Robot having a variable transmission ratio
An apparatus having a drive unit having a first drive axis rotatable about a first axis of rotation and a second drive axis rotatable about a second axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis. A robot arm has an upper arm connected to the drive unit at the first drive axis, a forearm coupled to the upper arm, the forearm being coupled to the upper arm at a first rotary joint and rotatable about the first rotary joint, the first rotary joint being actuatable by a first band arrangement coupled to the second drive axis, and an end effector coupled to the forearm, the end effector being coupled to the forearm at a second rotary joint and rotatable about the second rotary joint, the second rotary joint being actuatable by a second band arrangement coupled to the first rotary joint. The second band arrangement is configured to provide a variable transmission ratio.
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This application claims priority under 35 119(e) to U.S. Provisional Patent Application No. 62/132,066 filed Mar. 12, 2015, U.S. Provisional Patent Application No. 62/135,490 filed Mar. 19, 2015, U.S. Provisional Patent Application No. 62/137,458 filed Mar. 24, 2015, U.S. Provisional Patent Application No. 62/264,436 filed Dec. 8, 2015, U.S. Provisional Patent Application No. 62/275,884 filed Jan. 7, 2016, which are hereby incorporated by reference in their entirety.
BACKGROUNDTechnical Field
The exemplary and non-limiting embodiments relate generally to a robot having an end effector and, more particularly, to a robot having slaved end effector motion.
Brief Description of Prior Developments
Vacuum, atmospheric and controlled environment processing for applications such as associated with manufacturing of semiconductor, LED, Solar, MEMS or other devices utilize robotics and other forms of automation to transport substrates and carriers associated with substrates to and from storage locations, processing locations or other locations. Such transport of substrates may be moving individual substrates, groups of substrates with single arms transporting one or more substrates or with multiple arms, each transporting one or more substrate. Much of the manufacturing, for example, as associated with semiconductor manufacturing is done in a clean or vacuum environment where footprint and volume are at a premium. Further, much of the automated transport is conducted where minimization of transport times results in reduction of cycle time and increased throughput and utilization of the associated equipment.
SUMMARYThe following summary is merely intended to be exemplary. The summary is not intended to limit the scope of the claims.
In accordance with one aspect, an apparatus has a drive unit having a first drive axis rotatable about a first axis of rotation and a second drive axis rotatable about a second axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis. A robot arm has an upper arm connected to the drive unit at the first drive axis, a forearm coupled to the upper arm, the forearm being coupled to the upper arm at a first rotary joint and rotatable about the first rotary joint, the first rotary joint being actuatable by a first band arrangement coupled to the second drive axis, and an end effector coupled to the forearm, the end effector being coupled to the forearm at a second rotary joint and rotatable about the second rotary joint, the second rotary joint being actuatable by a second band arrangement coupled to the first rotary joint. The second band arrangement is configured to provide a variable transmission ratio.
In accordance with another aspect, an apparatus has a drive unit having a first drive axis rotatable about a first axis of rotation, a second drive axis rotatable about a second axis of rotation, and a third drive axis rotatable about a third axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis, and the third drive axis being coaxial with and partially within the second drive axis and axially rotatable within the second drive axis. A robot arm has an upper arm connected to the drive unit at the first drive axis, a forearm coupled to the upper arm, the forearm being coupled to the upper arm at a first rotary joint and rotatable about the first rotary joint, the first rotary joint being actuatable by a single-stage band arrangement comprising a first shoulder pulley actuatable by the third drive axis, a first elbow pulley partially forming the first rotary joint, and a belt, band or cable configured to transmit motion between the first shoulder pulley and the first elbow pulley, a first end effector and a second end effector coupled to the forearm, the first end effector and the second end effector being coupled to the forearm at a second rotary joint, orientation of the first end effector and the second end effector being controlled via a two-stage band arrangement. A first stage of the two-stage band arrangement comprises a second shoulder pulley actuatable by the second drive axis, a second elbow pulley partially forming the first rotary joint, and an upper band, belt, or cable configured to transmit motion between the second shoulder pulley and the second elbow pulley. A second stage of the two-stage band arrangement comprises a third elbow pulley coupled to the second elbow pulley, a first wrist pulley coupled to the first end effector, and a first lower belt, band, or cable configured to transmit motion between the third elbow pulley and the first wrist pulley, and wherein the second stage of the two-stage band arrangement further comprises a fourth elbow pulley coupled to the second elbow pulley, a second wrist pulley coupled to the second effector, and a second lower belt, band, or cable configured to transmit motion between the fourth elbow pulley and the second wrist pulley. At least one of the motion between the first shoulder pulley and the first elbow pulley, the motion between the second shoulder pulley and the second elbow pulley, the motion between the third elbow pulley and the first wrist pulley, and the motion between the fourth elbow pulley and the second wrist pulley are at a variable transmission ratio.
