Abstract: The present disclosure relates to an apparatus for fabricating a display panel including: an attachment member having a fixing portion in a pressurization direction to which a pressurization header is fixed, an attachment driving member configured to move the attachment member and the pressurization header in the pressurization direction or a detachment direction through a fixing frame of the attachment member, a first pressure sensing module between the pressurization header and the attachment member and configured to generate first pressure detection signals according to pressure applied to the pressurization header, a gradient setting module configured to set a gradient of the pressurization header based on magnitudes of the first pressure detection signals, and a gradient control module configured to adjust gradients of the pressurization header, the attachment member, and the fixing frame according to control of the gradient setting module.

Abstract: A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an ambient to which the photoresist film on the substrate is exposed, and an exposer irradiating the photoresist film exposed to the ambient having the increased amount of moisture with light. The humidifier is disposed between the photoresist coater and the exposer.

Abstract: A delay circuit including a first output clock generation circuit and a second output clock generation circuit. The first output clock generation circuit generates a first output clock signal by mixing phases of a first clock signal and a second clock signal based on an (n+1)-th generated delay control signal. The second output clock generation circuit generates a second output clock signal by mixing the phases of the first and second clock signals based on both an n-th generated delay control signal and the (n+1)-th generated delay control signal.

Abstract: A duty correction circuit comprises a first delay circuit, a second delay circuit, a bang-bang driver, a duty detection circuit, and a delay control circuit. The first delay circuit delays an input clock signal to generate a first delayed clock signal. The second delay circuit delays the input clock signal based on a delay control signal to generate a second delayed clock signal. The bang-bang driver generates first and second driving clock signals from the first and second delayed clock signals based on a locking signal and a duty detection signal. The duty detection circuit may detect duty cycles of the first and second driving clock signals and generate the duty detection signal. The delay control circuit may generate the delay control signal and the locking signal based on the duty detection signal.

Abstract: A delay circuit including a first output clock generation circuit and a second output clock generation circuit. The first output clock generation circuit generates a first output clock signal by mixing phases of a first clock signal and a second clock signal based on an (n+1)-th generated delay control signal. The second output clock generation circuit generates a second output clock signal by mixing the phases of the first and second clock signals based on both an n-th generated delay control signal and the (n+1)-th generated delay control signal.

Abstract: A delay circuit including a first output clock generation circuit and a second output clock generation circuit. The first output clock generation circuit generates a first output clock signal by mixing phases of a first clock signal and a second clock signal based on an (n+1)-th generated delay control signal. The second output clock generation circuit generates a second output clock signal by mixing the phases of the first and second clock signals based on both an n-th generated delay control signal and the (n+1)-th generated delay control signal.

Abstract: A semiconductor apparatus includes a first clock path which generates a first output clock signal by delaying a first phase clock signal, and a second clock path which generates a second output clock signal by delaying a second phase clock signal based on a delay compensation signal. The oscillating path generation circuit forms oscillating paths with the first clock path and the second clock path. The delay information generation circuit generates a delay compensation signal based on oscillating signals generated by forming the oscillating paths.

Abstract: A clock generation circuit may include a clock receiver, a first delay loop circuit, and a second delay loop circuit. The clock receiver may receive a first clock signal and a second clock signal and generate a first reception clock signal and a second reception clock signal. The first delay loop circuit may receive the first reception clock signal and the second reception clock signal generate a reference clock signal. The first delay loop circuit may perform a delay-locking operation on the reference clock signal to generate a first delay locked clock signal. The second delay loop circuit may delay the first reception clock signal and the second reception clock signal based on the first delay locked clock signal and an internal clock signal to generate a first internal clock signal.

Abstract: A skew compensation circuit includes a skew detection circuit configured to generate skew detection signals by detecting a skew characteristic of a basic logic element constituting a semiconductor apparatus, a skew compensation signal generation circuit configured to generate a skew compensation signal by comparing the skew detection signals and a plurality of reference voltages, a variable delay circuit configured to generate a compensation signal by delaying an input signal by a delay time varied according to the skew compensation signal, and a reference voltage generation circuit configured to generate the plurality of reference voltages of which offset components are compensated for according to variations of a temperature and an external voltage.

