Patents by Inventor Zhi Chang

Zhi Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11626402
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes an isolation structure formed over a substrate, and a first stacked structure and a second stacked structure extending above the isolation structure. The first stacked structure includes a plurality of first nanostructures stacked in a vertical direction, and the second stacked structure includes a plurality of second nanostructures stacked in the vertical direction. The semiconductor device structure includes a first dummy fin structure formed over the isolation structure, and the first dummy fin structure is between the first stacked structure and the second stacked structure. The semiconductor device structure also includes a first capping layer formed over the first dummy fin structure, and an interface between the first dummy fin structure and the first capping layer is lower than a top surface of a topmost first nanostructure.
    Type: Grant
    Filed: December 22, 2021
    Date of Patent: April 11, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kuo-Cheng Chiang, Shi-Ning Ju, Chih-Hao Wang, Kuan-Ting Pan, Zhi-Chang Lin
  • Publication number: 20230106478
    Abstract: A method of forming a semiconductor transistor device. The method comprises forming a channel structure over a substrate and forming a first source/drain structure and a second source/drain structure on opposite sides of the fin structure. The method further comprises forming a gate structure surrounding the fin structure. The method further comprises flipping and partially removing the substrate to form a back-side capping trench while leaving a lower portion of the substrate along upper sidewalls of the first source/drain structure and the second source/drain structure as a protective spacer. The method further comprises forming a back-side dielectric cap in the back-side capping trench.
    Type: Application
    Filed: December 12, 2022
    Publication date: April 6, 2023
    Inventors: Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang, Zhi-Chang Lin, Li-Zhen Yu
  • Publication number: 20230099320
    Abstract: A semiconductor device includes a first transistor and a second transistor. The first transistor includes: a first source and a first drain separated by a first distance, a first semiconductor structure disposed between the first source and first drain, a first gate electrode disposed over the first semiconductor structure, and a first dielectric structure disposed over the first gate electrode. The first dielectric structure has a lower portion and an upper portion disposed over the lower portion and wider than the lower portion. The second transistor includes: a second source and a second drain separated by a second distance greater than the first distance, a second semiconductor structure disposed between the second source and second drain, a second gate electrode disposed over the second semiconductor structure, and a second dielectric structure disposed over the second gate electrode. The second dielectric structure and the first dielectric structure have different material compositions.
    Type: Application
    Filed: December 5, 2022
    Publication date: March 30, 2023
    Inventors: Huan-Chieh Su, Zhi-Chang Lin, Ting-Hung Hsu, Jia-Ni Yu, Wei-Hao Wu, Yu-Ming Lin, Chih-Hao Wang
  • Patent number: 11616062
    Abstract: Self-aligned gate cutting techniques are disclosed herein that provide dielectric gate isolation fins for isolating gates of multigate devices from one another. An exemplary device includes a first multigate device having first source/drain features and a first metal gate that surrounds a first channel layer and a second multigate device having second source/drain features and a second metal gate that surrounds a second channel layer. A dielectric gate isolation fin separates the first metal gate from the second metal gate. The dielectric gate isolation fin includes a first dielectric layer having a first dielectric constant and a second dielectric layer having a second dielectric constant disposed over the first dielectric layer. The second dielectric constant is greater than the first dielectric constant. The first metal gate and the second metal gate physically contact the first channel layer and the second channel layer, respectively, and the dielectric gate isolation fin.
