Abstract: A method for fabricating carbon electrode coated with a porous metal film includes the steps of: positioning a roll of carbon material within a vacuum chamber; winding the carbon material off the roll at a certain speed, winding the carbon material on a different roll while coating a porous metal to a thickness of a few Řa few &mgr;m on the carbon material between the two rolls from a metal evaporation source; and stabilizing the thusly coated carbon material under a vacuum. The coated porous metal film is of Li, Al, Sn, Bi, Si, Sb, Ni, Cu, Ti, V, Cr, Mn, Fe, Co, Zn, Mo, W, Ag, Au, Pt, Ru, Ir, In or their alloys. Since the stable film is formed on the surface of the carbon material, when the thusly coated carbon material is use for forming a cathode electrode of a secondary battery, the reversibility and high rate charging and discharging characteristics of the carbon electrode can be improved.

Abstract: The present invention relates to a battery having a trench structure which can increase an effective area per unit area, and a fabrication method therefor. The battery according to the present invention forms trenches on thin film elements including a substrate, thereby increasing a contact interface between a cathode and an electrolyte and between the electrolyte and an anode, and simultaneously increasing an amount of an electrode per unit area. As a result, the present invention provides a high performance battery that a current density and a total current storage density are increased, and a charging speed after discharge is improved. The trench structure of the present invention can adapt to a bulk battery as well as a thin film battery.

Abstract: An economical method of fabricating a high quality ZnO thin film with only NBE and without any deep-level emission at room temperature in order to replace conventional III-V group compounds such as GaN, and an apparatus therefor. The method comprises the steps of introducing argon (Ar) and oxygen (O2) into a vacuum chamber while maintaining a vacuum level of 1-100 mTorr in the vacuum chamber, preheating a substrate, depositing a ZnO monocrystal thin film on the substrate by RF magnetron sputtering while introducing carbon(C) or nitrogen (N) atoms from an atomic radical source installed over the substrate, and slowly cooling the substrate while maintaining a partial pressure of oxygen in the vacuum chamber at a partial pressure level used while depositing the ZnO thin film.

Abstract: An economical method of fabricating a high quality ZnO thin film with only NBE and without any deep-level emission at room temperature in order to replace conventional III-V group compounds such as GaN, and an apparatus therefor. The method comprises the steps of introducing argon (Ar) and oxygen (O2) into a vacuum chamber while maintaining a vacuum level of 1-100 mTorr in the vacuum chamber, preheating a substrate, depositing a ZnO monocrystal thin film on the substrate by RF magnetron sputtering while introducing carbon(C) or nitrogen (N) atoms from an atomic radical source installed over the substrate, and slowly cooling the substrate while maintaining a partial pressure of oxygen in the vacuum chamber at a partial pressure level used while depositing the ZnO thin film.

Abstract: An electrical or electronic device and a thin-film type battery are vertically integrated and interconnected for reducing the area occupied thereby, enabling a higher degree of device integration and simplifying their fabrication. An insulating layer is formed on the device, with vertical conductors extending respectively from a pair of terminals of the device through the insulating layer. Electrode conductors are formed on the insulating layer in contact with the respective vertical conductors and serve as the cathode and anode electrodes of a thin-film battery fabricated thereon.

Abstract: The present invention relates to a process for modifying a polymer surface by irradiating ion particles with energy on a polymer surface, while blowing the reactive gas directly on the polymer surface under vacuum condition, to decrease the wetting angle of the polymer surface. The process for modifying the polymer surface according to the present invention can be widely used in the application fields of polymers because it provides effects of increasing the spreading of aqueous dyestuffs, increasing adhesive strength with other materials and inhibition of light scattering by decreasing the wetting angle of the polymer surface.