Abstract: Example embodiments relate to a reflective type display apparatus using dielectrophoresis and a method of manufacturing the reflective type display apparatus. The display apparatus may include a first substrate and a second substrate arranged so as to face each other; a hydrophobic insulating layer formed on the first substrate; a hydrophobic pattern electrode unit arranged to form a non-uniform electric field; a hydrophilic dielectric medium with hydrophobic uncharged particles therein in a space between the first substrate and the second substrate; and a reflective plate arranged under the first substrate. The display apparatus may form an image by using dielectrophoresis of the hydrophobic uncharged particles according to an electric field gradient formed by the hydrophobic pattern electrode unit.

Abstract: Example embodiments relate to a display apparatus using dielectrophoresis and a method of manufacturing the display apparatus. The display apparatus may include a display pixel, wherein the display pixel may include uncharged particles distributed in a dielectric medium that fills a cell area. A pattern electrode unit may be configured to produce a non-uniform electric field in the dielectric medium. A light transmittance of the display pixel may be adjusted by dielectrophoresis of the uncharged particles according to an electric field gradient.

Abstract: Provided are a method and an apparatus for reproducing information using a semiconductor probe.

Abstract: A device for detecting micro particles in gas, which comprises: an inlet through which a gaseous sample including micro particles flows in; an outlet through which the sample flows out; a channel through which the sample flows from the inlet toward the outlet; a cooling layer which cools and condenses the sample flowing in the channel; a reservoir which is positioned on the cooling layer and collects the condensed sample; a detector which is positioned in the reservoir on the cooling layer and detects the micro particles included in the collected sample; and a heater which heats the outlet portion to produce a pressure difference between the inlet portion and the outlet portion, so that the sample flows through the channel from the inlet toward the outlet. The device for detecting micro particles in gas provides the advantage that micro particles included in gaseous sample can be detected without having to use additional pump or collector, detection time can be reduced, and detection accuracy can be improved.

Abstract: A device for separating micro particles is provided. The separating device comprises a sample inlet into which a sample containing micro particles is injected; fluid inlets into which fluid is injected to form a flow sheath for the sample; a plurality of outlets through which the micro particles are separated and discharged out; a channel through which the sample and the fluid flow; and a first electrode and a second electrode longitudinally disposed in parallel in the channel. The first and the second electrodes are provided in such a manner that an electrode gap between the first and the second electrodes has a curved shape. The micro particles in the sample are easily separated using a dielectrophoresis characteristic.

Abstract: Provided are a patterned magnetic recording medium which has an extremely planarized surface and a method of manufacturing the same. The medium includes a patterned magnetic layer including a plurality of magnetic columns that are arranged with a predetermined pitch therebetween; a substrate that supports the patterned magnetic layer; and a boundary layer, which is filled in gaps between the magnetic columns of the patterned magnetic layer. Thus, an air bearing due to stable airflow is created over the magnetic layer, and magnetic recording/reproduction are easily achieved at ultrahigh density.

Abstract: Provided are a fingerprint sensor and a fabrication method thereof. The fingerprint sensor includes: a complementary metal-oxide semiconductor structure which is formed on a substrate that is doped with a first type dopant; an insulating layer which is formed on the complementary metal-oxide semiconductor structure; a lower electrode which is formed in a central portion of the insulating layer; a piezoelectric region which is formed on the lower electrode; an upper electrode which is formed on the piezoelectric layer; and a fingerprint contact layer which is formed to cover a portion of an upper surface of the insulating layer on which the lower electrode has not been formed, the lower electrode, the piezoelectric region, and the upper electrode.

Abstract: A method of manufacturing a micromirror array and a method of manufacturing an optical device having a micromirror. The method of manufacturing a micromirror array includes forming an adhesion layer on a substrate and a magnetic layer on the adhesion layer, patterning the adhesion layer and magnetic layer, magnetizing the magnetic layer and forming a bonding layer on each side of the adhesion layer and the magnetic layer. The substrate is severed into units, each unit including the adhesion layer, the magnetic layer, and the bonding layer. A mirror surface is formed on a side of the substrate to form a unit micromirror structure. The unit micromirror structure is then placed in a holder to form a micromirror array.

Abstract: The present invention relates to an apparatus for maintaining freshness by applying a displacement current. Application of the displacement current to an object of preservation interrupts an ion channel of a living microorganism present in the object of preservation, thereby preventing the microorganism from proliferating and subsequently maintaining the freshness of the object of preservation. The apparatus for maintaining freshness by applying a displacement current includes: a displacement current control unit which regulates the displacement current at less than 1 A and less than 3 GHz; and a displacement current applying unit, comprising a first electrode, and a second electrode which faces the first electrode.

Abstract: A system for maintaining the freshness of an object of preservation comprising an electrode made of a flexible conducting polymer. The system includes: an electrode module comprising a first electrode and a second electrode which face each other; and an electric field supply module generating an electric field between the first electrode and the second electrode by supplying a voltage to the electrode module, and where the first electrode is comprised of a flexible conducting polymer material.

Abstract: Provided are a method and an apparatus for reproducing information using a semiconductor probe.

Abstract: A method for manufacturing a flexible MEMS transducer includes forming a sacrificial layer on a flexible substrate, sequentially depositing a membrane layer, a lower electrode layer, an active layer, and an upper electrode layer on the sacrificial layer by PECVD, sequentially patterning the upper electrode layer, the active layer, and the lower electrode layer, depositing an upper protective layer to cover the upper electrode layer, the lower electrode layer, and the active layer, patterning the upper protective layer to be connected to the lower electrode layer and the upper electrode layer, and then depositing a connecting pad layer and patterning the connecting pad layer to form a first connecting pad to be connected to the lower electrode layer and a second connecting pad to be connected to the upper electrode layer; and patterning the membrane layer to expose the sacrificial layer and removing the sacrificial layer.