    Type: Grant
    Filed: February 8, 2021
    Date of Patent: March 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shi Ning Ju, Kuo-Cheng Chiang, Kuan-Ting Pan, Zhi-Chang Lin, Chih-Hao Wang, Shih-Cheng Chen
  • Patent number: 11605737
    Abstract: A device includes a substrate, a semiconductor layer, a gate structure, source/drain regions, a bottom isolation layer, and a bottom spacer. The semiconductor layer is above the substrate. The gate structure is above the substrate and surrounds the semiconductor layer. The source/drain regions are on opposite sides of the semiconductor layer. The bottom isolation layer is between the substrate and the semiconductor layer. The bottom spacer is on a sidewall of the bottom isolation layer. The bottom isolation layer has a seam therein, and the seam exposes a sidewall of the bottom spacer.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: March 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Zhi-Chang Lin, Shih-Cheng Chen, Jung-Hung Chang, Lo-Heng Chang, Chien-Ning Yao
  • Publication number: 20230064705
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a plurality of semiconductor layers having a first group of semiconductor layers, a second group of semiconductor layers disposed over and aligned with the first group of semiconductor layers, and a third group of semiconductor layers disposed over and aligned with the second group of semiconductor layers. The structure further includes a first source/drain epitaxial feature in contact with a first number of semiconductor layers of the first group of semiconductor layers and a second source/drain epitaxial feature in contact with a second number of semiconductor layers of the third group of semiconductor layers. The first number of semiconductor layers of the first group of semiconductor layers is different from the second number of semiconductor layers of the third group of semiconductor layers.
    Type: Application
    Filed: August 27, 2021
    Publication date: March 2, 2023
    Inventors: Jung-Hung CHANG, Zhi-Chang LIN, Shih-Cheng CHEN, Chien Ning YAO, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Publication number: 20230065208
    Abstract: A device includes a substrate, a first nanostructure channel above the substrate and a second nanostructure channel between the first nanostructure channel and the substrate. An inner spacer is between the first nanostructure channel and the second nanostructure channel. A gate structure abuts the first nanostructure channel, the second nanostructure channel and the inner spacer. A liner layer is between the inner spacer and the gate structure.
    Type: Application
    Filed: August 31, 2021
    Publication date: March 2, 2023
    Inventors: Tsung-Han CHUANG, Zhi-Chang LIN, Shih-Cheng CHEN, Jung-Hung CHANG, Chien Ning YAO, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Publication number: 20230053451
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a first stacked nanostructure and a second stacked nanostructure formed over a substrate, and a dummy fin structure between the first stacked nanostructure and the second stacked nanostructure. The semiconductor device structure includes a gate structure formed over the first stacked nanostructure and the second stacked nanostructure, and a conductive layer formed over the gate structure. The semiconductor device structure includes a capping layer formed over the dummy fin structure, and each of the gate structure and the conductive layer is divided into two portions by the capping layer.
    Type: Application
    Filed: November 4, 2022
    Publication date: February 23, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Cheng CHING, Zhi-Chang LIN, Kuan-Ting PAN, Chih-Hao WANG, Shi-Ning JU
  • Patent number: 11581224
    Abstract: A method of forming a semiconductor transistor device. The method comprises forming a fin-shaped channel structure over a substrate and forming a first source/drain epitaxial structure and a second source/drain epitaxial structure on opposite endings of the fin structure. The method further comprises forming a metal gate structure surrounding the fin structure. The method further comprises flipping and partially removing the substrate to form a back-side capping trench while leaving a lower portion of the substrate along upper sidewalls of the first source/drain epitaxial structure and the second source/drain epitaxial structure as a protective spacer. The method further comprises forming a back-side dielectric cap in the back-side capping trench.
    Type: Grant
    Filed: October 12, 2020
    Date of Patent: February 14, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang, Zhi-Chang Lin, Li-Zhen Yu
  • Patent number: 11571721
    Abstract: Disclosed is a drainage system for an automatic cleaning storage base of an electric mop. The automatic cleaning storage base of the electric mop comprises a casing member having a cleaning tank. The drainage system comprises a drain valve; an outlet end of the drain valve is connected to the outside of the casing member, and an inlet end of the drain valve is connected to the cleaning tank; the drain valve has a switch, and the switch is provided with a first rack; the drain valve is further provided with a duplex gear and a second rack; the duplex gear has a gear portion with a larger outer diameter to mesh with the first rack, and the duplex gear has a gear portion with a smaller outer diameter to mesh with the second rack.
    Type: Grant
    Filed: September 4, 2019
    Date of Patent: February 7, 2023
    Assignee: SHENZHEN JASHEN TECHNOLOGY CO., LTD.
