Patents by Inventor Yukiyasu Arisawa

Yukiyasu Arisawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pattern extracting system, method for extracting measuring points, method for extracting patterns, and computer program product for extracting patterns
    Publication number: 20060190875
    Abstract: A pattern extracting system includes a sampler configured to sample test candidate patterns from a circuit pattern, based on a lithographic process tolerance, a space classification module configured to classify the test candidate patterns into space distance groups depending on a space distance to an adjacent pattern, a density classification module configured to classify the test candidate patterns into pattern density groups depending on a surrounding pattern density, and an assessment module configured to assess actual measurements of dimensional errors of the test candidate patterns classified into the space distance groups and the pattern density groups.
    Type: Application
    Filed: January 5, 2006
    Publication date: August 24, 2006
    Inventors: Yukiyasu Arisawa, Osamu Ikenaga, Shigeki Nojima, Shigeru Hasebe