Abstract: A leak check is performed on a semiconductor wafer processing tool that includes a process chamber and process gas lines, and a semiconductor wafer is processed using the semiconductor wafer processing tool if the leak check passes. Each gas line includes a mass flow controller (MFC) and normally closed valves including an upstream and downstream valves upstream and downstream of the MFC. Leak checking includes: leak checking up to the downstream valves of the gas lines with the upstream valves closed and the downstream valves of the gas lines closed; and leak checking up to the upstream valve of each the process gas line with the upstream valves of the of the process gas lines closed and with the downstream valve of the of the process gas line being leak checked open and the downstream valve of every other process gas line closed.

Abstract: A neutron-capture therapy system includes a charged particle beam generation unit, a beam transmission unit and a neutron beam generation unit. The charged particle beam generation unit includes an ion source and an accelerator. The accelerator accelerates charged particles generated by the ion source, so as to obtain a charged particle beam of the required energy. The neutron beam generation unit includes a target, a beam shaping body and a collimator. The charged particle beam irradiates onto the target through the beam transmission unit to generate neutrons, which sequentially pass through the beam shaping body and the collimator to form a neutron beam for therapy. The neutron-capture therapy system is accommodated in a concrete building including an irradiation room, an accelerator chamber and a beam transmission chamber. The neutron beam generation unit is at least partially accommodated in a partition wall of the irradiation chamber and the beam transmission chamber.

Abstract: A neutron capture therapy system includes a neutron beam generating unit, an irradiation room configured to irradiate an irradiated body with a neutron beam, a preparation room configured to implement preparation work required to irradiate the irradiated body with the neutron beam, and an auxiliary positioner disposed in the irradiation room and/or the preparation room. The irradiation room includes a first shielding wall, a collimator is disposed on the first shielding wall for emitting the neutron beam, the neutron beam is emitted from the collimator and defines a neutron beam axis. The auxiliary positioner includes a laser emitter that emits a laser beam to position the irradiated body. Wherein the position of the laser emitter is selectable. Therefore, the irradiated body can be positioned in any case to implement precise irradiation.

Abstract: A neutron capture therapy device and a corresponding correction method for a neutron capture therapy device. The neutron capture therapy device comprises a neutron dose measurement apparatus (21) and a correction system (3) for correcting the neutron dose measurement apparatus (21), wherein the neutron dose measurement apparatus (21) comprises a detector (211) used to receive neutrons and output electrical signals, a signal processing unit (212) used to process the electrical signals output from the detector (211) and convert the electrical signals into pulse signals, and a counter (213) used to count the pulse signals output from the signal processing unit (212) to obtain a count rate.

Abstract: A neutron capture therapy apparatus includes a neutron beam irradiation system, a detection system and a monitoring system. The neutron beam irradiation system is configured for generating a neutron beam. The detection system is configured for detecting real-time irradiation parameters during a neutron beam irradiation therapy process. The monitoring system is configured for controlling the whole neutron beam irradiation process and includes an input part for inputting preset irradiation parameters, a determination part for determining whether the irradiation parameters need to be corrected and a correction part for correcting some of the irradiation parameters when the determination part determines that the irradiation parameters need to be corrected. When the ratio of the real-time neutron dose detected by the detection system to a preset neutron dose is greater than or equal to a preset value, the determination part of the monitoring system determines that the irradiation parameters need to be corrected.

Abstract: Disclosed are a neutron dose detection apparatus and a neutron capture therapy device. The neutron dose detection apparatus includes at least two counting rate channels and a counting rate channel selection unit used for selecting one of the at least one counting rate channels. The counting rate channel includes a detector used for detecting neutrons and outputting a signal, a signal processing unit used for processing the signal output by the detector, and a counter used for counting the signal output by the signal processing unit.

