Abstract: A scanning exposure apparatus includes a surface position adjuster for adjusting the surface position of an object with respect to an image plane of a projection optical system, on the basis of a detection by the surface position detector in the projection, a controller for controlling a moving system and the surface position detector to perform a pre-scan measurement of the surface position of the object, prior to the projection, so as to detect an error, related to the detection through the surface position detector, with respect to each of detection points, which error is attributable to a difference in pattern structure at the detection points in the region, the detected error being used for correcting the adjustment by the surface position adjuster in the projection, and an initializing device for initializing the surface position detector in synchronism with the scan motion and the projection, at the position where the surface position detector has started the detection in the pre-scan measurement.

Abstract: An object of this invention is to improve transmission characteristics in WDM transmission. An optical transmitter (10) wavelength-multiplexes signal lights of wavelengths &lgr;1 through &lgr;n and outputs them onto an optical transmission line (12). Optical powers of the signal lights of the respective wavelength &lgr;1 through &lgr;n are identical or become smaller proportional to the wavelength. One repeater span of the optical transmission line (12) is composed of an optical fibers (20, 22) and an optical amplifier (24), and a gain equalizer (26) is dispersed every several repeater spans. The optical amplifier (24) in the repeater span amplifies each signal light so that optical power of a signal on the shorter wavelength side becomes smaller than that of a signal on the longer wavelength side. The gain equalizer (26) equalizes optical powers of the respective signal lights.

Abstract: The magnetic head of the present invention is capable of improving heat radiativity and preventing overheat of the magnetic head. The magnetic head comprises: a slider having a disk-side face; an element for reproducing data; a shielding layer; a coil for writing data; magnetic poles; a heat radiating layer for radiating heat generated in the magnetic head; and an insulating layer for electrically insulating the heat radiating layer. The heat radiating layer is provided near the element or the coil without touching the element, the shielding layer, the coil and the magnetic poles. The heat radiating layer is made of a material whose heat conductivity is higher than that of the insulating layer. An end of the heat radiating layer is exposed in the disk-side face of the slider.

Abstract: An optical signal generator comprises a light source to generate an optical carrier, a data modulator to modulate the optical carrier output from the light source with a transmission data, an optical phase modulator to modulate an optical phase of an output light from the data modulator in synchronization with the output light from the data modulator so as to emphasize one of sidebands, and an optical filter to remove harmonic components located outside the emphasized sideband out of an output light from the optical phase modulator.

Abstract: To extend a distance of polarization-multiplexing, an optical transmitter in an optical transmission system has a first signal light output unit (24A, 124A) to output a first signal light (S1) of linear polarization to carry a first data (D1) using VSB modulation having one of sideband on a short wavelength side and sideband on a long wavelength side, a second signal light output unit (24B, 124B) to output a second signal light (S2) of linear polarization to carry a second data (D2) using VSB modulation having the other of sideband on a long wavelength side and sideband on a long wavelength side, and an optical coupler (26, 126) to couple the first signal light (S1) and the second signal light (S2) under different polarizations and output the coupled signal lights onto the optical transmission line (12, 112).

Abstract: A surface position detecting method wherein an object having a region with a pattern structure is relatively scanned relative to surface position detecting means and wherein surface position at plural detection points in the region is detected by use of the surface position detecting means, the method includes detecting an error in the detection by the surface position detecting means, with respect to each of the detection points, which error may result from a difference in pattern structure among the detection points, detecting, in synchronism with relative position of the object and the surface position detecting means, the surface position at each of the detection points by use of the surface position detecting means, and correcting the detected surface position on the basis of the error.

Abstract: A surface position detecting method wherein an object having a region with a pattern structure formed thereon is relatively scanned relative to a surface position detecting device and surface positions of the object at plural detection points in the region are detected by use of the surface position detecting device.

Abstract: A surface position detecting system for detecting a surface position of a substrate. The system includes a plurality of sensors for measuring surface position at plural locations on the substrate, while relatively scanning the substrate, a discriminating device for discriminating and memorizing, beforehand, effectiveness/ineffectiveness of each sensor at each measurement point during scanning measurement, on the basis of information related to the substrate processing, and a calculating device for selecting, during scan measurement, one or those of the sensors of effective measured value on the basis of the discrimination information and for calculating the surface information of the substrate on the basis of a measurement output of the one or those sensors.

Abstract: A surface position detecting system having a surface position detecting device including a light projecting device for projecting light obliquely onto a detection point and a light receiving device for receiving reflection light from the detection point. While an object having a region with a pattern structure is relatively scanned relative to the surface position detecting device, a surface position at plural points within the range is detected. The surface position detecting system includes an optimum value detecting device for projecting, before the surface position detection, light from the light projecting device to each of the plural detection points and for receiving, with the light receiving device, reflection light from the point. The optimum value detecting device detects and memorizes an optimum value of a gain of the light receiving device or a drive current for the light projecting device with respect to each detection point, on the basis of a light reception signal of the light receiving device.

Abstract: The magnetic head of the present invention is capable of improving heat radiativity and preventing overheat of the magnetic head. The magnetic head comprises: a slider having a disk-side face; an element for reproducing data; a shielding layer; a coil for writing data; magnetic poles; a heat radiating layer for radiating heat generated in the magnetic head; and an insulating layer for electrically insulating the heat radiating layer. The heat radiating layer is provided near the element or the coil without touching the element, the shielding layer, the coil and the magnetic poles. The heat radiating layer is made of a material whose heat conductivity is higher than that of the insulating layer. An end of the heat radiating layer is exposed in the disk-side face of the slider.

