Abstract: Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring and a connecting terminal, an actuator formed on the substrate, and a reflecting member formed on the actuator. The actuator has a plurality of actuating portions in which adjacent actuating portions are actuated in opponent directions one after another, so the reflecting member installed on the actuator has large tilting angle. Therefore, the light efficiency of the light reflected by reflecting member increases and the contrast of the picture projected onto a screen also increases. Furthermore, the distance between a light source and the screen is wider because the tilting angle of the reflecting member is bigger.

Abstract: Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring and a connecting terminal, an actuator formed on the substrate, and a reflecting member formed on the actuator. The actuator has a plurality of actuating portions in which adjacent actuating portions tilt in opposite directions one after another. Each actuating portion has bottom electrodes, active layers, top electrodes, and via contacts. The top electrodes and bottom electrodes of the actuating portions are cross-connected, so electric fields are generated in opposite directions. The reflecting member installed on the actuator has a large tilting angle. Therefore, the light efficiency of the light reflected by the reflecting member increases and the contrast of the picture projected onto a screen also increases.