In accordance with another aspect, an apparatus has a drive unit having a first drive axis rotatable about a first axis of rotation, a second drive axis rotatable about a second axis of rotation, and a third drive axis rotatable about a third axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis, and the third drive axis being coaxial with and partially within the second drive axis and axially rotatable within the second drive axis. A first robot arm has a first upper arm connected to the drive unit at the first drive axis, a first forearm coupled to the first upper arm, the first forearm being coupled to the first upper arm at a first rotary joint, the first rotary joint being actuatable by the second drive axis using a first band arrangement, and a first end effector coupled to the first forearm, the first end effector being coupled to the first forearm at a third rotary joint, the third rotary joint being actuatable by the first rotary joint using a third band arrangement. A second robot arm has a second upper arm connected to the drive unit at the third drive axis, a second forearm coupled to the second upper arm, the second forearm being coupled to the second upper arm at a second rotary joint, the second rotary joint being actuatable by the second drive axis using a second band arrangement, and a second end effector coupled to the second forearm, the second end effector being coupled to the second forearm at a fourth rotary joint, the fourth rotary joint being actuatable by the second rotary joint using a fourth band arrangement. At least one of the first band arrangement, the second band arrangement, the third band arrangement, and the fourth band arrangement has a variable transmission ratio.
The foregoing aspects and other features are explained in the following description, taken in connection with the accompanying drawings, wherein:
Referring to
An example layout of a semiconductor wafer processing tool 10 is diagrammatically depicted in the top view of
The variable transmission ratio may be selected so that the orientation of the third link (end-effector) 38 changes in a predefined manner as a function of the relative position of the first and the second links 34, 36. The relative position of the first and second links 34, 36 may be conveniently expressed in terms of the included angle between the two links. Alternately, the orientation of the third link (end-effector) 38 may change in a predefined manner as a function of the relative position of links, shafts or otherwise. By way of example, the transmission ratio may be selected in a manner that may allow a reference point on the third link (typically the nominal center 70 of the end-effector) to follow a predetermined path with a predetermined (but not necessarily constant) orientation of the third link (end-effector) when the first and second links are actuated accordingly. As an example, the path 72, 74, 76, 78 may be selected as an access path to one of the stations 82 of
Although the initial position of the robot arm mechanism is shown on the axis of symmetry between the neighboring side-by-side stations, it is noted that any other initial position may be used. It also is noted that the drive unit of the robot may feature an additional axis to facilitate vertical lift of the arm mechanism, e.g., to pick and place wafers carried by the end-effector. In alternate aspects, other additional rotary axis and/or arms may be provided. In alternate aspects, a band arrangement between the shoulder pulley attached to the T2 shaft and the elbow pulley attached to the second link features a variable transmission ratio, e.g., using at least one non-circular pulley. The variable transmission ratio is selected so that extension of the arm is driven by the T1 shaft while the T2 shaft remains stationary. In alternate aspects, the variable transmission ratio may be selected so that the T2 shaft follows a predetermined motion profile as the robot arm extends along the predefined path. In alternate aspects, the mechanism that constrains the orientation of the third link includes an additional band arrangement.
