Abstract: A concentration computation section is a concentration measurement section including a light-emitting element and a first sensor element. The concentration computation section includes a light-emitting element drive section that drives the light-emitting element; a signal acquisition section that acquires at least an output signal of the first sensor element, a first drive signal that is a first voltage value or a first current value of the light-emitting element, and a second drive signal that is a second voltage value or a second current value of the light-emitting element; and a computation section that computes a concentration based on signals acquired by the signal acquisition section. The computation section, based on the first drive signal and the second drive signal, corrects the output signal of the first sensor element and computes the concentration.

Abstract: Provided is an electric connector which includes: a housing; and a pair of reinforcement brackets reinforces both end sides of the housing in a longitudinal direction, wherein the housing has a bottom wall, a pair of short walls, a pair of long walls, an island-shaped protruding wall surrounded by the short walls and the long walls, and pairs of corner portions between a corresponding pair of short and long walls, each reinforcement bracket has an outer plate portion, a short wall protection portion, a pair of side plate portions, a pair of long wall protection portions, a pair of connection portions connecting the outer plate portion to the side plate portions, and a pair of corner protection portions, and each corner protection portion extends from either one of the outer plate portion or the side plate portions, and is formed to cover an upper surface of the corner portions.

Abstract: Provided are a gas concentration measurement system, gas concentration computation section, and gas concentration measurement method enabling high-accuracy gas concentration measurement. The gas concentration measurement system includes: a gas concentration measurement section (10a) including a light-emitting element (11) and a first sensor element; a light-emitting element drive section that drives the light-emitting element; a signal acquisition section (21) that acquires at least an output signal of the first sensor element, a first drive signal that is a first voltage value or first current value of the light-emitting element, and a second drive signal that is a second voltage value or second current value of the light-emitting element; and a computation section (22) that computes gas concentration based on signals acquired by the signal acquisition section.

Abstract: Provided is a gas sensor that senses gas to be sensed, comprising a light emitting unit that radiates light; a first light receiving unit that receive at least a part of the light that passed through the gas to be sensed, and outputs a first light reception signal according to a light reception result; a second light receiving unit that receives at least a part of the light that did not pass through the gas to be sensed, and outputs a second light reception signal according to a light reception result; and an operating unit that senses that condensation has occurred in a light path from the light emitting unit to the first light receiving unit based on the first light reception signal and the second light reception signal.

Abstract: Provided is a breath sensor which senses a breath generated by breathing, including: a light emitting unit which emits light toward a path through which the breath passes; a first light receiving unit which receives at least a part of the light emitted from the light emitting unit and outputs a first light reception signal according to a light reception result; and an operating unit which performs an operation on the first light reception signal, wherein the operating unit calculates a baseline of a waveform of based on a frequency component of the first light reception signal lower than a first cut-off frequency that is set, and senses the breath based on a signal obtained by removing the baseline from the first light reception signal.

Abstract: A gas sensor (1) includes a gas measuring unit (40) including a light source (11) provided on a substrate, a detector (41) provided on the substrate and configured to detect a signal based on light emitted from the light source, and a gas detection space (42) provided with a hole for gas to pass through. The natural frequency of a resonance mode of the gas measuring unit is f, and the driving frequency of the light source is from 0.9f or more to 1.1f or less. A distribution of sound pressure is generated in the gas detection space by driving of the light source, and the light source and the detector are each arranged in a region that is 70% or more of the maximum absolute value of the sound pressure.

Abstract: An optical member (30) includes a reflective structure (32) including a metallic thin film or an optical thin film, a metal body electrically disconnected from the reflective structure (32), and a support (31) integrally sealing and supporting the reflective structure (32) and the metal body. The reflective structure (32) is exposed from a first surface of the support (31). The metal body is exposed from the support (31) on a second surface opposite the first surface from which the reflective structure (32) is exposed, and on at least one side different from the first surface and the second surface.

Abstract: There is provided a sensor system including a reward transmission unit which transmits a reward for calibration by a calibration unit. The calibration unit calibrates an environmental measurement value of a measurement target that is measured by a second environmental sensor, based on first calibration information for calibrating an environmental measurement value of a measurement target that is measured by a first environmental sensor. The sensor system may further include: a first sensor device having a calibration information transmission unit which transmits the first calibration information; and a second sensor device having a receiving unit which receives the first calibration information that is transmitted by the calibration information transmission unit, and the calibration unit.

Abstract: Provided is a plasma processing method capable of suppressing the diffusion of contamination to a transportation system while forming a deposited film on the inner wall of a processing chamber. The plasma processing method, in which a sample placed on a sample table is plasma-processed in a processing chamber, includes: a first step of removing deposits in the processing chamber by using plasma; a second step of depositing the deposits in the processing chamber by using a mixed gas of hydrofluorocarbon gas and argon (Ar) gas after the first step; a third step of selectively removing the deposits on the sample table by using a mixed gas of oxygen (O2) gas and argon (Ar) gas after the second step; and a fourth step of plasma-processing a predetermined number of sheets of the sample after the third step.

Abstract: Provided is an electric connector which includes: a terminal; and a housing, in which the terminal has a bottom portion, a first leg portion, and a second leg portion, the housing has a first side wall, the first leg portion extends in a fitting direction of fitting to a partner connector from a first direction side of the bottom portion, and is elastically deformable in a first direction, the second leg portion extends in the fitting direction from a second direction side of the bottom portion, and is elastically deformable in a second direction, the first side wall extends in the fitting direction to hold the second leg portion, and when a terminal of the partner connector is inserted into between the bottom portion, the first leg portion, and the second leg portion, the second leg portion and the first side wall are elastically deformed in the second direction.

