetic-pole-position correction amount as it is associated with the detection-current vector. At normal operation of the AC rotary machine, a voltage-vector command generation device generates a voltage command for normal operation based on the detection-current vector detected by a current vector detection device and the magnetic-pole-position correction amount associated with the detection-current vector.

Abstract: A top plate is provided with a top plate rotation mechanism configured to rotate the top plate in a horizontal plane. An outside cup peripheral case disposed around a cup is configured to move between an upper position, in which a top end of the cylinder is positioned above the cup, and a lower position located below the upper position. A nozzle support arm configured to support a nozzle is moved, in a horizontal direction, between an advanced position, in which the arm is advanced into the outside cup peripheral case via a side opening formed in a side surface of the outside cup peripheral case when the cylinder is located in the upper position, and a retracted position, in which the arm is retracted outward from the outside cup peripheral case.

Abstract: A control device for an AC rotating machine includes: a current detection unit; a command generation unit for generating a voltage command, using a moment of inertia J; a speed estimation unit for calculating an estimated speed ?0 on the basis of the voltage command and detected current; an output torque computing unit for calculating output torque on the basis of the detected current; and an inertia moment computing unit for calculating the moment of inertia J. The output torque computing unit gives a delay characteristic corresponding to an estimation delay of the estimated speed ?0, to the output torque, and the inertia moment computing unit calculates the moment of inertia J on the basis of the estimated speed ?0 and the output torque having the delay characteristic.

Abstract: A control device for AC rotary machine includes a current vector detection section (3), a magnetic flux vector detection section (9), an adaptive observation section (8), a control section (4), a voltage application section (5), a deviation vector calculation section (6) for outputting a current deviation vector and a magnetic flux deviation vector, and a deviation amplification section (7). The adaptive observation section (8) calculates an estimated current vector, an estimated magnetic flux vector, and an estimated position, based on a voltage instruction vector and an amplified deviation vector. Further, the control section (4) superimposes a high-frequency voltage vector, and the magnetic flux vector detection section (9) calculates a detected magnetic flux vector, based on a magnitude of a high-frequency current vector having the same frequency component as the high-frequency voltage vector, included in a detected current vector, and on a magnitude of a rotor magnetic flux.

Abstract: The present disclosure provides a substrate processing apparatus including: a substrate processing chamber configured to process a substrate on which a target layer to be removed is formed on the surface of an underlying layer; a substrate holding unit provided in the substrate processing chamber and configured to hold the substrate; a mixed liquid supplying unit configured to supply a mixed liquid of sulfuric acid and hydrogen peroxide to the substrate held by the substrate holding unit in a mixing ratio of the hydrogen peroxide and a temperature that does not damage the underlying layer while removing the target layer; and an OH-group supplying unit configured to supply a fluid containing OH-group to the substrate in an amount that does not damage the underlying layer when the mixed liquid and the OH-group are mixed on the substrate.

Abstract: A control device of an AC rotating machine includes a controller receiving a current vector instruction and a detection current vector as inputs and outputs a voltage vector instruction to the AC rotating machine, an alternating current amplitude computation mechanism computing an alternating current amplitude of at least one of a parallel component and an orthogonal component with respect to the voltage vector instruction, an alternating current amplitude instruction generator generating an alternating current amplitude instruction from the current vector instruction, and a magnetic-pole position computation mechanism computing an estimated magnetic-pole position of the AC rotating machine. The magnetic-pole position computation mechanism computes the estimated magnetic-pole position so that the alternating current amplitude coincides with the alternating current amplitude instruction.

Abstract: A control device for rotary machine includes: a voltage instruction generation section for generating a voltage instruction; a voltage application section for applying voltage to a rotary machine based on the voltage instruction; a current detection section for detecting rotary machine current of the rotary machine; and an inductance calculation section for calculating an inductance of the rotary machine from the voltage instruction and the rotary machine current. The voltage instruction generation section generates voltage instructions of constant DC voltages. The voltage application section applies voltages to the rotary machine based on the voltage instructions. The inductance calculation section calculates the inductance from a voltage instruction for measurement arbitrarily selected from the voltage instructions, and the rotary machine currents detected by the current detection section before and after application of the voltage instruction for measurement.