For example, as depicted diagrammatically in
The disclosed aspects may similarly be applied to dual-end-effector arm mechanisms which may be used to transfer material to/from side-by-side (laterally offset) stations in a semiconductor wafer processing tool. Here, an example layout of a semiconductor wafer processing tool 210 is diagrammatically depicted in the top view of
The present embodiment arm mechanisms may be designed to provide access to each of the stations in the tool along a predefined path 236, e.g., substantially straight-line path, with predefined orientation of the end-effector, e.g., along the straight-line path, as illustrated in the example of
The variable transmission ratio may be selected so that the orientation of end-effector A changes in a predefined manner as a function of the relative position of the first and second links and the T2 shaft. For instance, it may be selected so that end-effector A may follow a path to a station, as illustrated in
Although the arm mechanism is shown as right-handed (the elbow joint is on the right-hand side of the line from the shoulder joint to the wrist joint) when it accesses the left station in
In yet another alternative embodiment, the second link may be actuated by the T2 shaft and the orientation of the end-effectors may be controlled by the T3 shaft. Referring now to
As an example, the path may be selected as an access path to one of the stations of
The remaining components of the right linkage may be configured substantially as a mirror image of the right linkage, and the operation of the right linkage is substantially equivalent to the left linkage in a mirrored manner. Further, the T1, T2 and T3 shafts may rotate in sync to reorient the arm mechanism to access another pair of stations.
Although the left linkage is shown as left-handed (the elbow joint is on the left-hand side of the line from the shoulder joint to the wrist joint) in
In yet another alternative embodiment, the right upper arm may be actuated by the T2 shaft and the orientation of the right and left forearms may be constrained by the T3 shaft.
The disclosed aspects may similarly be applied to dual-end-effector robot arm mechanisms which may be used to transfer material to/from side-by-side (laterally offset) stations in a semiconductor wafer processing tool. An example layout of a semiconductor wafer processing tool 410 is diagrammatically depicted in the top view of
The disclosed arm mechanisms may provide access to each of the stations in the tool along a predefined path, for example, substantially straight-line path 418, 420, with predefined orientation of the end-effector, for example, along the straight-line path 418, 420, as illustrated in the example of
The variable transmission ratio may be selected so that the orientation of end-effector A 460 changes in a predefined manner as a function of the relative position of the first link 456 and second link A 458. For instance, it may be selected so that end-effector A 460 may follow a path to a station, as illustrated in
Similarly, end-effector B 464 may be coupled to second link B 462 via a rotary joint (wrist joint) 502, and its orientation may be constrained by yet another band arrangement 504. The band arrangement 504 may comprise an elbow pulley 506, which may be connected to the first link 56, a wrist pulley 508, which may be connected to end-effector B 464, and a band, belt or cable 510, which may transmit motion between the two pulleys. The band arrangement may feature a variable transmission ratio. The variable transmission ratio may be implemented, for instance, using at least one pulley with a non-circular profile. As an example, referring to
Typical operations of the robot are illustrated in
The examples of
As an example, the path may be selected as an access path to one of the stations 132 of
Typical operations of the robot are illustrated in
As seen in
Additional alternative example embodiments are shown diagrammatically in
The disclosed aspects may similarly be applied to dual-end-effector robot arm mechanisms which may be used to transfer material to/from side-by-side (laterally offset) stations in a semiconductor wafer processing tool. An example layout of a semiconductor wafer processing tool 810 is diagrammatically depicted in the top view of
The present arm mechanisms may provide access to each of the stations in the tool along a predefined path, for example, substantially straight-line path 818, 820, with predefined orientation of the end-effector, for example, along the straight-line path 818, 820, as illustrated in the example of
The variable transmission ratio may be selected so that the orientation of end-effector A 860 changes in a predefined manner as a function of the relative position of the first link 856 and second link A 858. For instance, it may be selected so that end-effector A 860 may follow a path to a station, as illustrated in
The variable transmission ratio may be selected so that the orientation of end-effector B changes in a predefined manner as a function of the relative position of the first link and second link B. For instance, it may be selected so that end-effector B may follow a path to a station, as illustrated in
The operations and motions of
The examples of
The examples of
Although the example embodiments of
One example of a suitable arrangement is shown in
An example layout of a semiconductor wafer processing tool 1010 is diagrammatically depicted in the top view of
An example arrangement with a variable transmission ratio that provides such functionality will be discussed, for example, see
Determining an example length of the third link 1062: The length of the third link, L3, may be conveniently defined as the distance between the axis of rotation of the wrist joint 1080 and a reference point on the third link 1082 (typically the nominal center of the end-effector). When the end-effector is extended to a station, there are three constraints in effect: 1) the position of the reference point on the third link (typically the nominal center of the end-effector) should be substantially aligned with the station location, 2) the end-effector should have a desired orientation, for instance, it may point straight along the access path to the station, and 3) the wrist joint should be far back enough so that it does not collide with any obstacles in the path to the station. The above constraints may be used to determine the length of the third link (end-effector), for instance, as the minimum value that complies with the constraints. As an example, the following expression may be used:
L3=Ystn−√{square root over (Rs2−Xstn2)} (1)
where Xstn and Ystn represent respectively the x- and y-axis offsets of the station location in a Cartesian coordinate system centered on the robot, i.e., the robot center (shoulder joint) is at (0, 0), and where Rs denotes the allowable swing radius Rs, which defines a circular space where the retracted robot arm mechanism can rotate freely.
