Abstract: [Problem] To provide a wafer supporting device wherein particle generation is suppressed while chucking force is not decreased. [Solution] In this wafer supporting device, chuck electrodes are provided in a predetermined pattern on the surface of an insulation base material, the chuck electrodes being covered by an insulation cover layer made up of PBN or C-PBN. The surface of each chuck electrode has a protruding section a so as to assume a protruding-and-recessed shape. The surface of the insulation cover layer is formed into a protruding-and-recessed shape in conformity with the protrusions and recesses of the chuck electrode surfaces. The top surfaces of the protruding sections of the insulation cover layer are approximately flush with one another, forming a wafer placement face or plane.

Abstract: A coated graphite heater. The heater has a configuration comprising a plurality of heating elements having a major portion disposed parallel to an upper surface of the heater so that the major portion is disposed horizontally. The heater configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to designs having heating elements with a major portion oriented perpendicular to the plane of the upper surface of the heater.

Abstract: A coated graphite heater. The heater has a configuration comprising a plurality of heating elements having a major portion disposed parallel to an upper surface of the heater so that the major portion is disposed horizontally. The heater configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to designs having heating elements with a major portion oriented perpendicular to the plane of the upper surface of the heater.

Abstract: A resistance heater is shown and described. The resistance heater may include a body. The body may include at least one heating surface, the heating surface being generally smooth and generally flat and a recess formed in the body, at least a portion of the body having a cross-sectional shape selected from the group consisting of: generally U shape, generally I-shape, and generally H-shape, and where the cross-sectional shape extends along at least a portion of the body.

Abstract: A method for manufacturing a narrow frame touch input sheet includes forming and stacking transparent conductive films, light-excluding conductive electrode films, and first resist layers sequentially on both surfaces of a transparent base sheet, exposing and developing the first resist layers simultaneously on the both surfaces, etching the transparent and light-excluding conductive electrode films on the both surfaces, and stripping the first resist layers to form a fine wiring circuit pattern with the stacked transparent conductive film and light-excluding conductive electrode film in an outer edge portion on each of the two surfaces. The method further includes forming a second resist layer to cover the fine wiring circuit pattern on each surface, and etching only the light-excluding electrode conductive film layer on which the second resist layer is not formed, to expose a circuit pattern of the transparent conductive film in a central window portion on each surface.

Abstract: A unibody, multi-piece crucible for use in for use in elemental purification, compounding, and growth of semi-conductor crystals, e.g., in the process of molecular beam epitaxy (MBE) for melting silicon and the like at high temperature. The crucible has an outer coating layer that fixedly joins the multi pieces making up the crucible. The invention also provides a method for making a unibody containing structure comprising pyrolytic boron nitride having a negative draft, which method obviates the need of complicated overhang structure of graphite mandrels or the removal of the graphite mandrels by burning at high temperatures.

Abstract: A PG-coated product is produced by: producing a body by using PBN; providing a traceability display made of purified graphite in an arbitrary section of the body surface; and covering the body surface including the traceability display with a PG film. By setting the thickness of the PG film to 100 ?m or less, preferably 80 ?m or less, it is possible to provide transparency sufficient for reading the product serial number displayed on the body surface. Thus, this is a suitable way of displaying traceability. Because graphite does not adversely affect the physical properties of PBN and PG, the functions and durability intrinsic to the product are not impaired, even when the traceability display, which is formed by using graphite, is placed between the body surface made of PBN and the PG film.

Abstract: A method for manufacturing a narrow frame touch input sheet includes forming and stacking transparent conductive films, light-excluding conductive electrode films, and first resist layers sequentially on both surfaces of a transparent base sheet, exposing and developing the first resist layers simultaneously on the both surfaces, etching the transparent and light-excluding conductive electrode films on the both surfaces, and stripping the first resist layers to form a fine wiring circuit pattern with the stacked transparent conductive film and light-excluding conductive electrode film in an outer edge portion on each of the two surfaces. The method further includes forming a second resist layer to cover the fine wiring circuit pattern on each surface, and etching only the light-excluding electrode conductive film layer on which the second resist layer is not formed, to expose a circuit pattern of the transparent conductive film in a central window portion on each surface.

Abstract: A narrow frame touch input sheet, and a conductive sheet used in the narrow frame touch input sheet, are suitable for a capacitive touch sensor having a narrow frame and two layers of transparent conductive film patterns. The conductive sheet includes one or more transparent base sheets stacked into a layer, transparent conductive films, light-excluding conductive electrode films, and first resist layers, which are layered sequentially on the uppermost and lowermost surfaces thereof. The first resist layers are exposed simultaneously on both surfaces, and after development, the transparent and light-excluding conductive electrode films are simultaneously etched, the first resist layers are stripped away, then second resist layers are formed as coating on the both surfaces in an outer edge portion, so that the light-excluding conductive electrode films are etched only in the central window portions. Thus, circuit patterns of the transparent conductive films are exposed.

Abstract: A resistance heater is shown and described. The resistance heater may include a body. The body may include at least one heating surface, the heating surface being generally smooth and generally flat and a recess formed in the body, at least a portion of the body having a cross-sectional shape selected from the group consisting of: generally U shape, generally I-shape, and generally H-shape, and where the cross-sectional shape extends along at least a portion of the body.

