Patents by Inventor Yutaka Mikawa
Yutaka Mikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 12107129Abstract: An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10?5 ? or less is observed.Type: GrantFiled: April 18, 2023Date of Patent: October 1, 2024Assignee: Mitsubishi Chemical CorporationInventors: Satoru Nagao, Yusuke Tsukada, Kazunori Kamada, Shuichi Kubo, Hirotaka Ikeda, Kenji Fujito, Hideo Fujisawa, Yutaka Mikawa, Tae Mochizuki
-
Patent number: 12060653Abstract: Provided is a bulk GaN crystal in which the degree of curvature of the c-plane is reduced. The bulk GaN crystal includes a main surface selected from a surface inclined at 0° to 10° from the (0001) crystal plane and a surface inclined at 0° to 10° from the (000-1) crystal plane, and the main surface is a specific main surface A that satisfies the following conditions (i) and (ii): (i) a first line, which is a 80 mm-long virtual line segment extending in a first direction on the specific main surface A, can be drawn, and a difference between a maximum value and a minimum value of peak angles in (002) XRD rocking curves of the GaN crystal, which is measured between 17 measurement points arranged at a 5-mm pitch on the first line with the omega axis being perpendicular to the first direction, is 0.Type: GrantFiled: December 23, 2021Date of Patent: August 13, 2024Assignee: MITSUBISHI CHEMICAL CORPORATIONInventors: Yutaka Mikawa, Tetsuo Okano
-
GALLIUM NITRIDE CRYSTAL, GALLIUM NITRIDE SUBSTRATE, AND METHOD FOR PRODUCING GALLIUM NITRIDE CRYSTAL
Publication number: 20240191395Abstract: A gallium nitride crystal, containing F in which a total content of halogen elements other than F is 1/100 or less of a content of F and including a main surface 1 having an inclination of 0 degrees or more and 10 degrees or less from a (000-1) crystal plane in which the main surface 1 is a specific main surface A satisfying a specific condition regarding facet growth region in which a first line segment which is a virtual line segment extending in a first direction on the specific main surface A and having a length of 40 mm and a second line segment which is a virtual line segment extending in a second direction perpendicular to the first direction on the specific main surface A and having a length of 40 mm can be drawn, has fewer specific crystal defects and is of high quality,Type: ApplicationFiled: February 23, 2024Publication date: June 13, 2024Applicants: MITSUBISHI CHEMICAL CORPORATION, THE JAPAN STEEL WORKS, LTD.Inventors: Yutaka MIKAWA, Kouhei KURIMOTO, Quanxi BAO -
Publication number: 20240105449Abstract: A conductive C-plane GaN substrate has a resistivity of 2×10?2 ?·cm or less or an n-type carrier concentration of 1×1018 cm?3 or more at room temperature. At least one virtual line segment with a length of 40 mm can be drawn at least on one main surface of the substrate. The line segment satisfies at least one of the following conditions (A1) and (B1): (A1) when an XRC of (004) reflection is measured at 1 mm intervals on the line segment, a maximum value of XRC-FWHMs across all measurement points is less than 30 arcsec; and (B1) when an XRC of the (004) reflection is measured at 1 mm intervals on the line segment, a difference between maximum and minimum values of XRC peak angles across all the measurement points is less than 0.2°.Type: ApplicationFiled: September 29, 2023Publication date: March 28, 2024Applicant: MITSUBISHI CHEMICAL CORPORATIONInventors: Yutaka MIKAWA, Hideo FUJISAWA, Tae MOCHIZUKI, Hideo NAMITA, Shinichiro KAWABATA
-
