Abstract: The optical unit includes a base member, a shift member configured to hold an image stabilizing lens and to be movable with respect to the base member in a plane orthogonal to an optical axis to reduce image blur, and an image stabilizing actuator configured to shift the shift member. The optical unit further includes a light controlling member disposed further inside than the image stabilizing actuator in a direction orthogonal to the optical axis and in an area where the image stabilizing actuator is disposed in a direction parallel to the optical axis.

Abstract: A lens apparatus of the present invention includes a cam ring 7 having an inner circumferential surface on which first, second, and third cam groove portions 7a, 7b, and 7c with which first, second, and third cam followers 25, 26, and 6 provided on first, second, and third lens holding members 1, 2, and 3 engage. The cam ring introduces the first and second cam followers from an insertion opening 7d and includes an introducing groove portion 7b4 for introducing the third cam follower and a connecting groove portion 7a5. The third cam groove portion is divided at a middle of the introducing groove portion which connects the insertion opening with the second cam groove portion.

Abstract: A third group barrel 3 holding a third lens group L3 is controlled to be driven by drivers in yaw and pitch directions orthogonal to an optical axis, respectively. The Y magnet and the Y yoke of the driver in the yaw direction are fixed on the third group barrel 3, and a Y electromagnetic coil is disposed at a Y guide base 24 surrounding the third group barrel 3. As a driver in the pitch direction, a P magnet and P yoke 29 are fixed to the Y guide base 24, and a P electromagnetic coil is fixed to a P guide base at an opposed position. A Y guide bar 25 and a P guide bar 30 are overlapped with projection regions onto planes orthogonal to the optical axis of the Y electromagnetic coil and the Y magnet, and the P electromagnetic coil and the P magnet, respectively.

Abstract: An optical device includes a lens holding member that holds a lens and that is movable in a direction along a plane that is orthogonal to an optical axis of the lens, and an actuator that moves the lens holding member in the direction along the plane. In the optical device, the actuator includes an actuator element, formed of electroactive polymer, and a connecting member that connects the lens holding member to the actuator element.

Abstract: An optical apparatus is disclosed which can suppress an increase in size thereof even if its lens is driven in a large movable range. The apparatus comprises a first linear actuator which includes a first member to which an electrical signal is input and a second member whose length in an optical axis direction is longer than the first member, and drives a first lens in a first movable range in the optical axis direction. The apparatus comprises a second linear actuator which includes a third member to which an electrical signal is input and a fourth member whose length in the optical axis direction is longer than the third member, and drives a second lens in a second movable range in the optical axis direction. The first member is moved together with the first lens in the optical axis direction, with respect to the second member.

Abstract: An optical device includes a lens holding member that holds a lens and that is movable in a direction along a plane that is orthogonal to an optical axis of the lens, and an actuator that moves the lens holding member in the direction along the plane. In the optical device, the actuator includes an actuator element, formed of electroactive polymer, and a connecting member that connects the lens holding member to the actuator element.

Abstract: An optical apparatus is disclosed which can suppress an increase in size thereof even if its lens is driven in a large movable range. The apparatus comprises a first linear actuator which includes a first member to which an electrical signal is input and a second member whose length in an optical axis direction is longer than the first member, and drives a first lens in a first movable range in the optical axis direction. The apparatus comprises a second linear actuator which includes a third member to which an electrical signal is input and a fourth member whose length in the optical axis direction is longer than the third member, and drives a second lens in a second movable range in the optical axis direction. The first member is moved together with the first lens in the optical axis direction, with respect to the second member.

Abstract: Light beam is irradiated onto a surface of a substrate to be inspected and scattered lights from the surface of the substrate are received at different light reception angles, so that first and second light detection signals corresponding to the different light reception angles are generated. Reference function defining a correlation in level value between the first and second light detection signals is set, a comparison is made between respective level values of the first and second light detection signals using the reference function as a comparison reference, and it is determined, on the basis of a result of the comparison, which of a plurality of different types of defects, such as a foreign substance and crystal-originated pit, a possible defect present on the surface of the substrate, which is represented by the light detection signals, corresponds to.

Abstract: Light beam is irradiated onto a surface of a substrate to be inspected and scattered lights from the surface of the substrate are received at different light reception angles, so that first and second light detection signals corresponding to the different light reception angles are generated. Reference function defining a correlation in level value between the first and second light detection signals is set, a comparison is made between respective level values of the first and second light detection signals using the reference function as a comparison reference, and it is determined, on the basis of a result of the comparison, which of a plurality of different types of defects, such as a foreign substance and crystal-originated pit, a possible defect present on the surface of the substrate, which is represented by the light detection signals, corresponds to.