Abstract: A feature of this invention is to realize a VSB modulation with a simple configuration.

Abstract: A position detection device for detecting position information of a photosensitive substrate when performing projection exposure of a pattern on a surface of an object onto the photosensitive substrate, via a projection optical system, by scanning the pattern includes a device for detecting the position information within a shot region of the photosensitive substrate in the projection optical system, and a device for causing the detection device to detect the position information at a plurality of points arranged so that a first end of the plurality of points coincides with a position to start a scanning exposure and a second end of the plurality of points coincides with a position to end the scanning exposure, in accordance with a size of the shot region.

Abstract: A surface position detecting method wherein an object having a region with a pattern structure is relatively scanned relative to surface position detecting means and wherein surface position at plural detection points in the region is detected by use of the surface position detecting means, the method includes detecting an error in the detecting by the surface position detecting means, with respect to each of the detecting points, which error may result from a difference in pattern structure among the detection points, detecting, in synchronism with relative position of the object and the surface position detecting means, the surface position at each of the detection points by use of the surface position detecting means, and correcting the detected surface position on the basis of the error.

Abstract: An object of this invention is to improve transmission characteristics in WDM transmission. An optical transmitter (10) wavelength-multiplexes signal lights of wavelengths &lgr;1 through &lgr;n and outputs them onto an optical transmission line (12). Optical powers of the signal lights of the respective wavelength &lgr;1 through &lgr;n are identical or become smaller proportional to the wavelength. One repeater span of the optical transmission line (12) is composed of an optical fibers (20, 22) and an optical amplifier (24), and a gain equalizer (26) is dispersed every several repeater spans. The optical amplifier (24) in the repeater span amplifies each signal light so that optical power of a signal on the shorter wavelength side becomes smaller than that of a signal on the longer wavelength side. The gain equalizer (26) equalizes optical powers of the respective signal lights.

Abstract: A surface position detecting method wherein an object having a region with a pattern structure is relatively scanned relative to surface position detecting means and wherein surface position at plural detection points in the region is detected by use of the surface position detecting means, the method includes detecting an error in the detection by the surface position detecting means, with respect to each of the detection points, which error may result from a difference in pattern structure among the detection points, detecting, in synchronism with relative position of the object and the surface position detecting means, the surface position at each of the detection points by use of the surface position detecting means, and correcting the detected surface position on the basis of the error.

Abstract: A surface position detecting method wherein an object having a region with a pattern structure is relatively scanned relative to surface position detecting means and wherein surface position at plural detection points in the region is detected by use of the surface position detecting means, the method includes detecting an error in the detection by the surface position detecting means, with respect to each of the detection points, which error may result from a difference in pattern structure among the detection points, detecting, in synchronism with relative position of the object and the surface position detecting means, the surface position at each of the detection points by use of the surface position detecting means, and correcting the detected surface position on the basis of the error.

Abstract: An exposure method for exposing a surface to be exposed via a projection optical system after a substrate moves stepwise in a direction perpendicular to an optical axis of the projection optical system to feed to a predetermined exposure position a plurality of shots on the substrate, in turn, in which at least one of a position and tilt of the surface to be exposed of a fed shot to be exposed in the direction of the optical axis is measured during the stepwise movement, and the surface to be exposed is brought to a position of a focal plane of the projection optical system on the basis of a measurement value.

Abstract: The position or the inclination of a substrate surface is detected at a high accuracy and a high speed, and corrected. When moving the substrate in a direction substantially at right angles to an optical axis of a projection optical system and feeding an area on the substrate into an image space of the projection optical system, at least one of the position and inclination in the optical axis direction of the substrate is detected, to bring that area into focus with the focal plane of the projection optical system. One of a first mode of conducting the measurement during travel of the substrate and a second mode of performing the measurement in a state in which that area has substantially been positioned in the image space is selected.

Abstract: Selected switching devices (e.g., Tra and Trd) of an inverter are turned on to supply a current between selected phases. If the respective inclinations of current waveforms then detected by current detection circuits IR and IS are equal to a reference inclination, it can be concluded that the current detection circuit in a circuit through which the current then flows, switching devices, and motor windings are normal. If the inclinations of the detected current waveforms are "0" or smaller than the reference, it can be concluded that the current detection circuits, switching devices, or motor windings are abnormal. In such a case, an abnormal spot is identified by checking the inclinations of the waveforms of the current detection circuits in like manner after changing the switching device to be turned on. If the inclinations of the detected current waveforms are very much greater than the reference, cables or motor windings can be concluded to be shorted.

Abstract: A positioning method of detecting a position of an object, fixed on a driving device, in a direction of height as a driving direction, by a surface position detector, while scanning the object in a direction perpendicular to the driving direction of the driving device and positioning and correction driving the object by the driving device to sequentially set the object at a predetermined position and a predetermined height. The method includes a step of monitoring a driving condition of the driving device in synchronism with a periodical detection performed by the surface position detector and a step of correcting a drive amount of the driving device on the basis of the periodical detection performed by the surface position detector and a result of the monitoring performed in the monitoring step.