Abstract: A heater has a smooth heating surface and a recess formed on a second surface opposite to the heating surface. The recess is formed between opposite side walls in a lengthwise direction of the heater. Formation of the recess improves the electrical resistance of the heater and the opposite side walls reinforce the heater and prevent deformation of the heater when it is subjected to high temperatures in a semiconductor wafer processing device. The heater has substantially the same width along its lengthwise direction. This improves the control of heat pattern design, because the terminal end portions do not have an expanded shape.

Abstract: A narrow frame touch input sheet, and a conductive sheet used in the narrow frame touch input sheet, are suitable for a capacitive touch sensor having a narrow frame and two layers of transparent conductive film patterns. The conductive sheet includes one or more transparent base sheets stacked into a layer, transparent conductive films, light-excluding conductive electrode films, and first resist layers, which are layered sequentially on the uppermost and lowermost surfaces thereof. The first resist layers are exposed simultaneously on both surfaces, and after development, the transparent and light-excluding conductive electrode films are simultaneously etched, the first resist layers are stripped away, then second resist layers are formed as coating on the both surfaces in an outer edge portion, so that the light-excluding conductive electrode films are etched only in the central window portions. Thus, circuit patterns of the transparent conductive films are exposed.

Abstract: A heater has a smooth heating surface and a recess formed on a second surface opposite to the heating surface. The recess is formed between opposite side walls in a lengthwise direction of the heater. Formation of the recess improves the electrical resistance of the heater and the opposite side walls reinforce the heater and prevent deformation of the heater when it is subjected to high temperatures in a semiconductor wafer processing device. The heater has substantially the same width along its lengthwise direction. This improves the control of heat pattern design, because the terminal end portions do not have an expanded shape.

Abstract: A unibody, multi-piece crucible for use in for use in elemental purification, compounding, and growth of semi-conductor crystals, e.g., in the process of molecular beam epitaxy (MBE) for melting silicon and the like at high temperature. The crucible has an outer coating layer that fixedly joins the multi pieces making up the crucible. The invention also provides a method for making a unibody containing structure comprising pyrolytic boron nitride having a negative draft, which method obviates the need of complicated overhang structure of graphite mandrels or the removal of the graphite mandrels by burning at high temperatures.

Abstract: In the preparation of a characteristic word list as one method of text mining, means for selecting an unnecessary word group that requires to be removed in advance is provided. Document IDs and a user ID are received from a client, and a characteristic word list is prepared from the document IDs and document information obtained in advance. Next, selected book IDs are obtained referring to the user ID and a user attribute table. On the basis of the obtained book IDs, unnecessary words are removed from the characteristic word list prepared by characteristic word list preparation program, and the characteristic word list from which the unnecessary words are removed is returned to the client as mining results.

Abstract: Disclosed herein is a crack-free protective coating comprising at least one of aluminum nitride, aluminum oxide, aluminum oxynitride or combinations thereof. Disclosed herein too is a method for making an article comprising disposing a protective coating comprising at least one of aluminum nitride, aluminum oxide, aluminum oxynitride or combinations thereof upon a substrate comprising pyrolytic boron nitride, pyrolytic graphite and/or carbon doped boron nitride.

Abstract: The characteristics of the entire gene group including a plurality of genes can be readily grasped. A plurality of search keys are accepted from a client, and a set of document groups each corresponding to the plurality of the accepted search keys is obtained, referring to a table where correspondence relationships between the search keys and the document groups are recorded. Then, a characteristic word list having the levels of relative importance is prepared in each of the search keys, and a characteristic table is prepared on the basis of the characteristic word lists. Finally, characteristic table is sorted, colored, and displayed.

Abstract: In the preparation of a characteristic word list as one method of text mining, means for selecting an unnecessary word group that requires to be removed in advance is provided. Document IDs and a user ID are received from a client, and a characteristic word list is prepared from the document IDs and document information obtained in advance. Next, selected book IDs are obtained referring to the user ID and a user attribute table. On the basis of the obtained book IDs, unnecessary words are removed from the characteristic word list prepared by characteristic word list preparation program, and the characteristic word list from which the unnecessary words are removed is returned to the client as mining results.

Abstract: Disclosed herein is a protective coating having a compressive stress of less than 280 Mpa, for devices to be used in a corrosive environment such as halogen containing gases or halogen plasma atmosphere, e.g., wafer supporting device for use in semi-conductor processing assemblies such as electrostatic chucks, heaters, etc. The protective coating in one embodiment is crack-free, with a compressive stress of less than 250 Mpa. It is deposited onto at least one surface of the device via an ion-plating process, in which the Ar flow is kept below 5 sccm, and one embodiment, at 0 sccm, for a crack-free protective layer.

Abstract: When the characteristics of the entire gene group consisting of a plurality of genes are to be grasped, the tendency that the characteristics of a gene having a large number of documents become dominant can be avoided. A plurality of search keys are accepted from a client, and a set of document groups each corresponding to the plurality of the accepted search keys is obtained by searching a database in which corresponding relationships between the search keys and the document groups are recorded. Next, an associative search is performed on a document database with respect to each of the search keys using the obtained document groups as keys to obtain a new set of document groups including the obtained document groups. Characteristic words are extracted from the new set of document groups, and a characteristic word list is sent to the client as mining results.