Abstract: An electrostatic chuck 55 comprises an electrostatic member 100 including a dielectric 115 having a surface 120 adapted to receive a substrate 30. The dielectric 115 covers an electrode 105 that is chargeable to electrostatically hold the substrate 30. The base 175 comprises a composite of a plurality of materials, such as, ceramic and metal, for example silicon carbide and aluminum. Optionally, a support 190 can be provided to support the base 175.

Abstract: An electrostatic chuck 55 has an electrostatic member 100 including a dielectric 115 having a surface 120 adapted to receive the substrate 30. The dielectric 115 covers an electrode 105 that is chargeable to electrostatically hold the substrate 30. A support 190 below the electrostatic member 100 has a cavity 300 adapted to hold a gas to serve as a thermal insulator to regulate the flow of heat from the electrostatic chuck 55 to a surface 120 of the chamber 25. The cavity 300 has a cross-sectional profile that is shaped to provide a predetermined temperature profile across the substrate 30.

Abstract: A traction drive type driving apparatus is provided, by which any particular pressing mechanism is unnecessary, by which a big deformation can be obtained easily, in which decreasing degree of the pressing load is extremely small against small amount of abrasion, in which the test for confirming the pressing load at a desired amount can be done easily, and which has a readily constructible hollow structure. The traction drive type driving apparatus comprises an externally contacting shaft (2) located at the center, a plurality of intermediate shafts (1) equidistantly disposed around and externally contacting with the externally contacting shaft (2), and an internally contacting cylinder (3) internally contacting with the intermediate shafts (1), at least one of the intermediate shafts offset from the center is an input shaft, and the externally contacting shaft (2) is a ring-like hollow cylinder and is held by the intermediate shafts (1) to form a floating ring without disposing any particular bearing.

Abstract: An internally meshing planetary gear device which comprises an internal gear having a circular arc tooth form and an outer gear of a planetary gear having an epitrochoid tooth form, the internal gear comprises pins, both ends of which are supported, and rolling bearings inserted onto the pins, and the rolling bearings have outer races meshing with the outer gear.

Abstract: A traction drive type driving apparatus is provided, by which any particular pressing mechanism is unnecessary, by which a big deformation can be obtained easily, in which decreasing degree of the pressing load is extremely small against small amount of abrasion, in which the test for confirming the pressing load at a desired amount can be done easily, and which has a readily constructible hollow structure. The traction drive type driving apparatus comprises an externally contacting shaft (2) located at the center, a plurality of intermediate shafts (1) equidistantly disposed around and externally contacting with the externally contacting shaft (2), and an internally contacting cylinder (3) internally contacting with the intermediate shafts (1), at least one of the intermediate shafts offset from the center is an input shaft, and the externally contacting shaft (2) is a ring-like hollow cylinder and is held by the intermediate shafts (1) to form a floating ring without disposing any particular bearing.

Abstract: An electrostatic chuck 20 for holding a substrate 25 in a process chamber 30 comprises an electrostatic member 115 comprising a polymer 120 covering an electrode 125, the polymer 120 having a receiving surface 135 for receiving the substrate 25. A heater 130 abutting the polymer 120 is provided to heat the substrate 25 during processing of the substrate 25. The heater 130 has a resistance that is sufficiently low to heat the substrate 25 without causing excessive thermal degradation of the polymer 120.

Abstract: A failure resistant electrostatic chuck 20 for holding a substrate 35 during processing of the substrate 35 comprises one or more electrodes 25 covered by an insulator 30, the electrodes 25 capable of electrostatically holding a substrate 35 when a voltage is applied thereto. An electrical power bus 40 comprises one or more output terminals 45 that conduct voltage to the electrodes 25. The fuses 50 are positioned in hollow cavities 55 in the insulator 30, and electrically connect the electrodes 25 in series to the output terminals 45 of the power bus 40. Each fuse 50 can electrically disconnect an electrode 25 from an output terminal 45 when the insulator 30 covering the electrode 25 punctures and exposes the electrode 25 to a plasma process environment thereby causing a plasma current discharge to flow through the fuse 50.

Abstract: A planetary gear apparatus comprising an inner tooth gear having an inner peripheral portion formed with a plurality of inner teeth each in the form of a semi-circular cross-section shape and an outer tooth gear positioned within the inner tooth gear and having an outer peripheral portion formed with a plurality of outer teeth each in the form of a wave shape. The outer tooth gear has a center axis offset at an offset amount from the center axis of the inner tooth gear, and revolvable while being held in sliding and meshing contact with the inner tooth gear with the center axis of the outer tooth gear moving on a revolution orbit encircling and spaced from the center axis of the inner tooth gear at a distance equal to the offset amount.

Abstract: A method for treating the surface of aluminum alloys hang a relatively high copper content is provided which includes the steps of removing substantially all of the copper from the surface, contacting the surface with a first solution containing cerium, electrically charging the surface while contacting the surface in an aqueous molybdate solution, and contacting the surface with a second solution containing cerium. The copper is substantially removed from the surface in the first step either by (i) contacting the surface with an acidic chromate solution or by (ii) contacting the surface with an acidic nitrate solution while subjecting the surface to an electric potential. The corrosion-resistant surface resulting from the invention is excellent, consistent and uniform throughout the surface. Surfaces treated by the invention may often be certified for use in salt-water services.

Abstract: A method for treating the surface of aluminum alloys having a relatively high copper content is provided which includes the steps of removing substantially all of the copper from the surface, contacting the surface with a first solution containing cerium, electrically charging the surface while contacting the surface in an aqueous molybdate solution, and contacting the surface with a second solution containing cerium. The copper is substantially removed from the surface in the first step either by (i) contacting the surface with an acidic chromate solution or by (ii) contacting the surface with an acidic nitrate solution while subjecting the surface to an electric potential. The corrosion-resistant surface resulting from the invention is excellent, consistent and uniform throughout the surface. Surfaces treated by the invention may often be certified for use in salt-water services.

Abstract: A method for treating the surface of an aluminum-based material so as to make the surface resistant to corrosion includes the steps of contacting the surface with an aqueous cerium non-halide solution and then contacting the surface with an aqueous cerium halide solution. These steps may optionally be followed by a step of positively charging the metal surface while in contact with an aqueous molybdenum solution.