Patents by Inventor Yueh-Ching Pai
Yueh-Ching Pai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12191199Abstract: The present disclosure describes a method to a metallization process with improved gap fill properties. The method includes forming a contact opening in an oxide, forming a barrier layer in the contact opening, forming a liner layer on the barrier layer, and forming a first metal layer on the liner layer to partially fill the contact opening. The method further includes forming a second metal layer on the first metal layer to fill the contact opening, where forming the second metal layer includes sputter depositing the second metal layer with a first radio frequency (RF) power and a direct current power, as well as reflowing the second metal layer with a second RF power.Type: GrantFiled: March 29, 2021Date of Patent: January 7, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tien-Pei Chou, Ken-Yu Chang, Sheng-Hsuan Lin, Yueh-Ching Pai, Yu-Ting Lin
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Patent number: 12170325Abstract: In method of manufacturing a semiconductor device, a source/drain epitaxial layer is formed, one or more dielectric layers are formed over the source/drain epitaxial layer, an opening is formed in the one or more dielectric layers to expose the source/drain epitaxial layer, a first silicide layer is formed on the exposed source/drain epitaxial layer, a second silicide layer different from the first silicide layer is formed on the first silicide layer, and a source/drain contact is formed over the second silicide layer.Type: GrantFiled: August 8, 2023Date of Patent: December 17, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Cheng-Wei Chang, Shahaji B. More, Yi-Ying Liu, Yueh-Ching Pai
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Patent number: 12170202Abstract: The present disclosure relates to a semiconductor device and a manufacturing method of fabricating a semiconductor structure. The method includes forming an opening in a substrate and depositing a conformal metal layer in the opening. The depositing includes performing one or more deposition cycles. The deposition includes flowing a first precursor into a deposition chamber and purging the deposition chamber to remove at least a portion of the first precursor. The method also includes flowing a second precursor into the deposition chamber to form a sublayer of the conformal metal layer and purging the deposition chamber to remove at least a portion of the second precursor. The method further includes performing a metallic halide etching (MHE) process that includes flowing a third precursor into the deposition chamber.Type: GrantFiled: January 2, 2023Date of Patent: December 17, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Po-Yu Lin, Chi-Yu Chou, Hsien-Ming Lee, Huai-Tei Yang, Chun-Chieh Wang, Yueh-Ching Pai, Chi-Jen Yang, Tsung-Ta Tang, Yi-Ting Wang
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Patent number: 12166126Abstract: Provided are a gate structure and a method of forming the same. The gate structure includes a gate dielectric layer, a metal layer, and a cluster layer. The metal layer is disposed over the gate dielectric layer. The cluster layer is sandwiched between the metal layer and the gate dielectric layer, wherein the cluster layer at least includes an amorphous silicon layer, an amorphous carbon layer, or an amorphous germanium layer. In addition, a semiconductor device including the gate structure is provided.Type: GrantFiled: June 23, 2022Date of Patent: December 10, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chun-Chieh Wang, Sheng-Wei Yeh, Yueh-Ching Pai, Chi-Jen Yang
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Publication number: 20240395611Abstract: The present disclosure describes a method to a metallization process with improved gap fill properties. The method includes forming a contact opening in a dielectric layer to expose a source/drain epitaxial layer in a substrate. An aspect ratio of the contact opening is between about 3 and about 10. The method further includes forming a first metal layer in the contact opening and in contact with the source/drain epitaxial layer, forming a barrier layer on the first metal layer, forming a liner layer on the barrier layer, forming second metal layer on the liner layer to partially fill the contact opening, and forming a third metal layer on the second metal layer to fill the contact opening.Type: ApplicationFiled: July 30, 2024Publication date: November 28, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tien-Pei CHOU, Ken-Yu CHANG, Sheng-Hsuan LIN, Yueh-Ching PAI, Yu-Ting LIN
