Patents by Inventor Youngtag Woo

Youngtag Woo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220416054
    Abstract: One illustrative integrated circuit (IC) product disclosed herein includes a first conductive source/drain contact structure of a first transistor with an insulating source/drain cap positioned above at least a portion of an upper surface of the first conductive source/drain contact structure and a gate-to-source/drain (GSD) contact structure that is conductively coupled to the first conductive source/drain contact structure and a first gate structure of a second transistor. In this example, the product also includes a gate contact structure that is conductively coupled to a second gate structure of a third transistor, wherein an upper surface of each of the GSD contact structure and the gate contact structure is positioned at a first level that is at a level that is above a level of an upper surface of the insulating source/drain cap.
    Type: Application
    Filed: September 2, 2022
    Publication date: December 29, 2022
    Inventors: Ruilong Xie, Youngtag Woo, Daniel Chanemougame, Bipul C. Paul, Lars W. Liebmann, Heimanu Niebojewski, Xuelian Zhu, Lei Sun, Hui Zang
  • Patent number: 11469309
    Abstract: One illustrative integrated circuit (IC) product disclosed herein includes a first conductive source/drain contact structure of a first transistor with an insulating source/drain cap positioned above at least a portion of an upper surface of the first conductive source/drain contact structure and a gate-to-source/drain (GSD) contact structure that is conductively coupled to the first conductive source/drain contact structure and a first gate structure of a second transistor. In this example, the product also includes a gate contact structure that is conductively coupled to a second gate structure of a third transistor, wherein an upper surface of each of the GSD contact structure and the gate contact structure is positioned at a first level that is at a level that is above a level of an upper surface of the insulating source/drain cap.
    Type: Grant
    Filed: February 28, 2020
    Date of Patent: October 11, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Ruilong Xie, Youngtag Woo, Daniel Chanemougame, Bipul C. Paul, Lars W. Liebmann, Heimanu Niebojewski, Xuelian Zhu, Lei Sun, Hui Zang
  • Patent number: 10770388
    Abstract: A semiconductor structure includes a substrate having a first region and a second region, a first source/drain disposed on the substrate in the first region, an interlevel dielectric (ILD) disposed on the source/drain, and a first gate disposed on the substrate. The semiconductor structure further includes a first contact trench within the ILD extending to the first source/drain, a first trench contact within the first contact trench, and a first source/drain contact trench extending to the first trench contact. The semiconductor structure further includes a cross couple contact trench within the ILD, and a cross couple contact disposed in the cross couple contact trench in contact with the first gate and the first trench contact. The cross couple contact couples the first source/drain and the first gate.
    Type: Grant
    Filed: June 15, 2018
    Date of Patent: September 8, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ruilong Xie, Veeraraghavan S. Basker, Kangguo Cheng, Jia Zeng, Youngtag Woo, Mahender Kumar, Guillaume Bouche
  • Patent number: 10714591
    Abstract: One illustrative transistor device disclosed herein includes a final gate structure that includes a gate insulation layer comprising a high-k material and a conductive gate, wherein the gate structure has an axial length in a direction that corresponds to a gate width direction of the transistor device. The device also includes a sidewall spacer contacting opposing lateral sidewalls of the final gate structure and a pillar structure (comprised of a pillar material) positioned above at least a portion of the final gate structure, wherein, when the pillar structure is viewed in a cross-section taken through the pillar structure in a direction that corresponds to the gate width direction of the transistor device, the pillar structure comprises an outer perimeter and wherein a layer of the high-k material is positioned around the entire outer perimeter of the pillar material.
    Type: Grant
    Filed: January 30, 2020
    Date of Patent: July 14, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ruilong Xie, Youngtag Woo, Hui Zang
  • Publication number: 20200203497
    Abstract: One illustrative integrated circuit (IC) product disclosed herein includes a first conductive source/drain contact structure of a first transistor with an insulating source/drain cap positioned above at least a portion of an upper surface of the first conductive source/drain contact structure and a gate-to-source/drain (GSD) contact structure that is conductively coupled to the first conductive source/drain contact structure and a first gate structure of a second transistor. In this example, the product also includes a gate contact structure that is conductively coupled to a second gate structure of a third transistor, wherein an upper surface of each of the GSD contact structure and the gate contact structure is positioned at a first level that is at a level that is above a level of an upper surface of the insulating source/drain cap.