Determining an example length of the second link: The joint-to-joint length of the second link, L2, may be defined as the distance between the axis of rotation of the elbow joint and the axis of rotation of the wrist joint. For a semiconductor wafer processing tool with pairs of side-by-side stations, such as the example layout of
L2≥Xstn (2)
An L2 larger than Xstn may be required to allow the end-effector of the arm mechanism to reach the required extension to a station without overextending its elbow joint.
Determining an example length of the first link: The joint-to-joint length of the first link, L1, may be defined as the distance between the axis of rotation of the shoulder joint and the axis of rotation of the elbow joint. Given the values of L2 and L3, the length of the first link may be determined, for instance, so that the arm mechanism fits within the allowable swing radius when it is retracted:
L1=Rs−Rw+L2−L3 (3)
Here, Rw represents radius of a circular payload, such as a wafer, carried by the end-effector.
As an example, a station location may be selected with an x-axis offset Xstn of 388.6 mm and a y-axis offset Ystn of 1,030.2 mm. The allowable swing radius Rs, which defines a circular space where the retracted robot arm mechanism can rotate freely, may be selected, for example, as 605.8 mm. The payload carried by the arm mechanism may be, for example, a circular wafer with a radius Rw of 150 mm. Based on the above example guidelines, the geometry of a suitable example arm mechanism, i.e., the joint-to-joint link and end-effector lengths, may be determined as follows: L3=565.5 mm, L2 =397.6 mm>Xstn=388.6 mm and L1=287.9 mm.
Considering the example arm mechanism of
A belt/band/cable arrangement may be provided that constraints the orientation of the end-effector using two non-circular pulleys. For example, this may be applied both to the single end-effector configuration (
An example phased motion of the robot arm mechanism as the end-effector of the robot arm mechanism extends along a straight path to the above example station is depicted in
Another example phased motion of the robot arm mechanism as the end-effector extends to the same example station, this time along a path formed by two segments 1200, 1202 blended around a common via-point 1204, is depicted in
In
An example internal arrangement of the robot of
A suitable geometry of the arm mechanism of
Similarly, considering the example arm mechanism of
An example phased motion of the robot arm mechanism as end-effector A extends along a straight path 1440 to the above example station is depicted in
Another example phased motion of the robot arm mechanism as end-effector A extends to the same example station, this time along a path formed by two segments 1540, 1542 blended around a common via-point 1544, is depicted in
In
In accordance with one aspect, an apparatus has a drive unit having a first drive axis rotatable about a first axis of rotation and a second drive axis rotatable about a second axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis. A robot arm has an upper arm connected to the drive unit at the first drive axis, a forearm coupled to the upper arm, the forearm being coupled to the upper arm at a first rotary joint and rotatable about the first rotary joint, the first rotary joint being actuatable by a first band arrangement coupled to the second drive axis, and an end effector coupled to the forearm, the end effector being coupled to the forearm at a second rotary joint and rotatable about the second rotary joint, the second rotary joint being actuatable by a second band arrangement coupled to the first rotary joint. The second band arrangement is configured to provide a variable transmission ratio.
In accordance with another aspect, the first band arrangement comprises a shoulder pulley attached to the second drive axis, a first elbow pulley coupled to the forearm, and a band, belt, or cable arranged between the shoulder pulley and the first elbow pulley to transmit motion between the shoulder pulley and the first elbow pulley.
In accordance with another aspect, the second band arrangement comprises a second elbow pulley coupled to the upper arm, a wrist pulley coupled to the end effector, and a band, belt, or cable arranged between the second elbow pulley and the wrist pulley to transmit motion between the second elbow pulley and the wrist pulley.
In accordance with another aspect, at least one of the second elbow pulley and the wrist pulley have a non-circular profile to provide the variable transmission ratio.
In accordance with another aspect, the variable transmission ratio is selected such that orientation of the end effector changes in a predefined manner as a function of relative positions of the upper arm and forearm.
