Patents by Inventor Yusuke Aoki

Yusuke Aoki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220215570
    Abstract: According to one embodiment, a progress determination system includes a first acquisition part and a second acquisition part. The first acquisition part acquires area data relating to area values of a plurality of colors from an image of an article, the article relating to a task. The second acquisition part acquires a classification result from a classifier by inputting the area data to the classifier. The classification result indicates a progress amount.
    Type: Application
    Filed: September 2, 2021
    Publication date: July 7, 2022
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yusuke AOKI, Yuki SAKURAI, Tomoyuki SHIBATA
  • Publication number: 20220199363
    Abstract: There is provided a plasma processing apparatus comprising: a chamber where a substrate is disposed and processed by plasma generated therein; a substrate attraction portion disposed in the chamber, having therein an electrode, and configured to attract the substrate by a voltage applied to the electrode; a conductive member disposed in the chamber; and a voltage supply configured to apply a voltage to the electrode. A reference potential terminal of the voltage supply is connected to the conductive member, and the voltage supply applies a voltage having as a reference potential a potential of the conductive member to the electrode.
    Type: Application
    Filed: December 23, 2021
    Publication date: June 23, 2022
    Applicant: Tokyo Electron Limited
    Inventor: Yusuke AOKI
  • Publication number: 20220139752
    Abstract: A plasma processing method includes supplying a voltage to an electrode provided in an electrostatic chuck, thereby adsorbing a substrate onto an upper surface of the electrostatic chuck; after the voltage supplied to the electrode of the electrostatic chuck is stabilized, cutting off the supply of the voltage to the electrode, thereby bringing the electrode into a floating state; and after the voltage supplied to the electrode of the electrostatic chuck is stabilized, performing a predetermined processing with plasma on a surface of the substrate adsorbed onto the electrostatic chuck.
    Type: Application
    Filed: October 28, 2021
    Publication date: May 5, 2022
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: Yusuke AOKI
  • Patent number: 11262243
    Abstract: A vehicle lamp includes a light emitting source, a support substrate configured to support the light emitting source, a heat sink configured to support the support substrate and dissipate heat from the light emitting source, and a light controller configured to control light from the light emitting source. The heat sink includes an opening configured to measure the radiant heat of the support substrate.
    Type: Grant
    Filed: February 19, 2019
    Date of Patent: March 1, 2022
    Assignee: KOITO MANUFACTURING CO., LTD.
    Inventor: Yusuke Aoki
  • Publication number: 20220059385
    Abstract: A substrate processing method is provided. The method includes a) causing a substrate to be attracted to an electrostatic chuck, and b) processing the substrate. The method includes c) determining a charge removal temperature based on information preliminarily stored in a storage, thereby adjusting a surface temperature of the electrostatic chuck to be greater than or equal to the determined charge removal temperature, the information indicating a relationship between a maximum surface temperature of the electrostatic chuck, during substrate processing, and a residual charge amount for the processed substrate. The method includes d) removing a charge from the processed substrate.
    Type: Application
    Filed: August 23, 2021
    Publication date: February 24, 2022
    Inventors: Yusuke AOKI, Ryusei KASHIMURA
  • Patent number: 11251048
    Abstract: A plasma processing method according to an exemplary embodiment includes generating plasma from a film formation gas in a chamber of a plasma processing apparatus by supplying radio frequency power from a radio frequency power source. The plasma processing method further includes forming a protective film on an inner wall surface of a side wall of the chamber by depositing a chemical species from the plasma on the inner wall surface. In the forming a protective film, a pulsed negative direct-current voltage is periodically applied from a direct-current power source device to an upper electrode of the plasma processing apparatus.
