Patents by Inventor Yu-Wei Ting

Yu-Wei Ting has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10700070
    Abstract: An embedded transistor for an electrical device, such as a DRAM memory cell, and a method of manufacture thereof is provided. A trench is formed in a substrate and a gate dielectric and a gate electrode formed in the trench of the substrate. Source/drain regions are formed in the substrate on opposing sides of the trench. In an embodiment, one of the source/drain regions is coupled to a storage node and the other source/drain region is coupled to a bit line. In this embodiment, the gate electrode may be coupled to a word line to form a DRAM memory cell. A dielectric growth modifier may be implanted into sidewalls of the trench in order to tune the thickness of the gate dielectric.
    Type: Grant
    Filed: April 24, 2017
    Date of Patent: June 30, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Yu-Wei Ting, Chun-Yang Tsai, Kuo-Ching Huang
  • Publication number: 20200006349
    Abstract: An embedded transistor for an electrical device, such as a DRAM memory cell, and a method of manufacture thereof is provided. A trench is formed in a substrate and a gate dielectric and a gate electrode formed in the trench of the substrate. Source/drain regions are formed in the substrate on opposing sides of the trench. In an embodiment, one of the source/drain regions is coupled to a storage node and the other source/drain region is coupled to a bit line. In this embodiment, the gate electrode may be coupled to a word line to form a DRAM memory cell. A dielectric growth modifier may be implanted into sidewalls of the trench in order to tune the thickness of the gate dielectric.
    Type: Application
    Filed: September 12, 2019
    Publication date: January 2, 2020
    Inventors: Yu-Wei Ting, Chun-Yang Tsai, Kuo-Ching Huang
  • Patent number: 10262731
    Abstract: A device includes a first word line, a resistive random access memory (RRAM) cell, a second word line, and a charge pump circuit. The RRAM cell is coupled to the first word line and is not formed. The charge pump circuit is coupled to the second word line and is configured to provide a negative voltage. Methods of forming the device are also disclosed.
    Type: Grant
    Filed: March 11, 2016
    Date of Patent: April 16, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chih-Yang Chang, Wen-Ting Chu, Yu-Wei Ting, Chun-Yang Tsai, Kuo-Ching Huang
  • Patent number: 10103151
    Abstract: An embedded transistor for an electrical device, such as a DRAM memory cell, and a method of manufacture thereof is provided. A trench is formed in a substrate and a gate dielectric and a gate electrode formed in the trench of the substrate. Source/drain regions are formed in the substrate on opposing sides of the trench. In an embodiment, one of the source/drain regions is coupled to a storage node and the other source/drain region is coupled to a bit line. In this embodiment, the gate electrode may be coupled to a word line to form a DRAM memory cell. A dielectric growth modifier may be implanted into sidewalls of the trench in order to tune the thickness of the gate dielectric.
    Type: Grant
    Filed: April 3, 2017
    Date of Patent: October 16, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wei Ting, Kuo-Ching Huang
  • Patent number: 10062735
    Abstract: Some embodiments of the present disclosure relate to an integrated chip having a vertical transistor device. The integrated chip may have a semiconductor body with a trench extending along first sides of a source region, a channel region over the source region, and a drain region over the channel region. A gate electrode is arranged along a first sidewall of the trench, and a metal contact is arranged on the drain region. An isolation dielectric material is disposed within the trench. The isolation dielectric material is vertically over a top surface of the gate electrode and is laterally adjacent to the gate electrode.
    Type: Grant
    Filed: November 9, 2016
    Date of Patent: August 28, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Wei Ting, Chi-Wen Liu, Chun-Yang Tsai, Kuo-Ching Huang
  • Patent number: 9991368
    Abstract: Some aspects of this disclosure relate to a memory device. The memory device includes a collector region having a first conductivity type and which is coupled to a source line of the memory device. A base region is formed over the collector region and has a second conductivity type. A gate structure is coupled to the base region and acts as a shared word line for first and second neighboring memory cells of the memory device. First and second emitter regions are formed over the base region and have the first conductivity type. The first and second emitter regions are arranged on opposite sides of the gate structure. First and second contacts extend upwardly from the first and second emitter regions, respectively, and couple the first and second emitter regions to first and second data storage elements, respectively, of the first and second neighboring memory cells, respectively.
    Type: Grant
    Filed: December 7, 2016
    Date of Patent: June 5, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Wei Ting, Chun-Yang Tsai, Kuo-Ching Huang
  • Patent number: 9893122
    Abstract: Some embodiments relate to an integrated circuit device including an array of memory cells disposed over a semiconductor substrate. An array of first metal lines are disposed at a first height over the substrate and are connected to the memory cells of the array. Each of the first metal lines has a first cross-sectional area. An array of second metal lines are disposed at a second height over the substrate and are connected to the memory cells of the array. Each of the second metal lines has a second cross-sectional area which is greater than the first cross-sectional area.