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Publication number: 20240387747Abstract: An embodiment includes a device having a first set of nanostructures on a substrate, the first set of nanostructures including a first channel region, a second set of nanostructures on the substrate, the second set of nanostructures including a second channel region, a gate dielectric layer wrapping around each of the first and second sets of nanostructures, a first work function tuning layer on the gate dielectric layer of the first set of nanostructures, the first work function tuning layer wrapping around each of the first set of nanostructures, a glue layer on the first work function tuning layer, the glue layer wrapping around each of the first set of nanostructures, a second work function tuning layer on the glue layer of the first set of nanostructures and on the gate dielectric layer of the second set of nanostructures, and a fill layer on the second work function tuning layer.Type: ApplicationFiled: July 30, 2024Publication date: November 21, 2024Inventors: Chunchieh Wang, Yueh-Ching Pai
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Publication number: 20240363409Abstract: A method includes forming an ILD to cover a gate stack of a transistor. The ILD and the gate stack are parts of a wafer. The ILD is etched to form a contact opening, and a source/drain region of the transistor or a gate electrode in the gate stack is exposed through the contact opening. A conductive capping layer is formed to extend into the contact opening. A metal-containing material is plated on the conductive capping layer in a plating solution using electrochemical plating. The metal-containing material has a portion filling the contact opening. The plating solution has a sulfur content lower than about 100 ppm. A planarization is performed on the wafer to remove excess portions of the metal-containing material. A remaining portion of the metal-containing material and a remaining portion of the conductive capping layer in combination form a contact plug.Type: ApplicationFiled: July 12, 2024Publication date: October 31, 2024Inventors: Yu-Sheng Wang, Chi-Cheng Hung, Chen-Yuan Kao, Yi-Wei Chiu, Liang-Yueh Ou Yang, Yueh-Ching Pai
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Publication number: 20240363350Abstract: The present disclosure relates to a semiconductor device and a manufacturing method of fabricating a semiconductor structure. The method includes forming an opening in a substrate and depositing a conformal metal layer in the opening. The depositing includes performing one or more deposition cycles. The deposition includes flowing a first precursor into a deposition chamber and purging the deposition chamber to remove at least a portion of the first precursor. The method also includes flowing a second precursor into the deposition chamber to form a sublayer of the conformal metal layer and purging the deposition chamber to remove at least a portion of the second precursor. The method further includes performing a metallic halide etching (MHE) process that includes flowing a third precursor into the deposition chamber.Type: ApplicationFiled: July 8, 2024Publication date: October 31, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Po-Yu LIN, Chi-Yu CHOU, Hsien-Ming LEE, Huai-Tei YANG, Chun-Chieh WANG, Yueh-Ching PAI, Chi-Jen YANG, Tsung-Ta TANG, Yi-Ting WANG
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Patent number: 12068197Abstract: A method includes forming an ILD to cover a gate stack of a transistor. The ILD and the gate stack are parts of a wafer. The ILD is etched to form a contact opening, and a source/drain region of the transistor or a gate electrode in the gate stack is exposed through the contact opening. A conductive capping layer is formed to extend into the contact opening. A metal-containing material is plated on the conductive capping layer in a plating solution using electrochemical plating. The metal-containing material has a portion filling the contact opening. The plating solution has a sulfur content lower than about 100 ppm. A planarization is performed on the wafer to remove excess portions of the metal-containing material. A remaining portion of the metal-containing material and a remaining portion of the conductive capping layer in combination form a contact plug.Type: GrantFiled: April 19, 2021Date of Patent: August 20, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yu-Sheng Wang, Chi-Cheng Hung, Chen-Yuan Kao, Yi-Wei Chiu, Liang-Yueh Ou Yang, Yueh-Ching Pai
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Publication number: 20240266439Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a gate structure formed over a fin structure, and a gate spacer layer formed on a sidewall surface of the gate structure. The semiconductor structure includes a source/drain (S/D) epitaxial layer formed adjacent to the gate structure, and a dielectric spacer layer formed on the S/D epitaxial layer. The semiconductor structure includes a contact plug barrier formed over the S/D epitaxial layer, and a contact plug surrounding by the contact plug barrier, wherein the contact plug is separated from the gate spacer layer by the dielectric spacer layer and the contact plug barrier.Type: ApplicationFiled: April 17, 2024Publication date: August 8, 2024Inventors: Chun-Chieh WANG, Yu-Ting LIN, Yueh-Ching PAI, Shih-Chieh CHANG, Huai-Tei YANG
