Patents by Inventor Yu-An Lien

Yu-An Lien has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230260850
    Abstract: Methods of forming a semiconductor device structure are described. In some embodiments, the method includes forming fins from a substrate, forming a gate stack over portions of the fins, forming an epitaxial source/drain region adjacent the gate stack, depositing a dielectric layer over the epitaxial source/drain region, forming an opening in the dielectric layer, and forming a gapfill in the opening in a bottom-up fashion. The gapfill includes Si or W. The method further includes forming a conductive feature over the epitaxial source/drain region and replacing the gapfill with a dielectric material.
    Type: Application
    Filed: June 4, 2022
    Publication date: August 17, 2023
    Inventor: Yu-Lien HUANG
  • Patent number: 11728218
    Abstract: A method includes forming a first inter-layer dielectric (ILD) layer over source and drain regions of a semiconductor structure; forming a first mask material over the first ILD layer; etching first openings in the first mask material; filling the first openings with a fill material; etching second openings in the fill material; filling the second openings with a second mask material; removing the fill material; and etching the first ILD layer using the first mask material and the second mask material as an etching mask to form openings in the first ILD layer that expose portions of the source and drain regions of the semiconductor structure.
    Type: Grant
    Filed: April 16, 2021
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ching-Feng Fu, Yu-Lien Huang, Tsai-Jung Ho, Huan-Just Lin
  • Patent number: 11721764
    Abstract: A semiconductor structure includes a gate structure, a source region, a drain region, and an isolation structure. The gate structure includes a first portion, a second portion and a third portion. The first portion extends in a first direction, and the second portion and the third portion extend in a second direction. The second portion and the third portion are disposed at opposite ends of the first portion. The source region and the drain region are separated by the gate structure. The isolation structure surrounds the gate structure, the source region and the drain region. The first portion has a first sidewall, the second portion has a second sidewall, and the third portion has a third sidewall. The first sidewall, the second sidewall and the third sidewall are parallel to the first direction and aligned with each other to form a straight line.
    Type: Grant
    Filed: April 16, 2021
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventor: Yu-Lien Huang
  • Patent number: 11715777
    Abstract: A semiconductor device including source/drain contacts extending into source/drain regions, below topmost surfaces of the source/drain regions, and methods of forming the same are disclosed. In an embodiment, a semiconductor device includes a semiconductor substrate; a first channel region over the semiconductor substrate; a first gate stack over the semiconductor substrate and surrounding four sides of the first channel region; a first epitaxial source/drain region adjacent the first gate stack and the first channel region; and a first source/drain contact coupled to the first epitaxial source/drain region, a bottommost surface of the first source/drain contact extending below a topmost surface of the first channel region.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: August 1, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Guan-Ren Wang, Yun-Min Chang, Yu-Lien Huang, Ching-Feng Fu
  • Publication number: 20230238279
    Abstract: The method for forming a semiconductor device includes forming a gate structure over a substrate; forming a plurality of source/drain structures in the substrate and on opposite sides of the gate structure; forming a source/drain contact on one of the plurality of source/drain structures; etching back the source/drain contact; forming a protective structure over the etched back source/drain contact; forming a dielectric layer over the gate structure and the protective structure; etching the dielectric layer to form an opening that exposes the gate structure and the protective structure; selectively depositing a capping material on the protective structure; after selectively depositing the capping material, forming a gate contact in the opening.
    Type: Application
    Filed: January 21, 2022
    Publication date: July 27, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Yu-Lien HUANG
  • Publication number: 20230238382
    Abstract: The method for forming a semiconductor device includes forming gate spacers on a substrate; forming a gate structure on the substrate and laterally between the gate spacers; forming a protective cap over the gate structure and laterally between the gate spacers; forming source/drain structures over the substrate and on opposite sides of the gate structure; depositing a dielectric layer over the protective cap, the gate spacers, and the source/drain structures; performing an etching process on the dielectric layer to form an opening exposing one of the source/drain structures, the etching process further etching a first one of the gate spacers to expose the protective cap; selectively depositing a capping material on the exposed protective cap; forming a source/drain contact in the opening.
    Type: Application
    Filed: January 27, 2022
    Publication date: July 27, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Yu-Lien HUANG
  • Patent number: 11710387
    Abstract: A method of detecting and responding to a visitor to a smart home environment via an electronic greeting system of the smart home environment, including determining that a visitor is approaching an entryway of the smart home environment; initiating a facial recognition operation while the visitor is approaching the entryway; initiating an observation window in response to the determination that a visitor is approaching the entryway; obtaining context information from one or more sensors of the smart home environment during the observation window; and at the end of the time window, initiating a response to the detected approach of the visitor based on the context information and/or an outcome of the facial recognition operation.