In accordance with another aspect, one or more of the first drive axis and the second drive axis are axially movable to facilitate vertical movement of the robot arm.
In accordance with another aspect, an apparatus has a drive unit having a first drive axis rotatable about a first axis of rotation, a second drive axis rotatable about a second axis of rotation, and a third drive axis rotatable about a third axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis, and the third drive axis being coaxial with and partially within the second drive axis and axially rotatable within the second drive axis. A robot arm has an upper arm connected to the drive unit at the first drive axis, a forearm coupled to the upper arm, the forearm being coupled to the upper arm at a first rotary joint and rotatable about the first rotary joint, the first rotary joint being actuatable by a single-stage band arrangement comprising a first shoulder pulley actuatable by the third drive axis, a first elbow pulley partially forming the first rotary joint, and a belt, band or cable configured to transmit motion between the first shoulder pulley and the first elbow pulley, a first end effector and a second end effector coupled to the forearm, the first end effector and the second end effector being coupled to the forearm at a second rotary joint, orientation of the first end effector and the second end effector being controlled via a two-stage band arrangement. A first stage of the two-stage band arrangement comprises a second shoulder pulley actuatable by the second drive axis, a second elbow pulley partially forming the first rotary joint, and an upper band, belt, or cable configured to transmit motion between the second shoulder pulley and the second elbow pulley. A second stage of the two-stage band arrangement comprises a third elbow pulley coupled to the second elbow pulley, a first wrist pulley coupled to the first end effector, and a first lower belt, band, or cable configured to transmit motion between the third elbow pulley and the first wrist pulley, and wherein the second stage of the two-stage band arrangement further comprises a fourth elbow pulley coupled to the second elbow pulley, a second wrist pulley coupled to the second effector, and a second lower belt, band, or cable configured to transmit motion between the fourth elbow pulley and the second wrist pulley. At least one of the motion between the first shoulder pulley and the first elbow pulley, the motion between the second shoulder pulley and the second elbow pulley, the motion between the third elbow pulley and the first wrist pulley, and the motion between the fourth elbow pulley and the second wrist pulley are at a variable transmission ratio.
In accordance with another aspect, at least one of the third elbow pulley and the first wrist pulley have a non-circular profile to provide the variable transmission ratio to the two-stage band arrangement.
In accordance with another aspect, at least one of the fourth elbow pulley and the second wrist pulley have a non-circular profile to provide the variable transmission ratio to the two-stage band arrangement.
In accordance with another aspect, at least one of the first lower belt, band, or cable and the second lower belt, band, or cable is configured in a crossover configuration.
In accordance with another aspect, the variable transmission ratio is selected such that orientations of the first end effector and the second end effector change in predefined manners as a function of relative positions of the upper arm and forearm and the second drive axis.
In accordance with another aspect, the first rotary joint is one of on a right hand side of an imaginary line extending from the first shoulder pulley to the first wrist pulley and on a left hand side of an imaginary line extending from the first shoulder pulley to the first wrist pulley.
In accordance with another aspect, an apparatus has a drive unit having a first drive axis rotatable about a first axis of rotation, a second drive axis rotatable about a second axis of rotation, and a third drive axis rotatable about a third axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis, and the third drive axis being coaxial with and partially within the second drive axis and axially rotatable within the second drive axis. A first robot arm has a first upper arm connected to the drive unit at the first drive axis, a first forearm coupled to the first upper arm, the first forearm being coupled to the first upper arm at a first rotary joint, the first rotary joint being actuatable by the second drive axis using a first band arrangement, and a first end effector coupled to the first forearm, the first end effector being coupled to the first forearm at a third rotary joint, the third rotary joint being actuatable by the first rotary joint using a third band arrangement. A second robot arm has a second upper arm connected to the drive unit at the third drive axis, a second forearm coupled to the second upper arm, the second forearm being coupled to the second upper arm at a second rotary joint, the second rotary joint being actuatable by the second drive axis using a second band arrangement, and a second end effector coupled to the second forearm, the second end effector being coupled to the second forearm at a fourth rotary joint, the fourth rotary joint being actuatable by the second rotary joint using a fourth band arrangement. At least one of the first band arrangement, the second band arrangement, the third band arrangement, and the fourth band arrangement has a variable transmission ratio.
