Patents by Inventor Zhen-Dong Zhu

Zhen-Dong Zhu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11579169
    Abstract: The present disclosure provides a scanning probe, a method and an apparatus for manufacturing the scanning probe. The scanning probe includes a base and a micro-tip disposed on an end of the base, wherein at least a section of the micro-tip comprises a lateral surface with a concavely curved generatrix. In the method, an end of a probe precursor is immersed in a corrosive solution by having a length direction of the probe precursor inclined with a liquid surface of the corrosive solution. The probe precursor is corroded by the corrosive solution while a corrosion current of the corroding is monitored. The probe precursor is moved away from the corrosive solution after a magnitude of the corrosion current has a plunge. The apparatus includes a container containing the corrosive solution, and a driving device configured to move the probe precursor in the container through a fastener.
    Type: Grant
    Filed: September 18, 2021
    Date of Patent: February 14, 2023
    Assignee: NATIONAL INSTITUTE OF METROLOGY, CHINA
    Inventors: Zhen-Dong Zhu, Si-Tian Gao, Wei Li
  • Patent number: 11515438
    Abstract: A solar cell including: a silicon substrate; a back electrode; a doped silicon layer; an upper electrode, wherein the upper electrode includes a plurality of three-dimensional nanostructures extending along a same direction; an electrode lead, wherein a direction of the electrode lead intersects with the direction of the plurality of three-dimensional nanostructures; wherein the three-dimensional nanostructures includes a first rectangular structure, a second rectangular structure, and a triangular prism structure; the first rectangular structure, the second rectangular structure, and the triangular prism structure are stacked, a first width of a bottom surface of the triangular prism structure is equal to a second width of a top surface of the second rectangular structure, and is greater than a third width of a top surface of the first rectangular structure, materials of the first rectangular structure and the triangular prism structure are metal.
    Type: Grant
    Filed: May 29, 2018
    Date of Patent: November 29, 2022
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Zhen-Dong Zhu, Qun-Qing Li, Shou-Shan Fan
  • Publication number: 20220128596
    Abstract: The present disclosure provides a tip-enhanced Raman spectroscope system. The system includes a laser emitting unit, a laser excitation unit, a first dichroic beam splitter, a first Raman spectrometer, and a confocal detecting unit. The laser excitation unit includes a sample stage and a first scanning probe. The sample stage is configured to have a sample disposed thereon such that a first incident laser beam emitted from the laser emitting unit is transmitted to the sample to excite first scattered light. The first dichroic beam splitter is configured to split a first Raman scattered light from the first Rayleigh scattered light. The first Raman spectrometer is disposed on a first Raman optical path of the first Raman scattered light. The confocal detecting unit is disposed on a first Rayleigh optical path of the first Rayleigh scattered light to image the sample.
    Type: Application
    Filed: January 11, 2022
    Publication date: April 28, 2022
    Inventors: ZHEN-DONG ZHU, SI-TIAN GAO, WEI LI
  • Patent number: 11268978
    Abstract: The present disclosure provides a tip-enhanced Raman spectroscope system. The system includes a laser emitting unit, a laser excitation unit, a first dichroic beam splitter, a first Raman spectrometer, and a confocal detecting unit. The laser excitation unit includes a sample stage and a first scanning probe. The sample stage is configured to have a sample disposed thereon such that a first incident laser beam emitted from the laser emitting unit is transmitted to the sample to excite first scattered light. The first dichroic beam splitter is configured to split a first Raman scattered light from the first Rayleigh scattered light. The first Raman spectrometer is disposed on a first Raman optical path of the first Raman scattered light. The confocal detecting unit is disposed on a first Rayleigh optical path of the first Rayleigh scattered light to image the sample.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: March 8, 2022
    Assignee: NATIONAL INSTITUTE OF METROLOGY, CHINA
    Inventors: Zhen-Dong Zhu, Si-Tian Gao, Wei Li, Shi Li, Jing-Tao Xu
  • Publication number: 20220003799
    Abstract: The present disclosure provides a scanning probe, a method and an apparatus for manufacturing the scanning probe. The scanning probe includes a base and a micro-tip disposed on an end of the base, wherein at least a section of the micro-tip comprises a lateral surface with a concavely curved generatrix. In the method, an end of a probe precursor is immersed in a corrosive solution by having a length direction of the probe precursor inclined with a liquid surface of the corrosive solution. The probe precursor is corroded by the corrosive solution while a corrosion current of the corroding is monitored. The probe precursor is moved away from the corrosive solution after a magnitude of the corrosion current has a plunge. The apparatus includes a container containing the corrosive solution, and a driving device configured to move the probe precursor in the container through a fastener.
