Patents by Inventor Yutaka Mikawa

Yutaka Mikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240105449
    Abstract: A conductive C-plane GaN substrate has a resistivity of 2×10?2 ?·cm or less or an n-type carrier concentration of 1×1018 cm?3 or more at room temperature. At least one virtual line segment with a length of 40 mm can be drawn at least on one main surface of the substrate. The line segment satisfies at least one of the following conditions (A1) and (B1): (A1) when an XRC of (004) reflection is measured at 1 mm intervals on the line segment, a maximum value of XRC-FWHMs across all measurement points is less than 30 arcsec; and (B1) when an XRC of the (004) reflection is measured at 1 mm intervals on the line segment, a difference between maximum and minimum values of XRC peak angles across all the measurement points is less than 0.2°.
    Type: Application
    Filed: September 29, 2023
    Publication date: March 28, 2024
    Applicant: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Yutaka MIKAWA, Hideo FUJISAWA, Tae MOCHIZUKI, Hideo NAMITA, Shinichiro KAWABATA
  • Publication number: 20230392280
    Abstract: An object of the present invention is to provide a GaN crystal long in light emission lifetime by time-resolved photoluminescence measurement and provide high-quality GaN crystal and GaN substrate that have few specified crystal defects affecting the light emission lifetime. A gallium nitride crystal having a light emission lifetime by time-resolved photoluminescence measurement, of 5 ps or more and 200 ps or less, and satisfying at least one of the following requirement (i) and requirement (ii): (i) an FWHM in a 004 diffraction X-ray rocking curve is 50 arcsec or less at least one position of the crystal; and (ii) a dislocation density is 5×106 cm?2 or less.
    Type: Application
    Filed: August 24, 2023
    Publication date: December 7, 2023
    Applicants: MITSUBISHI CHEMICAL CORPORATION, THE JAPAN STEEL WORKS, LTD., TOHOKU UNIVERSITY
    Inventors: Yutaka MIKAWA, Hirotaka IKEDA, Quanxi BAO, Kouhei KURIMOTO, Kohei SHIMA, Kazunobu KOJIMA, Toru ISHIGURO, Shigefusa CHICHIBU
  • Patent number: 11810782
    Abstract: A conductive C-plane GaN substrate has a resistivity of 2×10?2 ?·cm or less or an n-type carrier concentration of 1×1018 cm?3 or more at room temperature. At least one virtual line segment with a length of 40 mm can be drawn at least on one main surface of the substrate. The line segment satisfies at least one of the following conditions (A1) and (B1): (A1) when an XRC of (004) reflection is measured at 1 mm intervals on the line segment, a maximum value of XRC-FWHMs across all measurement points is less than 30 arcsec; and (B1) when an XRC of the (004) reflection is measured at 1 mm intervals on the line segment, a difference between maximum and minimum values of XRC peak angles across all the measurement points is less than 0.2°.
    Type: Grant
    Filed: December 9, 2020
    Date of Patent: November 7, 2023
    Assignee: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Yutaka Mikawa, Hideo Fujisawa, Tae Mochizuki, Hideo Namita, Shinichiro Kawabata
  • Publication number: 20230253461
    Abstract: An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10?5 ? or less is observed.
    Type: Application
    Filed: April 18, 2023
    Publication date: August 10, 2023
    Applicant: Mitsubishi Chemical Corporation
    Inventors: Satoru NAGAO, Yusuke TSUKADA, azunori KAMADA, Shuichi KUBO, Hirotaka IKEDA, Kenji FUJITO, Hideo FUJISAWA, Yutaka MIKAWA, Tae MOCHIZUKI
  • Patent number: 11670687
    Abstract: A gallium nitride substrate comprising a first main surface and a second main surface opposite thereto, wherein the first main surface is a non-polar or semi-polar plane, a dislocation density measured by a room-temperature cathode luminescence method in the first main surface is 1×104 cm?2 or less, and an averaged dislocation density measured by a room-temperature cathode luminescence method in an optional square region sizing 250 ?m×250 ?m in the first main plan is 1×106 cm?2 or less.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: June 6, 2023
    Assignee: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Yusuke Tsukada, Shuichi Kubo, Kazunori Kamada, Hideo Fujisawa, Tatsuhiro Ohata, Hirotaka Ikeda, Hajime Matsumoto, Yutaka Mikawa
  • Patent number: 11664428
    Abstract: An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10?5 ? or less is observed.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: May 30, 2023
    Assignee: Mitsubishi Chemical Corporation
    Inventors: Satoru Nagao, Yusuke Tsukada, Kazunori Kamada, Shuichi Kubo, Hirotaka Ikeda, Kenji Fujito, Hideo Fujisawa, Yutaka Mikawa, Tae Mochizuki
  • Patent number: 11591715
    Abstract: A GaN single crystal having a gallium polar surface which is a main surface on one side and a nitrogen polar surface which is a main surface on the opposite side, wherein on the gallium polar surface is found at least one square area, an outer periphery of which is constituted by four sides of 2 mm or more in length, and, when the at least one square area is divided into a plurality of sub-areas each of which is a 100 ?m×100 ?m square, pit-free areas account for 80% or more of the plurality of sub-areas.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: February 28, 2023
    Assignee: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Hideo Fujisawa, Yutaka Mikawa, Shinichiro Kawabata, Hideo Namita, Tae Mochizuki
  • Patent number: 11404268
    Abstract: A method for growing a GaN crystal suitable as a material of GaN substrates including C-plane GaN substrates includes: a first step of preparing a GaN seed having a nitrogen polar surface; a second step of arranging a pattern mask on the nitrogen polar surface of the GaN seed, the pattern mask being provided with a periodical opening pattern comprising linear openings and including intersections, the pattern mask being arranged such that longitudinal directions of at least part of the linear openings are within ±3° from a direction of an intersection line between the nitrogen polar surface and an M-plane; and a third step of ammonothermally growing a GaN crystal through the pattern mask such that a gap is formed between the GaN crystal and the pattern mask.
