Abstract: A shock-absorbing element (1) for buckets (2) with door (4) of cable excavator shovels, comprising push cables (6) connected to the bucket (2) to controls its inclination, to cushion impacts of the bucket (2) on a boom (3) of the excavator shovel, improving the protection of the boom (3) and the push cables (6), wherein the shock-absorbing element (1) comprising: an elongated metal base (9), hollow inside, comprising joining surfaces (10) at each end configured to join to the upper part of the door (4) of the bucket (2) and a central longitudinal recess (12) defining an intermediate space (7); and two rubber pieces (8) fixed to the metal base (9), being separated by the intermediate space (7), wherein the intermediate space (7) is configured to receive the push cables (6) of the bucket (2), allowing said push cables (6) to remain between the two rubber pieces (8).

Abstract: Equipment is used in the manufacturing of electronic devices, and more particularly, to a cleaning system, cleaning system hardware and related methods which may be used to transport and clean the surface of a substrate. According to one embodiment, a substrate cleaning unit may include a pre-clean chamber that performs a pre-clean process on a substrate with the substrate in a horizontal orientation. The unit may also include a first cleaning chamber that performs a first cleaning process on the substrate with the substrate in a vertical orientation. The unit may also include a second cleaning chamber. The unit may also include an integrated cleaning and drying chamber that performs a cleaning and drying process on the substrate in the horizontal orientation. A substrate handler may transfer the substrate between the chambers. The first and second cleaning chambers may be positioned below the pre-clean chamber.

Abstract: Gripping device for crates having a first abutment and a second abutment in contact with two panels of a crate that are adjacent and perpendicular to one another. A first presser, in the active position, is able to press on the free edge of the first panel, exerting an operating thrust along at least the main direction, and a second presser, in the active position, is able to press on the free edge of the second panel, exerting an operating thrust along at least the main direction. A first cursor, in the operating position, is able to engage with the first panel, to prevent a movement of the first panel along the main direction, and a second cursor, in the operating position, is able to engage with the second panel, to prevent a movement of the second panel along the main direction.

Abstract: The semiconductor carrier storage system includes storage ports each of which accommodates a semiconductor carrier, a shuttle rail that extends in a horizontal direction on a side of the storage ports, an internal carrier shuttle that moves along the shuttle rail and transfers a semiconductor carrier to each of the storage ports, and an upper transfer port that receives the semiconductor carrier from an overhead hoist transport (OHT). The internal carrier shuttle includes a shuttle body coupled to the shuttle rail, a transfer wheel that connects the shuttle body to the shuttle rail, a gripper that holds the semiconductor carrier, and a hoist that vertically extends between the shuttle body and the gripper and drives the gripper to vertically move.

Abstract: An apparatus for manufacturing a semiconductor device includes a substrate transfer unit configured to transfer a substrate, a rail unit including a driving rail extending in a first direction that the substrate transfer unit moves and a stopper on a side of the driving rail in a second direction crossing the first direction, and a lifting unit configured to move in the first direction and a third direction perpendicular to the first and second directions to remove the substrate transfer unit from the rail unit, wherein the lifting unit is configured to contact the stopper to move the stopper from a closed state to an open state.

Abstract: Systems and methods for end of arm tools having belt-driven engagement members and related item manipulation devices are provided. In one embodiment, an example item manipulation device may include a housing, a suction cup assembly having a first suction cup, where the suction cup assembly is positioned at a distal end of the housing, a first engagement member having a first arm portion configured to rotate with respect to the housing, a first belt coupled to the first arm portion, and a first actuator configured to actuate the first belt to cause the first arm portion to rotate with respect to the housing.

Abstract: A management device is for use in a component mounting system including a component mounting machine having a supply target attachment section and a buffer target attachment section. In a case where a target feeder to be used in a target job to be executed from the next time are pre-served on the component mounting machine, the management device is configured to determine a serving destination among empty slots in a supply target attachment section and empty slots in a buffer target attachment section by giving priority to the empty slots in the buffer target attachment section, and cause a work device to pre-serves the target feeder in the determined serving destination.

Abstract: A system for a semiconductor fabrication facility comprises a transporting tool configured to move a carrier, a first manufacturing tool configured to accept the carrier facing in a first direction, a second manufacturing tool configured to accept the carrier facing in the second direction, and an orientation tool. The carrier is moved to the orientation tool by the transporting tool prior to being moved to the first manufacturing tool or the second manufacturing tool by the transporting tool. The orientation tool rotates the carrier so that the carrier is accepted by the first manufacturing tool or the second manufacturing tool. The transporting tool, the first manufacturing tool, the second manufacturing tool and the orientation tool are physically separated from each other.

Abstract: In order to improve transport efficiency of an object transport system, an object transport system includes, a ceiling carrier configured to travel on at least travel rail and transport an object; and a transfer device including a hanging part configured to hang the object and configured to be capable of being raised and lowered, the transfer device being disposed so as to be separated from the ceiling carrier.

Abstract: A method for operating a substrate transferring device that includes a substrate container holding at least two substrates stacked vertically, a hand having two fingers, a manipulator, and a controller. A mapping device detects a vertical position of a higher substrate, and a substrate detector measures a distance to a principal surface of the substrate. The controller moves the hand to a position below the detected vertical position and then advances the hand to pick up the higher substrate. During forward movement, the substrate detector acquires at least three consecutive, linearly aligned distance measurements along a front-and-rear direction. Based on a relationship among the measurements, the controller determines whether the principal surface of the higher substrate is warped. If warpage is detected, the controller predicts a possibility of collision between the hand and the substrate and withdraws the hand to avoid collision.

