Patents by Inventor Young Jun SON
Young Jun SON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240153831Abstract: An apparatus and method for measuring air currents on the surface of a substrate, which can accurately measure the magnitude and direction of air currents on the surface of a wafer with wafer-type air current measurement sensors, are provided. The apparatus includes: a first air current measurement module measuring a magnitude of air currents on a surface of a first substrate, which is processed in accordance with a semiconductor manufacturing process; a second air current measurement module measuring a movement direction of the air currents; and a power module supplying power to the first and second air current measurement modules, wherein the first air current measurement module, the second air current measurement module, and the power module are mounted on a second substrate, which has the same shape as the first substrate.Type: ApplicationFiled: October 19, 2023Publication date: May 9, 2024Inventors: Yong Jun SEO, Su Jin CHAE, Sang Hyun SON, Sang Min HA, Young Sik BANG, Jeong Mo HWANG, Dong Ok AHN
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Publication number: 20240139934Abstract: The inventive concept provides a teaching method for teaching a transfer position of a transfer robot. The teaching method includes: searching for an object on which a target object to be transferred by the transfer robot is placed, based on a 3D position information acquired by a first sensor; and acquiring coordinates of a second direction and coordinates of a third direction of the object based on a data acquired from a second sensor which is a different type from the first sensor.Type: ApplicationFiled: March 8, 2023Publication date: May 2, 2024Applicant: SEMES CO., LTD.Inventors: Jong Min Lee, Kwang Sup Kim, Myeong Jun Lim, Young Ho Park, Yeon Chul Song, Sang Hyun Son, Jun Ho Oh, Ji Hoon Yoo, Joong Chol Shin
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Patent number: 11960236Abstract: Proposed are a home port and a substrate processing apparatus using the same. The home port is installed in the substrate processing apparatus to temporarily mount a nozzle for discharging a process liquid to a substrate, and includes a main body having a space therein, a nozzle holder provided at an upper portion of the main body and configured to mount the nozzle, an inclined surface formed below the nozzle holder in the space, a first supply pipe configured to discharge a rinse liquid to a tip of the nozzle, a second supply pipe configured to inject the rinse liquid into the main body, a conductive wire configured to electrically connect the inclined surface and the first supply pipe, and a first switch installed on the conductive wire.Type: GrantFiled: December 19, 2022Date of Patent: April 16, 2024Assignee: SEMES CO., LTD.Inventors: Young Jun Son, Tae Hoon Lee, Hyun Yoon, Do Yeon Kim
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Patent number: 11933808Abstract: A buffer unit for temporarily storing a substrate includes a housing having a space for storing a substrate therein, one or more slots disposed within the housing for placing a substrate thereon, and a holding unit disposed at a bottom portion of the housing, having a flat and non-inclined top surface, and comprising a built-in wireless charging module. A substrate type sensor is stored at the holding unit.Type: GrantFiled: December 29, 2021Date of Patent: March 19, 2024Assignee: SEMES CO., LTD.Inventors: Young Seop Choi, Yong-Jun Seo, Sang Hyun Son, Ji Young Lee, Gyeong Ryul Kim, Sun Yong Park
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Patent number: 11919303Abstract: Provided is a jetting driver that can be used for various types of heads with minimal changes. The jetting driver includes: an image board receiving raw image data and generating image data by transforming the raw image data into a form suitable for a type of heads used; and an interface board physically separated from the image board, receiving the image data, and transmitting the image data to the heads through a plurality of channels.Type: GrantFiled: May 1, 2022Date of Patent: March 5, 2024Assignee: SEMES CO., LTD.Inventors: Sang Min Ha, Sang Hyun Son, Young Joo Seo, Hyeong Jun Cho, Jae Hong Kim
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Patent number: 11912672Abstract: A novel compound having excellent light emission and heat stability is disclosed. Also disclosed is an organic electroluminescent device having properties such as light emitting efficiency, an operation voltage, and a service life improved by including the compound in at least one organic layer of the device.Type: GrantFiled: July 12, 2019Date of Patent: February 27, 2024Assignee: SOLUS ADVANCED MATERIALS CO., LTD.Inventors: Hyungchan Bae, Young Bae Kim, Hoe Moon Kim, Ho Jun Son, Jin Woong Kim
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Publication number: 20230314951Abstract: A liquid chemical supply apparatus for supplying a liquid chemical to a plurality of substrate processing apparatuses disposed at different heights includes a pump for providing a hydraulic pressure for moving the liquid chemical to the substrate processing apparatuses, a plurality of liquid chemical supply lines having ends connected to the pump and other ends separately connected to the substrate processing apparatuses, to provide passages through which the liquid chemical moves, and a pump vent line connected to the pump to discharge some of the liquid chemical to outside, wherein flow rate calibration lines are connected between the liquid chemical supply lines and the pump vent line.Type: ApplicationFiled: March 6, 2023Publication date: October 5, 2023Applicant: SEMES CO., LTD.Inventors: Young Jun SON, Woo Sin JUNG, Youngun YUN, Jung Suk GOH