    Type: Grant
    Filed: June 10, 2020
    Date of Patent: August 2, 2022
    Assignee: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Yutaka Mikawa, Hideo Fujisawa, Tae Mochizuki, Hideo Namita, Shinichiro Kawabata
  • Publication number: 20220112624
    Abstract: Provided is a bulk GaN crystal in which the degree of curvature of the c-plane is reduced. The bulk GaN crystal includes a main surface selected from a surface inclined at 0° to 10° from the (0001) crystal plane and a surface inclined at 0° to 10° from the (000-1) crystal plane, and the main surface is a specific main surface A that satisfies the following conditions (i) and (ii): (i) a first line, which is a 80 mm-long virtual line segment extending in a first direction on the specific main surface A, can be drawn, and a difference between a maximum value and a minimum value of peak angles in (002) XRD rocking curves of the GaN crystal, which is measured between 17 measurement points arranged at a 5-mm pitch on the first line with the omega axis being perpendicular to the first direction, is 0.
    Type: Application
    Filed: December 23, 2021
    Publication date: April 14, 2022
    Applicant: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Yutaka MIKAWA, Tetsuo OKANO
  • Publication number: 20220033992
    Abstract: A high-quality nitride crystal can be produced efficiently by charging a nitride crystal starting material that contains tertiary particles having a maximum diameter of from 1 to 120 mm and formed through aggregation of secondary particles having a maximum diameter of from 100 to 1000 ?m, in the starting material charging region of a reactor, followed by crystal growth in the presence of a solvent in a supercritical state and/or a subcritical state in the reactor, wherein the nitride crystal starting material is charged in the starting material charging region in a bulk density of from 0.7 to 4.5 g/cm3 for the intended crystal growth.
    Type: Application
    Filed: September 27, 2021
    Publication date: February 3, 2022
    Applicant: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Yutaka MIKAWA, Hideo FUJISAWA, Kazunori KAMADA, Hirobumi NAGAOKA, Shinichiro KAWABATA, Yuji KAGAMITANI
  • Patent number: 11162190
    Abstract: A high-quality nitride crystal can be produced efficiently by charging a nitride crystal starting material that contains tertiary particles having a maximum diameter of from 1 to 120 mm and formed through aggregation of secondary particles having a maximum diameter of from 100 to 1000 ?m, in the starting material charging region of a reactor, followed by crystal growth in the presence of a solvent in a supercritical state and/or a subcritical state in the reactor, wherein the nitride crystal starting material is charged in the starting material charging region in a bulk density of from 0.7 to 4.5 g/cm3 for the intended crystal growth.
    Type: Grant
    Filed: October 28, 2019
    Date of Patent: November 2, 2021
    Assignee: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Yutaka Mikawa, Hideo Fujisawa, Kazunori Kamada, Hirobumi Nagaoka, Shinichiro Kawabata, Yuji Kagamitani
  • Publication number: 20210273058
    Abstract: An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10?5 ? or less is observed.
    Type: Application
    Filed: April 23, 2021
    Publication date: September 2, 2021
    Applicant: Mitsubishi Chemical Corporation
    Inventors: Satoru NAGAO, Yusuke TSUKADA, Kazunori KAMADA, Shuichi KUBO, Hirotaka IKEDA, Kenji FUJITO, Hideo FUJISAWA, Yutaka MIKAWA, Tae MOCHIZUKI
  • Publication number: 20210230770
    Abstract: A GaN single crystal having a gallium polar surface which is a main surface on one side and a nitrogen polar surface which is a main surface on the opposite side, wherein on the gallium polar surface is found at least one square area, an outer periphery of which is constituted by four sides of 2 mm or more in length, and, when the at least one square area is divided into a plurality of sub-areas each of which is a 100 ?m×100 ?m square, pit-free areas account for 80% or more of the plurality of sub-areas.
    Type: Application
    Filed: April 6, 2021
    Publication date: July 29, 2021
    Applicant: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Hideo FUJISAWA, Yutaka MIKAWA, Shinichiro KAWABATA, Hideo NAMITA, Tae MOCHIZUKI
  • Patent number: 11038024
    Abstract: An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10?5 ? or less is observed.