    Type: Grant
    Filed: October 13, 2016
    Date of Patent: February 13, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Yang Tsai, Yu-Wei Ting, Kuo-Ching Huang
  • Publication number: 20170229467
    Abstract: An embedded transistor for an electrical device, such as a DRAM memory cell, and a method of manufacture thereof is provided. A trench is formed in a substrate and a gate dielectric and a gate electrode formed in the trench of the substrate. Source/drain regions are formed in the substrate on opposing sides of the trench. In an embodiment, one of the source/drain regions is coupled to a storage node and the other source/drain region is coupled to a bit line. In this embodiment, the gate electrode may be coupled to a word line to form a DRAM memory cell. A dielectric growth modifier may be implanted into sidewalls of the trench in order to tune the thickness of the gate dielectric.
    Type: Application
    Filed: April 24, 2017
    Publication date: August 10, 2017
    Inventors: Yu-Wei Ting, Chun-Yang Tsai, Kuo-Ching Huang
  • Publication number: 20170207224
    Abstract: An embedded transistor for an electrical device, such as a DRAM memory cell, and a method of manufacture thereof is provided. A trench is formed in a substrate and a gate dielectric and a gate electrode formed in the trench of the substrate. Source/drain regions are formed in the substrate on opposing sides of the trench. In an embodiment, one of the source/drain regions is coupled to a storage node and the other source/drain region is coupled to a bit line. In this embodiment, the gate electrode may be coupled to a word line to form a DRAM memory cell. A dielectric growth modifier may be implanted into sidewalls of the trench in order to tune the thickness of the gate dielectric.
    Type: Application
    Filed: April 3, 2017
    Publication date: July 20, 2017
    Inventors: Yu-Wei Ting, Kuo-Ching Huang
  • Patent number: 9680091
    Abstract: The present disclosure provides a resistive random access memory (RRAM) structure. The RRAM structure includes a bottom electrode on a substrate; a resistive material layer on the bottom electrode, the resistive material layer including a defect engineering film; and a top electrode on the resistive material layer.
    Type: Grant
    Filed: August 29, 2012
    Date of Patent: June 13, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Yang Tsai, Yu-Wei Ting, Kuo-Ching Huang
  • Patent number: 9634134
    Abstract: An embedded transistor for an electrical device, such as a DRAM memory cell, and a method of manufacture thereof is provided. A trench is formed in a substrate and a gate dielectric and a gate electrode formed in the trench of the substrate. Source/drain regions are formed in the substrate on opposing sides of the trench. In an embodiment, one of the source/drain regions is coupled to a storage node and the other source/drain region is coupled to a bit line. In this embodiment, the gate electrode may be coupled to a word line to form a DRAM memory cell. A dielectric growth modifier may be implanted into sidewalls of the trench in order to tune the thickness of the gate dielectric.
    Type: Grant
    Filed: August 21, 2014
    Date of Patent: April 25, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wei Ting, Chun-Yang Tsai, Kuo-Ching Huang
  • Patent number: 9613965
    Abstract: An embedded transistor for an electrical device, such as a DRAM memory cell, and a method of manufacture thereof is provided. A trench is formed in a substrate and a gate dielectric and a gate electrode formed in the trench of the substrate. Source/drain regions are formed in the substrate on opposing sides of the trench. In an embodiment, one of the source/drain regions is coupled to a storage node and the other source/drain region is coupled to a bit line. In this embodiment, the gate electrode may be coupled to a word line to form a DRAM memory cell.
    Type: Grant
    Filed: October 6, 2014
    Date of Patent: April 4, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wei Ting, Kuo-Ching Huang
  • Publication number: 20170092748
    Abstract: Some aspects of this disclosure relate to a memory device. The memory device includes a collector region having a first conductivity type and which is coupled to a source line of the memory device. A base region is formed over the collector region and has a second conductivity type. A gate structure is coupled to the base region and acts as a shared word line for first and second neighboring memory cells of the memory device. First and second emitter regions are formed over the base region and have the first conductivity type. The first and second emitter regions are arranged on opposite sides of the gate structure. First and second contacts extend upwardly from the first and second emitter regions, respectively, and couple the first and second emitter regions to first and second data storage elements, respectively, of the first and second neighboring memory cells, respectively.