Abstract: A method of manufacturing a micromirror array and a method of manufacturing an optical device having a micromirror. The method of manufacturing a micromirror array includes forming an adhesion layer on a substrate and a magnetic layer on the adhesion layer, patterning the adhesion layer and magnetic layer, magnetizing the magnetic layer and forming a bonding layer on each side of the adhesion layer and the magnetic layer. The substrate is severed into units, each unit including the adhesion layer, the magnetic layer, and the bonding layer. A mirror surface is formed on a side of the substrate to form a unit micromirror structure. The unit micromirror structure is then placed in a holder to form a micromirror array.

Abstract: A probe head includes a sensor unit having: as sensor which records or reads data on or from a predetermined medium; first and second shields disposed on both sides of the sensor at a predetermined distance from each other; and first and second intermediate layers respectively interposed between the sensor and the first shield, and the sensor and the second shield. A method of fabricating the probe head includes: providing a substrate; forming an insulating layer on the substrate; forming a first shield on the insulating layer; forming a first intermediate layer on the first shield; forming a sensor on the first intermediate layer; forming a second intermediate layer on the sensor; forming a second shield on the second intermediate layer; and forming a protective layer on the second shield.

Abstract: A flexible wireless MEMS microphone includes a substrate of a flexible polymeric material, a flexible MEMS transducer structure formed on the substrate by PECVD, an antenna printed on the substrate for communicating with an outside source, a wire and interface circuit embedded in the substrate to electrically connect the flexible MEMS transducer and the antenna, a flexible battery layer electrically connected to the substrate for supplying power to the MEMS transducer, and a flexible bluetooth module layer electrically connected to the battery layer. The flexible MEMS transducer includes a flexible substrate, a membrane layer deposited on the substrate, a lower electrode layer formed on the membrane layer, an active layer formed by depositing a piezopolymer on the lower electrode layer, an upper electrode layer formed on the active layer, and a first and a second connecting pad electrically connected to the lower and upper electrode layers, respectively.

Abstract: Provided are a fingerprint sensor and a fabrication method thereof. The fingerprint sensor includes: a complementary metal-oxide semiconductor structure which is formed on a substrate that is doped with a first type dopant; an insulating layer which is formed on the complementary metal-oxide semiconductor structure; a lower electrode which is formed in a central portion of the insulating layer; a piezoelectric region which is formed on the lower electrode; an upper electrode which is formed on the piezoelectric layer; and a fingerprint contact layer which is formed to cover a portion of an upper surface of the insulating layer on which the lower electrode has not been formed, the lower electrode, the piezoelectric region, and the upper electrode.

Abstract: Provided are a patterned magnetic recording medium which has an extremely planarized surface and a method of manufacturing the same. The medium includes a patterned magnetic layer including a plurality of magnetic columns that are arranged with a predetermined pitch therebetween; a substrate that supports the patterned magnetic layer; and a boundary layer, which is filled in gaps between the magnetic columns of the patterned magnetic layer. Thus, an air bearing due to stable airflow is created over the magnetic layer, and magnetic recording/reproduction are easily achieved at ultrahigh density.

Abstract: A method for manufacturing a flexible MEMS transducer includes forming a sacrificial layer on a flexible substrate, sequentially depositing a membrane layer, a lower electrode layer, an active layer, and an upper electrode layer on the sacrificial layer by PECVD, sequentially patterning the upper electrode layer, the active layer, and the lower electrode layer, depositing an upper protective layer to cover the upper electrode layer, the lower electrode layer, and the active layer, patterning the upper protective layer to be connected to the lower electrode layer and the upper electrode layer, and then depositing a connecting pad layer and patterning the connecting pad layer to form a first connecting pad to be connected to the lower electrode layer and a second connecting pad to be connected to the upper electrode layer; and patterning the membrane layer to expose the sacrificial layer and removing the sacrificial layer.

Abstract: A flexible wireless MEMS microphone includes a substrate of a flexible polymeric material, a flexible MEMS transducer structure formed on the substrate by PECVD, an antenna printed on the substrate for communicating with an outside source, a wire and interface circuit embedded in the substrate to electrically connect the flexible MEMS transducer and the antenna, a flexible battery layer electrically connected to the substrate for supplying power to the MEMS transducer, and a flexible bluetooth module layer electrically connected to the battery layer. The flexible MEMS transducer includes a flexible substrate, a membrane layer deposited on the substrate, a lower electrode layer formed on the membrane layer, an active layer formed by depositing a piezopolymer on the lower electrode layer, an upper electrode layer formed on the active layer, and a first and a second connecting pad electrically connected to the lower and upper electrode layers, respectively.

Abstract: A method for manufacturing an array of thin film actuated mirrors, which is capable of minimizing the effect of a heat treatment involved in the manufacture of the thin film actuated mirror, is disclosed. The method includes the steps of: providing an active matrix having an array of connecting terminals; forming a contact member on top of each of the connecting terminals; forming a thin film sacrificial layer on top of the active matrix; forming an array of actuating structures on top of the thin film sacrificial layer, wherein each of the actuating structures has a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode and an elastic member having a contact hole; and removing the thin film sacrificial layer, thereby forming the array of thin film actuated mirrors.