Patents by Inventor Zhenyu Lu

Zhenyu Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10593690
    Abstract: Embodiments of through array contact structures of a 3D memory device and fabricating method thereof are disclosed. The memory device includes an alternating layer stack disposed on a first substrate. The alternating layer stack includes a first region including an alternating dielectric stack, and a second region including an alternating conductor/dielectric stack. The memory device further includes a barrier structure extending vertically through the alternating layer stack to laterally separate the first region from the second region, multiple through array contacts in the first region, each through array contact extending vertically through the alternating dielectric stack, an array interconnection layer in contact with the through array contacts, a peripheral circuit formed on a second substrate. and a peripheral interconnection layer on the peripheral circuit.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: March 17, 2020
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu Lu, Simon Shi-Ning Yang, Feng Pan, Steve Weiyi Yang, Jun Chen, Guanping Wu, Wenguang Shi, Weihua Cheng
  • Patent number: 10580788
    Abstract: Embodiments of methods for forming three-dimensional (3D) memory devices are disclosed. In an example, a peripheral device is formed on a first substrate. A first interconnect layer is formed above the peripheral device on the first substrate. A dielectric stack including a plurality of dielectric/sacrificial layer pairs and a plurality of memory strings each extending vertically through the dielectric stack is formed on a second substrate. A second interconnect layer is formed above the memory strings on the second substrate. The first substrate and the second substrate are bonded, so that the first interconnect layer is below and in contact with the second interconnect layer. The second substrate is thinned after the bonding. A memory stack is formed below the thinned second substrate and including a plurality of conductor/dielectric layer pairs by replacing, with a plurality of conductor layers, sacrificial layers in the dielectric/sacrificial layer pairs.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: March 3, 2020
    Assignee: Yangtze Memory Technologies, Co., Ltd.
    Inventors: Jifeng Zhu, Jun Chen, Zhenyu Lu, Qian Tao, Si Ping Hu, Jia Wen Wang, Yang Fu
  • Publication number: 20200058486
    Abstract: Embodiments of semiconductor structures for wafer flatness control and methods for using and forming the same are disclosed. In an example, a model indicative of a flatness difference of a wafer between a first direction and a second direction is obtained. The flatness difference is associated with one of a plurality of fabrication stages of a plurality of semiconductor devices on a front side of the wafer. A compensation pattern is determined for reducing the flatness difference based on the model. At the one of the plurality of the fabrication stages, a compensation structure is formed on a backside opposite to the front side of the wafer based on the compensation pattern to reduce the flatness difference.
    Type: Application
    Filed: September 24, 2018
    Publication date: February 20, 2020
    Inventors: Xiaowang Dai, Zhenyu Lu, Qian Tao, Yushi Hu, Ji Xia, Zhaosong Li, Jialan He
  • Publication number: 20200051607
    Abstract: Embodiments of methods for operating ferroelectric memory cells are disclosed. In one example, a method for writing a ferroelectric memory cell is provided. The ferroelectric memory cell includes a transistor and N capacitors. The transistor is electrically connected to a bit line and a word line, respectively, and each of the N capacitors is electrically connected to a respective one of N plate lines in parallel. A plate line signal pulsed between 0 V and Vdd is applied to each of the N plate lines according to a plate line time sequence. A bit line signal pulsed between 0 V and the Vdd is applied to the bit line according to a bit line time sequence to write a valid state of data into the N capacitors. The data consists of N+1 valid states that can be written into the N capacitors. The valid states of the data are determined based on the plate line time sequence. The bit line time sequence is determined based on the valid state of the data written into the N capacitors.
    Type: Application
    Filed: June 24, 2019
    Publication date: February 13, 2020
    Inventors: Feng Pan, Zhenyu Lu
  • Patent number: 10553604
    Abstract: Embodiments of through array contact structures of a 3D memory device and fabricating method thereof are disclosed. The 3D NAND memory device includes an alternating layer stack disposed on a substrate. The alternating layer stack includes a first region including an alternating dielectric stack, and a second region including an alternating conductor/dielectric stack. The memory device further comprises a barrier structure extending vertically through the alternating layer stack to laterally separate the first region from the second region, and multiple through array contacts in the first region each extending vertically through the alternating dielectric stack. At least one through array contact is electrically connected with a peripheral circuit.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: February 4, 2020
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu Lu, Wenguang Shi, Guanping Wu, Xianjin Wan, Baoyou Chen
  • Publication number: 20200035699
    Abstract: Methods and structures of a three-dimensional memory device are disclosed. In an example, the memory device includes a substrate and a multiple-stack staircase structure. The multiple-stack staircase structure can include a plurality of staircase structures stacked over the substrate. Each one of the plurality of staircase structures can include a plurality of conductor layers each between two insulating layers. The memory device can also include a filling structure over the multiple-stack staircase structure, a semiconductor channel extending through the multiple-stack staircase structure, and a supporting pillar extending through the multiple-stack staircase structure and the filling structure. The semiconductor channel can include unaligned sidewall surfaces, and the supporting pillar can include aligned sidewall surfaces.