    Type: Application
    Filed: December 7, 2016
    Publication date: March 30, 2017
    Inventors: Yu-Wei Ting, Chun-Yang Tsai, Kuo-Ching Huang
  • Publication number: 20170062525
    Abstract: Some embodiments of the present disclosure relate to an integrated chip having a vertical transistor device. The integrated chip may have a semiconductor body with a trench extending along first sides of a source region, a channel region over the source region, and a drain region over the channel region. A gate electrode is arranged along a first sidewall of the trench, and a metal contact is arranged on the drain region. An isolation dielectric material is disposed within the trench. The isolation dielectric material is vertically over a top surface of the gate electrode and is laterally adjacent to the gate electrode.
    Type: Application
    Filed: November 9, 2016
    Publication date: March 2, 2017
    Inventors: Yu-Wei Ting, Chi-Wen Liu, Chun-Yang Tsai, Kuo-Ching Huang
  • Patent number: 9576651
    Abstract: According to one embodiment, a method of RRAM operations is provided. The method includes the following operations: providing a first voltage difference across a resistor of the RRAM during a read operation; and providing a second voltage difference across the resistor of the RRAM during a reset operation, wherein the first voltage difference has the same polarity as the second voltage difference.
    Type: Grant
    Filed: January 21, 2015
    Date of Patent: February 21, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chun-Yang Tsai, Yu-Wei Ting, Kuo-Ching Huang, Chia-Fu Lee
  • Patent number: 9576656
    Abstract: A device and method for setting a resistive random access memory cell are provided. An exemplary method includes: providing a set current to a bit line of the RRAM cell by a current source. An exemplary device includes: a first RRAM cell and a current source. The first RRAM cell is connected to a first word line. The current source selectively connected to the first bit line. The current source selectively provides a current to the first bit line of the first RRAM cell to set the first RRAM cell.
    Type: Grant
    Filed: October 23, 2013
    Date of Patent: February 21, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chun-Yang Tsai, Yu-Wei Ting, Kuo-Ching Huang
  • Publication number: 20170033161
    Abstract: Some embodiments relate to an integrated circuit device including an array of memory cells disposed over a semiconductor substrate. An array of first metal lines are disposed at a first height over the substrate and are connected to the memory cells of the array. Each of the first metal lines has a first cross-sectional area. An array of second metal lines are disposed at a second height over the substrate and are connected to the memory cells of the array. Each of the second metal lines has a second cross-sectional area which is greater than the first cross-sectional area.
    Type: Application
    Filed: October 13, 2016
    Publication date: February 2, 2017
    Inventors: Chun-Yang Tsai, Yu-Wei Ting, Kuo-Ching Huang
  • Patent number: 9543404
    Abstract: Some aspects of this disclosure relate to a memory device. The memory device includes a collector region having a first conductivity type and which is coupled to a source line of the memory device. A base region is formed over the collector region and has a second conductivity type. A gate structure is coupled to the base region and acts as a shared word line for first and second neighboring memory cells of the memory device. First and second emitter regions are formed over the base region and have the first conductivity type. The first and second emitter regions are arranged on opposite sides of the gate structure. First and second contacts extend upwardly from the first and second emitter regions, respectively, and couple the first and second emitter regions to first and second data storage elements, respectively, of the first and second neighboring memory cells, respectively.
    Type: Grant
    Filed: August 14, 2015
    Date of Patent: January 10, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Wei Ting, Chun-Yang Tsai, Kuo-Ching Huang
  • Patent number: 9530462
    Abstract: A memory cell with a decoupled read/write path, the memory cell includes a switch comprising a gate, a first terminal and a second terminal, a resistive switching device connected to the gate of the switch, and a conductive path between the gate of the switch and the second terminal.
    Type: Grant
    Filed: January 9, 2015
    Date of Patent: December 27, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd
    Inventors: Yu-Wei Ting, Kuo-Ching Huang, Chun-Yang Tsai
  • Patent number: 9520446
    Abstract: Some embodiments of the present disclosure relate to a memory array comprising memory cells having vertical gate-all-around (GAA) selection transistors. In some embodiments, the memory array has a source region disposed within an upper surface of a semiconductor body, and a semiconductor pillar of semiconductor material extending outward from the upper surface of the semiconductor body and having a channel region and an overlying drain region. A gate region vertically overlies the source region at a position laterally separated from sidewalls of the channel region by a gate dielectric layer. A first metal contact couples the drain region to a data storage element that stores data. The vertical GAA selection transistors provide for good performance, while decreasing the size of the selection transistor relative to a planar MOSFET, so that the selection transistors do not negatively impact the size of the memory array.
    Type: Grant
    Filed: August 4, 2014
    Date of Patent: December 13, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Wei Ting, Chi-Wen Liu, Chun-Yang Tsai, Kuo-Ching Huang