Abstract: A method simply produces a narrowly distributed and high-purity polyalkylene glycol derivative having an amino group at an end without using a heavy metal catalyst.

Abstract: The present invention is a method for purifying an NCA, including the steps of: a) dissolving an NCA contaminated with impurities into a solvent which is a good solvent and is not a chlorinated solvent followed by stirring to precipitate an undissolved impurity to afford a suspension, b) adding an acidic filter aid having ability to trap a basic impurity to the obtained suspension followed by filtration and/or forming a fixed bed of the acidic filter aid having ability to trap a basic impurity followed by filtering the suspension to bring the suspension to be in contact with the acidic filter aid having ability to trap a basic impurity, and c) adding the obtained filtrate dropwise to a poor solvent for NCA to crystallize out the NCA in which the impurities are removed. This makes it possible to purify a low-purity NCA conveniently to afford a high-purity NCA.

Abstract: A polyalkylene glycol derivative with a minimal impurity content is prepared simply by the steps of reacting a compound having formula (III-I) or (III-II) with an electrophile having formula (IV) in the presence of an optional basic compound, to form a reaction solution containing a compound having formula (V), and passing the reaction solution through a column of cation and anion exchange resins to remove water-soluble impurities, for thereby purifying the desired polyalkylene glycol derivative.

Abstract: A novel onium salt having formula (1) and a resist composition comprising the same as a quencher are provided. When the resist composition is processed by photolithography using high-energy radiation, there is formed a resist pattern which is improved in LWR and CDU. In formula (1), R1, R2 and R3 each are a C1-C20 monovalent hydrocarbon group which may contain a heteroatom exclusive of fluorine, and Z+ is a sulfonium, iodonium or ammonium cation.

Abstract: A method simply produces a narrowly distributed and high-purity polyalkylene glycol derivative having an amino group at an end without using a heavy metal catalyst.

Abstract: The present invention is a method for purifying an NCA, including the steps of: a) dissolving an NCA contaminated with impurities into a solvent which is a good solvent and is not a chlorinated solvent followed by stirring to precipitate an undissolved impurity to afford a suspension, b) adding an acidic filter aid having ability to trap a basic impurity to the obtained suspension followed by filtration and/or forming a fixed bed of the acidic filter aid having ability to trap a basic impurity followed by filtering the suspension to bring the suspension to be in contact with the acidic filter aid having ability to trap a basic impurity, and c) adding the obtained filtrate dropwise to a poor solvent for NCA to crystallize out the NCA in which the impurities are removed. This makes it possible to purify a low-purity NCA conveniently to afford a high-purity NCA.

Abstract: A method for producing a narrowly distributed and high-purity polyalkylene glycol derivative having an amino group at an end, a polymerization initiator for use in the method, and a precursor of the polymerization initiator are provided.

Abstract: A method simply produces a narrowly distributed and high-purity polyalkylene glycol derivative having an amino group at an end without using a heavy metal catalyst.

Abstract: A method simply produces a narrowly distributed and high-purity polyalkylene glycol derivative having an amino group at an end without using a heavy metal catalyst.

Abstract: A method simply produces a narrowly distributed and high-purity polyalkylene glycol derivative having an amino group at an end without using a heavy metal catalyst.

Abstract: A polyalkylene glycol derivative with a minimal impurity content is prepared simply by the steps of reacting a compound having formula (III-I) or (III-II) with an electrophile having formula (IV) in the presence of an optional basic compound, to form a reaction solution containing a compound having formula (V), and passing the reaction solution through a column of cation and anion exchange resins to remove water-soluble impurities, for thereby purifying the desired polyalkylene glycol derivative.

Abstract: A method for producing a narrowly distributed and high-purity polyalkylene glycol derivative having an amino group at an end, a polymerization initiator for use in the method, and a precursor of the polymerization initiator are provided.

Abstract: A method for producing a narrowly distributed and high-purity polyalkylene glycol derivative having an amino group at an end, a polymerization initiator for use in the method, and a precursor of the polymerization initiator are provided.

