Abstract: A multi-axis load sensor comprises at least one radial plate structure adapted to detect a moment to be produced about its standard axis by a load, and at least one of a parallel plate structure adapted to detect a force to be produced in the direction of its standard axis by the load and another radial plate structure adapted to detect a moment to be produced about its standard axis by the load. The standard axis of the former radial plate structure is neither coincident with nor parallel to the standard axis of the at least one of the parallel plate structure and latter radial plate structure. The above sensor can reduce interactions of detected signals to extremely low levels, while showing good detection sensitivity and large strength and rigidity and making detection characteristic linear.

Abstract: A fine positioning device is constructed of a parallel flexible-beam displacement mechanism and/or a radial flexible-beam displacement mechanism. The former displacement mechanism comprises a first rigid portion rigid against forces, a second rigid portion rigid against forces, plural parallel flexible beams connecting the first and second rigid portions together, and a first actuator adapted to have the plural flexible beams undergo bending deformation. The latter displacement mechanism comprises a third rigid portion rigid against torques, a fourth rigid portion rigid against torques, plural radial flexible beams connecting the third and fourth rigid portions together, and a second actuator adapted to have the plural flexible beams undergo bending deformation. The fine positioning device can obtain fine linear displacements and/or fine angular displacement with good accuracy. This invention also facilitates the construction of multi-axis positioning devices.

Abstract: A multi-axis load sensor is composed of at least one of a parallel plate structure connecting two members to each other by means of a plurality of flexible beams arranged in parallel to one another and a radial plate structure connecting the two members to each other by means of a plurality of flexible beams arranged radially relative to a given point and equipped with detection means for detecting deformations of the associated flexible beams. The deformations are of the bending deformation mode and are developed by a load applied to the associated flexible beams. At least one of the associated flexible beams is provided with another detection means for detecting deformations of a deformation mode different from the bending mode. The multi-axis load sensor is simple in structure and easily machined.

Abstract: A load sensor is formed of a block, at least one parallel plate structure composed of three or more thin-walled plates formed by two or more through-holes extending in the same direction through the block, and detection means provided with the thin-walled plates at prescribed locations thereof. The load sensor can detect greater forces without increasing its external dimensions at the portion in which its parallel plate structure is included, and can also show high rigidity against forces and moments in directions other than the intended direction.

Abstract: A profile working machine is equipped with a support for holding a work in place, a working tool for machining the work, and drive and control systems for controlling the relative displacements between the support and the working tool. The profile working machine is to machine the work into a desired profile.

Abstract: A multi-axis load sensor comprises at least one radial plate structure adapted to detect a moment to be produced about its standard axis by a load, and at least one of a parallel plate structure adapted to detect a force to be produced in the direction of its standard axis by the load and another radial plate structure adapted to detect a moment to be produced about its standard axis by the load. The standard axis of the former radial plate structure is neither coincident with nor parallel to the standard axis of the at least one of the parallel plate structure and latter radial plate structure. The above sensor can reduce interactions of detected signals to extremely low levels, while showing good detection sensitivity and large strength and rigidity and making detection characteristic linear.

Abstract: A load converter having a force-sensitive and deformable section which has fixed portions, movable portions and a pair of thin, annular parallel, spaced, flexible portions extending so as to connect the fixed and movable portions together. Joint regions, which are connected to the fixed and movable portions, of each of the above-described flexible portions are made divergent toward the fixed and movable portions so as to have a radius of curvature of substantially not less than 2T, wherein T is a minimum thickness of each of the flexible portions.

Abstract: A load detector which includes a pin-like member arranged between force-transmitting members, a hole formed in the pin-like member along its neutral axis for bending deformations thereof, an insertion member inserted in the hole and having at both end parts thereof securement portions and at a central part thereof one or more deformation-sensing portions which are provided with their axis of symmetry coincident with the neutral axis of the pin-like member, are responsive to each load applied to the pin-like member, undergo deformations and hence enlarge the resulting strain, and a mechanism for converting the extent of deformation of the deformation-sensing portions into signals so as to obtain only portion of the resulting strain which portion has been produced by each shear deformation of the pin-like member. Owing to the position of the hole, the pin-like member has sufficient strength and rigidity and can thus be used as a connecting pin or bolt.

Abstract: A load converter in which part of a detecting block has a through-hole therein to facilitate deformation by a load. The through-hole is a slender or longitudinal hole, which is formed by cutting off a part between two small round holes so that the round holes are connected with each other.

Abstract: A pressure transducer having two through holes extending in one direction and a additional two through holes in another direction in a detection block such that they cross each other. The transducer has a pressure receiving portion located in the center of the detection block and surrounded by the through holes, and a retaining portion located around the periphery of the detection block and surrounding the pressure receiving portion. The pressure receiving portion is connected to the retaining portion through parallel upper and lower thin wall portions which are formed continuously between the upper wall of the through holes and the upper surface of the detection block, and between the lower wall of the through holes and the lower surface of the detection block.

Abstract: A thrust-torque detector comprising a tubular member. The tubular member has parallel spring-like elastically supported structural portions deformable by a thrust and positioned opposite each other. The tubular member has radially arranged spring-like elastically-supported structural portions deformable by a torque and positioned opposite each other.