    Type: Grant
    Filed: June 9, 2020
    Date of Patent: February 15, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yusuke Aoki, Toshikatsu Tobana, Fumiya Takata, Shinya Morikita, Kazunobu Fujiwara, Jun Abe, Koichi Nagami
  • Publication number: 20210249562
    Abstract: A light emitting device includes: a semiconductor structure including: a first semiconductor layer including: a first side parallel to an m-plane of the first semiconductor layer, and a second side meeting the first side, the second side being parallel to an a-plane of the first semiconductor layer, a light emitting layer disposed on a portion of the first semiconductor layer, and a second semiconductor layer disposed on the light emitting layer; a first conductive member disposed on the first semiconductor layer; a second conductive member disposed on the second semiconductor layer; a first terminal disposed on the first conductive member; a second terminal disposed on the second conductive member; and a covering member covering a lateral surface of the first conductive member, a lateral surface of the second conductive member, a lateral surface of the first terminal, and a lateral surface of the second terminal.
    Type: Application
    Filed: January 28, 2021
    Publication date: August 12, 2021
    Applicant: NICHIA CORPORATION
    Inventors: Takefumi NAKAGAWA, Yusuke AOKI
  • Patent number: 11085618
    Abstract: A vehicle lamp includes a light source; a power supply configured to supply power to the light source; a heat sink configured to dissipate heat from the light source; and a light controller configured to control light from the light source. The heat sink has a configuration in which a plate is bent so as to have a first portion and a second portion that is bent at a predetermined angle with respect to the first portion, the light source is arranged on the first portion, and the second portion includes an insertion portion through which the power supply connected to the light source is inserted.
    Type: Grant
    Filed: February 19, 2019
    Date of Patent: August 10, 2021
    Assignee: KOITO MANUFACTURING CO., LTD.
    Inventor: Yusuke Aoki
  • Patent number: 11081351
    Abstract: A disclosed method of processing a substrate includes (a) providing a substrate in a chamber of a plasma processing apparatus. The substrate has a patterned organic mask. The method further includes (b) generating plasma from a processing gas in the chamber in a state where the substrate is accommodated in the chamber. The method further includes (c) periodically applying a pulsed negative direct-current voltage to an upper electrode of the plasma processing apparatus, during execution of the generating plasma (that is, the above (b)). In the applying a pulsed negative direct-current voltage, ions from the plasma are supplied to the upper electrode, so that a silicon-containing material which is released from the upper electrode is deposited on the substrate.
    Type: Grant
    Filed: August 10, 2020
    Date of Patent: August 3, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yusuke Aoki, Toshikatsu Tobana, Shinya Morikita, Satoru Nakamura
  • Publication number: 20210234062
    Abstract: A method of manufacturing a light-emitting device includes: providing a structure body including: a first substrate having a first surface and a second surface opposite to the first surface, the first surface including first regions and second regions; first light-emitting element portions respectively located on the first regions; and second light-emitting element portions respectively located on the second regions; fixing the first light-emitting element portions to a second substrate without fixing the second light-emitting element portions to the second substrate; subsequently, transferring the first light-emitting element portions from the first substrate to the second substrate by removing, from the second surface, portions of the first substrate overlapping the first regions when viewed from the second surface; and subsequently, separating the first light-emitting element portions from the second substrate in a state in which the second light-emitting element portions are located on the second regions.