Abstract: Provided are a gas concentration measurement system, gas concentration computation section, and gas concentration measurement method enabling high-accuracy gas concentration measurement. The gas concentration measurement system includes: a gas concentration measurement section (10a) including a light-emitting element (11) and a first sensor element; a light-emitting element drive section that drives the light-emitting element; a signal acquisition section (21) that acquires at least an output signal of the first sensor element, a first drive signal that is a first voltage value or first current value of the light-emitting element, and a second drive signal that is a second voltage value or second current value of the light-emitting element; and a computation section (22) that computes gas concentration based on signals acquired by the signal acquisition section.

Abstract: Provided are a gas sensor system, a gas sensor control device, and a control method that enable high-accuracy measurement without causing a user to wait. The gas sensor system (1) includes: a gas sensor (10) that performs concentration measurement of a measurement target gas in air; a heater (17) that heats the gas sensor; an air intake port (11) and an air discharge port (12) that are connected to the gas sensor; and a control device (20) that performs heating control of operating the heater so as to heat the gas sensor. The control device acquires temperature information for the gas sensor and temperature information for a space from which the air intake port takes in air and performs the heating control based on the temperature information for the gas sensor and the temperature information for the space from which the air intake port takes in air.

Abstract: Provided are a gas sensor system, a gas sensor control device, and a control method that enable high-accuracy measurement without causing a user to wait. The gas sensor system (1) includes: a reception section (30) that receives a startup signal from externally to the gas sensor system; a gas sensor (10) that performs concentration measurement of a measurement target gas in air; an air intake port (11) and an air discharge port (12) that are connected to the gas sensor; at least one fan (13); and a control device (20) that starts up the gas sensor through reception of the startup signal, that acquires temperature information for the gas sensor, and that, based on the temperature information for the gas sensor, performs cooling control of operating the fan so as to cool the gas sensor from startup of the gas sensor, before initiation of the concentration measurement.

Abstract: Provided is an electric connector which includes: a housing; and a pair of reinforcement brackets reinforces both end sides of the housing in a longitudinal direction, wherein the housing has a bottom wall, a pair of short walls, a pair of long walls, an island-shaped protruding wall surrounded by the short walls and the long walls, and pairs of corner portions between a corresponding pair of short and long walls, each reinforcement bracket has an outer plate portion, a short wall protection portion, a pair of side plate portions, a pair of long wall protection portions, a pair of connection portions connecting the outer plate portion to the side plate portions, and a pair of corner protection portions, and each corner protection portion extends from either one of the outer plate portion or the side plate portions, and is formed to cover an upper surface of the corner portions.

Abstract: There is provided a gas sensor system including a first gas sensor apparatus including a transmission unit configured to transmit first calibration information and reliability information of the first gas sensor apparatus, and a second gas sensor apparatus including a reception unit configured to receive the first calibration information and the reliability information and a calibration unit configured to calibrate, based on the first calibration information, a gas concentration of a second gas sensor, in which when the calibration reliability of the first gas sensor apparatus is higher than a reference calibration reliability, the calibration unit is configured to calibrate, based on the first calibration information, the gas concentration of the second gas sensor.

Abstract: Provided is a connector terminal which includes: a mounting portion having a flat surface in a width direction and a depth direction; a holding target portion formed continuously to the mounting portion, formed in an inverted U-shape in a height direction; a base portion formed continuously to the holding target portion and having a flat surface in the width direction and the depth direction; and an elastic arm portion formed continuously to the base portion, having a standing portion extending in the height direction, and having a length in the width direction, in which a length of the standing portion in the width direction is approximately maximum among lengths of the connector terminal in the width direction.

Abstract: A light emitting and receiving apparatus includes a controller and a calculator. The controller acquires a first detection current from a light-receiving element when supplying a first drive current to a light-emitting element and acquires a second detection current from the light-receiving element when supplying a second drive current to the light-emitting element. The calculator generates a signal indicating deterioration of the light-emitting element when a reference value and an aging value satisfy a deterioration judgment condition, the aging value being a ratio between the first detection current and the second detection current. The detection accuracy of the light emitting and receiving apparatus is thereby improved.

Abstract: Provided is a connector terminal which includes: a mounting portion having a flat surface in a width direction and a depth direction; a holding target portion formed continuously to the mounting portion, formed in an inverted U-shape in a height direction, and having a length in the width direction; a base portion formed continuously to the holding target portion through a base portion transition portion and having a flat surface in the width direction and the depth direction; and an elastic arm portion formed continuously to the base portion through a standing transition portion, having a standing portion extending in the height direction and a portion which is to contact a terminal of a partner connector, and having a length in the width direction, in which a length of the standing portion in the width direction is approximately maximum among lengths of the connector terminal in the width direction.

Abstract: A light emitting and receiving apparatus includes a controller and a calculator. The controller acquires a first detection current from a light-receiving element when supplying a first drive current to a light-emitting element and acquires a second detection current from the light-receiving element when supplying a second drive current to the light-emitting element. The calculator generates a signal indicating deterioration of the light-emitting element when a reference value and an aging value satisfy a deterioration judgment condition, the aging value being a ratio between the first detection current and the second detection current. The detection accuracy of the light emitting and receiving apparatus is thereby improved.

Abstract: A plasma processing method includes an etching step of etching a wafer in a chamber, a plasma cleaning step of removing a particle on an inner wall of the chamber by introducing a gas containing a halogen element into the chamber by a plasma processing method for removing remaining halogen or the like in the chamber in a short time and improving throughput, and a remaining halogen removing step of removing the halogen element remaining in the chamber in the plasma cleaning step by alternately repeating an on state and an off state of the plasma containing oxygen in the chamber.