Abstract: Memory device includes a bottom-select-gate (BSG) structure. Cut slits are formed vertically through the BSG structure, on a substrate. A cell-layers structure is formed on the BSG structure. Gate-line slits are formed vertically through the cell-layers structure and the BSG structure, into the substrate and arranged along a first lateral direction to distinguish finger regions. The gate-line slits include a first gate-line slit between first and second finger regions, the first gate-line slit including gate-line sub-slits. The cut slits include a first cut-slit, formed in the second finger region and connecting to a gate-line sub-slit to define a BSG in a first portion of the second finger region. The BSG in the first portion of the second finger region is electrically connected to cell strings in the first finger region through an inter portion between the one gate-line sub-slit and an adjacent gate-line sub-slit.

Abstract: In a method for fabricating a semiconductor device, an initial stack is formed. The initial stack is formed of sacrificial layers and insulating layers that are alternatingly disposed over a substrate, and includes a first connection region, a first array region, and a second connection region that are disposed sequentially. A first initial staircase is formed in the first connection region and formed in a first group of sacrificial layers and insulating layers. A first top select gate staircase is formed in the second connection region, and formed in a second group of sacrificial layers and insulating layers. An etching process is subsequently performed in the first connection region to shift the first initial staircase toward the substrate along a vertical direction perpendicular to the substrate so as to form a first bottom select gate staircase.

Abstract: Embodiments of a three-dimensional (3D) memory device are provided. A method for forming a 3D memory device is disclosed. A dielectric stack including interleaved sacrificial layers and dielectric layers is formed over a substrate. Channel holes and contact holes are formed through the dielectric stack. The contact holes extend vertically into the substrate and are each surrounded by channel holes of nominally equal lateral distances to the respective contact hole in a plan view. A channel structure is formed in each of the channel holes. A memory stack having interleaved conductive layers and dielectric layers is formed by replacing, through the contact holes, the sacrificial layers in the dielectric stack with the conductive layers. A spacer is formed along a sidewall of each of the contact holes to cover the conductive layers of the memory stack. A contact is formed over the spacer in each of the contact holes. The contact is electrically connected to a common source of the channel structures.

Abstract: Aspects of the disclosure provide a semiconductor device. The semiconductor device includes gate layers and insulating layers that are stacked alternatingly along a direction perpendicular to a substrate of the semiconductor device and form a stack upon the substrate. The semiconductor device includes an array of channel structures that are formed in an array region of the stack. Further, the semiconductor device includes a first staircase formed of a first section of the stack in a connection region upon the substrate, and a second staircase formed of a second section of the stack in the connection region upon the substrate. In addition, the semiconductor device includes a dummy staircase formed of the first section of the stack and disposed between the first staircase and the second staircase in the connection region.

Abstract: A memory device includes a first semiconductor structure and a second semiconductor structure. The first semiconductor structure includes a first substrate and one or more peripheral devices on the first substrate. The second semiconductor structure includes a first set of conductive lines electrically coupled with a first set of a plurality of vertical structures and a second set of conductive lines electrically coupled with a second set of the plurality of vertical structures different from the first set of the plurality of vertical structures. The first set of conductive lines are vertically distanced from one end of the plurality of vertical structures and the second set of conductive lines are vertically distanced from an opposite end of the plurality of vertical structures.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a P-type doped region of a substrate, an N-type doped semiconductor layer on the P-type doped region, a memory stack including interleaved conductive layers and dielectric layers on the N-type doped semiconductor layer, a channel structure extending vertically through the memory stack and the N-type doped semiconductor layer into the P-type doped region, an N-type doped semiconductor plug extending vertically into the P-type doped region, and a source contact structure extending vertically through the memory stack to be in contact with the N-type doped semiconductor plug.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A stop layer, a first polysilicon layer, a sacrificial layer, a second polysilicon layer, and a dielectric stack are sequentially formed at a first side of a substrate. A channel structure extending vertically through the dielectric stack, the second polysilicon layer, the sacrificial layer, and the first polysilicon layer, stopping at the stop layer, is formed. An opening extending vertically through the dielectric stack and the second polysilicon layer, stopping at the sacrificial layer to expose part of the sacrificial layer, is formed. The sacrificial layer is replaced, through the opening, with a third polysilicon layer between the first and second polysilicon layers. The substrate is removed from a second side opposite to the first side of the substrate, stopping at the stop layer.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a peripheral circuit on the substrate, a memory stack including interleaved conductive layers and dielectric layers above the peripheral circuit, a first semiconductor layer above the memory stack, a second semiconductor layer above and in contact with the first semiconductor layer, a plurality of channel structures each extending vertically through the memory stack and the first semiconductor layer, and an insulating structure extending vertically through the memory stack, the first semiconductor layer, and the second semiconductor layer.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A first polysilicon layer, a dielectric sacrificial layer, a second polysilicon layer, and a dielectric stack are sequentially formed above a substrate. A channel structure extending vertically through the dielectric stack, the second polysilicon layer, and the dielectric sacrificial, and into the first polysilicon layer is formed. An opening extending vertically through the dielectric stack and the second polysilicon layer, and extending vertically into or through the dielectric sacrificial layer to expose part of the dielectric sacrificial layer, and a polysilicon spacer along part of a sidewall of the opening are formed. The dielectric sacrificial layer is replaced, through the opening, with a third polysilicon layer between the first and second polysilicon layers.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a peripheral circuit on the substrate, a memory stack including interleaved conductive layers and dielectric layers above the peripheral circuit, a first semiconductor layer above the memory stack, a second semiconductor layer above and in contact with the first semiconductor layer, a plurality of channel structures each extending vertically through the memory stack and the first semiconductor layer, and a source contact above the memory stack and in contact with the second semiconductor layer.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a stop layer, a polysilicon layer, a memory stack including interleaved stack conductive layers and stack dielectric layers, and a plurality of channel structures each extending vertically through the memory stack and the polysilicon layer, stopping at the stop layer.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes an insulating layer, a semiconductor layer, a memory stack including interleaved conductive layers and dielectric layers, a source contact structure extending vertically through the insulating layer from an opposite side of the insulating layer with respect to the semiconductor layer to be in contact with the semiconductor layer, and a channel structure extending vertically through the memory stack and the semiconductor layer into the insulating layer or the source contact structure.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a memory stack including interleaved conductive layers and dielectric layers above the substrate, a plurality of channel structures each extending vertically through the memory stack, a semiconductor layer above and in contact with the plurality of channel structures, a plurality of source contacts above the memory stack and in contact with the semiconductor layer, a plurality of contacts through the semiconductor layer, and a backside interconnect layer above the semiconductor layer including a source line mesh in a plan view. The plurality of source contacts are distributed below and in contact with the source line mesh. A first set of the plurality of contacts are distributed below and in contact with the source line mesh.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A sacrificial layer above a second semiconductor layer at a first side of a substrate and a dielectric stack on the sacrificial layer are subsequently formed. A channel structure extending vertically through the dielectric stack and the sacrificial layer into the second semiconductor layer is formed. The sacrificial layer is replaced with a first semiconductor layer in contact with the second semiconductor layer. The dielectric stack is replaced with a memory stack, such that the channel structure extends vertically through the memory stack and the first semiconductor layer into the second semiconductor layer. A source contact is formed at a second side opposite to the first side of the substrate to be in contact with the second semiconductor layer.