Abstract: An articulated work robot device includes a lower body, a bridgehead coupled to a common axis at a first position of the lower body to be rotatable, first and second articulated arms configured to be overlapped with each other up and down and having first ends respectively disposed at second and third positions opposite to each other with respect to the common axis on the bridgehead to be rotatable together through the common axis, first and second plurality of hands respectively coupled at second ends of the first and second articulated arms through scissor links, and first and second composite drive modules disposed in an internal space of the bridgehead and driving the first and second articulated arms and the first and second plurality of hands, respectively.

Abstract: A substrate treating apparatus includes a substrate holder that holds a treatment substrate group, a second transport mechanism configured to pull out and transport a divided substrate group from the treatment substrate group held by the substrate holder, and an underwater posture turning unit to turn the orientation of the divided substrate group from vertical to horizontal. A center robot takes and transports one substrate from the divided substrate group to the one substrate to a single-wafer processing unit. A lifting and lowering unit moves the substrate holder and the second transport mechanism upward/downward relatively. An alignment direction relative moving unit moves the substrate holder and the second transport mechanism horizontally in an alignment direction where the treatment substrate group is aligned. The second transport mechanism includes paired chucks having holding grooves and passing grooves arranged alternately.

Abstract: A first guide body includes a pair of first guide surfaces and corrects the position in a second direction of a gripping body section relative to a first grip section by at least one of the pair of first guide surfaces coming into contact with the first grip section during a lowering operation for gripping. A second guide body includes a pair of second guide surfaces and corrects the position in the second direction of the gripping body section relative to a target grip section by at least one of the pair of second guide surfaces coming into contact with the target grip section during the lowering operation for gripping. The first guide body and the second guide body are spaced apart from each other in at least either a first direction or the second direction.

Abstract: A closed gas circulation system may include a sealed plenum, circulation fans, and a fan filter unit (FFU) inlet to contain, filter, condition, and re-circulate a gas through a chamber of an interface tool. The gas provided to the chamber is maintained in a conditioned environment in the closed gas circulation system as opposed to introducing external air into the chamber through the FFU inlet. This enables precise control over the relative humidity and oxygen concentration of the gas used in the chamber, which reduces the oxidation of semiconductor wafers that are transferred through the chamber. The closed gas circulation system may also include an air-flow rectifier, a return vent, and one or more vacuum pumps to form a downflow of collimated gas in the chamber and to automatically control the feed-forward pressure and flow of gas through the chamber and the sealed plenum.

Abstract: A calibration object is transferred from a processing chamber to an aligner station by one or more robot arms. The calibration object has a first processing chamber orientation in the processing chamber and a second orientation at the aligner station. A first characteristic error value associated with a transfer path between the processing chamber and the aligner is determined based on the first processing chamber orientation and the second orientation of the calibration object at the aligner station. In response to detecting an object at the aligner station to be transferred to the processing chamber along the transfer path, the object is aligned by the aligner station to be placed in the processing chamber according to a target processing chamber orientation based on a target aligner orientation as adjusted by the first characteristic error value determined for the transfer path between the processing chamber and the aligner station.

Abstract: An overhead transport vehicle includes a lifter to be raised and lowered by a plurality of suspensions on left and right sides. The lifter includes a base portion, a left support and a right support attached to lower ends of the suspensions and each supporting the base portion via an elastic body, and a left arm and a right that are respectively bridged between the left support and the base portion and between the right support and the base portion, and each including a first end attached to each of the left support and the right support via a first rotation shaft and a second end attached to the base portion via a second rotation shaft.

Abstract: The industrial robot includes a hand, and a support member that supports the hand. The hand includes a connecting portion that configures a base end portion of the hand and is connected to the support member, a loading portion that configures a tip end portion of the hand and on which the conveying target is to be loaded, and a plurality of sensing mechanisms that sense the conveying target for correcting a position of the hand. The sensing mechanisms are transmission type optical sensors each including a light emitting portion and a light receiving portion that are positioned to be opposite to each other via a gap in an up-down direction and are positioned on a base end side of the loading portion.

Abstract: A substrate treating apparatus and a substrate transporting method wherein a platform is disposed on a first ID block, and a platform is placed on a second ID block. A currently-used carrier platform is provided only on the first ID block. Accordingly, a substrate is transported in both a forward path and a return path between the first ID block and a second treating block. The substrate is returned not to the first ID block but to the second ID block disposed between the two treating blocks in the return path.

Abstract: A transfer unit of a transfer apparatus includes a battery that is a power source of respective components, a suction mechanism that is a suction source of a transfer pad, a release mechanism that is an air source of the transfer pad, and a water supply mechanism that causes circulation of water stored in a water reservoir, which are all provided inside a housing of the transfer unit. This eliminates the need to externally supply the transfer unit with electric power, water, and air, and hence, the transfer unit does not include wires and pipes that are routed externally from the transfer unit and an accommodating member for accommodating the wires and pipes. Consequently, generation of dust due to rubbing between the accommodating member and the wires and pipes can be suppressed.

Abstract: A transfer robot includes a first arm provided rotatably around a first axis which extends along a vertical direction, a second arm connected to the first arm rotatably around a second axis which extends along the vertical direction, an arm distal end portion which is configured to be connected to a workpiece holder to hold a workpiece and which is connected to the second arm rotatably around a third axis which extends along the vertical direction, and a posture adjuster configured to rotate the workpiece around a first posture adjustment axis which intersects both the third axis and a direction extending toward the arm distal end portion away from the third axis.