In accordance with another aspect, the first band arrangement comprises a first shoulder pulley attached to the first drive axis, a first elbow pulley attached to the first forearm, and a first band, belt, or cable configured to transmit motion between the first shoulder pulley and the first elbow pulley.
In accordance with another aspect, at least one of the first shoulder pulley and the first elbow pulley have a non-circular profile to provide the variable transmission ratio to the first band arrangement.
In accordance with another aspect, the third band arrangement comprises a second elbow pulley operable with the first elbow pulley, a first wrist pulley coupled to the first end effector, and a third band, belt, or cable configured to transmit motion between the second elbow pulley and the first wrist pulley.
In accordance with another aspect, at least one of the second elbow pulley and the first wrist pulley have a non-circular profile to provide the variable transmission ratio to the third band arrangement.
In accordance with another aspect, the second band arrangement comprises a second shoulder pulley attached to the third drive axis, a third elbow pulley attached to the second forearm, and a second band, belt, or cable configured to transmit motion between the second shoulder pulley and the third elbow pulley.
In accordance with another aspect, at least one of the second shoulder pulley and the third elbow pulley have a non-circular profile to provide the variable transmission ratio to the second band arrangement.
In accordance with another aspect, the fourth band arrangement comprises a fourth elbow pulley operable with the third elbow pulley, a second wrist pulley coupled to the second end effector, and a fourth band, belt, or cable configured to transmit motion between the fourth elbow pulley and the second wrist pulley.
In accordance with another aspect, at least one of the fourth elbow pulley and the second wrist pulley have a non-circular profile to provide the variable transmission ratio to the fourth band arrangement.
In accordance with another aspect, the variable transmission ratio is selected such that orientations of the first end effector change in predefined manners as a function of relative positions of the first upper arm and first forearm.
In accordance with another aspect, a transmission ratio of the first band arrangement and a transmission ratio of the third band arrangement are selected such that a center point on the first end effector is configured to follow a predetermined path with a predetermined orientation of the first end effector when the first upper arm is actuated by the first drive axis and the second drive axis is stationary.
In accordance with another aspect, the variable transmission ratio is selected such that orientations of the second end effector change in predefined manners as a function of relative positions of the second upper arm and second forearm.
In accordance with another aspect, a transmission ratio of the second band arrangement and a transmission ratio of the fourth band arrangement are selected such that a center point on the second end effector is configured to follow a predetermined path with a predetermined orientation of the second end effector when the second upper arm is actuated by the third drive axis and the second drive axis is stationary.
It should be understood that the foregoing description is only illustrative. Various alternatives and modifications can be devised by those skilled in the art. For example, features recited in the various dependent claims could be combined with each other in any suitable combination(s). In addition, features from different embodiments described above could be selectively combined into a new embodiment. Accordingly, the description is intended to embrace all such alternatives, modifications and variances which fall within the scope of the appended claims.
Claims
1. A transport apparatus comprising:
- a drive unit having a first drive axis rotatable about a first axis of rotation and a second drive axis rotatable about a second axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis;
- a robot arm comprising: an upper arm connected to the drive unit at the first drive axis, a forearm coupled to the upper arm, the forearm being coupled to the upper arm at a first rotary joint and rotatable about the first rotary joint, the first rotary joint being actuatable by a first band arrangement coupled to the second drive axis, and an end effector coupled to the forearm, the end effector being coupled to the forearm at a second rotary joint and rotatable about the second rotary joint, the second rotary joint being actuatable by a second band arrangement coupled to the first rotary joint, wherein the second band arrangement comprises at least one pulley with a non-circular profile and is configured to provide a transmission that varies a ratio of a speed of rotation of the end effector about the second rotary joint relative to a speed of rotation of the forearm about the first rotary joint, wherein a nominal center of the end effector is configured to follow a predetermined path with a predetermined non-constant orientation of the end effector.
2. The transport apparatus of claim 1, wherein the first band arrangement comprises a shoulder pulley attached to the second drive axis, a first elbow pulley coupled to the forearm, and a band, belt, or cable arranged between the shoulder pulley and the first elbow pulley to transmit motion between the shoulder pulley and the first elbow pulley.
3. The transport apparatus of claim 1, wherein the second band arrangement comprises a second elbow pulley coupled to the upper arm, a wrist pulley coupled to the end effector, and a band, belt, or cable arranged between the second elbow pulley and the wrist pulley to transmit motion between the second elbow pulley and the wrist pulley.
