Patents by Inventor Yu Ying Lin

Yu Ying Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12237421
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes first nanostructures and second nanostructures formed over a substrate, and a first gate structure formed over the first nanostructures. The semiconductor device structure includes a second gate structure formed over the second nanostructures, and the second gate structure includes a gate dielectric layer, a first type work function layer and a filling layer. The semiconductor device structure includes a first isolation layer between the first gate structure and the second gate structure, and the first isolation layer includes a first sidewall surface, and the first sidewall surface is in direct contact with a first interface between the gate dielectric layer and the first type work function layer and a second interface between the work function layer and the filling layer.
    Type: Grant
    Filed: February 15, 2024
    Date of Patent: February 25, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Chao Lin, Wei-Sheng Yun, Tung-Ying Lee
  • Publication number: 20250063744
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a substrate comprising first opposing sidewalls defining a first trench and second opposing sidewalls defining a second trench laterally offset from the first trench. A stack of layers comprises a plurality of conductive layers and a plurality of dielectric layers alternatingly stacked with the conductive layers. The stack of layers comprises a first segment in the first trench and a second segment in the second trench. A first lateral distance between the first segment and the second segment aligned with a first surface of the substrate is greater than a second lateral distance between the first segment and the second segment below the first surface of the substrate.
    Type: Application
    Filed: November 7, 2024
    Publication date: February 20, 2025
    Inventors: Hsin-Li Cheng, Jyun-Ying Lin, Alexander Kalnitsky, Shih-Fen Huang, Shu-Hui Su, Ting-Chen Hsu, Tuo-Hsin Chien, Felix Ying-Kit Tsui, Shi-Min Wu, Yu-Chi Chang
  • Publication number: 20250063743
    Abstract: Some implementations described herein provide techniques and apparatuses for an integrated circuit device including a trench capacitor structure that has a merged region. A material filling the merged region is different than a material that is included in electrode layers of the trench capacitor structure. Furthermore, the material filling the merged region includes a coefficient of thermal expansion and a modulus of elasticity that, in combination with the architecture of the trench capacitor structure, reduce thermally induced stresses and/or strains within the integrated circuit device relative to another integrated circuit device having a trench capacitor structure including a merged region and electrode layers of a same material.
    Type: Application
    Filed: August 15, 2023
    Publication date: February 20, 2025
    Inventors: Shu-Hui SU, Hsin-Li CHENG, YingKit Felix TSUI, Tuo-Hsin CHIEN, Jyun-Ying LIN, Shi-Min WU, Yu-Chi CHANG, Ting-Chen HSU
  • Publication number: 20250063720
    Abstract: A semiconductor device includes a substrate, an interconnect, a memory cell, and a plurality of first barrier structures. The interconnect is disposed over the substrate. The memory cell is disposed in the interconnect within a memory region of the substrate, where the memory cell includes a transistor and a capacitor. The transistor includes a gate, source/drain elements respectively standing at two opposite sides of the gate, and a channel disposed between the source/drain elements and overlapped with the gate. The capacitor is disposed over the transistor and electrically coupled to one of the source/drain elements. The plurality of first barrier structures line sidewalls and bottom surfaces of the source/drain elements, and each include a first barrier layer and a second barrier layer disposed between the source/drain elements and the first barrier layer, where a first absorption interface is disposed between the first barrier layer and the second barrier layer.
    Type: Application
    Filed: August 15, 2023
    Publication date: February 20, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: I-Che Lee, Huai-Ying Huang, Yen-Chieh Huang, Wei-Gang Chiu, Kai-Wen Cheng, Yu-Ming Lin, Chung-Te Lin
  • Publication number: 20250063770
    Abstract: A semiconductor device including a substrate, a semiconductor layer, a gate, a dielectric structure, and a source/drain structure is provided. The semiconductor layer is disposed on the substrate, and is made of a first low dimensional material. The gate is disposed on the substrate and overlaps the semiconductor layer. The dielectric structure is disposed on the semiconductor layer and includes a trench structure reaching a portion of the semiconductor layer. The source/drain structure includes a barrier layer made of a second low dimensional material continuously extending along the trench structure and a metal fill filling a volume surrounded by the barrier layer.
    Type: Application
    Filed: August 16, 2023
    Publication date: February 20, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Jiun Lin, Tung-Ying Lee, Yu-Chao Lin
  • Patent number: 12230450
    Abstract: A method of manufacturing a semiconductor structure includes: forming a first oxide layer over a landing pad layer; forming a middle patterned dielectric layer over the first oxide layer; sequentially forming a second oxide layer and a top dielectric layer over the middle patterned dielectric layer; forming a trench through the top dielectric layer, the second oxide layer and the first oxide layer; conformally forming a bottom conductive layer in the trench; removing a portion of the top dielectric layer adjacent to the trench to expose a portion of the second oxide layer beneath the portion of the top dielectric layer; and performing an etching process to remove the second oxide layer and the first oxide layer. A semiconductor structure is also provided.