    Type: Application
    Filed: September 18, 2021
    Publication date: January 6, 2022
    Inventors: ZHEN-DONG ZHU, SI-TIAN GAO, WEI LI
  • Patent number: 11156636
    Abstract: The present disclosure provides a scanning probe, a method and an apparatus for manufacturing the scanning probe. The scanning probe includes a base and a micro-tip disposed on an end of the base, wherein at least a section of the micro-tip comprises a lateral surface with a concavely curved generatrix. In the method, an end of a probe precursor is immersed in a corrosive solution by having a length direction of the probe precursor inclined with a liquid surface of the corrosive solution. The probe precursor is corroded by the corrosive solution while a corrosion current of the corroding is monitored. The probe precursor is moved away from the corrosive solution after a magnitude of the corrosion current has a plunge. The apparatus includes a container containing the corrosive solution, and a driving device configured to move the probe precursor in the container through a fastener.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: October 26, 2021
    Assignee: NATIONAL INSTITUTE OF METROLOGY, CHINA
    Inventors: Zhen-Dong Zhu, Si-Tian Gao, Wei Li
  • Publication number: 20200103438
    Abstract: The present disclosure provides a scanning probe, a method and an apparatus for manufacturing the scanning probe. The scanning probe includes a base and a micro-tip disposed on an end of the base, wherein at least a section of the micro-tip comprises a lateral surface with a concavely curved generatrix. In the method, an end of a probe precursor is immersed in a corrosive solution by having a length direction of the probe precursor inclined with a liquid surface of the corrosive solution. The probe precursor is corroded by the corrosive solution while a corrosion current of the corroding is monitored. The probe precursor is moved away from the corrosive solution after a magnitude of the corrosion current has a plunge. The apparatus includes a container containing the corrosive solution, and a driving device configured to move the probe precursor in the container through a fastener.
    Type: Application
    Filed: September 25, 2019
    Publication date: April 2, 2020
    Applicant: National Institute of Metrology, China
    Inventors: ZHEN-DONG ZHU, SI-TIAN GAO, WEI LI
  • Publication number: 20200103279
    Abstract: The present disclosure provides a tip-enhanced Raman spectroscope system. The system includes a laser emitting unit, a laser excitation unit, a first dichroic beam splitter, a first Raman spectrometer, and a confocal detecting unit. The laser excitation unit includes a sample stage and a first scanning probe. The sample stage is configured to have a sample disposed thereon such that a first incident laser beam emitted from the laser emitting unit is transmitted to the sample to excite first scattered light. The first dichroic beam splitter is configured to split a first Raman scattered light from the first Rayleigh scattered light. The first Raman spectrometer is disposed on a first Raman optical path of the first Raman scattered light. The confocal detecting unit is disposed on a first Rayleigh optical path of the first Rayleigh scattered light to image the sample.
    Type: Application
    Filed: September 26, 2019
    Publication date: April 2, 2020
    Applicant: National Institute of Metrology, China
    Inventors: ZHEN-DONG ZHU, SI-TIAN GAO, WEI LI, SHI LI, JING-TAO XU
  • Patent number: 10481096
    Abstract: A method of detecting single molecule includes: providing a carrier, wherein the carrier includes a substrate, and a plurality of three-dimensional nanostructures are located on the substrate; disposing single molecule samples on the plurality of three-dimensional nanostructures; detecting the single molecule samples with a detector; wherein each three-dimensional nanostructure includes a first rectangular structure, a second rectangular structure, and a triangular prism structure; the first rectangular structure, the second rectangular structure, and the triangular prism structure are stacked in that order, a first width of a bottom surface of the triangular prism structure is equal to a second width of a first top surface of the second rectangular structure and greater than a third width of a second top surface of the first rectangular structure, and the first rectangular structure comprises a first metal and the triangular prism structure comprises a second metal.