Publication number: 20230392280Abstract: An object of the present invention is to provide a GaN crystal long in light emission lifetime by time-resolved photoluminescence measurement and provide high-quality GaN crystal and GaN substrate that have few specified crystal defects affecting the light emission lifetime. A gallium nitride crystal having a light emission lifetime by time-resolved photoluminescence measurement, of 5 ps or more and 200 ps or less, and satisfying at least one of the following requirement (i) and requirement (ii): (i) an FWHM in a 004 diffraction X-ray rocking curve is 50 arcsec or less at least one position of the crystal; and (ii) a dislocation density is 5×106 cm?2 or less.Type: ApplicationFiled: August 24, 2023Publication date: December 7, 2023Applicants: MITSUBISHI CHEMICAL CORPORATION, THE JAPAN STEEL WORKS, LTD., TOHOKU UNIVERSITYInventors: Yutaka MIKAWA, Hirotaka IKEDA, Quanxi BAO, Kouhei KURIMOTO, Kohei SHIMA, Kazunobu KOJIMA, Toru ISHIGURO, Shigefusa CHICHIBU
-
Patent number: 11810782Abstract: A conductive C-plane GaN substrate has a resistivity of 2×10?2 ?·cm or less or an n-type carrier concentration of 1×1018 cm?3 or more at room temperature. At least one virtual line segment with a length of 40 mm can be drawn at least on one main surface of the substrate. The line segment satisfies at least one of the following conditions (A1) and (B1): (A1) when an XRC of (004) reflection is measured at 1 mm intervals on the line segment, a maximum value of XRC-FWHMs across all measurement points is less than 30 arcsec; and (B1) when an XRC of the (004) reflection is measured at 1 mm intervals on the line segment, a difference between maximum and minimum values of XRC peak angles across all the measurement points is less than 0.2°.Type: GrantFiled: December 9, 2020Date of Patent: November 7, 2023Assignee: MITSUBISHI CHEMICAL CORPORATIONInventors: Yutaka Mikawa, Hideo Fujisawa, Tae Mochizuki, Hideo Namita, Shinichiro Kawabata
-
Publication number: 20230253461Abstract: An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10?5 ? or less is observed.Type: ApplicationFiled: April 18, 2023Publication date: August 10, 2023Applicant: Mitsubishi Chemical CorporationInventors: Satoru NAGAO, Yusuke TSUKADA, azunori KAMADA, Shuichi KUBO, Hirotaka IKEDA, Kenji FUJITO, Hideo FUJISAWA, Yutaka MIKAWA, Tae MOCHIZUKI
-
Patent number: 11670687Abstract: A gallium nitride substrate comprising a first main surface and a second main surface opposite thereto, wherein the first main surface is a non-polar or semi-polar plane, a dislocation density measured by a room-temperature cathode luminescence method in the first main surface is 1×104 cm?2 or less, and an averaged dislocation density measured by a room-temperature cathode luminescence method in an optional square region sizing 250 ?m×250 ?m in the first main plan is 1×106 cm?2 or less.Type: GrantFiled: June 19, 2020Date of Patent: June 6, 2023Assignee: MITSUBISHI CHEMICAL CORPORATIONInventors: Yusuke Tsukada, Shuichi Kubo, Kazunori Kamada, Hideo Fujisawa, Tatsuhiro Ohata, Hirotaka Ikeda, Hajime Matsumoto, Yutaka Mikawa
-
Patent number: 11664428Abstract: An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10?5 ? or less is observed.Type: GrantFiled: April 23, 2021Date of Patent: May 30, 2023Assignee: Mitsubishi Chemical CorporationInventors: Satoru Nagao, Yusuke Tsukada, Kazunori Kamada, Shuichi Kubo, Hirotaka Ikeda, Kenji Fujito, Hideo Fujisawa, Yutaka Mikawa, Tae Mochizuki
-
Patent number: 11591715Abstract: A GaN single crystal having a gallium polar surface which is a main surface on one side and a nitrogen polar surface which is a main surface on the opposite side, wherein on the gallium polar surface is found at least one square area, an outer periphery of which is constituted by four sides of 2 mm or more in length, and, when the at least one square area is divided into a plurality of sub-areas each of which is a 100 ?m×100 ?m square, pit-free areas account for 80% or more of the plurality of sub-areas.Type: GrantFiled: April 6, 2021Date of Patent: February 28, 2023Assignee: MITSUBISHI CHEMICAL CORPORATIONInventors: Hideo Fujisawa, Yutaka Mikawa, Shinichiro Kawabata, Hideo Namita, Tae Mochizuki
