Patents by Inventor Zhanping Chen

Zhanping Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11476190
    Abstract: Embodiments herein describe techniques for fuse lines and plugs formation. A semiconductor device may include a fuse line having a nominal fuse segment abutted to a necked fuse segment. The nominal fuse segment may be wider than the necked fuse segment. A first spacer may be along a first side of the fuse line and a second spacer along a second side opposite to the first side of the fuse line. The first spacer may include a part having a width at least twice a width of a part of the second spacer. A plug within a vicinity of the necked fuse segment may have a plug width that may be at least twice a plug with of a plug of an interconnect line outside the vicinity. Other embodiments may also be described and claimed.
    Type: Grant
    Filed: December 30, 2016
    Date of Patent: October 18, 2022
    Assignee: Intel Corporation
    Inventors: Balijeet S. Bains, Charles H. Wallace, Zhanping Chen
  • Patent number: 11239149
    Abstract: Embodiments herein may describe techniques for an integrated circuit including a metal interconnect above a substrate and coupled to a first contact and a second contact. The first contact and the second contact may be above the metal interconnect and in contact with the metal interconnect. A first resistance may exist between the first contact and the second contact through the metal interconnect. After a programming voltage is applied to the second contact while the first contact is coupled to a ground terminal to generate a current between the first contact and the second contact, a non-conducting barrier may be formed as an interface between the second contact and the metal interconnect. A second resistance may exist between the first contact, the metal interconnect, the second contact, and the non-conducting barrier. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: April 2, 2018
    Date of Patent: February 1, 2022
    Assignee: Intel Corporation
    Inventors: Vincent Dorgan, Jeffrey Hicks, Uddalak Bhattacharya, Zhanping Chen, Walid Hafez
  • Publication number: 20210104459
    Abstract: Embodiments herein describe techniques for fuse lines and plugs formation. A semiconductor device may include a fuse line having a nominal fuse segment abutted to a necked fuse segment. The nominal fuse segment may be wider than the necked fuse segment. A first spacer may be along a first side of the fuse line and a second spacer along a second side opposite to the first side of the fuse line. The first spacer may include a part having a width at least twice a width of a part of the second spacer. A plug within a vicinity of the necked fuse segment may have a plug width that may be at least twice a plug with of a plug of an interconnect line outside the vicinity. Other embodiments may also be described and claimed.
    Type: Application
    Filed: December 30, 2016
    Publication date: April 8, 2021
    Inventors: BALIJEET S. BAINS, CHARLES H. WALLACE, ZHANPING CHEN
  • Publication number: 20190304893
    Abstract: Embodiments herein may describe techniques for an integrated circuit including a metal interconnect above a substrate and coupled to a first contact and a second contact. The first contact and the second contact may be above the metal interconnect and in contact with the metal interconnect. A first resistance may exist between the first contact and the second contact through the metal interconnect. After a programming voltage is applied to the second contact while the first contact is coupled to a ground terminal to generate a current between the first contact and the second contact, a non-conducting barrier may be formed as an interface between the second contact and the metal interconnect. A second resistance may exist between the first contact, the metal interconnect, the second contact, and the non-conducting barrier. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: April 2, 2018
    Publication date: October 3, 2019
    Inventors: Vincent DORGAN, Jeffrey HICKS, Uddalak BHATTACHARYA, Zhanping CHEN, Walid M. HAFEZ
  • Publication number: 20180145083
    Abstract: The controlled modification of an antifuse programming voltage is described. In one example, an antifuse circuit is formed on a substrate, including a gate area of the antifuse circuit. A molecule is implanted into the gate area to damage the structure of the gate area. Electrodes are formed over the gate areas to connect the antifuse circuit to other components.
    Type: Application
    Filed: June 25, 2015
    Publication date: May 24, 2018
    Inventors: Xiaoghong TONG, Walid M. HAFEZ, Zhiyong MA, Peng BAI, Chia-Hong JAN, Zhanping CHEN
  • Patent number: 9679845
    Abstract: Interconnect fuse structures including a fuse with a necked line segment, as well as methods of fabricating such structures. A current driven by an applied fuse programming voltage may open necked fuse segments to affect operation of an IC. In embodiments, the fuse structure includes a pair of neighboring interconnect lines equidistant from a center interconnect line. In further embodiments, the center interconnect line, and at least one of the neighboring interconnect lines, include line segments of lateral widths that differ by a same, and complementary amount. In further embodiments, the center interconnect line is interconnected at opposite ends of a necked line segment. In further embodiments, the necked line segment is fabricated with pitch-reducing spacer-based patterning process.