    Type: Grant
    Filed: February 18, 2022
    Date of Patent: July 25, 2023
    Assignee: Google LLC
    Inventors: Jason Evans Goulden, Rengarajan Aravamudhan, Hae Rim Jeong, Michael Dixon, James Edward Stewart, Sayed Yusef Shafi, Sahana Mysore, Seungho Yang, Yu-An Lien, Christopher Charles Burns, Rajeev Nongpiur, Jeffrey Boyd
  • Publication number: 20230230876
    Abstract: A method of forming a cap layer for sealing an air gap is provided. The method includes forming a line feature over a substrate, forming a contact etch stop layer (CESL) on a sidewall of the line feature, forming a sacrificial layer on a sidewall of the CESL, forming a liner layer on a sidewall of the sacrificial layer, removing the sacrificial layer to form an air gap which is bordered at the CESL and the liner layer and which is adjacent to the line feature, etching back upper ends of the CESL and the liner layer to widen an opening of the air gap, and forming a cap layer to seal the opening of the air gap thus widened.
    Type: Application
    Filed: January 18, 2022
    Publication date: July 20, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Yu-Lien HUANG
  • Publication number: 20230230884
    Abstract: A semiconductor device includes a first source/drain structure coupled to an end of a first conduction channel that extends along a first direction. The semiconductor device includes a second source/drain structure coupled to an end of a second conduction channel that extends along the first direction. The semiconductor device includes a first interconnect structure extending through an interlayer dielectric and electrically coupled to the first source/drain structure. The semiconductor device includes a second interconnect structure extending through the interlayer dielectric and electrically coupled to the second source/drain structure. The semiconductor device includes a first isolation structure disposed between the first and second source/drain structures and extending into the interlayer dielectric.
    Type: Application
    Filed: March 23, 2023
    Publication date: July 20, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Huan-Just Lin, Che-Ming Hsu
  • Patent number: 11695061
    Abstract: An integrated circuit structure includes a semiconductor substrate, insulation regions extending into the semiconductor substrate, with the insulation regions including first top surfaces and second top surfaces lower than the first top surfaces, a semiconductor fin over the first top surfaces of the insulation regions, a gate stack on a top surface and sidewalls of the semiconductor fin, and a source/drain region on a side of the gate stack. The source/drain region includes a first portion having opposite sidewalls that are substantially parallel to each other, with the first portion being lower than the first top surfaces and higher than the second top surfaces of the insulation regions, and a second portion over the first portion, with the second portion being wider than the first portion.
    Type: Grant
    Filed: February 10, 2021
    Date of Patent: July 4, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien Huang, Tung Ying Lee
  • Patent number: 11688787
    Abstract: A semiconductor device has a semiconductor substrate with a dielectric layer disposed thereon. A trench is defined in the dielectric layer. A metal gate structure is disposed in the trench. The metal gate structure includes a first layer and a second layer disposed on the first layer. The first layer extends to a first height in the trench and the second layer extends to a second height in the trench; the second height is less than the first height.
    Type: Grant
    Filed: April 5, 2021
    Date of Patent: June 27, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Lien Huang, Chi-Wen Liu, Clement Hsingjen Wann, Ming-Huan Tsai, Zhao-Cheng Chen
  • Publication number: 20230187530
    Abstract: A method of forming a semiconductor device includes forming a dummy gate structure across a fin protruding from a substrate, forming gate spacers on opposite sidewalls of the dummy gate structure, forming source/drain epitaxial structures on opposite sides of the dummy gate structure, forming a first interlayer dielectric (ILD) layer on the source/drain epitaxial structures and outer sidewalls of the gate spacers, replacing the dummy gate structure with a replacement gate structure, etching back the replacement gate structure to form a recess between the gate spacers, performing a first non-conformal deposition process to fill the recess with a first gate cap material, and planarizing the first gate cap material to remove a portion of the first gate cap material outside the recess.
    Type: Application
    Filed: December 9, 2021
    Publication date: June 15, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien HUANG, Tze-Liang LEE, Jr-Hung LI, Chi-Hao CHANG, Bor Chiuan HSIEH
  • Patent number: 11670717
    Abstract: A semiconductor device includes a fin feature in a substrate, a stack of semiconductor layers over the fin feature. Each of the semiconductor layers does not contact each other. The device also includes a semiconductor oxide layer interposed between the fin feature and the stack of the semiconductor layers. A surface of the semiconductor oxide layer contacts the fin feature and an opposite surface of the semiconductor oxide layer contacts a bottom layer of the stack of semiconductor layers. The device also includes a conductive material layer encircling each of the semiconductor layers and filling in spaces between each of two semiconductor layers.
    Type: Grant
    Filed: June 22, 2020
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien Huang, Tung Ying Lee, Chun-Hsiang Fan
  • Patent number: 11671683
    Abstract: This application is directed to a doorbell camera for illuminating and capturing scenes. The doorbell camera includes at least a subset of processors for operating a camera module, an image sensor having a field of view of a scene and configured to capture video of a portion of the scene, one or more infrared (IR) illuminators for providing illumination, a waterproof button assembly, and a microphone and a speaker for enabling a real-time conversation between a visitor located at the doorbell camera and a user of a remote client device. The waterproof button assembly is configured to receive a user press on a button top, block water from entering the electronic device, and display a visual pattern uniformly at a peripheral region of the button assembly using LEDs and light guide component that are disposed under the button top.