    Type: Grant
    Filed: May 29, 2018
    Date of Patent: November 19, 2019
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Zhen-Dong Zhu, Qun-Qing Li, Shou-Shan Fan
  • Patent number: 10388833
    Abstract: A light emitting diode, the light emitting diode including: a first semiconductor layer, an active layer, a second semiconductor layer, wherein a surface of the second semiconductor layer defines a first area; a metallic plasma generating layer; a first electrode; a second electrode; wherein the metallic plasma generating layer includes a plurality of three-dimensional nanostructures, the three-dimensional nanostructure includes a first rectangular structure, a second rectangular structure, and a triangular prism structure, the first rectangular structure, the second rectangular structure, and the triangular prism structure are stacked, the width of the triangular prism structure is equal to the width of the second rectangular structure, and is greater than the width of the first rectangular structure, the first rectangular structure is a metal layer, and the triangular prism structure is a metal layer.
    Type: Grant
    Filed: May 29, 2018
    Date of Patent: August 20, 2019
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Zhen-Dong Zhu, Qun-Qing Li, Shou-Shan Fan
  • Patent number: 10388621
    Abstract: A method of making nanoscale devices, the method including: depositing a metal film on a surface of a first substrate; annealing the metal film to form a plurality of metal island structures on the surface of the first substrate; laying metal nanospheres on the surface of the first substrate; baking the first composite structure to make the metal nanospheres become a plurality of metal crystalline balls; forming a photoresist layer on the first surface of the second composite structure; placing a release agent layer on a second substrate, applying an external force to press the photoresist layer on the release agent layer under an inert atmosphere; heating the second composite structure, the photoresist layer, the release agent layer, and the second substrate are and applying voltages in three stages.
    Type: Grant
    Filed: April 23, 2018
    Date of Patent: August 20, 2019
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Zhen-Dong Zhu, Qun-Qing Li, Shou-Shan Fan
  • Patent number: 10267962
    Abstract: A method of making a pine shaped metal nano-scaled grating, the method including: forming a first metal layer on a substrate, forming an isolation layer on the first metal layer, and locating a second metal layer on the isolation layer; placing a first mask layer on the second metal layer, wherein the first mask layer comprises a body, and the body defines a plurality of openings parallel with and spaced apart from each other; etching the first mask layer and the second metal layer to obtain a plurality of triangular prism structures; etching the isolation layer to obtain a plurality of second rectangular structures using the plurality of triangular prism structures as a first mask; and etching the first metal layer to obtain a plurality of first rectangular structures using the plurality of second rectangular structures as a second mask.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: April 23, 2019
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Zhen-Dong Zhu, Qun-Qing Li, Shou-Shan Fan
  • Patent number: 10215896
    Abstract: A pine shaped metal nano-scaled grating, the grating including a substrate and a plurality of three-dimensional nanostructures located on the substrate, wherein each three-dimensional nanostructure comprises a first rectangular structure, a second rectangular structure, and a triangular prism structure; the first rectangular structure is located on the substrate, the second rectangular structure is located on the first rectangular structure, the triangular prism structure is located on the second rectangular structure, a first width of a bottom surface of the triangular prism structure is equal to a second width of a first top surface of the second rectangular structure and greater than a third width of a second top surface of the first rectangular structure, and the first rectangular structure comprises a first metal and the triangular prism structure comprises a second metal.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: February 26, 2019
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Zhen-Dong Zhu, Qun-Qing Li, Shou-Shan Fan
  • Publication number: 20180351007
    Abstract: A solar cell including: a silicon substrate; a back electrode; a doped silicon layer; an upper electrode, wherein the upper electrode includes a plurality of three-dimensional nanostructures extending along a same direction; an electrode lead, wherein a direction of the electrode lead intersects with the direction of the plurality of three-dimensional nanostructures; wherein the three-dimensional nanostructures includes a first rectangular structure, a second rectangular structure, and a triangular prism structure; the first rectangular structure, the second rectangular structure, and the triangular prism structure are stacked, a first width of a bottom surface of the triangular prism structure is equal to a second width of a top surface of the second rectangular structure, and is greater than a third width of a top surface of the first rectangular structure, materials of the first rectangular structure and the triangular prism structure are metal.
    Type: Application
    Filed: May 29, 2018
    Publication date: December 6, 2018
    Inventors: ZHEN-DONG ZHU, QUN-QING LI, SHOU-SHAN FAN
  • Publication number: 20180351044
    Abstract: A light emitting diode, the light emitting diode including: a first semiconductor layer, an active layer, a second semiconductor layer, wherein a surface of the second semiconductor layer defines a first area; a metallic plasma generating layer; a first electrode; a second electrode; wherein the metallic plasma generating layer includes a plurality of three-dimensional nanostructures, the three-dimensional nanostructure includes a first rectangular structure, a second rectangular structure, and a triangular prism structure, the first rectangular structure, the second rectangular structure, and the triangular prism structure are stacked, the width of the triangular prism structure is equal to the width of the second rectangular structure, and is greater than the width of the first rectangular structure, the first rectangular structure is a metal layer, and the triangular prism structure is a metal layer.