Abstract: A skew compensation circuit includes a skew detection circuit configured to generate skew detection signals by detecting a skew characteristic of a basic logic element constituting a semiconductor apparatus, a skew compensation signal generation circuit configured to generate a skew compensation signal by comparing the skew detection signals and a plurality of reference voltages, a variable delay circuit configured to generate a compensation signal by delaying an input signal by a delay time varied according to the skew compensation signal, and a reference voltage generation circuit configured to generate the plurality of reference voltages of which offset components are compensated for according to variations of a temperature and an external voltage.

Abstract: A phase detection circuit is configured to receive an input clock signal and a reference clock signal. The phase detection circuit is configured to generate a divided clock signal from the reference clock signal. The phase detection circuit is configured to generate a phase detection signal after comparing the phase of the input clock signal with the divided clock signal.

Abstract: A clock generation circuit may include a clock receiver, a first delay loop circuit, and a second delay loop circuit. The clock receiver may receive a first clock signal and a second clock signal and generate a first reception clock signal and a second reception clock signal. The first delay loop circuit may receive the first reception clock signal and the second reception clock signal generate a reference clock signal. The first delay loop circuit may perform a delay-locking operation on the reference clock signal to generate a first delay locked clock signal. The second delay loop circuit may delay the first reception clock signal and the second reception clock signal based on the first delay locked clock signal and an internal clock signal to generate a first internal clock signal.

Abstract: A phase detection circuit includes an edge trigger circuit and a duty detection circuit. The edge trigger circuit generates a reference pulse signal and a comparison pulse signal based on a target clock signal and at least two clock signals having phases adjacent to the phase of the target clock signal. The duty detection circuit generates a phase detection signal by detecting the duty ratio of the reference pulse signal and the comparison pulse signal.

Abstract: A skew compensation circuit includes a skew detection circuit configured to generate skew detection signals by detecting a skew characteristic of a basic logic element constituting a semiconductor apparatus, a skew compensation signal generation circuit configured to generate a skew compensation signal by comparing the skew detection signals and a plurality of reference voltages, a variable delay circuit configured to generate a compensation signal by delaying an input signal by a delay time varied according to the skew compensation signal, and a reference voltage generation circuit configured to generate the plurality of reference voltages of which offset components are compensated for according to variations of a temperature and an external voltage.

Abstract: A skew compensation circuit includes a skew detection circuit configured to generate skew detection signals by detecting a skew characteristic of a basic logic element constituting a semiconductor apparatus, a skew compensation signal generation circuit configured to generate a skew compensation signal by comparing the skew detection signals and a plurality of reference voltages, a variable delay circuit configured to generate a compensation signal by delaying an input signal by a delay time varied according to the skew compensation signal, and a reference voltage generation circuit configured to generate the plurality of reference voltages of which offset components are compensated for according to variations of a temperature and an external voltage.

Abstract: A semiconductor apparatus includes a first clock path which generates a first output clock signal by delaying a first phase clock signal, and a second clock path which generates a second output clock signal by delaying a second phase clock signal based on a delay compensation signal. The oscillating path generation circuit forms oscillating paths with the first clock path and the second clock path. The delay information generation circuit generates a delay compensation signal based on oscillating signals generated by forming the oscillating paths.

Abstract: A phase detection circuit is configured to receive an input clock signal and a reference clock signal. The phase detection circuit is configured to generate a divided clock signal from the reference clock signal. The phase detection circuit is configured to generate a phase detection signal after comparing the phase of the input clock signal with the divided clock signal.

Abstract: A semiconductor apparatus includes a first clock path which generates a first output clock signal by delaying a first phase clock signal, and a second clock path which generates a second output clock signal by delaying a second phase clock signal based on a delay compensation signal. The oscillating path generation circuit forms oscillating paths with the first clock path and the second clock path. The delay information generation circuit generates a delay compensation signal based on oscillating signals generated by forming the oscillating paths.

Abstract: A phase detection circuit is configured to receive an input clock signal and a reference clock signal. The phase detection circuit is configured to generate a divided clock signal from the reference clock signal. The phase detection circuit is configured to generate a phase detection signal after comparing the phase of the input clock signal with the divided clock signal.

Abstract: A phase detection circuit includes an edge trigger circuit and a duty detection circuit. The edge trigger circuit generates a reference pulse signal and a comparison pulse signal based on a target clock signal and at least two clock signals having phases adjacent to the phase of the target clock signal. The duty detection circuit generates a phase detection signal by detecting the duty ratio of the reference pulse signal and the comparison pulse signal.