Abstract: A method simply produces a narrowly distributed and high-purity polyalkylene glycol derivative having an amino group at an end without using a heavy metal catalyst.

Abstract: A method for producing a narrowly distributed and high-purity polyalkylene glycol derivative having an amino group at an end, a polymerization initiator for use in the method, and a precursor of the polymerization initiator are provided.

Abstract: A method for producing a narrow molecular weight distribution polyalkylene glycol derivative having an amino group at an end is provided and allows for polymerization of ethylene oxide under mild conditions with suppressed occurrence of diol polymer impurities includes at least the steps of polymerizing ethylene oxide by using a compound represented by the following general formula (2) and converting a polymer end to R3: wherein R1 represents a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 10 carbon atoms; R2 represents a linear or branched divalent hydrocarbon group having 1 to 5 carbon atoms; R3 represents a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 20 carbon atoms; M represents sodium or potassium; m represents an integer of 1 to 5; n represents an integer of 1 to 450; and k represents an integer of 1 to 5.

Abstract: A method for producing a narrow molecular weight distribution polyalkylene glycol derivative having an amino group at an end under mild conditions. A method for producing a compound of the general formula (1): CH3O(CH2CH2O)nCH2CH2CH2NH2 (wherein n is an integer of 1 to 450) comprises the following steps of: 1) a step of producing a compound of the general formula (3): CH3O(CH2CH2O)k-1CH2CH2O?M+ from a compound of the general formula (2): CH3O(CH2CH2O)kH (wherein k is an integer of 2 to 5); 2) a step of producing a compound of the general formula (4): CH3O(CH2CH2O)n-1CH2CH2O?M+ from a compound of the general formula (3); 3) a step of reacting a compound of the general formula (4) with acrylonitrile to obtain a compound of the general formula (5): CH3O(CH2CH2O)nCH2CH2CN; and 4) a step of reducing a compound of the general formula (5) to obtain a compound of the general formula (1).

Abstract: A method for producing a narrow molecular weight distribution polyalkylene glycol derivative having an amino group at an end is provided and allows for polymerization of ethylene oxide under mild conditions with suppressed occurrence of diol polymer impurities includes at least the steps of polymerizing ethylene oxide by using a compound represented by the following general formula (2) and converting a polymer end to R3: wherein R1 represents a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 10 carbon atoms; R2 represents a linear or branched divalent hydrocarbon group having 1 to 5 carbon atoms; R3 represents a linear, branched, or cyclic monovalent hydrocarbon group having 1 to 20 carbon atoms; M represents sodium or potassium; m represents an integer of 1 to 5; n represents an integer of 1 to 450; and k represents an integer of 1 to 5.

Abstract: A method for producing a narrow molecular weight distribution polyalkylene glycol derivative having an amino group at an end under mild conditions. A method for producing a compound of the general formula (1): CH3O(CH2CH2O)nCH2CH2CH2NH2 (wherein n is an integer of 1 to 450) comprises the following steps of: 1) a step of producing a compound of the general formula (3): CH3O(CH2CH2O)k-1CH2CH2O?M+ from a compound of the general formula (2): CH3O(CH2CH2O)kH (wherein k is an integer of 2 to 5); 2) a step of producing a compound of the general formula (4): CH3O(CH2CH2O)n-1CH2CH2O?M+ from a compound of the general formula (3); 3) a step of reacting a compound of the general formula (4) with acrylonitrile to obtain a compound of the general formula (5): CH3O(CH2CH2O)nCH2CH2CN; and 4) a step of reducing a compound of the general formula (5) to obtain a compound of the general formula (1).

Abstract: The present invention provides a polymerizable tertiary ester compound represented by the following general formula (1a) or (1b). There is provided a polymerizable ester compound useful as a monomer for a base resin of a resist composition having a high resolution and a reduced pattern edge roughness in photolithography using a high-energy beam such as an ArF excimer laser light as a light source, especially in immersion lithography, a polymer containing a polymer of the ester compound, a resist composition containing the polymer as a base resin, and a patterning process using the resist composition.