    Type: Grant
    Filed: May 8, 2014
    Date of Patent: June 13, 2017
    Assignee: Intel Corporation
    Inventors: Zhanping Chen, Andrew W. Yeoh, Seongtae Jeong, Uddalak Bhattacharya, Charles H. Wallace
  • Publication number: 20170018499
    Abstract: Interconnect fuse structures including a fuse with a necked line segment, as well as methods of fabricating such structures. A current driven by an applied fuse programming voltage may open necked fuse segments to affect operation of an IC. In embodiments, the fuse structure includes a pair of neighboring interconnect lines equidistant from a center interconnect line. In further embodiments, the center interconnect line, and at least one of the neighboring interconnect lines, include line segments of lateral widths that differ by a same, and complementary amount. In further embodiments, the center interconnect line is interconnected at opposite ends of a necked line segment. In further embodiments, the necked line segment is fabricated with pitch-reducing spacer-based patterning process.
    Type: Application
    Filed: May 8, 2014
    Publication date: January 19, 2017
    Inventors: Zhanping Chen, Andrew W. Yeoh, Seongtae Jeong, Uddalak Bhattacharya, Charles H. Wallace
  • Patent number: 9123724
    Abstract: Methods of forming and using a microelectronic structure are described. Embodiments include forming a diode between a metal fuse gate and a PMOS device, wherein the diode is disposed between a contact of the metal fuse gate and a contact of the PMOS device, and wherein the diode couples the contact of the metal fuse gate to the contact of the PMOS device.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: September 1, 2015
    Assignee: Intel Corporation
    Inventors: Xianghong Tong, Zhanping Chen, Walid M. Hafez, Zhiyong Ma, Sarvesh H. Kulkarni, Kevin X. Zhang, Matthew B. Pedersen, Kevin D. Johnson
  • Publication number: 20140103448
    Abstract: Methods of forming and using a microelectronic structure are described. Embodiments include forming a diode between a metal fuse gate and a PMOS device, wherein the diode is disposed between a contact of the metal fuse gate and a contact of the PMOS device, and wherein the diode couples the contact of the metal fuse gate to the contact of the PMOS device.
    Type: Application
    Filed: December 19, 2013
    Publication date: April 17, 2014
    Inventors: Xianghong Tong, Zhanping Chen, Walid M. Hafez, Zhiyong Ma, Sarvesh H. Kulkarni, Kevin X. Zhang, Matthew B. Pedersen, Kevin D. Johnson
  • Patent number: 8618613
    Abstract: Methods of forming and using a microelectronic structure are described. Embodiments include forming a diode between a metal fuse gate and a PMOS device, wherein the diode is disposed between a contact of the metal fuse gate and a contact of the PMOS device, and wherein the diode couples the contact of the metal fuse gate to the contact of the PMOS device.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: December 31, 2013
    Assignee: Intel Corporation
    Inventors: Xianghong Tong, Zhanping Chen, Walid M. Hafez, Zhiyong Ma, Sarvesh H. Kulkarni, Kevin X. Zhang, Matthew B. Pedersen, Kevin D. Johnson
  • Patent number: 8411482
    Abstract: A memory cell includes a fuse and at least one transistor. The transistor is used to control the programming or sensing of the fuse. A program voltage is applied to a stack of first and second conductive layers. A first portion of the stack couples the program voltage to a terminal of the transistor in a cell. A second portion of the stack couples the program voltage to a terminal of the transistor in another cell.
    Type: Grant
    Filed: August 20, 2008
    Date of Patent: April 2, 2013
    Assignee: Intel Corporation
    Inventors: Zhanping Chen, Sarvesh Kulkarni, Kevin Zhang
  • Patent number: 8395923
    Abstract: Techniques and circuitry are disclosed for efficiently implementing programmable memory array circuit architectures, such as PROM, OTPROM, and other such programmable non-volatile memories. The circuitry employs an antifuse scheme that includes an array of memory bitcells, each containing a program device and an antifuse element configured with current path isolation well and for storing the memory cell state. The bitcell configuration, which can be used in conjunction with column/row select circuitry, power selector circuitry, and/or readout circuitry, allows for high-density memory array circuit designs and layouts.
    Type: Grant
    Filed: December 16, 2009
    Date of Patent: March 12, 2013
    Assignee: Intel Corporation
    Inventors: Zhanping Chen, Sarvesh H. Kulkarni, Kevin Zhang
  • Patent number: 8331186
    Abstract: A program circuit generates first and second currents to program the fuse. The second current is higher than the first current. A control circuit controls generating the first and second currents in succession.