    Type: Application
    Filed: September 10, 2018
    Publication date: January 30, 2020
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Jun LIU, Zongliang Huo, Li Hong Xiao, Zhenyu Lu, Qian Tao, Yushi Hu, Sizhe Li, Zhao Hui Tang, Yu Ting Zhou, Zhaosong Li
  • Publication number: 20200027509
    Abstract: Embodiments of three-dimensional (3D) memory devices are disclosed. In an example, a 3D memory device includes a substrate, a peripheral device disposed on the substrate, a memory stack disposed above the peripheral device and including a plurality of conductor/dielectric layer pairs, and a plurality of memory strings. Each of the memory strings extends vertically through the memory stack and includes a drain select gate and a source select gate above the drain select gate. Edges of the conductor/dielectric layer pairs in a staircase structure of the memory stack along a vertical direction away from the substrate are staggered laterally toward the memory strings.
    Type: Application
    Filed: September 21, 2018
    Publication date: January 23, 2020
    Inventors: Jun Chen, Jifeng Zhu, Zhenyu Lu, Yushi Hu, Jin Wen Dong, Lan Yao
  • Publication number: 20200027892
    Abstract: Embodiments of methods for forming three-dimensional (3D) memory devices are disclosed. In an example, a peripheral device is formed on a first substrate. A first interconnect layer is formed above the peripheral device on the first substrate. A dielectric stack including a plurality of dielectric/sacrificial layer pairs and a plurality of memory strings each extending vertically through the dielectric stack is formed on a second substrate. A second interconnect layer is formed above the memory strings on the second substrate. The first substrate and the second substrate are bonded, so that the first interconnect layer is below and in contact with the second interconnect layer. The second substrate is thinned after the bonding. A memory stack is formed below the thinned second substrate and including a plurality of conductor/dielectric layer pairs by replacing, with a plurality of conductor layers, sacrificial layers in the dielectric/sacrificial layer pairs.
    Type: Application
    Filed: September 21, 2018
    Publication date: January 23, 2020
    Inventors: Jifeng Zhu, Jun Chen, Zhenyu Lu, Qian Tao, Si Ping Hu, Jia Wen Wang, Yang Fu
  • Patent number: 10522474
    Abstract: Embodiments of three-dimensional (3D) memory devices and methods for controlling a photoresist (PR) trimming rate in the formation of the 3D memory devices are disclosed. In an example, a method includes forming a dielectric stack over a substrate, measuring a first distance between the first trimming mark and the PR layer along a first direction, and trimming the PR layer along the first direction. The method also includes etching the dielectric stack using the trimmed PR layer as an etch mask to form a staircase, forming a second trimming mark using the first trimming mark as an etch mask, measuring a second distance between the second trimming mark and the trimmed PR layer, comparing the first distance with the second distance to determine a difference between an actual PR trimming rate and an estimated PR trimming rate, and adjusting PR trimming parameters based on the difference.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: December 31, 2019
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu Lu, Lidong Song, Yongna Li, Feng Pan, Xiaowang Dai, Dan Liu, Steve Weiyi Yang, Simon Shi-Ning Yang
  • Publication number: 20190392480
    Abstract: In an implementation, guiding a service flow is described. Historical behavior data of one or more users who use a target service is obtained for the target service. The historical behavior data is analyzed to obtain one or more user features. One or more target users are selected from one or more users who do not use the target service based on the one or more user features. Each target user has at least one of the one or more user features. Service flow guiding information is sent to each target user. The service flow guiding information guides each target user to use the target service.