-
Patent number: 11404268Abstract: A method for growing a GaN crystal suitable as a material of GaN substrates including C-plane GaN substrates includes: a first step of preparing a GaN seed having a nitrogen polar surface; a second step of arranging a pattern mask on the nitrogen polar surface of the GaN seed, the pattern mask being provided with a periodical opening pattern comprising linear openings and including intersections, the pattern mask being arranged such that longitudinal directions of at least part of the linear openings are within ±3° from a direction of an intersection line between the nitrogen polar surface and an M-plane; and a third step of ammonothermally growing a GaN crystal through the pattern mask such that a gap is formed between the GaN crystal and the pattern mask.Type: GrantFiled: June 10, 2020Date of Patent: August 2, 2022Assignee: MITSUBISHI CHEMICAL CORPORATIONInventors: Yutaka Mikawa, Hideo Fujisawa, Tae Mochizuki, Hideo Namita, Shinichiro Kawabata
-
Publication number: 20220112624Abstract: Provided is a bulk GaN crystal in which the degree of curvature of the c-plane is reduced. The bulk GaN crystal includes a main surface selected from a surface inclined at 0° to 10° from the (0001) crystal plane and a surface inclined at 0° to 10° from the (000-1) crystal plane, and the main surface is a specific main surface A that satisfies the following conditions (i) and (ii): (i) a first line, which is a 80 mm-long virtual line segment extending in a first direction on the specific main surface A, can be drawn, and a difference between a maximum value and a minimum value of peak angles in (002) XRD rocking curves of the GaN crystal, which is measured between 17 measurement points arranged at a 5-mm pitch on the first line with the omega axis being perpendicular to the first direction, is 0.Type: ApplicationFiled: December 23, 2021Publication date: April 14, 2022Applicant: MITSUBISHI CHEMICAL CORPORATIONInventors: Yutaka MIKAWA, Tetsuo OKANO
-
Publication number: 20220033992Abstract: A high-quality nitride crystal can be produced efficiently by charging a nitride crystal starting material that contains tertiary particles having a maximum diameter of from 1 to 120 mm and formed through aggregation of secondary particles having a maximum diameter of from 100 to 1000 ?m, in the starting material charging region of a reactor, followed by crystal growth in the presence of a solvent in a supercritical state and/or a subcritical state in the reactor, wherein the nitride crystal starting material is charged in the starting material charging region in a bulk density of from 0.7 to 4.5 g/cm3 for the intended crystal growth.Type: ApplicationFiled: September 27, 2021Publication date: February 3, 2022Applicant: MITSUBISHI CHEMICAL CORPORATIONInventors: Yutaka MIKAWA, Hideo FUJISAWA, Kazunori KAMADA, Hirobumi NAGAOKA, Shinichiro KAWABATA, Yuji KAGAMITANI
-
Patent number: 11162190Abstract: A high-quality nitride crystal can be produced efficiently by charging a nitride crystal starting material that contains tertiary particles having a maximum diameter of from 1 to 120 mm and formed through aggregation of secondary particles having a maximum diameter of from 100 to 1000 ?m, in the starting material charging region of a reactor, followed by crystal growth in the presence of a solvent in a supercritical state and/or a subcritical state in the reactor, wherein the nitride crystal starting material is charged in the starting material charging region in a bulk density of from 0.7 to 4.5 g/cm3 for the intended crystal growth.Type: GrantFiled: October 28, 2019Date of Patent: November 2, 2021Assignee: MITSUBISHI CHEMICAL CORPORATIONInventors: Yutaka Mikawa, Hideo Fujisawa, Kazunori Kamada, Hirobumi Nagaoka, Shinichiro Kawabata, Yuji Kagamitani