Abstract: Disclosed are a neutron capture therapy apparatus and an operation method of a monitoring system thereof. The neutron capture therapy apparatus includes a neutron beam irradiation system, a measurement system and a monitoring system. The neutron beam irradiation system is used for generating a neutron beam suitable for carrying out neutron irradiation therapy on a sick body, the measurement system is used for measuring real-time irradiation parameters during a neutron beam irradiation therapy process, and the monitoring system is used for controlling the whole neutron beam irradiation process. The monitoring system includes an input section for inputting preset irradiation parameters, a storage section for storing the irradiation parameters, a modification section for modifying some of the irradiation parameters in the storage section, and a display section for displaying the irradiation parameters in real time.

Abstract: Disclosed are a neutron dose measurement apparatus and a neutron capturing treatment device. The neutron dose measurement apparatus includes a measurement unit for receiving neutrons and outputting signals, a signal processing unit for processing the signals output from the measurement unit, a counter for counting the signals output from the signal processing unit to obtain a count rate, and a count rate correction unit for correcting the count rate.

Abstract: A neutron capture treatment device includes a neutron beam irradiation system, a detection system, and a correction system, the neutron beam irradiation system being used for producing neutron beams, the detection system being used for detecting irradiation parameters during the neutron beam irradiation treatment, and the correction system being used for correcting a preset neutron dosage; the accuracy of the neutron beam dosage irradiated to a sick body is thereby ensured at the source.

Abstract: Disclosed is a neutron capture therapy apparatus. The neutron capture therapy apparatus is used for irradiating a neutron beam with a preset neutron dose to an object to be irradiated. The neutron beam enters the object and undergoes a nuclear reaction with boron in the object. The neutron capture therapy apparatus includes a correction system for correcting the preset neutron dose.

Abstract: Disclosed are a neutron capture therapy device and an operation method of a monitoring system. The neutron capture therapy device includes a neutron beam irradiation system, a detection system and the monitoring system. The neutron beam irradiation system generates a neutron beam for performing neutron irradiation therapy on a sick body. The detection system is used for detecting irradiation parameters during a neutron beam irradiation therapy, and the monitoring system is used for controlling the whole neutron beam irradiation process. The monitoring system includes a storage part for storing the irradiation parameters, a control part for executing a therapy plan according to the irradiation parameters stored in the storage part, and a correction part for correcting part of the irradiation parameters stored in the storage part. The disclosure improves the accuracy of the dosage of the neutron beam for irradiating the sick body.

Abstract: A process for analyzing elements and mass ratios of elements of a tissue includes approximating the tissue having unknown elements and mass ratios of the unknown elements thereof using the data of the medical image corresponding to a tissue having known elements and mass ratios of the known elements thereof. A method for establishing a geometric model based on a medical image includes: reading data of the medical image; defining a type of a tissue according to a conversion relationship between the data of the medical image and tissue types or according to the process; determining a quantity of tissue clusters of the tissue; defining a tissue density of the tissue by a conversion relationship between the data of the medical image and density values; establishing a 3D coding matrix with information about the tissue and the density; and generating the geometric model.

Abstract: An animal irradiation system includes a radioactive source and an irradiation fixing apparatus having irradiated bodies. The radioactive source includes a beam outlet having a first central axis. Radioactive rays generated by the radioactive source exit from the beam outlet and irradiate the irradiated bodies. The radioactive rays define a main axis around the first central axis. The irradiation fixing apparatus includes a box body, which is divided into multiple accommodating chambers around a second central axis. Each accommodating chamber accommodates an irradiated body. Multiple first irradiation holes corresponding to the accommodating chambers are formed on the box body. The radioactive rays pass through the first irradiation holes and then irradiate the irradiated bodies. A maximum distance from an inner wall of each first irradiation hole to the first central axis is less than a minimum distance from an inner wall of the beam outlet to the first central axis.

Abstract: A neutron capture therapy system includes a neutron beam generating unit, an irradiation room configured to irradiate an irradiated body with a neutron beam, a preparation room configured to implement preparation work required to irradiate the irradiated body with the neutron beam, and an auxiliary positioner disposed in the irradiation room and/or the preparation room. The irradiation room includes a first shielding wall, a collimator is disposed on the first shielding wall for emitting the neutron beam, and the neutron beam is emitted from the collimator and defines a neutron beam axis. The auxiliary positioner includes a laser emitter that emits a laser beam to position the irradiated body, wherein the position of the laser emitter is selectable. Therefore, the irradiated body can be positioned in any case to implement precise irradiation.

