Abstract: A plasma processing method includes an etching step of etching a wafer in a chamber, a plasma cleaning step of removing a particle on an inner wall of the chamber by introducing a gas containing a halogen element into the chamber by a plasma processing method for removing remaining halogen or the like in the chamber in a short time and improving throughput, and a remaining halogen removing step of removing the halogen element remaining in the chamber in the plasma cleaning step by alternately repeating an on state and an off state of the plasma containing oxygen in the chamber.

Abstract: A light-emitting/receiving device including: a diode-type light-emitting element formed on a semiconductor substrate; a diode-type light-receiving element formed on the semiconductor substrate; a light source driving unit configured to supply a first common voltage to an anode or a cathode of the light-emitting element to drive the light-emitting element; and a light signal processing unit configured to perform current/voltage conversion on an output current outputted from the light-receiving element, by referring to a second common voltage.

Abstract: A light-emitting/receiving device including: a diode-type light-emitting element formed on a semiconductor substrate; a diode-type light-receiving element formed on the semiconductor substrate; a light source driving unit configured to supply a first common voltage to an anode or a cathode of the light-emitting element to drive the light-emitting element; and a light signal processing unit configured to perform current/voltage conversion on an output current outputted from the light-receiving element, by referring to a second common voltage.

Abstract: To provide a vehicle resin part and a vehicle resin part manufacturing method with which raised portions can be formed using slanted slide molds even on opposing molded portions that have a narrow distance between them. In a rail cover, shelf-shaped portions that can be molded using a cavity and a core are formed on opposing side wall portions, and claw portions that can be molded using slanted slide molds are formed projecting from the shelf-shaped portions in the directions of the opposing side wall portions. Additionally, the claw portions are molded by moving, during demolding, the pair of slanted slide molds in the directions of the opposing side wall portions from a molding position and thereafter removing the pair of slanted slide molds in a forward direction.

Abstract: An infrared-sensor filter member includes an optical filter disposed in an opening portion of a second member and a first member. The infrared-sensor filter member includes a recess portion formed from a light-incident surface of the optical filter and the first member. At least a part of a bottom surface of the recess portion is formed by the light-incident surface and side walls of the recess portion, which are formed by the first member.

Abstract: A vehicle-use resin cover including: a resin cover main body configured including an opening, and anchoring portions formed at locations running along a peripheral edge of the opening; a resin cap member, which is mounted in the opening and is configured including a cap main body that covers the opening, and anchored portions, which are provided to an outer peripheral portion of the cap main body so as to correspond to the anchoring portions and are anchored by the anchoring portions; a recessed portion, which is formed at the peripheral edge of the opening and is in communication with the opening at the cap member side of the recessed portion, and through which a leading end of a tool for removing the cap member is insertable; and a marker portion provided to the outer peripheral portion of the cap main body at a position facing the recessed portion.

Abstract: A wireless circuit that can be used in a plurality of frequency bands even if its duplexer is formed of current variable frequency filters is provided. The circuit includes a transmission-reception antenna 911, a variable frequency duplexer 131, a double-pole six-throw switch 923, an RFIC 180, and a controller 190 which executes switching operations in accordance with control signals. The RFIC 180 determines a pair of frequency bands for transmission and reception signals input to the variable frequency duplexer 131 and generates and sends the control signals to perform switching control operations to connect a transmission port corresponding to the determined transmission frequency band with the transmission terminal of the variable frequency duplexer 131 and to connect a reception port corresponding to the determined reception frequency band with the reception terminal of the variable frequency duplexer 131 and to perform a frequency switching operation of the variable frequency duplexer 131.

Abstract: A front-end circuit includes an RFIC, an antenna, N duplexers, N variable impedance adjustment circuits, a switch for selecting any two of the N variable impedance adjustment circuits, and a control unit which receives a control signal from the RFIC, where 2?N. The control unit executes switching operations of the N variable impedance adjustment circuits and the switch in accordance with control information. The control signal indicates to 1) control the switch to select two variable impedance adjustment circuits corresponding to a p-th frequency band and a q-th frequency band respectively, 2) control a variable impedance adjustment circuit corresponding to the p-th frequency band to increase input impedance in the q-th frequency band as viewed from the antenna side and 3) control a variable impedance adjustment circuit corresponding to the q-th frequency band to increase input impedance in the p-th frequency band as viewed from the side.

