Abstract: A single wafer type wet-cleaning technique for wet-cleaning wafers, individually, which are not stored in a cassette, at the front and back faces thereof simultaneously, in a sealed cleaning housing, whereby a plurality of chemical fluids are vertically and sequentially supplied from a number of upper side supply nozzles 25 and lower side supply nozzles 26 to the front and back faces of each wafer W to clean the same, and purified water is always caused to flow out of the lower side supply nozzles 26, 26, . . . ,, which do not supply chemical fluids, of the lower side supply nozzles, thereby preventing the occurrence of cross contamination of various chemical fluids between cleaning treatments.

Abstract: There is provided a substrate cleaning system which is capable of cleaning wafers W in a high cleanliness atmosphere with high accuracy taking an advantage of a sheet-type wet cleaning treatment, and which is simple and compact in construction, and is excellent in cost performance.

Abstract: In a 3D-shape measurement apparatus, a photoreceptive optical system for linearly scanning a target-to-be-measured with a scanning light beam and guiding a reflected light beam from the object to a scanning convergence lens is constituted such that the position of an apparent emission point of the reflected light to be incident on the scanning convergence lens moves in the same direction as the direction along which the scanning light beam deviates due to deformation of a scanning optical system, and the apparent emission point is always positioned on a scanning plane even when the scanning position varies.

Abstract: In the drying step of the single wafer type substrate cleaning system for cleaning wafers not stored in a cassette, in a sealed cleaning housing, a spin drying treatment is applied to the wafer when the wafer is supported and rotated at high speed while an inert gas for preventing oxidation is supplied to the face of the wafer, and the amount of the inert gas to be supplied to the face of the wafer is larger at the outer peripheral portion of the wafer than that supplied at the center thereof, thereby preventing oxidation on the face of the wafer effectively while optimizing the benefits of the single wafer type cleaning system.

Abstract: A closed-type cassette is mounted on a cassette stand disposed in a working region at a position corresponding to an opening formed in a wall separating the working region from a loading region. When the cassette is mounted on the cassette stand, a detecting device gives a signal to that effect to a controller. Then, the controller closes a valve to interrupt nitrogen gas supply into the loading region. A lid of the cassette is opened 20 to 30 sec after the interruption of nitrogen gas supply into the loading region and, then, nitrogen gas supply is resumed. The pressure difference between the loading region and the interior of the cassette is decreased by interrupting nitrogen gas supply into the loading region, so that the lid can be easily opened.

Abstract: In view of a possibility that a conventional structure which mounts a pressure-sensitive riding detection sensor on a seat bottom plate and mounts a seat cushion on the riding detection sensor lowers the sensitivity of the riding detection sensor, the present invention arranges the riding detection sensor such that the riding detection sensor can have favorable sensitivity. A lower seat cushion is arranged on a seat bottom plate of a seat, and a seat switch is supported on the lower seat cushion. A seat cushion body which is made thin by the thickness of the lower seat cushion is mounted on the seat switch, and a seat skin covers an upper surface of the seat cushion body.

Abstract: A double super tuner for receiving television signals from conventional broadcast, CATV, satellite broadcast, and HDTV. A first frequency converter converts an input high-frequency signal in a first intermediate frequency band signal based on a first local oscillator signal. The output of the first frequency converter is band-pass filtered by a dielectric filter. A second frequency converter converts the output of the dielectric filter into a second intermediate frequency band signal based on a second local oscillator signal.

Abstract: A closed-type cassette is mounted on a cassette stand disposed in a working region at a position corresponding to an opening formed in a wall separating the working region from a loading region. When the cassette is mounted on the cassette stand, a detecting device gives a signal to that effect to a controller. Then, the controller closes a valve to interrupt nitrogen gas supply into the loading region. A lid of the cassette is opened 20 to 30 sec after the interruption of nitrogen gas supply into the loading region and, then, nitrogen gas supply is resumed. The pressure difference between the loading region and the interior of the cassette is decreased by interrupting nitrogen gas supply into the loading region, so that the lid can be easily opened.

Abstract: To provide a waterproof connector capable of reducing a load applied upon connection or separation of a male connector to or from a female connector while sufficiently ensuring sufficient waterproofing. A plurality of individually fitting projections, each being adapted to support a female terminal, are provided on the top surface of a collectively fitting projection provided in a female connector housing. In a male connector housing, a plurality of individually fitting recesses, in each of which an associated one of the individually fitting projections is fittable, are provided in a bottom surface portion of a collectively fitting recess in which the collectively fitting projection is fittable. Each of the individually fitting recesses is adapted to support a male terminal.

Abstract: A double super tuner for receiving television signals from conventional broadcast, CATV, satellite broadcast, and HDTV. A first frequency converter converts an input high-frequency signal in a first intermediate frequency band signal based on a first local oscillator signal. The output of the first frequency converter is band-pass filtered by a dielectric filter. A second frequency converter converts the output of the dielectric filter into a second intermediate frequency band signal based on a second local oscillator signal.

Abstract: A treatment system is disclosed, which has a treatment apparatus for performing a predetermined treatment for a planar workpiece contained in a carrier, and a first air-tight carrier storage chamber for storing the carrier. The treatment apparatus may also have an air-tight second carrier storage chamber. An inert gas supply pipe and an exhaust pipe are connected to each of the treatment apparatus, the first carrier storage chamber, and the second carrier storage chamber. A open/close valve device is provided for each of the inert gas supply pipes and the exhaust pipes.

