Abstract: A device and system for thin wafer cleaning is disclosed. A preferred embodiment comprises a spin chuck having at least three holding clamps. A thin wafer with a wafer frame is mounted on the spin chuck through a tape layer. When the holding clamps are unlocked, there is no interference with the removal and placement of the wafer frame. On the other hand, when the holding clamps are locked, the holding clamps are brought into contact with the outer edge of the wafer frame so as to prevent the wafer frame from moving laterally. Furthermore, the shape of the holding clamps in a locked position is capable of preventing the wafer frame from moving vertically.

Abstract: A chemical mechanical polishing (CMP) device for processing a wafer is provided which includes a plate for supporting the wafer to be processed in a face-up orientation, a polishing head opposing the plate, wherein the polishing head includes a rotatable polishing pad operable to contact the wafer while the polishing pad is rotating, and a slurry coating system providing a slurry to the polishing pad for polishing the wafer.

Abstract: The embodiments described provide apparatus and methods for bonding wafers to carriers with the surface contours of plates facing the substrates or carriers are modified either by re-shaping, by using height adjusters, by adding shim(s), or by zoned temperature control. The modified surface contours of such plates compensate the effects that may cause the non-planarity of bonded substrates.

Abstract: A method includes bonding a wafer on a carrier through an adhesive, and performing a thinning process on the wafer. After the step of performing the thinning process, a portion of the adhesive not covered by the wafer is removed, while the portion of the adhesive covered by the wafer is not removed.

Abstract: A rapid cooling system for a rapid thermal processing chamber includes a rapid thermal processing chamber having a wafer support for supporting a wafer. A tank having a supply of cooling liquid is provided in fluid communication with the chamber. A pump is provided in fluid communication with the rapid thermal processing chamber and the tank for pumping the cooling liquid from the tank to the chamber and cooling the wafer during the cooling phase of rapid thermal processing.

Abstract: A chemical mechanical polishing (CMP) device for processing a wafer is provided which includes a plate for supporting the wafer to be processed in a face-up orientation, a polishing head opposing the plate, wherein the polishing head includes a rotatable polishing pad operable to contact the wafer while the polishing pad is rotating, and a slurry coating system providing a slurry to the polishing pad for polishing the wafer.

Abstract: A driving apparatus for fan motors, electrically connected between a pulse width modulation (PWM) signal generator and a controller, includes a converter electrically connected to the PWM signal generator, generating a first reference voltage according to the duty cycle of a PWM signal generated by the PWM signal generator; a reference voltage generator electrically connected to an external power source, generating a second reference voltage according to the external power source; and a comparator having a first and second input terminal and an output terminal; wherein the first input terminal is electrically connected to the converter, the second input terminal is connected to the reference voltage generator and the output terminal is connected to the controller, and when the first reference voltage is greater than the second reference voltage, a driving signal is output from the output terminal to the controller to control the rotation speed of the fan motor.

Abstract: A motor control device is electrically connected with a motor. The motor control device includes a controller and a driving circuit. The controller has a default value of time and generates a first driving signal and a second driving signal. The driving circuit includes a first switching element and a second switching element, the first switching element and the second switching element receive the first driving signal and the second driving signal respectively, and the first switching element and the second switching element are switched on or switched off alternately according to the first driving signal and the second driving signal respectively, so as to drive the motor to operate.

Abstract: A circuit board adapted to a fan comprises a circuit region and a heat-dissipative film. The circuit region is provided on a first surface of the circuit board and comprises at least one heat-generating component thereon. The heat-dissipative film is coated on an edge portion of the first surface and is in contact with the heat-generating component. A plurality of openings through the heat-dissipative film, a protrusion of the circuit board, a cutout in the protrusion to expose the heat-generating component to airflow, etc., have been disclosed and claimed for enhancing the efficiency in heat dissipation. A heat sink may also be provided on a second surface opposite to the first surface of the circuit board. The heat sink is connected to the heat-dissipative film to help dissipate the heat generated by the operation of the fan.

Abstract: A fan control device receives a target revolution signal to control a rotation speed of a fan. The device includes a temperature measuring module, a revolution modulating module and a driving module. The temperature measuring module generates a temperature value according to an ambient temperature of the fan. The revolution modulating module is electrically connected with the temperature measuring module, receives the temperature value, and generates a control signal according to the temperature value and the target revolution signal. The driving module is electrically connected with the revolution modulating module, and generates a driving signal to drive the fan according to the control signal. In addition, a fan control method, which is applied to the fan control device, is also provided.