    Type: Grant
    Filed: January 7, 2011
    Date of Patent: December 11, 2012
    Assignee: Intel Corporation
    Inventors: Jun He, Zhanping Chen, Jeffrey Hicks, Gregory F. Taylor
  • Publication number: 20120248546
    Abstract: Methods of forming and using a microelectronic structure are described. Embodiments include forming a diode between a metal fuse gate and a PMOS device, wherein the diode is disposed between a contact of the metal fuse gate and a contact of the PMOS device, and wherein the diode couples the contact of the metal fuse gate to the contact of the PMOS device.
    Type: Application
    Filed: March 31, 2011
    Publication date: October 4, 2012
    Inventors: Xianghong Tong, Zhanping Chen, Walid M. Hafez, Zhiyong Ma, Sarvesh H. Kulkarni, Kevin X. Zhang, Matthew B. Pedersen, Kevin D. Johnson
  • Patent number: 8242831
    Abstract: A tamper resistant fuse design is generally presented. In this regard, an apparatus is introduced comprising a plurality of fuses in an integrated circuit device to store values and a plurality of resistors in parallel to the fuses, wherein each fuse includes a parallel resistor to provide a potential dissipation path around the fuse. Other embodiments are also described and claimed.
    Type: Grant
    Filed: December 31, 2009
    Date of Patent: August 14, 2012
    Assignee: Intel Corporation
    Inventors: Xianghong Tong, Zhanping Chen, Kevin X. Zhang, Zhiyong Ma, Kevin D. Johnson, Jun He
  • Patent number: 8101471
    Abstract: A programmable anti-fuse element includes a substrate (224), an N-well (426) in the substrate, an electrically insulating layer (427) over the N-well, and a gate electrode (430) over the electrically insulating layer. The gate electrode has n-type doping so that the N-well is able to substantially contain within its boundaries a current generated following a programming event of the programmable anti-fuse element. In the same or another embodiment, a twice-programmable fuse element (100) includes a metal gate fuse (110) and an oxide anti-fuse (120) such as the programmable anti-fuse element just described.
    Type: Grant
    Filed: December 30, 2008
    Date of Patent: January 24, 2012
    Assignee: Intel Corporation
    Inventors: Walid M. Hafez, Chia-Hong Jan, Jie-Feng Lin, Chetan Prasad, Sangwoo Pae, Zhanping Chen, Anisur Rahman
  • Publication number: 20110156801
    Abstract: A tamper resistant fuse design is generally presented. In this regard, an apparatus is introduced comprising a plurality of fuses in an integrated circuit device to store values and a plurality of resistors in parallel to the fuses, wherein each fuse includes a parallel resistor to provide a potential dissipation path around the fuse. Other embodiments are also described and claimed.
    Type: Application
    Filed: December 31, 2009
    Publication date: June 30, 2011
    Inventors: Xianghong Tong, Zhanping Chen, Kevin X. Zhang, Zhiyong Ma, Kevin D. Johnson, Jun He
  • Publication number: 20110103170
    Abstract: An embodiment of the present invention is a technique to program a fuse. A program circuit generates first and second currents to program the fuse. The second current is higher than the first current. A control circuit controls generating the first and second currents in succession.
    Type: Application
    Filed: January 7, 2011
    Publication date: May 5, 2011
    Applicant: INTEL CORPORATION
    Inventors: Jun He, Zhanping Chen, Jeffrey Hicks, Gregory F. Taylor
  • Patent number: 7924596
    Abstract: A programmable ROM (PROM) architecture includes cascode NMOS transistors with a fuse bit cell that is arrayed, with sleep transistors located in each column of the array that in a standby mode shut down the entire fuse array. A fuse redundancy scheme may be used to repair a defective fuse row.
    Type: Grant
    Filed: September 26, 2007
    Date of Patent: April 12, 2011
    Assignee: Intel Corporation
    Inventors: Zhanping Chen, Kevin Zhang
  • Patent number: 7889587
    Abstract: A program circuit generates first and second currents to program the fuse. The second current is higher than the first current. A control circuit controls generating the first and second currents in succession.
    Type: Grant
    Filed: December 6, 2006
    Date of Patent: February 15, 2011
    Assignee: Intel Corporation
    Inventors: Jun He, Zhanping Chen, Jeffrey Hicks, Gregory F. Taylor