Yutaka Ohira has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
Abstract: The first chamber cleaning gas and the first silicon-containing film-etching gas of the present invention comprise at least one compound selected from the group consisting of FCOF, CF3OCOF and CF3OCF2OCOF, and O2 in the specific amount, and optionally other gases. The second chamber cleaning gas and the second silicon-containing film-etching gas comprise CF3COF, C3F7COF or CF2(COF)2 and O2 in specific amounts, and optionally may comprise other gases. The chamber cleaning gases and silicon-containing film etching gases of the present invention have a low global warming potential and hardly generate substances in the exhaust gases such as CF4, etc, which are harmful to the environment and have been perceived as contributing to global warming. Therefore, the gases are friendly to the global environment, and have easy handling and excellent exhaust gas treating properties. Further, the chamber cleaning gases of the invention have excellent cleaning rate.
May 13, 2002
Date of Patent:
September 7, 2004
Asahi Glass Company, Limited, Anelva Corporation, Ulvac, Inc., Kanto Denka Kogyo Co., Ltd., Sanyo Electric Co., Ltd., Sony Corporation, Daikin Industries, Ltd., Tokyo Electron Limited, NEC Electronics Corporation, Hitachi Kokusai Electric Inc., Matsushita Electric Industrial Co., Ltd., Renesas Technology Corp.
Abstract: The plasma cleaning gas for CVD chamber according to the present invention is a gas for cleaning silicon-containing deposits on the surface of a CVD chamber inner wall and the surfaces of members placed inside the CVD chamber after film forming treatment on a substrate by a plasma CVD apparatus. The cleaning gas comprises 100% by volume of fluorine gas which gas can generate plasma by electric discharge.
Abstract: The first chamber cleaning gas and the first silicon-containing film-etching gas of the present invention comprise at least one compound selected from the group consisting of FCOF, CF3OCOF and CF3OCF2OCOF, and O2 in the specific amount, and optionally other gases. The second chamber cleaning gas and the second silicon-containing film-etching gas comprise CF3COF, C3F7COF or CF2(COF)2 and O2 in specific amounts, and optionally may comprise other gases.
Abstract: The invention provides a compound represented by the following formula (I)
wherein m is an integer of 2-15; n is an integer of 0-12; R represents a sugar chain or a derivative thereof; R′ represents a general formula (II)
(wherein p is an integer of 0-4, q is an integer of 0-5; r is an integer of 2-5; R12 and R13 are the same or different and each represents a hydrogen atom, a lower alkyl group, an aliphatic acyl group, a nitro group or a nitrile group), R1 represents a hydrogen atom or a protective group of carboxylic acid, R2, R4 and R5 are the same or different and each represents a hydrogen atom, an aliphatic or aromatic acyl group; R3 represents an acetyl group, a glycolyl group or a trifluoroacetyl group; useful as reagent for detecting influenza virus A.
Abstract: 2-Fluorofucosyl-N-aroylglucosamine derivatives which are obtained by substitution of a hydroxyl group at the 3- or 4-position of N-aroylglucosamine with 2-fluorofucose, their intermediates and preparation methods thereof. The 2-fluorofucosyl-N-aroylglucosamine derivatives which are useful medicinal components for the treatment, improvement and prevention of inflammation and diseases accompanying inflammation, their intermediates and preparation methods thereof can be provided.
Abstract: A novel fluorine-containing Lewis X derivative represented by the following formula (I): ##STR1## wherein R represents hydrogen, a hydroxyl-protective group, --PO(OH).sub.2, --SO.sub.3 H or sialylate;R.sup.1 represents hydrogen, hydroxyl, aliphatic acyloxy, aromatic acyloxy, lower alkylthio, optionally substituted phenylthio, lower alkoxy, branched long chain alkoxy, optionally substituted phenylmethoxy or sphingosinyl, R.sup.10 represents hydrogen or --O--C--(.dbd.NH)CCl.sub.3 ; provided that when R.sup.10 is --O--C--(.dbd.NH)CCl.sub.3, R.sup.9 is hydrogen;R.sup.2 and R.sup.3 are the same or different and independently represent hydrogen, aliphatic acyl, aromatic acyl or optionally substituted phenylmethyl; andR.sup.4 represents hydroxyl, aliphatic acyloxy, aromatic acyloxy, aliphatic acylamino or aromatic acylamino.