4. The transport apparatus of claim 3, wherein at least one of the second elbow pulley or the wrist pulley has the non-circular profile to provide the transmission that varies the ratio of the speed of rotation of the end effector about the second rotary joint relative to the speed of rotation of the forearm about the first rotary joint.
5. The transport apparatus of claim 3, wherein the second elbow pulley and the wrist pulley have the non-circular profile to provide the transmission that varies the ratio of the speed of rotation of the end effector about the second rotary joint relative to the speed of rotation of the forearm about the first rotary joint.
6. The transport apparatus of claim 1 where the transmission provides a ratio of a first rotation of the second link about the first rotary joint relative to a different second rotation of the third link about the second rotary joint as the robot arm is extended and retracted relative to the drive, where the ratio is configured to be changed by the second band arrangement as the robot arm is extended and retracted relative to the drive unit with an elbow pulley of the second band arrangement fixedly grounded with respect to the upper arm.
7. The transport apparatus of claim 6 where the elbow pulley is stationarily connected to the upper arm.
8. The transport apparatus of claim 6 where the second band arrangement constrains rotation of the end effector relative upper arm.
9. The transport apparatus of claim 6 where the second band arrangement comprises at least one pulley with a non-circular profile to provide the ratio which changes as the robot arm is extended and retracted relative to the drive unit.
10. The transport apparatus of claim 6 where the elbow pulley is connected to the upper arm with axial rotational independence from the drive unit.
11. A transport apparatus comprising:
- a drive having a first drive axis rotatable about a first axis of rotation and a second drive axis rotatable about a second axis of rotation, the second drive axis being coaxial with the first drive axis; and
- a robot arm connected to the drive, where the robot arm comprises: an upper arm connected to the drive at the first drive axis, a forearm connected to the upper arm, where the forearm is coupled to the upper arm at a first rotary joint and rotatable about the first rotary joint, where the first rotary joint is actuatable by a first band arrangement coupled to the second drive axis, and an end effector coupled to the forearm, where the end effector is coupled to the forearm at a second rotary joint and rotatable about the second rotary joint, where the second rotary joint is actuatable by a second band arrangement coupled to the first rotary joint, wherein the second band arrangement comprises at least one pulley having a non-circular profile and is configured to provide a transmission that varies a ratio of a speed of rotation of the end effector about the second rotary joint relative to a speed of rotation of the forearm about the first rotary joint, where the apparatus is configured such that a nominal center of the end effector follows a predetermined path with a predetermined non-constant orientation of the end effector relative to the predetermined path.
12. The transport apparatus of claim 11 wherein the first band arrangement comprises a shoulder pulley attached to the second drive axis, a first elbow pulley coupled to the forearm, and a band, belt, or cable arranged between the shoulder pulley and the first elbow pulley to transmit motion between the shoulder pulley and the first elbow pulley.
13. The transport apparatus of claim 11 wherein the second band arrangement comprises a second elbow pulley coupled to the upper arm, a wrist pulley coupled to the end effector, and a band, belt, or cable arranged between the second elbow pulley and the wrist pulley to transmit motion between the second elbow pulley and the wrist pulley.
14. The transport apparatus of claim 13 wherein at least one of the second elbow pulley or the wrist pulley has the non-circular profile to provide the transmission that varies the ratio of the speed of rotation of the end effector about the second rotary joint relative to the speed of rotation of the forearm about the first rotary joint.
15. The transport apparatus of claim 11 where the predetermined path is a straight path.
16. The transport apparatus of claim 15 where the nominal center of the end effector is in the predetermined path, where the predetermined non-constant orientation of the end effector relative to the predetermined path comprises rotation of the end effector about the nominal center of the end effector.
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Type: Grant
Filed: Mar 11, 2016
Date of Patent: Jul 4, 2023
Patent Publication Number: 20160263742
Assignee: Persimmon Technologies Corporation (Wakefield, MA)
Inventors: Martin Hosek (Lowell, MA), Leonard T. Lilliston (Roxbury, MA), Jacob Lipcon (Arlington, MA)
Primary Examiner: Gerald McClain
Application Number: 15/067,684
International Classification: B25J 9/04 (20060101); H01L 21/677 (20060101); B25J 9/10 (20060101);