    Type: Application
    Filed: February 28, 2020
    Publication date: June 25, 2020
    Inventors: Ruilong Xie, Youngtag Woo, Daniel Chanemougame, Bipul C. Paul, Lars W. Liebmann, Heimanu Niebojewski, Xuelian Zhu, Lei Sun, Hui Zang
  • Publication number: 20200176587
    Abstract: One illustrative transistor device disclosed herein includes a final gate structure that includes a gate insulation layer comprising a high-k material and a conductive gate, wherein the gate structure has an axial length in a direction that corresponds to a gate width direction of the transistor device. The device also includes a sidewall spacer contacting opposing lateral sidewalls of the final gate structure and a pillar structure (comprised of a pillar material) positioned above at least a portion of the final gate structure, wherein, when the pillar structure is viewed in a cross-section taken through the pillar structure in a direction that corresponds to the gate width direction of the transistor device, the pillar structure comprises an outer perimeter and wherein a layer of the high-k material is positioned around the entire outer perimeter of the pillar material.
    Type: Application
    Filed: January 30, 2020
    Publication date: June 4, 2020
    Inventors: Ruilong Xie, Youngtag Woo, Hui Zang
  • Patent number: 10651284
    Abstract: One illustrative method disclosed includes, among other things, selectively forming a gate-to-source/drain (GSD) contact opening and a CB gate contact opening in at least one layer of insulating material and forming an initial gate-to-source/drain (GSD) contact structure and an initial CB gate contact structure in their respective openings, wherein an upper surface of each of the GSD contact structure and the CB gate contact structure is positioned at a first level, and performing a recess etching process on the initial GSD contact structure and the initial CB gate contact structure to form a recessed GSD contact structure and a recessed CB gate contact structure, wherein a recessed upper surface of each of these recessed contact structures is positioned at a second level that is below the first level.
    Type: Grant
    Filed: October 24, 2017
    Date of Patent: May 12, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ruilong Xie, Youngtag Woo, Daniel Chanemougame, Bipul C. Paul, Lars W. Liebmann, Heimanu Niebojewski, Xuelian Zhu, Lei Sun, Hui Zang
  • Patent number: 10629701
    Abstract: One illustrative method disclosed herein includes forming a sacrificial gate structure and a gate-cut structure within the sacrificial gate structure at a location positioned above the isolation material, the gate-cut structure having an upper portion and a lower portion, and forming a replacement gate cavity by removing the sacrificial gate structure and the lower portion of the gate-cut structure. The method further includes forming a final gate structure that includes forming a gate insulation layer of the final gate structure on all exposed surfaces of the upper portion of the gate-cut structure, removing the upper portion of the gate-cut structure, removing the exposed portion of the final gate structure to define a gate-cut opening that separates the final gate structure into the first and second final gate structures, and forming a gate separation structure in the gate-cut opening.
    Type: Grant
    Filed: October 10, 2018
    Date of Patent: April 21, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ruilong Xie, Youngtag Woo, Hui Zang
  • Publication number: 20200119163
    Abstract: One illustrative method disclosed herein includes forming a sacrificial gate structure and a gate-cut structure within the sacrificial gate structure at a location positioned above the isolation material, the gate-cut structure having an upper portion and a lower portion, and forming a replacement gate cavity by removing the sacrificial gate structure and the lower portion of the gate-cut structure. The method further includes forming a final gate structure that includes forming a gate insulation layer of the final gate structure on all exposed surfaces of the upper portion of the gate-cut structure, removing the upper portion of the gate-cut structure, removing the exposed portion of the final gate structure to define a gate-cut opening that separates the final gate structure into the first and second final gate structures, and forming a gate separation structure in the gate-cut opening.
    Type: Application
    Filed: October 10, 2018
    Publication date: April 16, 2020
    Inventors: Ruilong Xie, Youngtag Woo, Hui Zang
  • Publication number: 20190385946
    Abstract: A semiconductor structure includes a substrate having a first region and a second region, a first source/drain disposed on the substrate in the first region, an interlevel dielectric (ILD) disposed on the source/drain, and a first gate disposed on the substrate. The semiconductor structure further includes a first contact trench within the ILD extending to the first source/drain, a first trench contact within the first contact trench, and a first source/drain contact trench extending to the first trench contact. The semiconductor structure further includes a cross couple contact trench within the ILD, and a cross couple contact disposed in the cross couple contact trench in contact with the first gate and the first trench contact. The cross couple contact couples the first source/drain and the first gate.
