Abstract: A semiconductor device includes: a drift region that is arranged on a main surface of a substrate, and has a higher impurity concentration than the substrate; a first well region that is connected to the drift region; and a second well region that is arranged adjacent to the first well region and faces the drift region. The second well region has a higher impurity concentration than the first well region. A distance between the source region that faces the drift region via the first well region and the drift region is greater than a distance between the second well region and the drift region, in a direction parallel to the main surface of the substrate. A depletion layer extending from the second well region reaches the drift region.

Abstract: A semiconductor device includes: a substrate; a source region formed on a main surface of the substrate; a well region electrically connected to the source region; a drift region in contact with the well region; a drain region in contact with the drift region; a first electrode electrically connected to the source region; a second electrode electrically connected to the drain region; a third electrode formed in contact with the source region, the well region, and the drift region through an insulating film; and a parasitic capacitance reduction region formed in contact with the source region and in contact with the third electrode through the insulating film and having a higher resistance value than that of the source region.

Abstract: A semiconductor device includes: a substrate; a source region formed on a main surface of the substrate; a well region electrically connected to the source region; a drift region in contact with the well region; a drain region in contact with the drift region; a first electrode electrically connected to the source region; a second electrode electrically connected to the drain region; a third electrode formed in contact with the source region, the well region, and the drift region through an insulating film; and a parasitic capacitance reduction region formed in contact with the source region and in contact with the third electrode through the insulating film and having a higher resistance value than that of the source region.

Abstract: A storage device stores an ejection cartridge including an accommodating container that accommodates an ejection material, and an ejection head that includes an ejection port for ejecting the ejection material accommodated in the accommodating container. The storage device includes a mount on which the ejection cartridge is mounted, and includes a pressure regulating tank configured to control a pressure of an inside of the accommodating container of the ejection cartridge fixed to the mount with its ejection port not enclosed.

Abstract: A liquid discharge apparatus has a storage portion configured to store a discharged material, a discharge port configured to communicate with the storage portion and discharge the discharged material stored in the storage portion, and a pressure control device configured to control a pressure of the discharged material stored in the storage portion. The pressure control device controls the pressure of the discharged material to shift from a first negative pressure state, to a second negative pressure state of a greater negative pressure than the first negative pressure state, and then to a third positive pressure state.

Abstract: An ejection-material ejection apparatus and an imprinting apparatus are provided which are capable of quickly detecting damage of a flexible membrane and avoiding contact between an ejection material and an operating liquid even if part of the flexible membrane is damaged. The flexible membrane includes a first film (1) covering a first storing space (5) for the ejection material, a second film (2) covering a second storing space (6) for the operating liquid, and an inter-film space 4 situated between the first film (1) and the second film (2). A change in state of the inter-film space (4) resulting from communication between at least one of the first storing space (5) and the second storing space (6) and the inter-film space (4) is detected with a liquid sensor (41), a flow speed sensor (77), and a liquid leakage sensor (42).

Abstract: An ejection material filling device fills an ejection material into a first storage space of an ejection material ejecting device including an ejection head configured to eject the ejection material and a storage container having an internal space separated by flexible membrane into the first storage space storing the ejection material and a second storage space storing a hydraulic fluid. The ejection material filling device includes an ejection material server bottle storing the ejection material to be filled into the first storage space, pipes configured to form a circulation path including the ejection material server bottle and the first storage space, a pump configured to circulate the ejection material through the circulation path, and a particle filter provided in the circulation path.

Abstract: An ejection-material ejection apparatus and an imprinting apparatus are provided which are capable of quickly detecting damage of a flexible membrane and avoiding contact between an ejection material and an operating liquid even if part of the flexible membrane is damaged. The flexible membrane includes a first film (1) covering a first storing space (5) for the ejection material, a second film (2) covering a second storing space (6) for the operating liquid, and an inter-film space 4 situated between the first film (1) and the second film (2). A change in state of the inter-film space (4) resulting from communication between at least one of the first storing space (5) and the second storing space (6) and the inter-film space (4) is detected with a liquid sensor (41), a flow speed sensor (77), and a liquid leakage sensor (42).

Abstract: The present disclosure includes a drive circuit (2-4) for switching a switching element, and a variable capacity circuit (6A), connected between a control terminal (G) of the switching element and the drive circuit (2-4), capable of switching at least between a first capacity value and a second capacity value different from the first capacity value, and controls a capacity value between the control terminal and the drive circuit via the variable capacity circuit.