    Type: Grant
    Filed: February 18, 2024
    Date of Patent: February 18, 2025
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Mao-Ying Wang, Yu-Ting Lin
  • Publication number: 20250048941
    Abstract: Provided are a memory cell and a method of forming the same. The memory cell includes a bottom electrode, an etching stop layer, a variable resistance layer, and a top electrode. The etching stop layer is disposed on the bottom electrode. The variable resistance layer is embedded in the etching stop layer and in contact with the bottom electrode. The top electrode is disposed on the variable resistance layer. A semiconductor device having the memory cell is also provided.
    Type: Application
    Filed: October 24, 2024
    Publication date: February 6, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Carlos H. Diaz, Shao-Ming Yu, Tung-Ying Lee
  • Patent number: 12218253
    Abstract: A flash memory device and method of making the same are disclosed. The flash memory device is located on a substrate and includes a floating gate electrode, a tunnel dielectric layer located between the substrate and the floating gate electrode, a smaller length control gate electrode and a control gate dielectric layer located between the floating gate electrode and the smaller length control gate electrode. The length of a major axis of the smaller length control gate electrode is less than a length of a major axis of the floating gate electrode.
    Type: Grant
    Filed: April 15, 2023
    Date of Patent: February 4, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Yu-Chu Lin, Chi-Chung Jen, Wen-Chih Chiang, Yi-Ling Liu, Huai-Jen Tung, Keng-Ying Liao
  • Patent number: 12211844
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first gate-all-around FET over a substrate, and the first gate-all-around FET includes first nanostructures and a first gate stack surrounding the first nanostructures. The semiconductor structure also includes a first FinFET adjacent to the first gate-all-around FET, and the first FinFET includes a first fin structure and a second gate stack over the first fin structure. The semiconductor structure also includes a gate-cut feature interposing the first gate stack of the first gate-all-around FET and the second gate stack of the first FinFET.
    Type: Grant
    Filed: July 21, 2022
    Date of Patent: January 28, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jin-Aun Ng, Yu-Chao Lin, Tung-Ying Lee
  • Tie
    Patent number: 12210924
    Abstract: A tie includes an RFID device and a body encapsulating the RFID device by overmolding. The body includes a strap member, a head member, and a protection member connected between the strap member and the head member. The strap member has a plurality of engaging teeth. The RFID device is embedded in the protection member. The head member has a through hole. A hole wall of the through hole is provided with a one-way pawl. When winding the body around an object, the protection member can get a better protection since the protection member is located on an inner side between the head member and the strap member without protruding outward. Because the protection member and the head member are closer to a surface of the object, the extent to which the protection member protrudes outwards is reduced, thereby facilitating the RFID device to be sensed more easily.
    Type: Grant
    Filed: October 10, 2023
    Date of Patent: January 28, 2025
    Assignees: YOKE INDUSTRIAL CORP., ASIA SMART TAG CO., LTD.
    Inventors: Rong-Der Hong, Lien-Feng Lin, Yu-Ying Lin
  • Patent number: 12209888
    Abstract: A reading device for capacitive sensing element comprises a differential capacitive sensing element, a modulator, a charge-voltage conversion circuit, a phase adjustment circuit, a demodulator and a low-pass filter. The modulator outputs a modulation signal to the common node of the capacitive sensing element and modulates the output signal of the capacitive sensing element. The two input terminals of the charge-to-voltage conversion circuit are connected to two non-common nodes of the capacitive sensing element. The charge-to-voltage converter read the output charge of the capacitive sensing element and convert it into a voltage signal. The modulator generates a demodulation signal through the phase adjustment circuit. The demodulator receives the demodulation signal from the phase adjustment circuit and demodulates the output of the charge-to-voltage conversion circuit. The low-pass filter is connected to the output of the demodulator for filtering the demodulated voltage signal to output the read signal.
    Type: Grant
    Filed: January 13, 2023
    Date of Patent: January 28, 2025
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Lu-Pu Liao, Yu-Sheng Lin, Liang-Ying Liu, Chin-Fu Kuo
  • Patent number: 12213308
    Abstract: A memory structure and a method of manufacturing the same are provided. The method includes forming a gate structure and a source/drain region in a substrate, in which the source/drain region is next to the gate structure. A dry etching process is performed to form a trench in the source/drain region. A wet etching process is performed to expand the trench to form an expanded trench, in which the expanded trench has a polygonal cross section profile. A bit line contact is formed in the expanded trench.
    Type: Grant
    Filed: February 19, 2024
    Date of Patent: January 28, 2025
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yu-Ying Lin
  • Patent number: 12213388
    Abstract: A memory cell includes a bottom electrode, a first dielectric layer, a top electrode, and a variable resistance layer. The first dielectric layer laterally surrounds the bottom electrode. The top electrode is disposed over the bottom electrode and the first dielectric layer. The variable resistance layer is sandwiched between the bottom electrode and the top electrode and between the first dielectric layer and the top electrode. The variable resistance layer exhibits a T-shape in a cross-sectional view.