    Type: Application
    Filed: January 25, 2021
    Publication date: July 29, 2021
    Applicant: NICHIA CORPORATION
    Inventor: Yusuke AOKI
  • Patent number: 11062882
    Abstract: A plasma processing apparatus according to an exemplary embodiment includes a chamber, a substrate support, an upper electrode, a radio frequency power source, and a direct-current power source device. The substrate support includes a lower electrode. The lower electrode is provided in the chamber. The upper electrode is provided above the substrate support. The radio frequency power source generates a plasma in the chamber. The direct-current power source device is electrically connected to the upper electrode. The direct-current power source device is configured to periodically generate a pulsed negative direct-current voltage. An output voltage of the direct-current power source device is alternately switched between a negative direct-current voltage and zero volts.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: July 13, 2021
    Assignee: Tokyo Electron Limited
    Inventors: Yusuke Aoki, Shinya Morikita, Toshikatsu Tobana, Fumiya Takata
  • Publication number: 20210192771
    Abstract: According to one embodiment, a calculation system includes a detector, a combiner, and a duration calculator. The detector refers to a plurality of images of an object imaged from mutually-different angles, detects the object in each of the images, and calculates a provisional position of the object in a coordinate system for each of the images. The coordinate system is prescribed. The combiner calculates a combined position of the object in the coordinate system by using the calculated plurality of provisional positions. The duration calculator refers to process information and a plurality of execution regions and calculates a duration of at least a portion of a plurality of processes based on the combined position and the execution regions. The process information includes information relating to the processes. The execution regions are represented using the coordinate system. The processes are executed in the execution regions.
    Type: Application
    Filed: December 10, 2020
    Publication date: June 24, 2021
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yusuke AOKI, Yojiro TONOUCHI, Toshiaki NAKASU, Tomoyuki SHIBATA, Yuki SAKURAI, Akiko KASE, Ryo MORINAGA, Masaki IWASAKI, Sho KAWAHATA
  • Publication number: 20210057212
    Abstract: A disclosed method of processing a substrate includes (a) providing a substrate in a chamber of a plasma processing apparatus. The substrate has a patterned organic mask. The method further includes (b) generating plasma from a processing gas in the chamber in a state where the substrate is accommodated in the chamber. The method further includes (c) periodically applying a pulsed negative direct-current voltage to an upper electrode of the plasma processing apparatus, during execution of the generating plasma (that is, the above (b)). In the applying a pulsed negative direct-current voltage, ions from the plasma are supplied to the upper electrode, so that a silicon-containing material which is released from the upper electrode is deposited on the substrate.
    Type: Application
    Filed: August 10, 2020
    Publication date: February 25, 2021
    Applicant: Tokyo Electron Limited
    Inventors: Yusuke AOKI, Toshikatsu TOBANA, Shinya MORIKITA, Satoru NAKAMURA
  • Publication number: 20200402805
    Abstract: A plasma processing method according to an exemplary embodiment includes generating plasma from a film formation gas in a chamber of a plasma processing apparatus by supplying radio frequency power from a radio frequency power source. The plasma processing method further includes forming a protective film on an inner wall surface of a side wall of the chamber by depositing a chemical species from the plasma on the inner wall surface. In the forming a protective film, a pulsed negative direct-current voltage is periodically applied from a direct-current power source device to an upper electrode of the plasma processing apparatus.
    Type: Application
    Filed: June 9, 2020
    Publication date: December 24, 2020
    Applicant: Tokyo Electron Limited
    Inventors: Yusuke AOKI, Toshikatsu TOBANA, Fumiya TAKATA, Shinya MORIKITA, Kazunobu FUJIWARA, Jun ABE, Koichi NAGAMI
  • Publication number: 20200388724
    Abstract: A light emitting element comprises: a semiconductor layered body including a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, and a light emitting layer provided between the first semiconductor layer and the second semiconductor layer; and a dielectric member being in contact with the first semiconductor layer. The first semiconductor layer refractive index with respect to a wavelength of light differs from the light emitting layer refractive index with respect to the wavelength of light. The dielectric member comprises a first dielectric portion and a second dielectric portion. In a second direction that is perpendicular to a first direction that extends from the second semiconductor layer to the first semiconductor layer, a first portion of the first semiconductor layer is positioned between the first dielectric portion and the second dielectric portion. The first dielectric portion comprises the first surface and the second surface.
