Abstract: A holding device 100A according to one preferred form of the invention includes a holding member having holding portions 121 with an approximately V-shaped recess by which a subject member 110 having approximately V-shaped protrusions 111 is held, wherein the V-shaped protrusions 111 are disposed at a pitch of about 120 degrees with respect to the center of the subject member 110 and the holding portions 121 are disposed at positions to be opposed to the V-shaped protrusions, wherein the V-shaped protrusions 111 and the supporting portions 121 have supporting flat surfaces 112 and 112, and 114 and 124 which are opposed to and in parallel to each other, and wherein rolling members 131 are disposed between these parallel flat surfaces.

Abstract: A retainer for holding an optical element having three first grooves includes a first support member that supports the optical element through the first grooves, and a second support member that has three second grooves corresponding to the first grooves, and supports the first support member through the second grooves.

Abstract: A retainer for holding an optical element having three first grooves includes a first support member that supports the optical element through the first grooves, and a second support member that has three second grooves corresponding to the first grooves, and supports the first support member through the second grooves.

Abstract: A stage apparatus has a substrate holding unit which chucks and holds a substrate, and includes a flat surface having a recess where the substrate holding unit is to be mounted. A fixing member fixes a projection support provided to the substrate holding unit onto the flat surface. The substrate holding unit is supported by the fixing member while a distal end of the projection support is in contact with the recess of the flat surface and the remaining portion of the substrate holding unit is not in contact with the flat surface.

Abstract: Disclosed is a moving mechanism which includes a first structural member having a first guide surface, a moving member being movable along the first guide surface, a second structural member having a second guide surface, and an actuator having a movable element provided on the moving member and a stator being movable along the second guide surface, wherein the first and second structural members are isolated from each other with respect to vibration, such that displacement of the stator due to a reaction force as the moving member is driven does not have an influence to the moving member guide surface.

Abstract: A moving mechanism includes a first structural member having a first guide surface, a moving member being movable along the first guide surface, a second structural member having a second guide surface, and an actuator having a movable element provided on the moving member and a stator which is movable along the second guide surface. The first structural member is supported by the second structural member at three positions.

Abstract: A stage apparatus has a substrate holding unit which chucks and holds a substrate, and includes a flat surface having a recess where the substrate holding unit is to be mounted. A fixing member fixes a projection support provided to the substrate holding unit onto the flat surface. The substrate holding unit is supported by the fixing member while a distal end of the projection support is in contact with the recess of the flat surface and the remaining portion of the substrate holding unit is not in contact with the flat surface.

Abstract: A retainer for holding an optical element having three first grooves includes a first support member that supports the optical element through the first grooves, and a second support member that has three second grooves corresponding to the first grooves, and supports the first support member through the second grooves.

Abstract: A substrate attracting and holding method includes steps of supporting a substrate by use of a protrusion provided on a holding table for holding the substrate and reducing pressure between the holding table and the substrate to attract and hold the substrate. The protrusion is disposed to be placed in a predetermined positional relation, with respect to a direction along the surface of the substrate, with (i) a position of an alignment mark to be used for processing the substrate or (ii) a position to with respect to which an alignment mark is to be produced. The method also includes attracting and holding the substrate.

Abstract: Disclosed is a wafer chuck, which has protrusions for supporting a substrate, for attracting and holding the substrate by negative pressure while the substrate is being supported by the protrusions. The wafer chuck includes pin-shaped protrusions dispersed on a suction side of the chuck, and circular peripheral wall portions disposed in the vicinity of the rim of the supported substrate and in the vicinity of the outer peripheral portion of a lifting hole, respectively. The suction side of the wafer chuck is provided with a first area in which the pin-shaped protrusions are arrayed in a grid-line manner, and a second area in which the pin-shaped protrusions are arrayed in circumferential form. The second area is provided in the vicinity of the peripheral wall portion and peripheral wall portion, and the first area is provided elsewhere.