    Type: Application
    Filed: May 29, 2018
    Publication date: December 6, 2018
    Inventors: ZHEN-DONG ZHU, QUN-QING LI, SHOU-SHAN FAN
  • Publication number: 20180348139
    Abstract: A method of detecting single molecule includes: providing a carrier, wherein the carrier includes a substrate, and a plurality of three-dimensional nanostructures are located on the substrate; disposing single molecule samples on the plurality of three-dimensional nanostructures; detecting the single molecule samples with a detector; wherein each three-dimensional nanostructure includes a first rectangular structure, a second rectangular structure, and a triangular prism structure; the first rectangular structure, the second rectangular structure, and the triangular prism structure are stacked in that order, a first width of a bottom surface of the triangular prism structure is equal to a second width of a first top surface of the second rectangular structure and greater than a third width of a second top surface of the first rectangular structure, and the first rectangular structure comprises a first metal and the triangular prism structure comprises a second metal.
    Type: Application
    Filed: May 29, 2018
    Publication date: December 6, 2018
    Inventors: ZHEN-DONG ZHU, QUN-QING LI, SHOU-SHAN FAN
  • Publication number: 20180315724
    Abstract: A method of making nanoscale devices, the method including: depositing a metal film on a surface of a first substrate; annealing the metal film to form a plurality of metal island structures on the surface of the first substrate; laying metal nanospheres on the surface of the first substrate; baking the first composite structure to make the metal nanospheres become a plurality of metal crystalline balls; forming a photoresist layer on the first surface of the second composite structure; placing a release agent layer on a second substrate, applying an external force to press the photoresist layer on the release agent layer under an inert atmosphere; heating the second composite structure, the photoresist layer, the release agent layer, and the second substrate are and applying voltages in three stages.
    Type: Application
    Filed: April 23, 2018
    Publication date: November 1, 2018
    Applicants: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: ZHEN-DONG ZHU, QUN-QING LI, SHOU-SHAN FAN
  • Publication number: 20180313987
    Abstract: A method of making a pine shaped metal nano-scaled grating, the method including: forming a first metal layer on a substrate, forming an isolation layer on the first metal layer, and locating a second metal layer on the isolation layer; placing a first mask layer on the second metal layer, wherein the first mask layer comprises a body, and the body defines a plurality of openings parallel with and spaced apart from each other; etching the first mask layer and the second metal layer to obtain a plurality of triangular prism structures; etching the isolation layer to obtain a plurality of second rectangular structures using the plurality of triangular prism structures as a first mask; and etching the first metal layer to obtain a plurality of first rectangular structures using the plurality of second rectangular structures as a second mask.
    Type: Application
    Filed: December 22, 2017
    Publication date: November 1, 2018
    Inventors: ZHEN-DONG ZHU, QUN-QING LI, SHOU-SHAN FAN
  • Publication number: 20180313986
    Abstract: A pine shaped metal nano-scaled grating, the grating including a substrate and a plurality of three-dimensional nanostructures located on the substrate, wherein each three-dimensional nanostructure comprises a first rectangular structure, a second rectangular structure, and a triangular prism structure; the first rectangular structure is located on the substrate, the second rectangular structure is located on the first rectangular structure, the triangular prism structure is located on the second rectangular structure, a first width of a bottom surface of the triangular prism structure is equal to a second width of a first top surface of the second rectangular structure and greater than a third width of a second top surface of the first rectangular structure, and the first rectangular structure comprises a first metal and the triangular prism structure comprises a second metal.
    Type: Application
    Filed: December 22, 2017
    Publication date: November 1, 2018
    Inventors: ZHEN-DONG ZHU, QUN-QING LI, SHOU-SHAN FAN
  • Patent number: 9798052
    Abstract: A hollow-structure metal grating is provided. The hollow-structure metal grating includes a substrate, a number of connecting metal layers, and a number of hollow metal protrusions spaced and located on a surface of the substrate. A space is defined between each of the number of hollow metal protrusions and the substrate.
    Type: Grant
    Filed: April 28, 2014
    Date of Patent: October 24, 2017
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Zhen-Dong Zhu, Qun-Qing Li, Ben-Feng Bai, Shou-Shan Fan