Abstract: The present disclosure provides a method for forming a three-dimensional memory device. The method can comprise forming a film stack with a plurality of dielectric layer pairs on a substrate, forming a channel structure region in the film stack including a plurality of channel structures, and forming a first staircase structure in a first staircase region and a second staircase structure in a second staircase region. Each of the first staircase structure and the second staircase structure can include a plurality of division block structures arranged along a first direction. A first vertical offset defines a boundary between adjacent division block structures. Each division block structure includes a plurality of staircases arranged along a second direction that is different from the first direction. Each staircase includes a plurality of steps arranged along the first direction.

Abstract: Embodiments of 3D memory devices having staircase structures and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory array structure and a staircase structure in an intermediate of the memory array structure and laterally dividing the memory array structure into a first memory array structure and a second memory array structure. The staircase structure includes a first staircase zone and a bridge structure connecting the first memory array structure and the second memory array structure. The first staircase zone includes a first pair of staircases facing each other in a first lateral direction and at different depths. Each staircase includes a plurality of stairs. At least one stair in the first pair of staircases is electrically connected to at least one of the first memory array structure and the second memory array structure through the bridge structure.

Abstract: Embodiments of 3D memory devices having staircase structures and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory array structure and a staircase structure in an intermediate of the memory array structure and laterally dividing the memory array structure into a first memory array structure and a second memory array structure. The staircase structure includes a first staircase zone and a bridge structure connecting the first and second memory array structures. The bridge structure includes a lower wall portion and an upper staircase portion. The first staircase zone includes a first pair of staircases facing each other in a first lateral direction and at different depths. Each staircase includes stairs. At least one stair in the first pair of staircases is electrically connected to at least one of the first memory array structure and the second memory array structure through the bridge structure.

Abstract: Three-dimensional (3D) NAND memory devices and methods are provided. In one aspect, a fabrication method includes depositing a cover layer over a substrate, depositing a sacrificial layer over the cover layer, depositing a layer stack over the sacrificial layer, forming a channel layer extending through the layer stack and the sacrificial layer, performing a first epitaxial growth to deposit a first epitaxial layer on a side portion of the channel layer that is close to the substrate, removing the cover layer, and performing a second epitaxial growth to simultaneously thicken the first epitaxial layer and deposit a second epitaxial layer on the substrate. The layer stack includes first stack layers and second stack layers that are alternately stacked.

Abstract: Embodiments of 3D memory structures and methods for forming the same are disclosed. The fabrication method includes disposing an alternating dielectric stack on a substrate, wherein the alternating dielectric stack having first and second dielectric layers alternatingly stacked on top of each other. Next, a plurality of contact openings can be formed in the alternating dielectric stack such that a dielectric layer pair can be exposed inside at least one of the plurality of contact openings. The method further includes forming a film stack of alternating conductive and dielectric layers by replacing the second dielectric layer with a conductive layer, and forming a contact structure to contact the conductive layer in the film stack of alternating conductive and dielectric layers.

Abstract: Embodiments of three-dimensional memory device architectures and fabrication methods therefor are disclosed. In an example, the memory device includes a substrate and one or more peripheral devices on the substrate. The memory device also includes one or more interconnect layers and a semiconductor layer disposed over the one or more interconnect layers. A layer stack having alternating conductor and insulator layers is disposed above the semiconductor layer. A plurality of structures extend vertically through the layer stack. A first set of conductive lines are electrically coupled with a first set of the plurality of structures and a second set of conductive lines are electrically coupled with a second set of the plurality of structures different from the first set. The first and second sets of conductive lines are vertically distanced from opposite ends of the plurality of structures.