    Type: Application
    Filed: September 6, 2019
    Publication date: December 26, 2019
    Applicant: Alibaba Group Holding Limited
    Inventors: Weiwei Ding, Chen Tao, Feng Jin, Zhenyu Lu, Jiajun Wen, Yonggang Du, Wenming He, Zhaolin Feng, Zhirong Yang, Kai Yang
  • Patent number: 10515975
    Abstract: A method for forming a channel hole structure of a 3D memory device is disclosed. The method includes: forming a first alternating dielectric stack and a first insulating layer on a substrate; forming a first channel structure in a first channel hole penetrating the first insulating layer and the first alternating dielectric stack; forming a sacrificial inter-deck plug in the first insulating layer; forming a second alternating dielectric stack on the sacrificial inter-deck plug; forming a second channel hole penetrating the second alternating dielectric stack and expose a portion of the sacrificial inter-deck plug; removing the sacrificial inter-deck plug to form a cavity; and forming an inter-deck channel plug in the cavity and a second channel structure in the second channel hole, the inter-deck channel plug contacts the first channel structure and the second channel structure.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: December 24, 2019
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Qian Tao, Yushi Hu, Zhenyu Lu, Li Hong Xiao, Jun Chen, Xiaowang Dai, Jin Lyu, Jifeng Zhu, Jin Wen Dong, Lan Yao
  • Publication number: 20190378849
    Abstract: A method for forming a channel hole structure of a 3D memory device is disclosed. The method includes: forming a first alternating dielectric stack and a first insulating layer on a substrate; forming a first channel structure in a first channel hole penetrating the first insulating layer and the first alternating dielectric stack; forming a sacrificial inter-deck plug in the first insulating layer; forming a second alternating dielectric stack on the sacrificial inter-deck plug; forming a second channel hole penetrating the second alternating dielectric stack and expose a portion of the sacrificial inter-deck plug; removing the sacrificial inter-deck plug to form a cavity; and forming an inter-deck channel plug in the cavity and a second channel structure in the second channel hole, the inter-deck channel plug contacts the first channel structure and the second channel structure.
    Type: Application
    Filed: July 26, 2018
    Publication date: December 12, 2019
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Qian Tao, Yushi HU, Zhenyu Lu, Li Hong XIAO, Jun CHEN, Xiaowang DAI, Jin LYU, Jifeng ZHU, Jin Wen DONG, Lan YAO
  • Publication number: 20190341399
    Abstract: Embodiments of interconnect structures of a three-dimensional (3D) memory device and method for forming the interconnect structures are disclosed. In an example, a 3D NAND memory device includes a semiconductor substrate, an alternating layer stack disposed on the semiconductor substrate, and a dielectric structure, which extends vertically through the alternating layer stack, on an isolation region of the substrate. Further, the alternating layer stack abuts a sidewall surface of the dielectric structure and the dielectric structure is formed of a dielectric material. The 3D memory device additionally includes one or more through array contacts that extend vertically through the dielectric structure and the isolation region, and one or more channel structures that extend vertically through the alternating layer stack.
    Type: Application
    Filed: July 27, 2018
    Publication date: November 7, 2019
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Qian TAO, Yushi HU, Zhenyu LU, Li Hong XIAO, Xiaowang DAI, Yu Ting ZHOU, Zhao Hui TANG, Mei Lan GUO, ZhiWu TANG, Qinxiang WEI, Qianbing XU, Sha Sha LIU, Jian Hua SUN, Enbo WANG
  • Publication number: 20190326308
    Abstract: Methods and structures of a three-dimensional memory device are disclosed. In an example, the memory device includes a substrate having one or more first recesses in a first region and one or more second recesses in a second region. A liner layer is disposed over the sidewalls and bottom of the one or more first recesses in the first region and an epitaxially-grown material is formed in the one or more second recesses in the second region. One or more NAND strings are formed over the epitaxially-grown material disposed in the one or more second recesses, and one or more vertical structures are formed over the one or more first recesses in the first region.
    Type: Application
    Filed: July 26, 2018
    Publication date: October 24, 2019
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Yue Qiang PU, Jin Wen Dong, Jun Chen, Zhenyu Lu, Qian Tao, Yushi Hu, Zhao Hui Tang, Li Hong Xiao, Yu Ting Zhou, Sizhe Li, Zhaosong Li
  • Publication number: 20190326314
    Abstract: Embodiments of a channel hole plug structure of 3D memory devices and fabricating methods thereof are disclosed. The memory device includes an alternating layer stack disposed on a substrate, an insulating layer disposed on the alternating dielectric stack, a channel hole extending vertically through the alternating dielectric stack and the insulating layer, a channel structure including a channel layer in the channel hole, and a channel hole plug in the insulating layer and above the channel structure. The channel hole plug is electrically connected with the channel layer. A projection of the channel hole plug in a lateral plane covers a projection of the channel hole in the lateral plane.
    Type: Application
    Filed: July 26, 2018
    Publication date: October 24, 2019
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Li Hong XIAO, Zhenyu LU, Qian TAO, Yushi HU, Jun CHEN, LongDong LIU, Meng WANG
  • Publication number: 20190311011
    Abstract: A computing device hosting a website of a business may be operable to receive a first search input comprising a term submitted via a search bar on the website. Upon performing an internal search for the term with no result, the computing device may output information on the no-result. The computing device may then perform, using one or more external search engines, a search for the term. Search results of the search, performed using the external search engine(s), may be analyzed. Based on a result of the analysis, one or more particular character strings related to the term may be identified. The computing device may generate and store, based on the identifying of the particular character string(s), one or more alternative search suggestions. Upon subsequently receiving an input comprising at least a portion of the term entered in the search bar, the computing device may output the alternative search suggestion(s).
