Abstract: A method of forming a micro-electro-mechanical systems (MEMS) device includes: providing a substrate; forming a tantalum nitride (TaN) layer on the substrate; forming a dielectric anti-reflective coating (DARC) layer on the TaN layer; coating photoresist on the DARC layer and etching the DARC: and TaN layers to form a trench; performing intensified ashing and wet cleaning processes to remove the photoresist and the DARC layer. The DARC layer can prevent the formation of tantalum-containing polymeric substances from a reaction between the TaN layer and the photoresist during the intensified ashing process.

Abstract: A method of forming a micro-electro-mechanical systems device includes: providing a substrate; sequentially forming a tantalum nitride (TaN) layer and a hard mask layer on the substrate, the hard mask layer having a thickness larger than a thickness of the TaN layer; coating photoresist on the hard mask layer, patterning the photoresist and performing a first etching process on the hard mask layer with the photoresist serving as a mask to form an opening in the hard mask layer, wherein a portion of the thickness of the hard mask layer is remained under the opening; removing the photoresist; and performing a second etching process to remove the portion of the thickness of the hard mask layer under the opening as well as a portion of the TaN layer under the opening to form a trench.

Abstract: A method for forming a magnetic sensor includes: forming a hard mask film on a tantalum nitride film; forming a patterned photoresist layer on the hard mask film; implementing an isotropic dry etching process to the hard mask film by taking the photoresist layer as a mask, so as to form a hard mask layer; and implementing an etching process to the tantalum nitride film and the magnetic film by taking the hard mask layer as a mask, so as to form a tantalum nitride layer and a magnetic resistive layer. As an isotropic dry etching process is implemented to the hard mask film, the hard mask film located which is above the other sidewalls and is not used for forming the magnetic sensor can be effectively removed. In addition, shadow effect will not take place, thus dimension of the magnetic sensor formed is able to be easily controlled.

Abstract: A portable shower stall suitable for a wheelchair-bound person to bathe with the help of an assistant, comprising of a self-supporting flexible shower base, a modular shower enclosure standing freely within the shower base, a hand-held sprayer connected to a kitchen faucet via hose, and a pump with puddle scoop attachment that drains the shower base. One sidewall of the shower base can be pressed down and fastened to the shower base bottom to facilitate wheelchair access, but it can be released and restored to upright position for water retention. Shower enclosure consists of two identical bi-fold shower screens clamping to each other to form a splash-proof rectangle. However, one or both screens can be removed from the shower base to provide access to the wheelchair-bound person.

Abstract: A portable shower stall suitable for a wheelchair-bound person to bathe with the help of an assistant, comprising of a self-supporting flexible shower base, a modular shower enclosure standing freely within the shower base, a hand-held sprayer connected to a kitchen faucet via hose, and a pump with puddle scoop attachment that drains the shower base. One sidewall of the shower base can be pressed down and fastened to the shower base bottom to facilitate wheelchair access, but it can be released and restored to upright position for water retention. Shower enclosure consists of two identical bi-fold shower screens clamping to each other to form a splash-proof rectangle. However, one or both screens can be removed from the shower base to provide access to the wheelchair-bound person.