Abstract: A method for using an extreme ultraviolet radiation source is provided. The method includes assembling a first droplet generator onto a port of a vessel; ejecting a target droplet from the first droplet generator to a zone of excitation in front of a collector; emitting a laser toward the zone of excitation, such that the target droplet is heated by the laser to generate extreme ultraviolet (EUV) radiation; stopping the ejection of the target droplet; after stopping the ejection of the target droplet, disassembling the first droplet generator from the port of the vessel; after disassembling the first droplet generator from the port of the vessel, inserting a cleaning device into the vessel through the port; and cleaning the collector by using the cleaning device.

Abstract: A video-image-interpolation apparatus is provided, which includes at least three image-layering circuits, at least three motion-estimation circuits, a motion-estimation-filtering circuit, a motion-compensated frame-interpolation circuit, and a display-control circuit. Each motion-estimation circuit performs motion estimation on a reference image-layer sequence and a reference subtitle-layer sequence that are generated from an input video signal by each image-layering circuit. The motion-estimation-filtering circuit adaptively determines the motion-estimation circuit having the smallest motion error.

Abstract: A coaxial cable connector includes a metal sleeve, a metal clamping sleeve, a coupling sleeve and an elastic ring. The metal sleeve jackets an insulation layer of a coaxial cable and is coupled to a metal fence layer of the coaxial cable when the coaxial cable connector jackets the coaxial cable. The metal clamping sleeve jackets a first end portion of the metal sleeve for tightly clamping the coaxial cable. The coupling sleeve is detachably connected to a device connector and rotatably jackets a second end portion of the metal sleeve. The elastic ring is disposed in the coupling sleeve and fixedly jackets the second end portion. The elastic ring has a thick portion at least partially protruding from the second end portion relative to the metal sleeve and an abutting structure extending toward the first end portion axially for pushing the coupling sleeve against the metal clamping sleeve tightly.

Abstract: A photolithography system utilizes tin droplets to generate extreme ultraviolet radiation for photolithography. The photolithography system irradiates the droplets with a laser. The droplets become energized and emit extreme ultraviolet radiation. A collector reflects the extreme ultraviolet radiation toward a photolithography target. The photolithography system isolates a source of droplets from oxidants to prevent the oxidation of the nozzle or the formation of metal oxides on the nozzle, both of which can adversely affect an ability of the nozzle to generate a sufficient amount of droplets and/or direct the droplets in a desired direction.

Abstract: A method of region-based video-image interpolation is provided, which includes the following steps: respectively dividing each image and its subsequent image in an input video signal into first regions and second regions to obtain first regional images and second regional images; performing a motion-compensated frame-interpolation process on the first regional image and the second regional image in the same position in each image and its subsequent image to obtain an interpolated regional image; performing a frame-rate-conversion process on reference images and the interpolated regional images of each first region according to an original frame rate of each first region and a display frame rate of an output video signal to obtain a regional output image of each first region; and superimposing the regional output image generated at each output timestamp by each motion-compensated frame-interpolation circuit to generate an output image of the output video signal.

Abstract: A semiconductor package includes an interconnect structure, an insulating layer and a conductive layer. The interconnect structure includes a first surface and a second surface opposite to the first surface. The insulating layer contacts the interconnect structure. The insulating layer includes a third surface contacting the second surface of the interconnect structure and a fourth surface opposite to the third surface. The conductive layer is electrically coupled to the interconnect structure. The conductive layer has a continuous portion extending from the second surface to the fourth surface.

Abstract: This invention provides an x-y stage includes linear motors, linkages coupled to the linear motors respectively, a decoupling member coupling to the linkages movable in x-y directions freely, and a table fastened to the decoupling member. Coils or armatures of the linear motors can be fastened to the wall of vacuum chamber, such that heats generated in the coils can be conducted outside the vacuum chamber directly through the wall of the chamber. Cables for the coils or armatures are also fastened to the wall of chamber, and particle issue generated by the movable cable in the vacuum chamber can be removed.

Abstract: An epitaxial LED wafer is provided and chip process is processed such that each LED chip on the epitaxial wafer can be probed by an array of probe pin and results can be stored in a database. The epitaxial wafer is then diced on an expandable tape, and a display substrate is provided with driving circuits. The tape is expanded such that a pitch of LED chips on the tape is equal to a pitch of LED chips on display substrate. An array of drop pins will collectively and selectively drop LED chips, from the tape to the display substrate, with the same specification according to the probed results in the database.

Abstract: Herein disclosed is a fire extinguishing system and a fire extinguishing method for electronic components. The fire extinguishing system comprises a fire extinguishing device, a control device, and a crane device. The fire extinguishing device comprises a camera module and a frame. The camera module captures a scene image related to a storage location in a machine. The frame has a fire tank for receiving an electronic component in the storage location. The control device receives the scene image and selectively sends a fetch instruction according to a status of the storage location. The crane device fetches the electronic component from the storage location to the fire tank according to the fetch instruction. Wherein the frame is fireproof.

Abstract: A semiconductor package includes an interconnect structure having a first surface and a second surface opposite to the first surface, an insulating layer contacting the second surface of the interconnect structure wherein the insulating layer has a third surface facing the second surface of the interconnect structure and a fourth surface opposite to the third surface, at least one optical chip over the fourth surface of the insulating layer and electrically coupled to the interconnect structure, and a molding compound over the first surface of the interconnect structure.