Abstract: There are included: a metal member having a groove formed on a front side surface thereof; a thermally conductive member provided in an inside of the groove and having a thermal conductivity in an X-axial direction on the front side surface higher than a thermal conductivity in a Y-axial direction orthogonal to the X-axial direction on the front side surface; and a semiconductor element provided on the front side surface of the metal member, and at least a part of which is in contact with the thermally conductive member.

Abstract: The internal space of a storing container is separated by a flexible membrane into a first storing space storing an ejection material and a second storing space storing an operating liquid. A change in electrical property of the flexible membrane resulting from entry of at least one of the ejection material and the operating liquid to the inside of the flexible membrane is detected.

Abstract: The present disclosure includes a drive circuit (2-4) for switching a switching element, and a variable capacity circuit (6A), connected between a control terminal (G) of the switching element and the drive circuit (2-4), capable of switching at least between a first capacity value and a second capacity value different from the first capacity value, and controls a capacity value between the control terminal and the drive circuit via the variable capacity circuit.

Abstract: An ejection material filling device fills an ejection material into a first storage space of an ejection material ejecting device including an ejection head configured to eject the ejection material and a storage container having an internal space separated by flexible membrane into the first storage space storing the ejection material and a second storage space storing a hydraulic fluid. The ejection material filling device includes an ejection material server bottle storing the ejection material to be filled into the first storage space, pipes configured to form a circulation path including the ejection material server bottle and the first storage space, a pump configured to circulate the ejection material through the circulation path, and a particle filter provided in the circulation path.

Abstract: A storage device stores an ejection cartridge including an accommodating container that accommodates an ejection material, and an ejection head that includes an ejection port for ejecting the ejection material accommodated in the accommodating container. The storage device includes a mount on which the ejection cartridge is mounted, and includes a pressure regulating tank configured to control a pressure of an inside of the accommodating container of the ejection cartridge fixed to the mount with its ejection port not enclosed.

Abstract: A drive device wherein a main switching element is connected to a main current path, an input terminal of the switching element on the higher potential side and an output terminal of the switching element on the lower potential side are electrically connected to a control terminal of the main switching element, a first resistance is connected between an input terminal of the switching element on the lower potential side and a control terminal of the main switching element, a first capacitor is parallelly connected to the first resistance, and a second capacitor is connected between a connection point of the first resistance and a control terminal of the main switching element and a terminal on the higher potential side of the main switching element.

Abstract: The internal space of a storing container is separated by a flexible membrane into a first storing space storing an ejection material and a second storing space storing an operating liquid. A change in electrical property of the flexible membrane resulting from entry of at least one of the ejection material and the operating liquid to the inside of the flexible membrane is detected.

Abstract: A drive device wherein a main switching element is connected to a main current path, an input terminal of the switching element on the higher potential side and an output terminal of the switching element on the lower potential side are electrically connected to a control terminal of the main switching element, a first resistance is connected between an input terminal of the switching element on the lower potential side and a control terminal of the main switching element, a first capacitor is parallelly connected to the first resistance, and a second capacitor is connected between a connection point of the first resistance and a control terminal of the main switching element and a terminal on the higher potential side of the main switching element.

Abstract: Disclosed is a method of generating a recipe for supplying an imprint material onto a substrate, the imprint material being used in imprint processing of forming a pattern on the substrate with the imprint material and a mold. The method includes obtaining first information about a volume of a pattern of the mold, and obtaining second information about a concentration of a condensable gas to be supplied to a space between the mold and the imprint material on the substrate. The condensable gas has a property of being liquefied by contact between the mold and the imprint material. The method further includes generating the recipe based on the first information and the second information.

Abstract: The present invention provides a lithography apparatus including a plurality of detectors each configured to detect a mark on the substrate, and a controller configured to control a patterning so that a first operation and a second operation are alternately performed, the first operation irradiating the substrate with a beam while scan movement of the substrate is performed in a first direction, the second operation performing step movement of the substrate in a second direction different from the first direction, wherein the controller is configured to cause, in the first operation, at least one of the plurality of detectors to detect the mark, and the plurality of detectors are arranged, in the second direction, at an interval which is a positive integer multiple of a distance of the step movement.

Abstract: The present invention provides a lithography apparatus including a plurality of detectors each configured to detect a mark on the substrate, and a controller configured to control a patterning so that a first operation and a second operation are alternately performed, the first operation irradiating the substrate with a beam while scan movement of the substrate is performed in a first direction, the second operation performing step movement of the substrate in a second direction different from the first direction, wherein the controller is configured to cause, in the first operation, at least one of the plurality of detectors to detect the mark, and the plurality of detectors are arranged, in the second direction, at an interval which is a positive integer multiple of a distance of the step movement.