Abstract: A beam shaping assembly (10) used in a neutron capture system and capable of changing an irradiation range of a neutron beam. The beam shaping assembly includes: a beam inlet (11), a target (12), a moderator (13) adjoining the target (12), a reflector (14) surrounding the moderator (13), a thermal neutron absorber (15) adjoining the moderator (13), a radiation shield (16) arranged inside the beam shaping assembly (10), and a beam outlet (17). The beam shaping assembly (10) further includes replacement components (21, 22) that can be attached to and detached from the beam shaping assembly (10) to change the irradiation range of the neutron beam.

Abstract: A method for measuring radiation intensity includes measuring the radiation intensity received by the protein in a radiation field based on degree of protein degradation in the radiation field, wherein the degree of degradation is a ratio of the molecular weight of the protein before and after irradiation. The measuring method is simple in operation, small in number of steps, small in error, and capable of measuring radiation doses of various radiation fields or even mixed radiation fields. Use of a biological dosimeter for measuring the radiation intensity by the method in a neutron capture therapy system can not only assess radiation contamination in the irradiation chamber, but also evaluate the neutron dose.

Abstract: Disclosed is a moderator for moderating neutrons, including a substrate and a surface treatment layer or a dry inert gas layer or a vacuum layer coated on the surface of the substrate, wherein the substrate is prepared from a moderating material by a powder sintering device through a powder sintering process from powders or by compacting powders into a block, and the moderating material includes 40% to 100% by weight of aluminum fluoride; wherein the surface treatment layer is a hydrophobic material; and the surface treatment layer or the dry inert gas layer or the vacuum layer is used for isolating the substrate from the water in the environment in which the substrate is placed. The surface treated moderator can avoid the hygroscopic or deliquescence of the moderating material during use, improve the quality of the neutron source and prolong the service life.

Abstract: An irradiation parameter selection apparatus (71) and a usage method thereof and a control system (7) comprising the irradiation parameter selection apparatus (71) and a usage method thereof, the irradiation parameters comprising irradiation points and irradiation angles, and the irradiation parameter selection apparatus (71) comprising: a sampling part (711) for selecting multiple sets of irradiation points and irradiation angles; a calculation part (712) for calculating an evaluation value corresponding to the multiple sets of irradiation points and irradiation angles; and a selection part (713) for selecting the best set of implementable irradiation points and irradiation angles from all of the sampled irradiation points and irradiation angles on the basis of the evaluation values calculated by the calculation part (712).

Abstract: A neutron capture therapy system and a target for a particle beam generating device, which may improve the heat dissipation performance of the target, reduce blistering and extend the service life of the target. The neutron capture therapy system includes a neutron generating device and a beam shaping assembly. The neutron generating device includes an accelerator and a target, and a charg\ed particle beam generated by acceleration of the accelerator interacts with the target to generate a neutron beam. The target includes an acting layer, a backing layer and a heat dissipating structure, the acting layer interacts with the charged particle beam to generate the neutron beam, the backing layer supports the action layer, and the heat dissipating structure includes a tubular member composed of tubes arranged side by side.

Abstract: A neutron capture therapy system, including a beam shaping assembly and a vacuum tube. The beam shaping assembly includes a beam entrance, an accommodating cavity accommodating the vacuum tube, a moderator adjacent to an end of the accommodating cavity, a reflector surrounding the moderator, a radiation shield disposed in the beam shaping assembly, and a beam exit. A target is disposed at an end of the vacuum tube, nuclear reactions occur between the target and a charged particle beam entering through the beam entrance to generate neutrons. The moderator moderates the neutrons, the reflector guides deflected neutrons back to the moderator. The moderator at least includes two cylindrical moderating members with different outer diameters respectively, the moderator has a first end close to the beam entrance and a second end close to the beam exit, and the target is accommodated between the first end and the second end.