Abstract: An electronic device is provided here, which includes a casing, a keycap and a keyboard backlight module. The casing has a first opening. The keycap is disposed corresponding to the first opening, and a gap is formed between the keycap and a periphery of the first opening. The keyboard backlight module includes a shielding layer, the shielding layer includes a light transmission area corresponding to the first opening and a light block portion, and the light block portion is located in the light transmission area and covers a region where at least one light path passes through the gap and intersects the light transmission area through.

Abstract: A coaxial cable connector includes a metal sleeve, a metal clamping sleeve, a coupling sleeve and an elastic ring. The metal sleeve jackets an insulation layer of a coaxial cable and is coupled to a metal fence layer of the coaxial cable when the coaxial cable connector jackets the coaxial cable. The metal clamping sleeve jackets a first end portion of the metal sleeve for tightly clamping the coaxial cable. The coupling sleeve is detachably connected to a device connector and rotatably jackets a second end portion of the metal sleeve. The elastic ring is disposed in the coupling sleeve and fixedly jackets the second end portion. The elastic ring has a thick portion at least partially protruding from the second end portion relative to the metal sleeve and an abutting structure extending toward the first end portion axially for pushing the coupling sleeve against the metal clamping sleeve tightly.

Abstract: A droplet generator assembly includes a storage tank, a refill system, a droplet generator, and a temperature control system. The storage tank is configured to store a target material. The refill system is connected to the storage tank. The droplet generator includes a reservoir and a nozzle connected to the reservoir, in which the droplet generator is connected to the refill system, and the refill system is configured to deliver the target material to the reservoir. The temperature control system is adjacent to the refill system or the reservoir.

Abstract: An immersion objective lens is configured below a stage such that multiple detectors can be configured above sample for large beam current application, particularly for defect inspection. Central pole piece of the immersion objective lens thus can be provided that a magnetic monopole-like field can be provided for electron beam. Auger electron detector thus can be configured to analyze materials of sample in the defect inspection.

Abstract: An electronic device is provided here, which includes a casing, a keycap and a keyboard backlight module. The casing has a first opening. The keycap is disposed corresponding to the first opening, and a gap is formed between the keycap and a periphery of the first opening. The keyboard backlight module includes a shielding layer, the shielding layer includes a light transmission area corresponding to the first opening and a light block portion, and the light block portion is located in the light transmission area and covers a region where at least one light path passes through the gap and intersects the light transmission area through.

Abstract: A package structure including a plurality of first dies and an insulating encapsulant is provided. The plurality of first dies each include a first waveguide layer having a first waveguide path of a bent pattern, wherein the first waveguide layers of the plurality of first dies are optically coupled to each other to form an optical route. The insulating encapsulant encapsulates the plurality of first dies.

Abstract: A semiconductor package includes a first optical transceiver, a second optical transceiver, a third optical transceiver, and a plasmonic waveguide. The first optical transceiver, the second optical transceiver, and the third optical transceiver are stacked in sequential order. The first optical transceiver and the third optical transceiver respectively at least one optical input/output portion for transmitting and receiving an optical signal. The plasmonic waveguide includes a first segment, a second segment, and a third segment optically coupled to one another. The first segment is embedded in the first optical transceiver. The second segment extends through the second optical transceiver. The third segment is embedded in the third optical transceiver. The first segment is optically coupled to the at least one optical input/output portion of the first optical transceiver and the third segment is optically coupled to the at least one optical input/output portion of the third optical transceiver.

Abstract: A semiconductor package includes a first optical transceiver, a second optical transceiver, a third optical transceiver, and a plasmonic waveguide. The first optical transceiver includes at least one optical input/output portion for transmitting and receiving optical signal. The second optical transceiver is stacked on the first optical transceiver. The third optical transceiver includes at least one optical input/output portion for transmitting and receiving optical signal. The third optical transceiver is stacked on the second optical transceiver. The plasmonic waveguide penetrates through the second optical transceiver and optically couples the at least one optical input/output portion of the first optical transceiver and the at least one optical input/output portion of the third optical transceiver.

Abstract: A semiconductor package includes an interconnect structure having a first surface and a second surface opposite to the first surface, an insulating layer contacting the second surface of the interconnect structure wherein the insulating layer has a third surface facing the second surface of the interconnect structure and a fourth surface opposite to the third surface, at least one optical chip over the fourth surface of the insulating layer and electrically coupled to the interconnect structure, and a molding compound over the first surface of the interconnect structure.

Abstract: A radiation therapy system is equipped with a combined imaging system, such as an imaging system combining computed tomography (CT), spectral CT, and single photon emission tomography imaging (SPECT), for guidance of radiation beams providing radiotherapy. The system can include at least one x-ray source that emits an x-ray beam at a low energy level for imaging and/or an x-ray beam at a high energy level for radiation therapy. The system can also include at least one imager, such as a cadmium zinc telluride (CZT) or cadmium telluride (CdTe) flat-panel imager that receives x-ray beams traversing a subject from the x-ray source and gamma rays emitted by radioisotope tracers injected into the subject. Based on the guidance of the triple images (CT, spectral CT, and SPECT), a computer system can control the radiation therapeutic beam delivery to target areas, such as lesions and/or tumors.