    Type: Application
    Filed: June 15, 2018
    Publication date: December 19, 2019
    Applicant: International Business Machines Corporation
    Inventors: Ruilong Xie, Veeraraghavan S. Basker, Kangguo Cheng, Jia Zeng, Youngtag Woo, Mahender Kumar, Guillaume Bouche
  • Patent number: 10490455
    Abstract: One integrated circuit (IC) product disclosed herein includes a first conductive source/drain contact structure of a first transistor and an insulating source/drain cap positioned above at least a portion of an upper surface of the first conductive source/drain contact structure. In one example, the product also includes a gate-to-source/drain (GSD) contact structure that is conductively coupled to the first conductive source/drain contact structure and a first gate structure of a second transistor, wherein an upper surface of the GSD contact structure is positioned at a first level that is at a level above the upper surface of the first conductive source/drain contact structure, and a CB gate contact structure that is conductively coupled to a second gate structure of a third transistor, wherein an upper surface of the CB gate contact structure is positioned at a level that is above the first level.
    Type: Grant
    Filed: January 9, 2019
    Date of Patent: November 26, 2019
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ruilong Xie, Youngtag Woo, Daniel Chanemougame, Bipul C. Paul, Lars W. Liebmann, Heimanu Niebojewski, Xuelian Zhu, Lei Sun, Hui Zang
  • Publication number: 20190148240
    Abstract: One integrated circuit (IC) product disclosed herein includes a first conductive source/drain contact structure of a first transistor and an insulating source/drain cap positioned above at least a portion of an upper surface of the first conductive source/drain contact structure. In one example, the product also includes a gate-to-source/drain (GSD) contact structure that is conductively coupled to the first conductive source/drain contact structure and a first gate structure of a second transistor, wherein an upper surface of the GSD contact structure is positioned at a first level that is at a level above the upper surface of the first conductive source/drain contact structure, and a CB gate contact structure that is conductively coupled to a second gate structure of a third transistor, wherein an upper surface of the CB gate contact structure is positioned at a level that is above the first level.
    Type: Application
    Filed: January 9, 2019
    Publication date: May 16, 2019
    Inventors: Ruilong Xie, Youngtag Woo, Daniel Chanemougame, Bipul C. Paul, Lars W. Liebmann, Heimanu Niebojewski, Xuelian Zhu, Lei Sun, Hui Zang
  • Publication number: 20190123162
    Abstract: One illustrative method disclosed includes, among other things, selectively forming a gate-to-source/drain (GSD) contact opening and a CB gate contact opening in at least one layer of insulating material and forming an initial gate-to-source/drain (GSD) contact structure and an initial CB gate contact structure in their respective openings, wherein an upper surface of each of the GSD contact structure and the CB gate contact structure is positioned at a first level, and performing a recess etching process on the initial GSD contact structure and the initial CB gate contact structure to form a recessed GSD contact structure and a recessed CB gate contact structure, wherein a recessed upper surface of each of these recessed contact structures is positioned at a second level that is below the first level.
    Type: Application
    Filed: October 24, 2017
    Publication date: April 25, 2019
    Inventors: Ruilong Xie, Youngtag Woo, Daniel Chanemougame, Bipul C. Paul, Lars W. Liebmann, Heimanu Niebojewski, Xuelian Zhu, Lei Sun, Hui Zang
  • Patent number: 10236215
    Abstract: One illustrative method disclosed includes, among other things, forming an initial gate-to-source/drain (GSD) contact structure and an initial CB gate contact structure, wherein an upper surface of each of these contact structures are positioned at a first level. In one example, this method also includes forming a masking layer that covers the initial CB gate contact structure and exposes the initial GSD contact structure and, with the masking layer in position, performing a recess etching process on the initial GSD contact structure so as to form a recessed GSD contact structure, wherein a recessed upper surface of the recessed GSD contact structure is positioned at a second level that is below the first level.
    Type: Grant
    Filed: October 24, 2017
    Date of Patent: March 19, 2019
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ruilong Xie, Youngtag Woo, Daniel Chanemougame, Bipul C. Paul, Lars W. Liebmann, Heimanu Niebojewski, Xuelian Zhu, Lei Sun, Hui Zang
  • Patent number: 10204861
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to contacts for local connections and methods of manufacture. The structure includes: at least one contact electrically shorted to a gate structure and a source/drain contact and located below a first wiring layer; and gate, source and drain contacts extending from selected gate structures and electrically connecting to the first wiring layer.