    Type: Grant
    Filed: September 21, 2023
    Date of Patent: January 28, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Tung-Ying Lee, Da-Ching Chiou
  • Publication number: 20250031388
    Abstract: A capacitor includes a bottom capacitor plate including a rough upper surface with a root mean square (RMS) surface roughness of at least 1.14, a capacitor dielectric layer on the bottom capacitor plate and contacting the rough upper surface of the bottom capacitor plate, and an upper capacitor plate on the capacitor dielectric layer. A semiconductor device includes a transistor located on a substrate, a dielectric layer on the transistor, and a capacitor in the dielectric layer and including a bottom capacitor plate connected to a source region of the transistor and having a rough upper surface with a root mean square (RMS) surface roughness of at least 1.14.
    Type: Application
    Filed: July 19, 2023
    Publication date: January 23, 2025
    Inventors: I-Che Lee, Pin-Ju Chen, Wei-Gang Chiu, Yen-Chieh Huang, Kai-Wen Cheng, Huai-Ying Huang, Yu-Ming Lin
  • Publication number: 20250031381
    Abstract: A method of forming a semiconductor device is provided. A first ferroelectric inducing layer including Ru is deposited on a substrate. A ferroelectric layer including HfZrO is deposited on the first ferroelectric inducing layer. A second ferroelectric inducing layer including Ru is deposited on the ferroelectric layer, wherein the HfZrO of the ferroelectric layer is in physical contact with the Ru of the first ferroelectric inducing layer and the Ru of the second ferroelectric inducing layer. The second ferroelectric inducing layer, the ferroelectric layer and the first ferroelectric inducing layer are patterned.
    Type: Application
    Filed: July 21, 2023
    Publication date: January 23, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Jiun Lin, Chih-Sheng Chang, Yu-Chao Lin, Tung-Ying Lee
  • TIE
    Publication number: 20250013850
    Abstract: A tie includes an RFID device and a body encapsulating the RFID device by overmolding. The body includes a strap member, a head member, and a protection member connected between the strap member and the head member. The strap member has a plurality of engaging teeth. The RFID device is embedded in the protection member. The head member has a through hole. A hole wall of the through hole is provided with a one-way pawl. When winding the body around an object, the protection member can get a better protection since the protection member is located on an inner side between the head member and the strap member without protruding outward. Because the protection member and the head member are closer to a surface of the object, the extent to which the protection member protrudes outwards is reduced, thereby facilitating the RFID device to be sensed more easily.
    Type: Application
    Filed: October 10, 2023
    Publication date: January 9, 2025
    Applicants: YOKE INDUSTRIAL CORP., Asia Smart Tag Co., Ltd.
    Inventors: RONG-DER HONG, LIEN-FENG LIN, YU-YING LIN
  • Publication number: 20240196601
    Abstract: A memory structure and a method of manufacturing the same are provided. The method includes forming a gate structure and a source/drain region in a substrate, in which the source/drain region is next to the gate structure. A dry etching process is performed to form a trench in the source/drain region. A wet etching process is performed to expand the trench to form an expanded trench, in which the expanded trench has a polygonal cross section profile. A bit line contact is formed in the expanded trench.
    Type: Application
    Filed: February 19, 2024
    Publication date: June 13, 2024
    Inventor: Yu-Ying LIN
  • Patent number: 11943914
    Abstract: A method of manufacturing a memory structure is provided. The method includes forming a first gate structure, a second gate structure, and a plurality of source/drain regions in a substrate, in which the plurality of source/drain regions are disposed on opposite sides of the first gate structure and the second gate structures; performing a dry etching process to form a trench between the first gate structure and the second gate structure; performing a wet etching process to expand the trench, in which the expanded trench has a hexagonal shaped cross section profile; and forming a bit line contact in the expanded trench.
    Type: Grant
    Filed: March 20, 2023
    Date of Patent: March 26, 2024
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Yu-Ying Lin
  • Publication number: 20240057311
    Abstract: A semiconductor device includes a substrate, a bitline, a bitline contact and a land pad. The bitline is over the substrate. The bitline contact is in contact with a bottom of the bitline and in the substrate. The bitline contact includes a first portion and a second portion below the first portion, and the first portion is wider than the second portion from a cross-section view. A word line is adjacent to the bitline contact. A land pad is on the substrate, and the land pad is adjacent to the word line, such that the word line is between the bitline contact and the land pad.
    Type: Application
    Filed: October 24, 2023
    Publication date: February 15, 2024
    Inventor: Yu-Ying LIN
  • Publication number: 20240057322
    Abstract: A semiconductor structure includes a semiconductor substrate; a spacer located in a trench of the semiconductor substrate, wherein the spacer includes two trench nitride layers and an empty gap sandwiched between the two trench nitride layers; a first nitride layer disposed to seal an exposed opening of the empty gap between the two trench nitride layers; a second nitride layer over the first nitride layer, wherein the second nitride layer has a higher density than the first nitride layer; and a third nitride layer having a first portion over the second nitride layer and a second portion disposed on sidewalls of the two trench nitride layers.
    Type: Application
    Filed: October 23, 2023
    Publication date: February 15, 2024
    Inventors: Yu-Ying LIN, Chung-Lin HUANG