    Type: Application
    Filed: April 16, 2019
    Publication date: October 10, 2019
    Inventors: Rongkai Zhao, Zhenyu Lu, Kenneth Katschke
  • Publication number: 20190303058
    Abstract: An approach provides access to cloud services that are impractical or difficult to implement on end-user devices without a high level of programming skill and customization. The approach uses a first set of cloud services, referred to herein as Integrated Cloud Environment (ICE) cloud services, to access to a second set of cloud services, referred to herein as Smart Integration (SI) cloud services, on end-user devices. The ICE cloud services provide a user-friendly user interface for accessing the SI cloud services via an end-user device, implement the Application Program Interfaces (APIs) of the SI cloud services, and also manage results generated by the SI cloud services. The ICE cloud services also manage user information, authorization credentials and tokens needed to access third-party services. According to another embodiment, the SI cloud and the ICE cloud are integrated using direct linking, i.e., directly linking an end-user device to the SI cloud.
    Type: Application
    Filed: March 30, 2018
    Publication date: October 3, 2019
    Applicant: RICOH COMPANY, LTD.
    Inventors: Jayasimha Nuggehalli, Bhushan Nadkarni, Srikrishna Narasimhan, Zhenyu Lu
  • Publication number: 20190306224
    Abstract: An approach provides access to cloud services that are impractical or difficult to implement on end-user devices without a high level of programming skill and customization. The approach uses a first set of cloud services, referred to herein as Integrated Cloud Environment (ICE) cloud services, to access to a second set of cloud services, referred to herein as Smart Integration (SI) cloud services, on end-user devices. The ICE cloud services provide a user-friendly user interface for accessing the SI cloud services via an end-user device, implement the Application Program Interfaces (APIs) of the SI cloud services, and also manage results generated by the SI cloud services. The ICE cloud services also manage user information, authorization credentials and tokens needed to access third-party services. According to another embodiment, the SI cloud and the ICE cloud are integrated using direct linking, i.e., directly linking an end-user device to the SI cloud.
    Type: Application
    Filed: March 30, 2018
    Publication date: October 3, 2019
    Applicant: RICOH COMPANY, LTD.
    Inventors: Jayasimha Nuggehalli, Bhushan Nadkarni, Srikrishna Narasimhan, Zhenyu Lu
  • Publication number: 20190306227
    Abstract: An approach provides access to cloud services that are impractical or difficult to implement on end-user devices without a high level of programming skill and customization. The approach uses a first set of cloud services, referred to herein as Integrated Cloud Environment (ICE) cloud services, to access to a second set of cloud services, referred to herein as Smart Integration (SI) cloud services, on end-user devices. The ICE cloud services provide a user-friendly user interface for accessing the SI cloud services via an end-user device, implement the Application Program Interfaces (APIs) of the SI cloud services, and also manage results generated by the SI cloud services. The ICE cloud services also manage user information, authorization credentials and tokens needed to access third-party services. According to another embodiment, the SI cloud and the ICE cloud are integrated using direct linking, i.e., directly linking an end-user device to the SI cloud.
    Type: Application
    Filed: March 30, 2018
    Publication date: October 3, 2019
    Applicant: RICOH COMPANY, LTD.
    Inventors: Jayasimha Nuggehalli, Bhushan Nadkarni, Srikrishna Narasimhan, Zhenyu Lu
  • Publication number: 20190306223
    Abstract: An approach provides access to cloud services that are impractical or difficult to implement on end-user devices without a high level of programming skill and customization. The approach uses a first set of cloud services, referred to herein as Integrated Cloud Environment (ICE) cloud services, to access to a second set of cloud services, referred to herein as Smart Integration (SI) cloud services, on end-user devices. The ICE cloud services provide a user-friendly user interface for accessing the SI cloud services via an end-user device, implement the Application Program Interfaces (APIs) of the SI cloud services, and also manage results generated by the SI cloud services. The ICE cloud services also manage user information, authorization credentials and tokens needed to access third-party services. According to another embodiment, the SI cloud and the ICE cloud are integrated using direct linking, i.e., directly linking an end-user device to the SI cloud.
    Type: Application
    Filed: March 30, 2018
    Publication date: October 3, 2019
    Applicant: RICOH COMPANY, LTD.
    Inventors: Jayasimha Nuggehalli, Bhushan Nadkarni, Srikrishna Narasimhan, Zhenyu Lu