    Type: Grant
    Filed: December 27, 2021
    Date of Patent: June 6, 2023
    Assignee: Google LLC
    Inventors: Haerim Jeong, Rengarajan Aravamudhan, Jacobi Grillo, Michael Dixon, Yu-An Lien, Minjung Kim, Etienne Bérubé, Rochus Jacob, Brian Conner, Scott Mullins
  • Publication number: 20230170987
    Abstract: A satellite communication system and a method for managing radio resource of a non-terrestrial network are provided. The method includes: transmitting, by a first satellite, a first resource scheduling assignment when leaving a service area of the non-terrestrial network; receiving, by a second satellite, a second resource scheduling assignment corresponding to the first scheduling assignment when entering the service area; and accessing, by the second satellite, the radio resource according to the second resource scheduling assignment.
    Type: Application
    Filed: December 27, 2021
    Publication date: June 1, 2023
    Applicant: Industrial Technology Research Institute
    Inventors: Shao-Yu Lien, Bai-Chuan Chang, Ching-Chun Chou, Hua-Lung Tsai
  • Publication number: 20230158230
    Abstract: An infusion apparatus and a method for testing extravasation are provided. The infusion apparatus includes a liquid driver, a detection unit, and a controller. The controller controls the liquid driver to be operated, so that an input liquid provided by a infusion supply unit is injected into a living body through a tube and a needle, and a blood return detecting procedure is performed. The blood return detecting procedure includes a stop driving step implemented by controlling the liquid driver to stop operating; and a determining step implemented by controlling the detection unit to test a state of a section of the tube adjacent to the needle to generate a detected signal, and determining whether or not the blood of the living body returns to the tube according to the detected signal.
    Type: Application
    Filed: October 4, 2022
    Publication date: May 25, 2023
    Inventors: SHIN-YU LIEN, CHAO-SUNG LAI, YA-JU CHANG
  • Publication number: 20230155005
    Abstract: A method includes forming a first fin and a second fin protruding from a substrate; forming an isolation layer surrounding the first fin and the second fin; epitaxially growing a first epitaxial region on the first fin and a second epitaxial region on the second fin, wherein the first epitaxial region and the second epitaxial region are merged together; performing an etching process on the first epitaxial region and the second epitaxial region, wherein the etching process separates the first epitaxial region from the second epitaxial region; depositing a dielectric material between the first epitaxial region and the second epitaxial region; and forming a first gate stack extending over the first fin.
    Type: Application
    Filed: May 13, 2022
    Publication date: May 18, 2023
    Inventors: Yu-Lien Huang, Hao-Heng Liu, Po-Chin Chang, Yi-Shan Chen, Ming-Huan Tsai
  • Publication number: 20230121435
    Abstract: A method for making a semiconductor device includes forming a first patterned structure over an interlayer dielectric. The interlayer dielectric overlays a first source/drain structure and a second source/drain structure. The first patterned structure extends along a first lateral direction and a vertical projection of the first patterned structure is located between the first and second source/drain structures along a second lateral direction perpendicular to the first lateral direction. The method includes reducing a width of the first patterned structure that extends along the second lateral direction. The method includes forming, based on the first patterned structure having the reduced width, contact holes that expose the first source/drain structure and the second source/drain structure, respectively.
    Type: Application
    Filed: December 15, 2022
    Publication date: April 20, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Guan-Ren Wang, Che-Ming Hsu
  • Publication number: 20230114507
    Abstract: A method includes forming an isolation region around a semiconductor fin; forming a gate structure over the semiconductor fin; forming a source/drain region in the semiconductor fin adjacent the gate structure; depositing a metal material covering the isolation region, the gate structure, the semiconductor fin, and the source/drain region; etching openings in the metal material, wherein each opening exposes the isolation region, wherein the metal material remains on a top surface of the source/drain region remains after etching the openings; and depositing an insulating material, wherein the insulating material fills the openings.
    Type: Application
    Filed: February 15, 2022
    Publication date: April 13, 2023
    Inventor: Yu-Lien Huang
  • Patent number: 11626326
    Abstract: A semiconductor device includes a first source/drain structure coupled to an end of a first conduction channel that extends along a first direction. The semiconductor device includes a second source/drain structure coupled to an end of a second conduction channel that extends along the first direction. The semiconductor device includes a first interconnect structure extending through an interlayer dielectric and electrically coupled to the first source/drain structure. The semiconductor device includes a second interconnect structure extending through the interlayer dielectric and electrically coupled to the second source/drain structure. The semiconductor device includes a first isolation structure disposed between the first and second source/drain structures and extending into the interlayer dielectric.
    Type: Grant
    Filed: February 3, 2021
    Date of Patent: April 11, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Huan-Just Lin, Che-Ming Hsu