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Patent number: 11990550Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a gate structure formed over a fin structure, and a source/drain (S/D) epitaxial layer formed in the fin structure and adjacent to the gate structure. The semiconductor structure also includes a S/D silicide layer formed on the S/D epitaxial layer, and the S/D silicide layer has a first width, the S/D epitaxial layer has a second width, and the first width is smaller than the second width. The semiconductor structure includes a dielectric spacer between the gate structure and the S/D silicide layer, and a top surface of the dielectric spacer is lower than a top surface of the gate structure.Type: GrantFiled: December 9, 2022Date of Patent: May 21, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chun-Chieh Wang, Yu-Ting Lin, Yueh-Ching Pai, Shih-Chieh Chang, Huai-Tei Yang
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Patent number: 11973124Abstract: In method of manufacturing a semiconductor device, a source/drain epitaxial layer is formed, one or more dielectric layers are formed over the source/drain epitaxial layer, an opening is formed in the one or more dielectric layers to expose the source/drain epitaxial layer, a first silicide layer is formed on the exposed source/drain epitaxial layer, a second silicide layer different from the first silicide layer is formed on the first silicide layer, and a source/drain contact is formed over the second silicide layer.Type: GrantFiled: January 18, 2022Date of Patent: April 30, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Cheng-Wei Chang, Shahaji B. More, Yi-Ying Liu, Yueh-Ching Pai
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Publication number: 20240105787Abstract: Embodiments of the present disclosure provide a method of forming a contact opening using selective ALE operations to remove ILD layer along an upper profile of a source/drain region, and then form a source/drain contact feature having a concave bottom profile with increased contact area.Type: ApplicationFiled: February 1, 2023Publication date: March 28, 2024Inventors: Cheng-Wei CHANG, Shahaji B. MORE, Chi-Yu CHOU, Yueh-Ching PAI
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Publication number: 20240055476Abstract: A method of fabricating a semiconductor device includes providing a dummy structure that includes channel layers, inner spacers disposed between adjacent ones of the channel layers, and a gate structure extending lengthwise in a first direction. A first trench extending lengthwise perpendicular to the first direction is formed, which divides the gate structure into segments. A first isolation feature is deposited in the first trench. The method also includes etching the gate structure and the channel layers to form a second trench extending lengthwise in the first direction. The second trench exposes the inner spacers. A second isolation feature is deposited in the second trench. The second isolation feature intersects the first isolation feature in a top view of the semiconductor device.Type: ApplicationFiled: April 10, 2023Publication date: February 15, 2024Inventors: Cheng-Wei Chang, Shahaji B. More, Lun-Kuang Tan, Chi-Yu Chou, Yueh-Ching Pai
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Publication number: 20240030136Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate having a first side and a second side opposing the first side, a source/drain epitaxial feature disposed adjacent the first side of the substrate, wherein the source/drain epitaxial feature comprises a first epitaxial layer, a second epitaxial layer in contact with the first epitaxial layer, and a third epitaxial layer having sidewalls surrounded by and in contact with the second epitaxial layer. The device structure also includes a first silicide layer in contact with the substrate, the first, second, and third epitaxial layers, a first source/drain contact extending through the substrate from the first side to the second side, and a first metal capping layer disposed between the first silicide layer and the first source/drain contact.Type: ApplicationFiled: July 21, 2022Publication date: January 25, 2024Inventors: Cheng-Wei CHANG, Shahaji B. MORE, Yi-Ying LIU, Yueh-Ching PAI