Abstract: A condensed thiophene compound represented by general formula: ##STR1## or a pharmaceutically acceptable salt thereof, wherein ring S represents a thiophene ring; R.sup.1 represents hydrogen, halogen, alkyl, etc.; R.sup.2 represents hydrogen, alkyl, acyl, etc.; G represents --CH.sub.2 --, --CH(OH)--, --CO--, etc.; Q represents alkylene; T represents --N(Rb)(Rc) (wherein Rb, Rc represents each alkyl etc.; or alternatively Rb and Rc are combined together to form cyclic amino); D represents --CH.sub.2 -- or --S--; A and B represent each carbonyl or thiocarbonyl, or are null; and m and n represent each 0, 1 to 4, provided that m+n represents an integer of 4 or less.This compound is useful as an antipsychotic drug having a reduced extrapyramidal side effect.

Abstract: In an automatic decompression device for an engine, having a decompression cam supported on a camshaft adjacent to a valve operating cam for movement between a biased valve opening position in which the decompression cam causes a cam surface to project beyond a base circle portion of the valve operating cam to bias open an exhaust valve or an intake valve in a compression stroke of the engine, and a retracted position in which the decompression cam retracts the cam surface inwardly of the base circle portion of the valve operating cam under centrifugal forces acting on the counterweight against spring forces of a spring when the engine operates at a relatively high rotational speed, to prevent oil from being trapped between the decompression cam and the camshaft and allow the decompression cam to operate smoothly to decompress the engine when the engine starts at low temperatures.

Abstract: A treatment system is disclosed, which has a treatment apparatus for performing a predetermined treatment for a planar workpiece contained in a carrier, and an first air-tight carrier storage chamber for storing the carrier. The treatment apparatus may also have an air-tight second carrier storage chamber. An inert gas supply and exhaust are connected to each of the treatment apparatus, the first carrier storage chamber, and the second carrier storage chamber. A valve device is provided for the inert gas supply and exhaust.

Abstract: A condensed thiophene compound represented by general formula: ##STR1## or a pharmaceutically acceptable salt thereof, wherein ring S represents a thiophene ring; R.sup.1 represents hydrogen, halogen, alkyl, etc.; R.sup.2 represents hydrogen, alkyl, acyl, etc.; G represents --CH.sub.2 --, --CH(OH)--, --CO--, etc.; Q represents alkylene; T represents --N(Rb)(Rc) (wherein Rb, Rc represents each alkyl etc.; or alternatively Rb and Rc are combined together to form cyclic amino); D represents --CH.sub.2 -- or --S--; A and B represent each carbonyl or thiocarbonyl, or are null; and m and n represent each 0, 1 to 4, provided that m+n represents an integer of 4 or less.This compound is useful as an antipsychotic drug having a reduced extrapyramidal side effect.

Abstract: A treatment system is disclosed, which has a treatment apparatus for performing a predetermined treatment for a planar workpiece contained in a carrier, and a first air-tight carrier storage chamber for storing the carrier. The treatment apparatus has an air-tight second carrier storage chamber. An inert gas supply pipe and an exhaust pipe are connected to each of the treatment apparatus, the first carrier storage chamber, and the second carrier storage chamber. An open/close valve and an open/close device are connected to each of the inert gas supply pipes and the exhaust pipes.

Abstract: There is provided an apparatus of inspecting a packaged state by scanning a packaged printed circuit board with a fine light beam and detecting reflection beams of the fine light beam in a plurality of directions. A fine light beam emitted from a light source is scanned on the packaged printed circuit board substantially vertically thereto by means of a polygon mirror and a light projection f.theta. lens. An optical path correcting system receives reflection beams scattered from the packaged printed circuit board and corrects optical paths of the reflection beams. The correction is done in such a way that reflection beams having constant directional vectors regardless of the change of the scanning position of the fine light beam are received and guided to light receiving positions complying with a height at a scanning position on a plurality of photoelectric conversion devices.

Abstract: Thiophene compounds of the formula ##STR1## wherein each symbol is as defined in the specification, their pharmaceutically acceptable salts, pharmaceutical compositions containing said compound and additives for pharmaceuticals, and antipsychotics containing said compound as an active ingredient.The compound of the present invention has pharmacological actions required of antipsychotic, such as motility suppressing action, anti-apomorphine action, mothamphetamine antagonistic action, tetrabenazine-induced blepharoptosis enhancing action, and the like. The compound of the present invention is useful as an antipsychotic having less extrapyramidal side-effects or a non-benzodiazepine type antianxiety agent.

Abstract: A treatment system is disclosed, which has a treatment apparatus for performing a predetermined treatment for a planar workpiece contained in a carrier, and an first air-tight carrier storage chamber for storing the carrier. The treatment apparatus may also have an air-tight second carrier storage chamber. An inert gas supply and an exhaust means are connected to each of the treatment apparatus, the first carrier storage chamber, and the second carrier storage chamber. A valve device is provided for the inert gas supply and exhaust means.

Abstract: A plate-like members conveying apparatus includes a rotating shaft and five support arms for supporting semiconductor wafers. The arms are vertically stacked at equal intervals and parallel to each other. The middle arm is fixed between two intermediate arms. Above and below the intermediate arms, two outer arms are located. The intermediate arms are coupled to an intermediate arm pinion coaxially fixed to the rotating shaft. The outer arms are coupled to an outer arm pinion coaxially fixed to the rotating shaft and having twice diameter of the intermediate arm pinion. These two pinions are rotated together upon the rotation of the rotating shaft. By the rotation of the intermediate arm pinion, the intermediate arms are moved to opposite direction each other. By the rotation of the outer arm pinion, the outer arms are moved to opposite direction each other by a distance twice a distance between the intermediate arms.