-
Publication number: 20210273058Abstract: An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10?5 ? or less is observed.Type: ApplicationFiled: April 23, 2021Publication date: September 2, 2021Applicant: Mitsubishi Chemical CorporationInventors: Satoru NAGAO, Yusuke TSUKADA, Kazunori KAMADA, Shuichi KUBO, Hirotaka IKEDA, Kenji FUJITO, Hideo FUJISAWA, Yutaka MIKAWA, Tae MOCHIZUKI
-
Publication number: 20210230770Abstract: A GaN single crystal having a gallium polar surface which is a main surface on one side and a nitrogen polar surface which is a main surface on the opposite side, wherein on the gallium polar surface is found at least one square area, an outer periphery of which is constituted by four sides of 2 mm or more in length, and, when the at least one square area is divided into a plurality of sub-areas each of which is a 100 ?m×100 ?m square, pit-free areas account for 80% or more of the plurality of sub-areas.Type: ApplicationFiled: April 6, 2021Publication date: July 29, 2021Applicant: MITSUBISHI CHEMICAL CORPORATIONInventors: Hideo FUJISAWA, Yutaka MIKAWA, Shinichiro KAWABATA, Hideo NAMITA, Tae MOCHIZUKI
-
Patent number: 11038024Abstract: An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10?5 ? or less is observed.Type: GrantFiled: June 18, 2019Date of Patent: June 15, 2021Assignee: Mitsubishi Chemical CorporationInventors: Satoru Nagao, Yusuke Tsukada, Kazunori Kamada, Shuichi Kubo, Hirotaka Ikeda, Kenji Fujito, Hideo Fujisawa, Yutaka Mikawa, Tae Mochizuki
-
Patent number: 11031475Abstract: An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10 ?5 ? or less is observed.Type: GrantFiled: September 18, 2019Date of Patent: June 8, 2021Assignee: Mitsubishi Chemical CorporationInventors: Satoru Nagao, Yusuke Tsukada, Kazunori Kamada, Shuichi Kubo, Hirotaka Ikeda, Kenji Fujito, Hideo Fujisawa, Yutaka Mikawa, Tae Mochizuki
-
Patent number: 11001940Abstract: A new GaN single crystal is provided. A GaN single crystal according to the present embodiment comprises a gallium polar surface which is a main surface on one side and a nitrogen polar surface which is a main surface on the opposite side, wherein on the gallium polar surface is found at least one square area, an outer periphery of which is constituted by four sides each with a length of 2 mm or more, and, when the at least one square are is divided into a plurality of sub-areas each of which is a square of 100 ?m×100 ?m, pit-free areas account for 80% or more of the sub-areas.Type: GrantFiled: November 20, 2018Date of Patent: May 11, 2021Assignee: MITSUBISHI CHEMICAL CORPORATIONInventors: Hideo Fujisawa, Yutaka Mikawa, Shinichiro Kawabata, Hideo Namita, Tae Mochizuki
-
Patent number: 10995421Abstract: An object of the present invention is to provide a crystal of a nitride of a Group-13 metal on the Periodic Table which has good crystallinity and has no crystal strain, and to provide a production method for the crystal. The crystal of a nitride of a Group-13 metal on the Periodic Table of the present invention, comprises oxygen atom and hydrogen atom in the crystal and has a ratio of a hydrogen concentration to an oxygen concentration therein of from 0.5 to 4.5.Type: GrantFiled: March 8, 2019Date of Patent: May 4, 2021Assignee: MITSUBISHI CHEMICAL CORPORATIONInventors: Yutaka Mikawa, Hideo Namita, Hirotaka Ikeda, Kazunori Kamada, Hideo Fujisawa, Atsuhiko Kojima