    Inventors: Zhi-Chang Liu, Xiao-Ming Zhang, Jian-Xin Xi
  • Publication number: 20230034360
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first gate stack wrapping around first nanostructures, a second gate stack wrapping around second nanostructures, a gate isolation structure interposing between the first gate stack and the second gate stack, a first source/drain feature adjoining the first nanostructures, a second source/drain feature adjoining the second nanostructures, and a source/drain spacer structure interposing between the first source/drain feature and the second source/drain feature. The gate isolation structure covers a sidewall of the source/drain spacer structure.
    Type: Application
    Filed: February 15, 2022
    Publication date: February 2, 2023
    Inventors: Huan-Chieh Su, Zhi-Chang Lin, Li-Zhen Yu, Chun-Yuan Chen, Lo-Heng Chang, Cheng-Chi Chuang, Chih-Hao Wang, Lin-Yu Huang
  • Patent number: 11565285
    Abstract: A self-cleaning automatically-stored electrical mop includes a mop rod assembly, a mop head assembly, and a cleaning base assembly used for storing and cleaning the mop head assembly. The mop head assembly is arranged at the lower end of the mop rod assembly and includes a mop head shell which is provided with a rotatable cleaning roller and a motor used for driving the cleaning roller. The cleaning base assembly includes a shell part. A cleaning groove used for cleaning the cleaning roller is formed in the shell part, and a cleaning assembly used for scrubbing the cleaning roller is arranged in the cleaning groove. The shell part is provided with a sewage discharge system used for discharging sewage.
    Type: Grant
    Filed: September 4, 2019
    Date of Patent: January 31, 2023
    Assignee: SHENZHEN JASHEN TECHNOLOGY CO., LTD.
    Inventors: Zhi-Chang Liu, Xiao-Ming Zhang, Jian-Xin Xi
  • Publication number: 20230028900
    Abstract: An integrated circuit includes a first nanostructure transistor including a plurality of first semiconductor nanostructures over a substrate and a source/drain region in contact with each of the first semiconductor nanostructures. The integrated circuit includes a second nanostructure transistor including a plurality of second semiconductor nanostructures and a second source/drain region in contact with one or more of the second semiconductor nanostructures but not in contact with one or more other second semiconductor nanostructures.
    Type: Application
    Filed: March 11, 2022
    Publication date: January 26, 2023
    Inventors: Zhi-Chang LIN, Chien Ning YAO, Shih-Cheng CHEN, Jung-Hung CHANG, Tsung-Han CHUANG, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Publication number: 20230026310
    Abstract: A method for forming a semiconductor structure is provided. The method includes forming a fin structure over a substrate. The fin structure includes a protection layer and alternating first and second semiconductor layers over the protection layer. The method also includes etching the fin structure to form a source/drain recess, forming a sacrificial contact in the source/drain recess, forming a source/drain feature over the sacrificial contact in the source/drain recess, removing the first semiconductor layers of the fin structure, thereby forming a plurality of nanostructures, forming a gate stack wrapping around the nanostructures, removing the substrate thereby exposing the protection layer and the sacrificial contact and replacing the sacrificial contact with a contact plug.
    Type: Application
    Filed: July 23, 2021
    Publication date: January 26, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jung-Hung CHANG, Lo Heng CHANG, Zhi-Chang LIN, Shih-Cheng CHEN, Chien-Ning YAO, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Patent number: 11557660
    Abstract: A mask layer is formed over a semiconductor device. The semiconductor device includes: a gate structure, a first layer disposed over the gate structure, and an interlayer dielectric (ILD) disposed on sidewalls of the first layer. The mask layer includes an opening that exposes a portion of the first layer and a portion of the ILD. A first etching process is performed to etch the opening partially into the first layer and partially into the ILD. A liner layer is formed in the opening after the first etching process has been performed. A second etching process is performed after the liner layer has been formed. The second etching process extends the opening downwardly through the first layer and through the gate structure. The opening is filled with a second layer after the second etching process has been performed.
