Abstract: In one embodiment, a phase-changeable structure can be formed by forming a phase-changeable layer on the lower electrode, forming a conductive layer on the phase-changeable layer, etching the conductive layer using a first etching material to form an upper electrode and etching the phase-changeable layer using a second etching material to form a phase-changeable pattern. The first etching material can include a first component containing fluorine. The second etching material does not contain chlorine.

Abstract: A relay server system for providing banking services to the subscriber comprises: a subscriber coupling unit, connected to subscriber terminals, for performing a protocol conversion process; a data storage unit for storing process control information, history information, output screen data, and subscriber information; a request processing unit for analyzing input request message to generate a corresponding handling process based on an analyzed request type and for providing a format-converted response data to the subscriber coupling means based on output screen data stored in the data storage means; and a session managing unit, in response to the input request message from the request processing means, for generating and format-converting an inquiry message based on the process control information to thereby provide the format-converted inquiry message to a corresponding bank system, and, in response to a response message from the bank system, for extracting and format-converting a response data to thereby p