Abstract: A switch control device receives an input signal and a power signal and includes a control unit and a switch unit. The control unit has a predetermined value and receives the input signal and the power signal. When the input signal is lower than the predetermined value, the control unit outputs a control signal. The switch unit is electrically connected with the control unit, receives the control signal, and stops outputting the power signal according to the control signal.

Abstract: A control device of a fan system includes a temperature sensing module, a comparing module and a driving module. The temperature sensing module senses an external temperature and generates a sensing signal according to the external temperature. The comparing module receives the sensing signal and outputs a comparing signal according to the sensing signal and a reference voltage signal. The driving module, which is electrically connected with the temperature sensing module and the comparing module, supplies a working voltage to the temperature sensing module and the comparing module, and outputs a rotating speed control signal according to the sensing signal or the comparing signal.

Abstract: An electric generator assembly is used on a vehicle having a frame and a rotating element, and includes a bracket that is adapted to be fixed to the frame of the vehicle, a support, an electric generator, and an adjusting unit. The support is pivotably mounted to the bracket. The electric generator is mounted on the support and includes a roller that is adapted to be engaged with the rotating element of the vehicle so as to be driven thereby. The adjusting unit is employed to adjust relative positioning between the bracket and the support to engage the roller with the rotating element and release the roller from the rotating element.

Abstract: An electric generator includes at least first and second stator units aligned along a stator axis, and a rotor. Each stator unit includes a stator core having a plurality of angularly spaced-apart coil mounting arms that extend in radial outward directions relative to the stator axis, a plurality of field coils each wound on a respective one of the coil mounting arms, and an insulator unit disposed between the field coils and the stator core so as to provide electrical insulation therebetween while permitting electromagnetic coupling therebetween. The first and second stator units are arranged side by side along the stator axis such that the coil mounting arms of the first stator unit are angularly displaced with respect to the coil mounting arms of the second stator unit. The rotor is coupled rotatably to the first and second stator units for inducing electrical currents in the field coils.

Abstract: A circuit board adapted to a fan comprises a circuit region and a heat-dissipative film. The circuit region is provided on a first surface of the circuit board and comprises at least one heat-generating component thereon. The heat-dissipative film is coated on an edge portion of the first surface and is in contact with the heat-generating component. A plurality of openings through the heat-dissipative film, a protrusion of the circuit board, a cutout in the protrusion to expose the heat-generating component to airflow, etc., have been disclosed and claimed for enhancing the efficiency in heat dissipation. A heat sink may also be provided on a second surface opposite to the first surface of the circuit board. The heat sink is connected to the heat-dissipative film to help dissipate the heat generated by the operation of the fan.

Abstract: An organic layer, such as a porous low-K dielectric in an IC, contains pores open at its surface. To close the pores, the organic layer is contacted by a supercritical fluid that is a solvent for the layer. After a small amount of the surface and the wall of the open pores is solvated, a phase transition of the solvated organic material is effected at the surface to cover it with a dense, smooth, non-porous film that seals the open pores.

Abstract: A control device of a fan system includes a temperature sensing module, a comparing module and a driving module. The temperature sensing module senses an external temperature and generates a sensing signal according to the external temperature. The comparing module receives the sensing signal and outputs a comparing signal according to the sensing signal and a reference voltage signal. The driving module, which is electrically connected with the temperature sensing module and the comparing module, supplies a working voltage to the temperature sensing module and the comparing module, and outputs a rotating speed control signal according to the sensing signal or the comparing signal.

Abstract: A method and apparatus for locally etching a substrate area the method including providing a substrate comprising a process surface; depositing a material layer over the process surface; and, applying a wet etchant to cover a targeted etching portion of the process surface while excluding an adjacent surrounding area to selectively etch the material layer overlying the targeted etching portion.

Abstract: A fan motor speed control circuit and a voltage-regulating module thereof are disclosed. The fan motor speed control circuit includes the voltage-regulating module and a driving module electrically connected to the voltage-regulating module. The driving module includes a pulse signal generating unit, a speed control unit, and a drive unit. The speed control unit compares a high frequency pulse signal generated by the pulse signal generating unit with a variable reference voltage signal output by the voltage-regulating module, and then outputs a control signal to the drive unit to proceed the speed control of the fan motor. In application, the voltage-regulating module and the driving module are electrically connected to a voltage source in parallel.

Abstract: A switch control device receives an input signal and a power signal and includes a control unit and a switch unit. The control unit has a predetermined value and receives the input signal and the power signal. When the input signal is lower than the predetermined value, the control unit outputs a control signal. The switch unit is electrically connected with the control unit, receives the control signal, and stops outputting the power signal according to the control signal.