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Publication number: 20230313791Abstract: Provided are a pump, an apparatus for supplying a chemical liquid and an apparatus for processing a substrate. The pump includes a tube having elasticity and having a flow path through which a chemical liquid flows in; and a case having an internal space partitioned into at least two chambers through which gas is supplied or discharged, where the at least two chambers cover an outer circumference of the tube. Using the pump, the apparatus for supplying a chemical liquid and the apparatus for processing a substrate, by an operation in which gas is supplied or discharged into each partitioned chamber in the case, by applying or releasing pressure to the outer circumference of each corresponding tube independently without interfering between the internal pressures between the chambers, efficient pumping operation of the pump may be obtained, and precise control of the discharge pressure of the liquid may be implemented.Type: ApplicationFiled: February 5, 2023Publication date: October 5, 2023Inventors: Young Jun SON, Woo Sin Jung, Woo Ram Lee, Byoung Doo Choi, Sung Chul Jung
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Publication number: 20230301546Abstract: Various examples are provided related to detection and measurement of respiratory parameters. In one example, a system for monitoring an individual's respiration includes a thermal sensor that can detect CO2, an optical sensor, and image processing circuitry that can determine a parameter of CO2 gas being exhaled about a mouth of the individual using a thermal image captured by the thermal sensor and optical image(s) captured by the optical sensor. In other examples, a system includes an arrangement of thermal sensors and/or optical sensors that can monitor gas being exhaled about a mouth of the individual. In another example, a system includes an arrangement of thermal and optical sensors and image processing circuitry that can determine, e.g., a flow field and/or distribution of gas being exhaled about a mouth of the individual based upon thermal images and optical images captured by the arrangement of thermal and optical sensors.Type: ApplicationFiled: August 12, 2021Publication date: September 28, 2023Inventors: Esther M. Sternberg, Jacob N. Hyde, Mohammad S. Majdi, Jeffrey J. Rodriguez, Young-Jun Son, Yijie Chen
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Publication number: 20230282501Abstract: Provided is a wafer treatment apparatus capable of measuring warpage of a wafer, the wafer treatment apparatus including a support plate providing a surface on which the wafer is supported, a temperature control channel mounted in the support plate to provide a path through which a fluid flows, and a plurality of warpage measurers disposed on the support plate and having lower ends mounted to be vertically spaced apart from an upper portion of the temperature control channel.Type: ApplicationFiled: January 18, 2023Publication date: September 7, 2023Applicant: SEMES CO., LTD.Inventor: Young Jun SON
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Patent number: 11727828Abstract: A training system uses a physical model of a head and neck with a first tracker, a second tracker on a physical laryngoscope model, a third tracker on a physical endotracheal tube model, and a fourth tracker on a VR goggle; the system uses the trackers to determine positions of the physical models. A simulation system has corresponding digital 3D models of a laryngoscope, an endotracheal tube, and an airway, the airway including 3D models of surfaces of tongue, epiglottis, larynx, pharynx, and trachea. The physical model locations are registered to the digital models. In embodiments, the physical laryngoscope model has sensors measure strain or pressure along its blade and the simulation system has instructions to distort the digital 3D model of the airway according to readings of the sensors. The system can render the digital 3D model viewed from the VR goggle or a camera of the laryngoscope.Type: GrantFiled: February 19, 2021Date of Patent: August 15, 2023Assignee: Arizona Board of Regents on Behalf of The University of ArizonaInventors: Jarrod Mosier, Young-Jun Son, David E. Biffar, Vignesh Subbain, Saurabh Jain, Bijoy Dripta Barua Chowdhury, Thomas Cahir, Eze Ahanonu
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Publication number: 20230215742Abstract: A substrate processing apparatus includes: a nozzle unit configured to discharge a processing liquid to a substrate; a pipe connected to the nozzle unit and a processing liquid supply unit supplying the processing liquid; a charge amount control unit disposed at the pipe, including a filter unit charged with positive charges or negative charges, and including at least one of a control valve, controlling a flow rate of the processing liquid passing through an inside of the filter unit, and a power supply unit, applying a voltage to the filter unit, to control a charge amount of the processing liquid; and a control unit connected to the charge amount control unit.Type: ApplicationFiled: November 15, 2022Publication date: July 6, 2023Inventors: Young Jun SON, Tae Hoon LEE, Sung Gyu LEE, Hyun YOON, Do Yeon KIM
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Publication number: 20230207342Abstract: Provided is an apparatus for treating a substrate. The substrate treating apparatus according to an exemplary embodiment may include: a support unit supporting a substrate; a treating container covering an outer side of the support unit; a liquid supply unit including a nozzle ejecting a liquid to the substrate supported on the support unit; and a home port which is positioned outside the treating container, and in which the nozzle waits, and the home port may include a body having a discharge space to which the liquid ejected from the nozzle is discharged therein, and a measurement unit connected to the body and measuring a charging amount of the liquid discharged from the discharge space.Type: ApplicationFiled: December 27, 2022Publication date: June 29, 2023Applicant: SEMES CO., LTD.Inventors: Young Jun SON, Tae Hoon LEE, Do Yeon KIM