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Publication number: 20240030318Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a first plurality of vertically aligned semiconductor layers disposed over a substrate and a first gate electrode layer surrounding each of the first plurality of vertically aligned semiconductor layers. The first gate electrode layer includes first one or more work function metal layers disposed between adjacent semiconductor layers of the first plurality of vertically aligned semiconductor layers and two first conductive layers disposed on opposite sides of the first one or more work function metal layers. The first conductive layers include a material different from the first one or more work function metal layers. The first gate electrode layer further includes a second conductive layer disposed on the first conductive layers, and the second conductive layer and the first conductive layers include a same material.Type: ApplicationFiled: July 21, 2022Publication date: January 25, 2024Inventors: Cheng-Wei CHANG, Shahaji B. MORE, Chi-Yu CHOU, Yueh-Ching PAI
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Publication number: 20240021687Abstract: A source/drain component is disposed over an active region and surrounded by a dielectric material. A source/drain contact is disposed over the source/drain component. The source/drain contact includes a conductive capping layer and a conductive material having a different material composition than the conductive capping layer. The conductive material has a recessed bottom surface that is in direct contact with the conductive capping layer. A source/drain via is disposed over the source/drain contact. The source/drain via and the conductive material have different material compositions. The conductive capping layer contains tungsten, the conductive material contains molybdenum, and the source/drain via contains tungsten.Type: ApplicationFiled: March 28, 2023Publication date: January 18, 2024Inventors: Cheng-Wei Chang, Chien Chang, Kan-Ju Lin, Harry Chien, Shuen-Shin Liang, Chia-Hung Chu, Sung-Li Wang, Shahaji B. More, Yueh-Ching Pai
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Publication number: 20230411453Abstract: Some implementations described herein provide a semiconductor device having an oxide-filled barrier structure between structures of gate-all-around transistors included in the semiconductor device. The use of the oxide-filled barrier structure may reduce a distance separating nanosheet structures of a p-type metal-oxide semiconductor fin structure and an n-type metal-oxide semiconductor fin structure, broaden an availability of work-function metals for gate structures formed around nanochannels of the p-type metal-oxide semiconductor fin structure and n-type metal-oxide semiconductor structure, and improve a performance of the gate-all-around transistors by reducing miller capacitances of the gate-all-around transistors. Furthermore, the oxide-filled barrier structure may enable the combining of the p-type metal-oxide semiconductor fin structure and the n-type metal-oxide semiconductor fin structure to form a type of integrated circuitry, such as an inverter.Type: ApplicationFiled: May 27, 2022Publication date: December 21, 2023Inventors: Cheng-Wei CHANG, Shahaji B. MORE, Chi-Yu CHOU, Yueh-Ching PAI
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Publication number: 20230402508Abstract: A semiconductor device and a method of fabricating the semiconductor device are disclosed. The semiconductor device includes a substrate, a fin base disposed on the substrate, a stack of nanostructured channel regions disposed on a first portion of the fin base, a gate structure surrounding the nanostructured channel regions, a source/drain (S/D) region disposed on a second portion of the fin base, an air spacer disposed between the S/D region and the fin base, and a dielectric layer disposed between the air spacer and the fin base.Type: ApplicationFiled: March 29, 2023Publication date: December 14, 2023Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Cheng-Wei CHANG, Shahaji B. MORE, Lun-Kuang TAN, Chi-Yu CHOU, Yueh-Ching PAI
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Publication number: 20230387328Abstract: An embodiment includes a device having a first set of nanostructures on a substrate, the first set of nanostructures including a first channel region, a second set of nanostructures on the substrate, the second set of nanostructures including a second channel region, a gate dielectric layer wrapping around each of the first and second sets of nanostructures, a first work function tuning layer on the gate dielectric layer of the first set of nanostructures, the first work function tuning layer wrapping around each of the first set of nanostructures, a glue layer on the first work function tuning layer, the glue layer wrapping around each of the first set of nanostructures, a second work function tuning layer on the glue layer of the first set of nanostructures and on the gate dielectric layer of the second set of nanostructures, and a fill layer on the second work function tuning layer.Type: ApplicationFiled: August 9, 2023Publication date: November 30, 2023Inventors: Chunchieh Wang, Yueh-Ching Pai