Abstract: An insulating liner layer has an extra-pixel removal region located outside a pixel region in a region of a vertical angle of at least one of four corners of the pixel region and having the insulating liner layer removed therefrom.

Abstract: Provided is a semiconductor device with improved performance. The semiconductor device includes a photodiode having a charge storage layer (n-type semiconductor region) and a surface layer (p-type semiconductor region), and a transfer transistor having a gate electrode and a floating diffusion. The surface layer (p-type semiconductor region) of a second conductive type formed over the charge storage layer (n-type semiconductor region) of a first conductive type includes a first sub-region having a low impurity concentration, and a second sub-region having a high impurity concentration. The first sub-region is arranged closer to the floating diffusion than the second sub-region.

Abstract: An imaging device and a manufacturing method of the imaging device are provided, which can lower the level of a dark current in an optical black pixel without forming a new layer such as a hydrogen diffusion preventing film. Both of an insulating layer over a photodiode arranged over an effective pixel region and an insulating layer over a photodiode arranged over an OB pixel region include silicon nitride, are formed of the same layer, and are coupled with each other.

Abstract: An insulating liner layer has an extra-pixel removal region located outside a pixel region in a region of a vertical angle of at least one of four corners of the pixel region and having the insulating liner layer removed therefrom.

Abstract: An insulating liner layer has an extra-pixel removal region located outside a pixel region in a region of a vertical angle of at least one of four corners of the pixel region and having the insulating liner layer removed therefrom.

Abstract: An improvement is achieved in the performance of a semiconductor device. A semiconductor device includes a pixel including a first active region where a photodiode and a transfer transistor are formed and a second active region for supplying a grounding potential. Over a p-type semiconductor region in the second active region, a plug for supplying the grounding potential is disposed. In an n-type semiconductor region for a drain region of the transfer transistor formed in the first active region, a gettering element is introduced. However, in the p-type semiconductor region in the second active region, the gettering element is not introduced.

Abstract: Provided is a semiconductor device with improved performance. The semiconductor device includes a photodiode having a charge storage layer (n-type semiconductor region) and a surface layer (p-type semiconductor region), and a transfer transistor having a gate electrode and a floating diffusion. The surface layer (p-type semiconductor region) of a second conductive type formed over the charge storage layer (n-type semiconductor region) of a first conductive type includes a first sub-region having a low impurity concentration, and a second sub-region having a high impurity concentration. The first sub-region is arranged closer to the floating diffusion than the second sub-region.

Abstract: An imaging device and a manufacturing method of the imaging device are provided, which can lower the level of a dark current in an optical black pixel without forming a new layer such as a hydrogen diffusion preventing film. Both of an insulating layer over a photodiode arranged over an effective pixel region and an insulating layer over a photodiode arranged over an OB pixel region include silicon nitride, are formed of the same layer, and are coupled with each other.

Abstract: Provided is a semiconductor device with improved performance. The semiconductor device includes a photodiode having a charge storage layer (n-type semiconductor region) and a surface layer (p-type semiconductor region), and a transfer transistor having a gate electrode and a floating diffusion. The surface layer (p-type semiconductor region) of a second conductive type formed over the charge storage layer (n-type semiconductor region) of a first conductive type includes a first sub-region having a low impurity concentration, and a second sub-region having a high impurity concentration. The first sub-region is arranged closer to the floating diffusion than the second sub-region.

Abstract: A connection portion connects a copper-based first wiring layer with a copper-based second wiring layer arranged on the upper side of a first diffusion barrier film. The first diffusion barrier film includes a first opening region formed in a semiconductor circuit region that is a partial region in a two-dimensional view and a second opening region formed as an opening region different from the first opening region in a two-dimensional view. The opening regions are formed in a region different from an opening region formed to allow the connection portion to pass through the first diffusion barrier film. A mark wiring layer is arranged immediately above the second opening region as the same layer as the second wiring layer. A second diffusion barrier film is arranged in contact with the upper surface of the mark wiring layer.

Abstract: An insulating liner layer has an extra-pixel removal region located outside a pixel region in a region of a vertical angle of at least one of four corners of the pixel region and having the insulating liner layer removed therefrom.

Abstract: A connection portion connects a copper-based first wiring layer with a copper-based second wiring layer arranged on the upper side of a first diffusion barrier film. The first diffusion barrier film includes a first opening region formed in a semiconductor circuit region that is a partial region in a two-dimensional view and a second opening region formed as an opening region different from the first opening region in a two-dimensional view. The opening regions are formed in a region different from an opening region formed to allow the connection portion to pass through the first diffusion barrier film. A mark wiring layer is arranged immediately above the second opening region as the same layer as the second wiring layer. A second diffusion barrier film is arranged in contact with the upper surface of the mark wiring layer.

Abstract: Provided is a semiconductor device with improved performance. The semiconductor device includes a photodiode having a charge storage layer (n-type semiconductor region) and a surface layer (p-type semiconductor region), and a transfer transistor having a gate electrode and a floating diffusion. The surface layer (p-type semiconductor region) of a second conductive type formed over the charge storage layer (n-type semiconductor region) of a first conductive type includes a first sub-region having a low impurity concentration, and a second sub-region having a high impurity concentration. The first sub-region is arranged closer to the floating diffusion than the second sub-region.