Abstract: Various embodiments of the present disclosure are directed towards a method for forming an integrated chip. The method includes forming a source region and a drain region within a substrate. A drift region is formed within the substrate such that the drift region is disposed laterally between the source region and the drain region. A first gate structure is formed over the drift region. An inter-level dielectric (ILD) layer is formed over the first gate structure. The ILD layers is patterned to define a field plate opening. A first field plate layer, a second field plate layer, and a third field plate layer are formed within the field plate opening.

Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a gate structure over a substrate and between a source region and a drain region. A composite etch stop structure is formed over the gate structure and a first inter-level dielectric (ILD) layer is formed over the composite etch stop structure. The composite etch stop structure has a plurality of stacked dielectric materials. The first ILD layer is etched to concurrently define contact openings extending to the substrate and a field plate opening extending to the composite etch stop structure. The contact openings and the field plate opening are concurrently filled with one or more conductive materials.

Abstract: An avalanche-protected field effect transistor includes, within a semiconductor substrate, a body semiconductor layer and a doped body contact region having a doping of a first conductivity type, and a source region a drain region having a doping of a second conductivity type. A buried first-conductivity-type well may be located within the semiconductor substrate. The buried first-conductivity-type well underlies, and has an areal overlap in a plan view with, the drain region, and is vertically spaced apart from the drain region, and has a higher atomic concentration of dopants of the first conductivity type than the body semiconductor layer. The configuration of the field effect transistor induces more than 90% of impact ionization electrical charges during avalanche breakdown to flow from the source region, to pass through the buried first-conductivity-type well, and to impinge on a bottom surface of the drain region.

Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a field plate. A gate structure overlies a substrate between a source region and a drain region. A drift region is disposed laterally between the gate structure and the drain region. A first dielectric layer overlies the substrate. A field plate is disposed within the first dielectric layer between the gate structure and the drain region. A conductive wire overlies the first dielectric layer and contacts the field plate. At least a portion of the conductive wire directly overlies a first sidewall of the drift region.

Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a gate structure disposed over a substrate between a source region and a drain region. A first inter-level dielectric (ILD) layer is disposed over the substrate and the gate structure and a second ILD layer is disposed over the first ILD layer. A field plate etch stop structure is between the first ILD layer and the second ILD layer. A field plate extends from an uppermost surface of the second ILD layer to the field plate etch stop structure. A plurality of conductive contacts extend from the uppermost surface of the second ILD layer to the source region and the drain region.

Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a field plate. A gate electrode overlies a substrate between a source region and a drain region. A drift region is arranged laterally between the gate electrode and the drain region. A plurality of inter-level dielectric (ILD) layers overlie the substrate. The plurality of ILD layers includes a first ILD layer underlying a second ILD layer. A plurality of conductive interconnect layers is disposed within the plurality of ILD layers. The field plate extends from a top surface of the first ILD layer to a point that is vertically separated from the drift region by the first ILD layer. The field plate is laterally offset the gate electrode by a non-zero distance in a direction toward the drain region. The field plate includes a same material as at least one of the plurality of conductive interconnect layers.

Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a field plate. A gate electrode overlies a substrate between a source region and a drain region. A drift region is arranged laterally between the gate electrode and the drain region. A plurality of inter-level dielectric (ILD) layers overlie the substrate. The plurality of ILD layers includes a first ILD layer underlying a second ILD layer. A plurality of conductive interconnect layers is disposed within the plurality of ILD layers. The field plate extends from a top surface of the first ILD layer to a point that is vertically separated from the drift region by the first ILD layer. The field plate is laterally offset the gate electrode by a non-zero distance in a direction toward the drain region. The field plate includes a same material as at least one of the plurality of conductive interconnect layers.

Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a source region and a drain region within a substrate. A gate structure is formed over the substrate and between the source region and the drain region. One or more dielectric layers are formed over the gate structure, and a first inter-level dielectric (ILD) layer is formed over the one or more dielectric layers. The first ILD layer laterally surrounds the gate structure. The first ILD layer is etched to define contact openings and a field plate opening. The contact openings and the field plate opening are filled with a conductive material.

Abstract: Various embodiments of the present disclosure are directed towards a method for forming an integrated chip. The method includes forming a source region and a drain region within a substrate. A drift region is formed within the substrate such that the drift region is disposed laterally between the source region and the drain region. A first gate structure is formed over the drift region. An inter-level dielectric (ILD) layer is formed over the first gate structure. The ILD layers is patterned to define a field plate opening. A first field plate layer, a second field plate layer, and a third field plate layer are formed within the field plate opening.

Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a field plate disposed over a drift region. A first gate electrode overlies a substrate between a source region and a drain region. An etch stop layer laterally extends from an outer sidewall of the first gate electrode to the drain region. The etch stop layer overlies the drift region disposed between the source region and the drain region. A field plate is disposed within a first inter-level dielectric (ILD) layer overlying the substrate. The field plate overlies the drift region. A top surface of the field plate is aligned with a top surface of the first gate electrode and a bottom surface of the field plate is vertically above a bottom surface of the first gate electrode. The field plate and first gate electrode respectively include metal materials.

Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a field plate disposed over a drift region. A first gate electrode overlies a substrate between a source region and a drain region. An etch stop layer laterally extends from an outer sidewall of the first gate electrode to the drain region. The etch stop layer overlies the drift region disposed between the source region and the drain region. A field plate is disposed within a first inter-level dielectric (ILD) layer overlying the substrate. The field plate overlies the drift region. A top surface of the field plate is aligned with a top surface of the first gate electrode and a bottom surface of the field plate is vertically above a bottom surface of the first gate electrode. The field plate and first gate electrode respectively include metal materials.

Abstract: A method for forming a semiconductor device includes forming a first guard ring around at least one transistor over a substrate. The method further includes forming a second guard ring around the first guard ring, wherein the second guard ring directly contacts the first guard ring. The method further includes forming an isolation structure between the first guard ring and the second guard ring. The method further includes forming a first doped region adjacent to the first guard ring, the first doped region having a first dopant type. The method further includes forming a second doped region adjacent to the second guard ring, the second doped region having a second dopant type.

Abstract: A method for forming an integrated circuit includes forming a first guard ring around at least one transistor over a substrate. The method further includes forming a second guard ring around the first guard ring. The method further includes forming a first doped region adjacent to the first guard ring, the first doped region having a first dopant type. The method further includes forming a second doped region adjacent to the second guard ring, the second doped region having a second dopant type.

Abstract: The present disclosure relates to an integrated chip. In some embodiments, the integrated chip has a gate structure disposed over a substrate between source and drain regions and a dielectric layer laterally extending from over the gate structure to between the gate structure and the drain region. A composite etch stop layer having a plurality of different dielectric materials is stacked over the dielectric layer. A contact etch stop layer directly contacts an upper surface and sidewalls of the composite etch stop layer. A field plate is laterally surrounded by a first inter-level dielectric (ILD) layer and vertically extends from a top of the first ILD layer, through the contact etch stop layer, and into the composite etch stop layer.

Abstract: The present disclosure, in some embodiments, relates to a transistor device having a field plate. The transistor device has a gate electrode disposed over a substrate between a source region and a drain region. One or more dielectric layers are arranged over the gate electrode, and a field plate is arranged over the one or more dielectric layers. The field plate extends from a first outermost sidewall that is directly over an upper surface of the gate electrode to a second outermost sidewall that is between the gate electrode and the drain region and that extends to below the upper surface of the gate electrode.

Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a source region and a drain region within a substrate. A gate structure is formed over the substrate and between the source region and the drain region. One or more dielectric layers are formed over the gate structure, and a first inter-level dielectric (ILD) layer is formed over the one or more dielectric layers. The first ILD layer laterally surrounds the gate structure. The first ILD layer is etched to define contact openings and a field plate opening. The contact openings and the field plate opening are filled with a conductive material.

Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a gate structure over a substrate and between a source region and a drain region. A composite etch stop structure is formed over the gate structure and a first inter-level dielectric (ILD) layer is formed over the composite etch stop structure. The composite etch stop structure has a plurality of stacked dielectric materials. The first ILD layer is etched to concurrently define contact openings extending to the substrate and a field plate opening extending to the composite etch stop structure. The contact openings and the field plate opening are concurrently filled with one or more conductive materials.

Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a gate structure disposed over a substrate between a source region and a drain region. A first inter-level dielectric (ILD) layer is disposed over the substrate and the gate structure and a second ILD layer is disposed over the first ILD layer. A field plate etch stop structure is between the first ILD layer and the second ILD layer. A field plate extends from an uppermost surface of the second ILD layer to the field plate etch stop structure. A plurality of conductive contacts extend from the uppermost surface of the second ILD layer to the source region and the drain region.

Abstract: A semiconductor device includes a first a first transistor configured to operate at a first threshold voltage level. The first transistor includes a first gate structure and a first drain terminal electrically coupled to the first gate structure. The semiconductor device also includes a second transistor configured to operate at a second threshold voltage level different from the first threshold voltage level. The second transistor includes a second source terminal and a second gate structure electrically coupled to the first gate structure. The first gate structure and the second gate structure comprise a first component in common, and the second gate structure further includes at least one extra component disposed over the first component. The number of the at least one extra component is determined by a desired voltage difference between the first threshold voltage level and the second threshold voltage level.

Abstract: In some embodiments, a BJT structure includes a base region, an emitter region formed in the base region and including an emitter doping region, a collector region including a collector doping region, an insulating structure and a field plate. The base region forms a junction with the collector region between the emitter and collector doping regions. The field plate is formed over an insulating structure over the junction. A first distance between the corresponding emitter and collector doping regions to the junction is shorter than a second distance in another BJT structure without the field plate corresponding to the first distance. The first distance causes a breakdown of the junction corresponding to a first breakdown voltage value between the emitter and collector doping regions being substantially the same or greater than a second breakdown voltage value of the other BJT structure corresponding to the first breakdown voltage value.