Abstract: A substrate attracting and holding system includes a holding table for holding a substrate, a protrusion provided on the holding table, the protrusion being disposed to be placed in a predetermined positional relationship with a position of an alignment mark to be used for processing the substrate or a position with respect to which an alignment mark is to be produced.

Abstract: This invention provides a substrate processing technique that can process a substrate with high flatness while suppressing a weight of a substrate chuck. A substrate processing apparatus includes a support member which supports the substrate chuck, and a cleaning mechanism. The cleaning mechanism moves at least one of a surface of the substrate chuck which contacts the support member and a surface of the support member which contacts the substrate chuck, and a cleaning member for the at least one, relative to each other.

Abstract: A stage apparatus is a stage apparatus having a substrate holding unit which chucks and holds a substrate, and includes a flat surface having a recess where the substrate holding unit is to be mounted, and a fixing member which fixes a projection support provided to the substrate holding unit onto the flat surface. The substrate holding unit is supported by the fixing member while a distal end of the projection support is in contact with the recess of the flat surface and the remaining portion of the substrate holding unit is not in contact with the flat surface.

Abstract: A substrate attracting and holding system includes a holding table for holding a substrate, a protrusion provided on the holding table, the protrusion being disposed to be placed in a predetermined positional relationship with a position of an alignment mark to be used for processing the substrate or a position with respect to which an alignment mark is to be produced.

Abstract: An exposure apparatus for lithographically transferring a pattern of an original onto a substrate to be exposed includes a first detector for detecting a position of an alignment mark on an exposure shot formed on the substrate, a second detector for detecting a local tilt adjacent to the alignment mark, the position of which is detected by the first detector, and a third detector for detecting a tilt of the exposure shot.

Abstract: A stage device includes a movable body, movable along a guide surface, for moving an element mounted on the movable body, a static pressure bearing, having at least one pad, for guiding the movable body along the guide surface, the at least one pad being attached to the movable body at a first position, and a linear motor, having a movable part and a relatively stationary part, for moving the movable body, the movable part of the linear motor being attached to the movable body at a second position. The movable body has a hollow structure at at least one of the first position and the second position. The hollow structure has an enclosure structure or a rib structure.

Abstract: Disclosed is a moving mechanism which includes a first structural member having a first guide surface, a moving member being movable along the first guide surface, a second structural member having a second guide surface, and an actuator having a movable element provided on the moving member and a stator being movable along the second guide surface, wherein the first and second structural members are isolated from each other with respect to vibration, such that displacement of the stator due to a reaction force as the moving member is driven does not have an influence to the moving member guide surface.

Abstract: A driving apparatus for moving an object has a stage which moves the object mounted thereon, a base member supporting the stage, a reaction force reception structure for receiving a reaction force generated upon driving the stage, a damp member for damping transmission of vibration with a predetermined frequency range from the reaction force reception structure to a floor and an actuator for generating a force between the base member and the reaction force reception structure.

Abstract: This invention is to reduce the influence of vibration or swing due to movement of stages, and minimize the influence on other apparatuses set on the same floor by decreasing the influence of a reaction force according to acceleration/deceleration of the stages on the floor. A driving apparatus includes a movable stage on which an object to be exposed is mounted, a stage base member supporting the stage, and a reaction force reception structure which is different from the stage base member and receives a reaction force generated upon driving the stage. Transmission of vibration with a predetermined frequency or more is damped between the reaction force reception structure and a floor. The apparatus also has an elastic support elastically supporting the reaction force reception structure with respect to the floor or base frame, and a force actuator such as a linear motor for generating a force between the stage base member and the reaction force reception structure.

Abstract: An anti-vibration apparatus for actively damping vibrations of an object by generating control forces for reducing the vibrations includes a first actuator for generating a first control force, and a second actuator which generates a second control force and is driven on a driving principle different from that for the first actuator. The first actuator generates forces in the vertical and horizontal directions. The second actuator generates a force in at least one of the vertical and horizontal directions.