    Type: Grant
    Filed: March 8, 2021
    Date of Patent: January 17, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Zhi-Chang Lin, Wei-Hao Wu, Jia-Ni Yu, Huan-Chieh Su, Ting-Hung Hsu, Chih-Hao Wang
  • Publication number: 20230012216
    Abstract: A method for forming a gate all around transistor includes forming a plurality of semiconductor nanosheets. The method includes forming a cladding inner spacer between a source region of the transistor and a gate region of the transistor. The method includes forming sheet inner spacers between the semiconductor nanosheets in a separate deposition process from the cladding inner spacer.
    Type: Application
    Filed: July 8, 2021
    Publication date: January 12, 2023
    Inventors: Zhi-Chang LIN, Kuan-Ting PAN, Shih-Cheng CHEN, Jung-Hung CHANG, Lo-Heng CHANG, Chien-Ning YAO, Kuo-Cheng CHIANG
  • Patent number: 11545400
    Abstract: A method includes forming a gate stack, which includes a gate dielectric and a metal gate electrode over the gate dielectric. An inter-layer dielectric is formed on opposite sides of the gate stack. The gate stack and the inter-layer dielectric are planarized. The method further includes forming an inhibitor film on the gate stack, with at least a portion of the inter-layer dielectric exposed, selectively depositing a dielectric hard mask on the inter-layer dielectric, with the inhibitor film preventing the dielectric hard mask from being formed thereon, and etching to remove a portion of the gate stack, with the dielectric hard mask acting as a portion of a corresponding etching mask.
    Type: Grant
    Filed: December 7, 2020
    Date of Patent: January 3, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsu-Hsiu Perng, Kai-Chieh Yang, Zhi-Chang Lin, Teng-Chun Tsai, Wei-Hao Wu
  • Publication number: 20220416036
    Abstract: A device includes a substrate. A first channel region of a first transistor overlies the substrate and a source/drain region is in contact with the first channel region. The source/drain region is adjacent to the first channel region along a first direction, and the source/drain region has a first surface opposite the substrate and side surfaces extending from the first surface. A dielectric fin structure is adjacent to the source/drain region along a second direction that is transverse to the first direction, and the dielectric fin structure has an upper surface, a lower surface, and an intermediate surface that is disposed between the upper and lower surfaces. A silicide layer is disposed on the first surface and the side surfaces of the source/drain region and on the intermediate surface of the dielectric fin structure.
    Type: Application
    Filed: January 14, 2022
    Publication date: December 29, 2022
    Inventors: Shih-Cheng CHEN, Zhi-Chang LIN, Jung-Hung CHANG, Chien-Ning YAO, Tsung-Han CHUANG, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Patent number: 11532626
    Abstract: A semiconductor device according to the present disclosure includes a bottom dielectric feature on a substrate, a plurality of channel members directly over the bottom dielectric feature, a gate structure wrapping around each of the plurality of channel members, two first epitaxial features sandwiching the bottom dielectric feature along a first direction, and two second epitaxial features sandwiching the plurality of channel members along the first direction.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: December 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jung-Hung Chang, Lo-Heng Chang, Zhi-Chang Lin, Shih-Cheng Chen, Kuo-Cheng Chiang, Chih-Hao Wang
  • Patent number: 11521858
    Abstract: A semiconductor device includes a first transistor and a second transistor. The first transistor includes: a first source and a first drain separated by a first distance, a first semiconductor structure disposed between the first source and first drain, a first gate electrode disposed over the first semiconductor structure, and a first dielectric structure disposed over the first gate electrode. The first dielectric structure has a lower portion and an upper portion disposed over the lower portion and wider than the lower portion. The second transistor includes: a second source and a second drain separated by a second distance greater than the first distance, a second semiconductor structure disposed between the second source and second drain, a second gate electrode disposed over the second semiconductor structure, and a second dielectric structure disposed over the second gate electrode. The second dielectric structure and the first dielectric structure have different material compositions.
    Type: Grant
    Filed: February 12, 2021
    Date of Patent: December 6, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Huan-Chieh Su, Zhi-Chang Lin, Ting-Hung Hsu, Jia-Ni Yu, Wei-Hao Wu, Yu-Ming Lin, Chih-Hao Wang