    Type: Grant
    Filed: June 18, 2019
    Date of Patent: June 15, 2021
    Assignee: Mitsubishi Chemical Corporation
    Inventors: Satoru Nagao, Yusuke Tsukada, Kazunori Kamada, Shuichi Kubo, Hirotaka Ikeda, Kenji Fujito, Hideo Fujisawa, Yutaka Mikawa, Tae Mochizuki
  • Patent number: 11031475
    Abstract: An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10 ?5 ? or less is observed.
    Type: Grant
    Filed: September 18, 2019
    Date of Patent: June 8, 2021
    Assignee: Mitsubishi Chemical Corporation
    Inventors: Satoru Nagao, Yusuke Tsukada, Kazunori Kamada, Shuichi Kubo, Hirotaka Ikeda, Kenji Fujito, Hideo Fujisawa, Yutaka Mikawa, Tae Mochizuki
  • Patent number: 11001940
    Abstract: A new GaN single crystal is provided. A GaN single crystal according to the present embodiment comprises a gallium polar surface which is a main surface on one side and a nitrogen polar surface which is a main surface on the opposite side, wherein on the gallium polar surface is found at least one square area, an outer periphery of which is constituted by four sides each with a length of 2 mm or more, and, when the at least one square are is divided into a plurality of sub-areas each of which is a square of 100 ?m×100 ?m, pit-free areas account for 80% or more of the sub-areas.
    Type: Grant
    Filed: November 20, 2018
    Date of Patent: May 11, 2021
    Assignee: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Hideo Fujisawa, Yutaka Mikawa, Shinichiro Kawabata, Hideo Namita, Tae Mochizuki
  • Patent number: 10995421
    Abstract: An object of the present invention is to provide a crystal of a nitride of a Group-13 metal on the Periodic Table which has good crystallinity and has no crystal strain, and to provide a production method for the crystal. The crystal of a nitride of a Group-13 metal on the Periodic Table of the present invention, comprises oxygen atom and hydrogen atom in the crystal and has a ratio of a hydrogen concentration to an oxygen concentration therein of from 0.5 to 4.5.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: May 4, 2021
    Assignee: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Yutaka Mikawa, Hideo Namita, Hirotaka Ikeda, Kazunori Kamada, Hideo Fujisawa, Atsuhiko Kojima
  • Publication number: 20210090886
    Abstract: A conductive C-plane GaN substrate has a resistivity of 2×10?2 ?·cm or less or an n-type carrier concentration of 1×1018 cm?3 or more at room temperature. At least one virtual line segment with a length of 40 mm can be drawn at least on one main surface of the substrate. The line segment satisfies at least one of the following conditions (A1) and (B1): (A1) when an XRC of (004) reflection is measured at 1 mm intervals on the line segment, a maximum value of XRC-FWHMs across all measurement points is less than 30 arcsec; and (B1) when an XRC of the (004) reflection is measured at 1 mm intervals on the line segment, a difference between maximum and minimum values of XRC peak angles across all the measurement points is less than 0.2°.
    Type: Application
    Filed: December 9, 2020
    Publication date: March 25, 2021
    Applicant: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Yutaka Mikawa, Hideo Fujisawa, Tae Mochizuki, Hideo Namita, Shinichiro Kawabata
  • Patent number: 10903072
    Abstract: A conductive C-plane GaN substrate has a resistivity of 2×10?2 ?·cm or less or an n-type carrier concentration of 1×1018 cm?3 or more at room temperature. At least one virtual line segment with a length of 40 mm can be drawn at least on one main surface of the substrate. The line segment satisfies at least one of the following conditions (A1) and (B1): (A1) when an XRC of (004) reflection is measured at 1 mm intervals on the line segment, a maximum value of XRC-FWHMs across all measurement points is less than 30 arcsec; and (B1) when an XRC of the (004) reflection is measured at 1 mm intervals on the line segment, a difference between maximum and minimum values of XRC peak angles across all the measurement points is less than 0.2°.
    Type: Grant
    Filed: July 15, 2020
    Date of Patent: January 26, 2021
    Assignee: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Yutaka Mikawa, Hideo Fujisawa, Tae Mochizuki, Hideo Namita, Shinichiro Kawabata
  • Publication number: 20200350163
    Abstract: A conductive C-plane GaN substrate has a resistivity of 2×10?2 ?·cm or less or an n-type carrier concentration of 1×1018 cm?3 or more at room temperature. At least one virtual line segment with a length of 40 mm can be drawn at least on one main surface of the substrate. The line segment satisfies at least one of the following conditions (A1) and (B1): (A1) when an XRC of (004) reflection is measured at 1 mm intervals on the line segment, a maximum value of XRC-FWHMs across all measurement points is less than 30 arcsec; and (B1) when an XRC of the (004) reflection is measured at 1 mm intervals on the line segment, a difference between maximum and minimum values of XRC peak angles across all the measurement points is less than 0.2°.
    Type: Application
    Filed: July 15, 2020
    Publication date: November 5, 2020
    Applicant: MITSUBISHI CHEMICAL CORPORATION
    Inventors: Yutaka MIKAWA, Hideo FUJISAWA, Tae MOCHIZUKI, Hideo NAMITA, Shinichiro KAWABATA