Abstract: A vehicle-use resin cover including: a resin cover main body configured including an opening, and anchoring portions formed at locations running along a peripheral edge of the opening; a resin cap member, which is mounted in the opening and is configured including a cap main body that covers the opening, and anchored portions, which are provided to an outer peripheral portion of the cap main body so as to correspond to the anchoring portions and are anchored by the anchoring portions; a recessed portion, which is formed at the peripheral edge of the opening and is in communication with the opening at the cap member side of the recessed portion, and through which a leading end of a tool for removing the cap member is insertable; and a marker portion provided to the outer peripheral portion of the cap main body at a position facing the recessed portion.

Abstract: An infrared-sensor filter member includes an optical filter disposed in an opening portion of a second member and a first member. The infrared-sensor filter member includes a recess portion formed from a light-incident surface of the optical filter and the first member. At least a part of a bottom surface of the recess portion is formed by the light-incident surface and side walls of the recess portion, which are formed by the first member.

Abstract: To provide a vehicle resin part and a vehicle resin part manufacturing method with which raised portions can be formed using slanted slide molds even on opposing molded portions that have a narrow distance between them. In a rail cover, shelf-shaped portions that can be molded using a cavity and a core are formed on opposing side wall portions, and claw portions that can be molded using slanted slide molds are formed projecting from the shelf-shaped portions in the directions of the opposing side wall portions. Additionally, the claw portions are molded by moving, during demolding, the pair of slanted slide molds in the directions of the opposing side wall portions from a molding position and thereafter removing the pair of slanted slide molds in a forward direction.

Abstract: A wireless circuit that can be used in a plurality of frequency bands even if its duplexer is formed of current variable frequency filters is provided. The circuit includes a transmission-reception antenna 911, a variable frequency duplexer 131, a double-pole six-throw switch 923, an RFIC 180, and a controller 190 which executes switching operations in accordance with control signals. The RFIC 180 determines a pair of frequency bands for transmission and reception signals input to the variable frequency duplexer 131 and generates and sends the control signals to perform switching control operations to connect a transmission port corresponding to the determined transmission frequency band with the transmission terminal of the variable frequency duplexer 131 and to connect a reception port corresponding to the determined reception frequency band with the reception terminal of the variable frequency duplexer 131 and to perform a frequency switching operation of the variable frequency duplexer 131.

Abstract: Provided is a front-end circuit which can prevent a signal from leaking into another circuit even when signals are sent and received simultaneously in multiple frequency bands in carrier aggregation.

Abstract: An multiband resonator of the present invention includes a dielectric substrate including three or more dielectric layers, a ground conductor, a main-line conductor, a sub-line conductor, a sub open stub, a main open stub, a short-circuit conductor, a main through conductor, and a sub through conductor. The short-circuit conductor electrically connects one end of the main-line conductor to one end of the sub-line conductor and to the ground conductor. The main through conductor electrically connects the other end of the main-line conductor to one end of the main open stub that is aligned with that other end of the main-line conductor. The sub through conductor electrically connects the other end of the sub-line conductor to one end of the sub open stub that is aligned with that other end of the sub-line conductor.

Abstract: An multiband resonator of the present invention includes a dielectric substrate including three or more dielectric layers, a ground conductor, a main-line conductor, a sub-line conductor, a sub open stub, a main open stub, a short-circuit conductor, a main through conductor, and a sub through conductor. The short-circuit conductor electrically connects one end of the main-line conductor to one end of the sub-line conductor and to the ground conductor. The main through conductor electrically connects the other end of the main-line conductor to one end of the main open stub that is aligned with that other end of the main-line conductor. The sub through conductor electrically connects the other end of the sub-line conductor to one end of the sub open stub that is aligned with that other end of the sub-line conductor.