    Type: Application
    Filed: June 5, 2020
    Publication date: December 10, 2020
    Applicant: NICHIA CORPORATION
    Inventor: Yusuke AOKI
  • Patent number: 10811686
    Abstract: A slurry for a positive electrode of a lithium-ion secondary battery. Also disclosed is a positive electrode for a lithium-ion secondary battery obtained using the slurry for a positive electrode of a lithium-ion secondary battery, and a production method for the electrode; and a lithium-ion secondary battery provided with the positive electrode for a lithium-ion secondary battery, and a production method for the battery. The slurry for a positive electrode of a lithium-ion secondary battery includes a positive electrode active material (A), a conductive auxiliary agent (B), a resin binder (C), a thickening dispersant (D), and water (E), wherein the thickening dispersant (D) includes a polyalkylene oxide having a phenyl group in a side chain thereof.
    Type: Grant
    Filed: August 3, 2016
    Date of Patent: October 20, 2020
    Assignee: SHOWA DENKO K.K.
    Inventors: Yusuke Aoki, Mitsuru Hanasaki
  • Publication number: 20200266036
    Abstract: An apparatus for plasma processing is configured to generate plasma in a chamber and periodically apply a pulsed negative DC voltage to an upper electrode from a DC power supply in the plasma processing on a substrate and in plasma cleaning. A duty ratio of the pulsed negative DC voltage used for the plasma processing is smaller than a duty ratio of the pulsed negative DC voltage used for the plasma cleaning. An absolute value of an average value of an output voltage of the DC power supply used for the plasma processing is smaller than an absolute value of an average value of the output voltage of the DC power supply used for the plasma cleaning.
    Type: Application
    Filed: February 13, 2020
    Publication date: August 20, 2020
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Yusuke AOKI, Fumiya TAKATA, Toshikatsu TOBANA, Shinya MORIKITA, Kazunobu FUJIWARA, Jun ABE, Koichi NAGAMI
  • Publication number: 20200234925
    Abstract: A plasma processing apparatus according to an exemplary embodiment includes a chamber, a substrate support, an upper electrode, a radio frequency power source, and a direct-current power source device. The substrate support includes a lower electrode. The lower electrode is provided in the chamber. The upper electrode is provided above the substrate support. The radio frequency power source generates a plasma in the chamber. The direct-current power source device is electrically connected to the upper electrode. The direct-current power source device is configured to periodically generate a pulsed negative direct-current voltage. An output voltage of the direct-current power source device is alternately switched between a negative direct-current voltage and zero volts.
    Type: Application
    Filed: January 15, 2020
    Publication date: July 23, 2020
    Applicant: Tokyo Electron Limited
    Inventors: Yusuke AOKI, Shinya MORIKITA, Toshikatsu TOBANA, Fumiya TAKATA
  • Patent number: 10717845
    Abstract: Provided is a polycarbonate-based resin composition containing a polycarbonate-based resin containing a predetermined polycarbonate-polyorganosiloxane copolymer, and 0.5 to 5 parts by mass of a white pigment with respect to 100 parts by mass of the polycarbonate-based resin, in which the molecular weight distribution of a polyorganosiloxane block in the polycarbonate-polyorganosiloxane copolymer is controlled within a specific region.
    Type: Grant
    Filed: March 11, 2016
    Date of Patent: July 21, 2020
    Assignee: IDEMITSU KOSAN CO., LTD.
    Inventors: Yasuhiro Ishikawa, Aki Yamada, Yusuke Aoki
  • Publication number: 20200194238
    Abstract: A structure for a substrate processing apparatus to be situated opposite a support pedestal for supporting a substrate includes an electrode plate having a surface exposed to an inner space of a chamber, the surface of the electrode plate having a first roughness, and an annular member disposed around the electrode plate and having a surface exposed to the inner space, the surface of the annular member having a second roughness, wherein the first roughness is different from the second roughness.
    Type: Application
    Filed: December 10, 2019
    Publication date: June 18, 2020
    Inventors: Daisuke ITO, Toshimasa KOBAYASHI, Toshikatsu TOBANA, Takuya OBARA, Yusuke AOKI