    Type: Grant
    Filed: January 5, 2017
    Date of Patent: February 12, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Xuelian Zhu, Jia Zeng, Wenhui Wang, Youngtag Woo, Jongwook Kye
  • Patent number: 10109636
    Abstract: A method of forming an active contact-gate contact interconnect including forming a first gate contact to a first gate electrode in an active region in a substrate, forming a first active contact to another portion of the first active region. The first gate contact and the first active contact include an approximately equal surface area, and forming an interconnect between the first active contact and the first gate contact. The interconnect includes a first metal wire in a first metal layer electrically connecting the first active contact to the first gate contact. The method may also include forming a second metal wire in the first metal layer configured to electrically connect a third metal wire in a second metal layer to an external contact to a second active region in the substrate, the external contact including the approximately equal surface area.
    Type: Grant
    Filed: March 8, 2017
    Date of Patent: October 23, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Youngtag Woo, Bipul C. Paul
  • Publication number: 20180261604
    Abstract: A method of forming an active contact-gate contact interconnect including forming a first gate contact to a first gate electrode in an active region in a substrate, forming a first active contact to another portion of the first active region. The first gate contact and the first active contact include an approximately equal surface area, and forming an interconnect between the first active contact and the first gate contact. The interconnect includes a first metal wire in a first metal layer electrically connecting the first active contact to the first gate contact. The method may also include forming a second metal wire in the first metal layer configured to electrically connect a third metal wire in a second metal layer to an external contact to a second active region in the substrate, the external contact including the approximately equal surface area.
    Type: Application
    Filed: March 8, 2017
    Publication date: September 13, 2018
    Inventors: Youngtag Woo, Bipul C. Paul
  • Publication number: 20180190588
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to contacts for local connections and methods of manufacture. The structure includes: at least one contact electrically shorted to a gate structure and a source/drain contact and located below a first wiring layer; and gate, source and drain contacts extending from selected gate structures and electrically connecting to the first wiring layer.
    Type: Application
    Filed: January 5, 2017
    Publication date: July 5, 2018
    Inventors: Xuelian ZHU, Jia ZENG, Wenhui WANG, Youngtag WOO, Jongwook KYE
  • Publication number: 20170373071
    Abstract: A semiconductor memory structure includes adjacent cross-sectionally rectangular-shaped bottom source and drain electrodes, the electrodes including n-type electrode(s) and p-type electrode(s), and vertical channel transistors on one or more of the n-type electrode(s) and one or more of the p-type electrode(s); each vertical channel transistor including a vertical channel and a gate electrode wrapped therearound, some of the transistors including pull-up transistors. The semiconductor memory structure further includes a routing gate electrode for each gate electrode, and a shared contact having at least two parts, each part situated over the routing gate electrodes for the pull-up transistors. A unit semiconductor memory cell, the semiconductor memory structure and a corresponding method of forming the memory structure are also provided.
    Type: Application
    Filed: June 27, 2016
    Publication date: December 28, 2017
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Kwan-Yong LIM, Motoi ICHIHASHI, Youngtag WOO, Deepak NAYAK
  • Patent number: 9711511
    Abstract: A semiconductor memory structure (e.g., SRAM) includes vertical channels with a circular, square or rectangular cross-sectional shape. Each unit cell can include a single pull-up vertical transistor and either: one pull-down vertical transistor and one pass-gate vertical transistor; or two or more of each of the pull-down and pass-gate vertical transistors. The structure may be realized by providing adjacent layers of undoped semiconductor material, forming vertical channels for vertical transistors, the vertical channels situated on each of the adjacent layers, doping a first half of each of the adjacent layers with a n-type or p-type dopant, doping a second half of each of the adjacent layers with an opposite type dopant to that of the first half, forming wrap-around gates surrounding the vertical channels, and forming top electrodes for the vertical transistors.
    Type: Grant
    Filed: June 27, 2016
    Date of Patent: July 18, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Kwan-Yong Lim, Ryan Ryoung-Han Kim, Motoi Ichihashi, Youngtag Woo, Deepak Nayak