Abstract: In order to rotatably support a joggle knob on a front panel, a recess is formed in the part of the front panel where the joggle knob is supported, and cuts are formed along the periphery of the recess in such a manner that they are coaxial with the center of turn. Furthermore, the joggle knob has locking pawls whose end portions are wedge-shaped in section. The locking pawls are inserted into the cuts, respectively. In addition, on the side of the inner surface of the front panel, sloped boards are arranged which have sloped surfaces along the loci of turn of the locking pawls. Hence, when the joggle knob is turned, the locking pawl is moved on the sloped board to push the latter backwardly, whereby a tact switch is positively pushed which is arranged behind the front panel.
Abstract: Compounds represented by general formula (I) and salts thereof useful as non-tolerance-inducing antiviral agents, wherein A is O, CH.sub.2 or S; R.sup.1 is lower alkoxycarbonyl, or the like; R.sup.2 is H, OR.sup.6, F, Cl, Br, CN, NHR.sup.6 or SR.sup.6 (wherein R is H, C.sub.1 -C.sub.6 lower alkyl and the like; one of R.sup.3 and R.sup.3' is H and the other thereof is H, CN, anitrogenous group such as amino or the like; R.sup.4 is NHR.sup.6 or N.dbd.CHR.sup.6 ; and R.sup.5 is CH.sub.2 CH.sub.2 XR.sup.6 or CH(XR.sup.6)CH.sub.2 XR.sup.6 (wherein X is O, S or NH.
Abstract: A sialyl Lewis X derivative represented by the general formula: ##STR1## in which a hydroxyl group at the 2 position of fucose is replaced with a fluorine atom, and a synthetic intermediate therefor are provided.
Abstract: A ganglioside GM3 derivative having a fluorine atom at the 9-position of sialic acid represented by the formula: ##STR1## wherein R is an aliphatic lower acyl group, R.sup.1 is a hydrogen atom or a lower alkyl group, R.sup.2 to R.sup.5 represent independently of one another a hydrogen atom, an aliphatic lower acyl group or an aromatic acyl group, R.sup.11 is an straight or branched, saturated or unsaturated aliphatic hydrocarbon group having 1 to 30 carbon atoms, and n is an integer of 0 to 20, provided that when R.sup.1 is a hydrogen atom, R.sup.2 to R.sup.5 are hydrogen atoms, or when R.sup.1 is a lower alkyl group, R.sup.2 to R.sup.5 are each an aliphatic lower acyl group or an aromatic acyl group, and intermediates therefor. This compound is useful as an agent for preventing infection of the influenza virus, an agent for preventing proliferation and metastasis of the cancer cells, etc.
Abstract: A ganglioside derivative in which a ceramide moiety is labeled with a fluorescent dye represented by the formula (I): ##STR1## wherein --O--R--O-- is a saccharide chain constituting the ganglioside, R' is an ether, sulfide, amide, urethane, thiourea or amino group having a fluorescent dye, one of R.sup.5 or R.sup.6 is a single bond and the other is a hydrogen atom, I is an integer of 1 to 8, m is an integer of at least 2, and n is an integer of 0 to 12. This ganglioside derivative has recognition characteristics of the saccharide chain portion and the labeling property of the fluorescent dye introduced in the ceramide moiety, and is useful as an agent for monitoring the dynamic behavior of the receptor for glycolipids, a diagnostic agent for bacteria or viruses, and the like.
Abstract: The invention pertains to 2,7-Deoxy-7-fluoro-2,3-didehydrosialic acid and an intermediate thereof which are useful for developing practical drugs, such as an antiviral agent, a preventing agent for viral diseases, etc. and for a clinical application. In addition, they are also useful as a carcinostatic agent and an immunomodulation agent.
Abstract: A ganglioside GM3 derivative containing fluorine atoms in a ceramide portion thereof, represented by the formula: ##STR1## in which m is an integer of at least 2, n is an integer of 0 to 7 provided that m is larger than n, and R represents an alkyl group or a fluoroalkyl group is disclosed.
Abstract: Fluorine-containing vitamin D.sub.3 analogues of the formula[I]: ##STR1## wherein R.sup.1, R.sup.2 and R.sup.3 are independently hydrogen atom, a chemically inactive hydroxy-protecting group, an acyl having 2 to 8 carbon atoms, or an alkyl having 1 to 8 carbon atoms, X is a straight carbon chain having 4 to 6 carbon atoms which contains at least one double or triple bond, which have excellent vitamin D.sub.3 -like activities, particularly anti-tumor activity owing to differentiation-inducing activity and are useful for the prophylaxis and treatment of various tumors, and intermediates therefor.
Abstract: Fluorine-containing vitamin D.sub.3 analogues of the formula: ##STR1## wherein R.sup.1, R.sup.2 and R.sup.3 are independently hydrogen atom, a hydroxy-protecting group, having excellent pharmacological activities, such as tumor cell differentiation-inducing activity, which are useful as a medicament.