Abstract: A container for a plurality of thin plates has a driving unit for moving one of a pair of magnetic members, at least one of which is a magnet, embedded in a container body and contained in a chamber in a lid, respectively, to selectively produce attractive and non-attractive magnetic conditions between the first and second magnetic members. In one embodiment, the driving unit includes a rotatable plate, and an arm having one end attached to the rotatable plate and the second end attached to the movable magnetic member to move the movable magnetic member in response to rotation of the rotatable plate. In a second embodiment a parallel movement link has a long groove for engaging a pin provided on the rotatable plate; a magnetic member supporting link has a first end attached to one end of the parallel movement link and has its second end attached to the movable magnetic member.

Abstract: The present invention relates to a thin-plate supporting container 1 having a container body 2, and a thin-plate supporting unit 3 for supporting the semiconductor wafers from both sides thereof in the container body. There are provided a lid 4, and an easy attach/detach mechanism for attaching and detaching the lid 4. The easy attach/detach mechanism 31 is composed of a lid engaging claw 32 provided on the circumference of the lid 4, and object engagement part 28, provided on the container body 2, for engaging with the lid engagement claw 32 so as to secure the lid 4 to the container body 2, an arm 34 for releasing the lid engagement claw 32 from the object engagement part 28; and an elevating mechanism for slightly elevating the lid 4 from the container body 2 when the lid engagement claw 32 is released by means of the arm 34. The thin-plate supporting unit 3, the top flange 5, the carrying handle 6 are detachably mounted. The thin-plate supporting unit 3 is formed with a V-shaped groove 38.

Abstract: A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material.

Abstract: An easily attachable/detachable lid mounted container includes a container body, a lid for covering the container body, and an easy attach/detach mechanism for reliably securing the lid to the container body and for easily detaching the lid from the container body. The easy attach/detach mechanism includes: an engagement plate provided on the lid and extending toward the container body, the engagement plate being resilient and bendable; an object engagement portion, provided on the container body, for engaging, when the lid is pressed toward the container body, with the engagement plate so as to secure the lid to the container body; and separation means, provided between the engagement plate and the object engagement portion, for separating the engagement plate from the object engagement portion when the separation means is pressed toward the container body.

Abstract: A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body or the like, and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit said chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material or the like.

Abstract: A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body or the like, and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material or the like.

Abstract: A thin-plate supporting container provided with supporting rib portions, each of which consists of multi-stage ribs, for supporting thin plates respectively on multiple stages at regular intervals. The ribs are provided in parallel on each of opposing side walls of the container casing in such a way that the supporting rib portions cooperate to hold the thin plates. An open end of the thin-plate supporting container serves as an inlet/outlet port, through which the thin plates are loaded and unloaded from the container. Each of the supporting rib portions is composed of an inlet portion adjacent the inlet/outlet-port and a support portion interior thereof. Further, the opening between opposed side surfaces of adjacent ribs is set to be sufficiently large that the thin plate can be easily loaded and unloaded.

Abstract: A thin-plate supporting container provided with supporting rib portions, each of which consists of multi-stage rib pieces, for supporting thin plates respectively on multiple stages at regular intervals. The supporting rib portions are provided on each of side walls of a casing of the container in parallel in such a way that each of the supporting rib portions provided on one of the side walls and a corresponding one of the supporting rib portions provided on the other of the side walls face each other and sandwich the thin plate. An opening portion of the thin-plate supporting container is an inlet/outlet port, through which the thin plate is loaded or unloaded from the container. Each of the supporting rib portions is composed of an inlet portion placed at the inlet/outlet-port-side thereof and a matching portion placed at an inner part thereof.

Abstract: A thin-plate supporting container provided with supporting rib portions, each of which consists of multi-stage ribs, for supporting thin plates respectively on multiple stages at regular intervals. The ribs are provided in parallel on each of opposing side walls of the container casing in such a way that the supporting rib portions cooperate to hold the thin plates. An open end of the thin-plate supporting container serves as an inlet/outlet port, through which the thin plates are loaded and unloaded from the container. Each of the supporting rib portions is composed of an inlet portion adjacent the inlet/outlet-port and a support portion interior thereof. Further, the opening between opposed side surfaces of adjacent ribs is set to be sufficiently large that the thin plate can be easily loaded and unloaded.