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Publication number: 20230207341Abstract: Provided is an apparatus for treating a substrate. The substrate treating apparatus may include: a substrate support unit supporting a substrate; a nozzle supplying a liquid to the substrate supported on the substrate support unit; a home port in which the nozzle waits; and an electrostatic measurement member measuring an electrostatic amount of a liquid dispensed from the nozzle in the home port.Type: ApplicationFiled: December 27, 2022Publication date: June 29, 2023Applicant: SEMES CO., LTD.Inventors: Do Yeon KIM, Young Jun SON, Tae Hoon LEE, Sung-gyu LEE, Hyun YOON
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Publication number: 20230194175Abstract: Proposed are a chilling unit, a heat treatment apparatus including same, and a heat treatment method. More particularly, proposed is a technology capable of rapidly and effectively lowering the temperature of a heating plate by bringing a heat exchange medium of a chilling unit into contact with the heating plate and then circulating a refrigerant after performing a heat treatment process of a substrate through a heat treatment apparatus.Type: ApplicationFiled: December 19, 2022Publication date: June 22, 2023Applicant: SEMES CO., LTD.Inventors: Young Jun SON, Young Jun LEE, Ki Sang EUM, Tae Hoon LEE
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Publication number: 20230195030Abstract: Proposed are a home port and a substrate processing apparatus using the same. The home port is installed in the substrate processing apparatus to temporarily mount a nozzle for discharging a process liquid to a substrate, and includes a main body having a space therein, a nozzle holder provided at an upper portion of the main body and configured to mount the nozzle, an inclined surface formed below the nozzle holder in the space, a first supply pipe configured to discharge a rinse liquid to a tip of the nozzle, a second supply pipe configured to inject the rinse liquid into the main body, a conductive wire configured to electrically connect the inclined surface and the first supply pipe, and a first switch installed on the conductive wire.Type: ApplicationFiled: December 19, 2022Publication date: June 22, 2023Applicant: SEMES CO., LTD.Inventors: Young Jun SON, Tae Hoon LEE, Hyun YOON, Do Yeon KIM
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Publication number: 20230197471Abstract: The present invention provides a pump for supplying a liquid. The pump comprises: a tube member having a hose communicating with a chemical liquid inlet and a chemical liquid outlet, and a cylindrical drum provided to wind the hose, and configured to discharge a chemical liquid through a volume change caused by contraction of the hose wound around the drum; and a driver configured to provide a rotational force such that the hose is wound around the drum.Type: ApplicationFiled: December 19, 2022Publication date: June 22, 2023Applicant: SEMES CO., LTD.Inventor: Young Jun Son
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Publication number: 20230178389Abstract: An apparatus for inspecting a chemical solution of the present invention comprises a base unit having an inlet, through which a chemical solution is introduced, a flow path unit, in which the chemical solution introduced through the inlet is moved while a velocity of its fluid is changed, and including a first region unit provided adjacent to the inlet of the base unit and a second region unit being in series communication with the first region unit, in which the chemical solution discharged from the first region unit is moved, a detecting unit including a first detecting member for detecting a first signal that is an electrical signal of the first region unit, and a second detecting member for detecting a second signal that is an electrical signal of the second region unit, and a determining unit for receiving a signal from the detecting unit and determining that a particle and a bubble are detected if a current of the first signal and the second signal is changed compared to a reference value, and discriminType: ApplicationFiled: November 18, 2022Publication date: June 8, 2023Inventors: Young Jun SON, Young Un YUN, Sung Chul JUNG
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Publication number: 20230173526Abstract: Proposed are a home port, and a substrate processing apparatus and a home port cleaning method using the same. The home port includes a housing supported by a holder and having a space therein, a nozzle holder provided at an upper portion of the housing and mounting a nozzle for discharging a process liquid to a substrate, an inclined surface formed below the nozzle holder in the space, an exhaust hole exhausting fumes generated in the space of the housing, a rinse supply hole supplying a rinse liquid for removing a residual process liquid remaining on the inclined surface, a hinge provided at a lower portion of the housing and hingedly coupling the housing and the holder to enable rotation of the housing, and an actuating means rotating the housing in a direction in which the inclined surface is parallel to a ground surface on which the housing is installed.Type: ApplicationFiled: December 1, 2022Publication date: June 8, 2023Applicant: SEMES CO., LTD.Inventors: Young Jun SON, Hyung Seok KANG, Min Woo KIM
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Publication number: 20230131569Abstract: An exemplary embodiment of the present invention provided a pump for supplying a liquid. The pump includes: a flexible tube body including a pump chamber; a first flange provided at one end of the tube body; and a second flange provided at the other end of the tube body; and a driving unit for transmitting rotational force to the tube body to twist the tube body, in which the tube body has a bent portion bent at a predetermined angle.Type: ApplicationFiled: October 17, 2022Publication date: April 27, 2023Applicant: SEMES CO., LTD.Inventors: Young Jun SON, Byoung Doo CHOI, Young Un YUN, Woo Ram LEE, Sung Chul JUNG, Woo Sin JUNG, Ki Sang EUM