Abstract: A substrate treatment apparatus includes a substrate support unit, a chemical supply unit supplying a chemical solution onto an upper surface of a substrate supported on the substrate support unit, a laser irradiation unit applying a laser pulse to the substrate to heat the substrate, and a controller controlling the laser irradiation unit to emit the laser pulse such that the substrate is repeatedly heated and cooled to maintain a preset temperature.

Abstract: Disclosed is a substrate treatment apparatus including a rotation unit that supports and rotates a substrate, a chemical discharge unit that discharges a chemical solution to the rotation unit, a chemical recovery unit disposed close to the rotation unit and configured to recover the chemical solution scattering from the rotation unit, and a laser irradiation unit that applies a laser beam to the substrate and heats the substrate.

Abstract: Provided is a light detection and ranging (LIDAR) system. The LIDAR system includes: a housing including a first region and a second region, the second region including a plurality of openings; a laser disposed in the first region of the housing and configured to emit light; a plurality of optical fibers disposed in the second region, and configured to receive, at one ends thereof, and transmit, at the other ends thereof, the light emitted from the laser to an outside of the housing through the plurality of openings; and a detector configured to receive the light transmitted from the plurality of optical fibers to the outside and reflected from the outside, and convert the received reflected light into an electrical signal.