Metal photomask box
The present invention relates to a metal photomask box structure, which is composed of an upper cover member, a lower cover member, and a ring-shaped airtight washer positioned between the upper metal cover member and the lower metal cover member. At least a movable connecting mechanism is disposed on one side of the metal photomask box to connect the upper metal cover member and the lower metal cover member. And at least a latch piece is disposed on an opposite side of the movable connecting mechanism to latch the upper metal cover member and the lower metal cover member.
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The present invention relates to a photomask box, and more particularly, to a structure of the metal photomask box.
DESCRIPTION OF THE PRIOR ARTCurrently, advanced Foundries or Fabs. have stepped toward 90 nm in the process of manufacturing chips. Therefore, the most urgent thing to do is to reduce the line width of photomasks that are used to carry out the exposing process. Since photomasks require high cost, the duration of photomasks has to be extended in order to reduce the manufacturing cost. There have already been many techniques focusing on the retaining piece or the locking piece in photomask boxes, used in the hope for effective damage reduction caused in the process of transporting or storing. In addition, there are also some techniques that add ESD devices in photomask boxes to prevent the photomasks from being damaged by static electricity.
As Fabs. move toward more advanced processes, in addition to ESD, EMI in Fabs. will also damage the photomasks on account of the development of processes, especially when the photomasks are in condition of storage and the changes in the surroundings cannot be expected. Therefore, considering the prevention of damages to photomasks caused by ESD and EMI as the prerequisite, the present invention provides a structure of the metal photomask box for effectively retaining the photomask, effectively isolating the photomask from air, and preventing from the damages caused by ESD and EMI by using the metal photomask box.
SUMMARY OF THE INVENTIONA main objective of the present invention is to provide a structure of the metal photomask box that uses the metal photomask box to prevent from the damages caused by ESD and EMI to the photomask.
Another objective of the present invention is to provide a structure of the metal photomask box with airtight effect that isolates the photomask in the metal photomask box from air and prevents from the fogging effect that can reduce the duration of the photomask.
Still another objective of the present invention is to provide a structure of the metal photomask box with filling function that not only reduces the fogging effect but also increases the storing time of the photomask.
And still another objective of the present invention is to provide a structure of the metal photomask box that can detect vibration and thus can monitor the storing condition of the metal photomask box by using a vibration detecting device.
The present invention further provides another objective, which is to provide a cover member of a metal photomask box provided with a RFID that can rapidly identify the storing position of the metal photomask box.
Concerning the afore-described objectives, the present invention provides a metal photomask box composed of a metal upper cover member and a metal lower cover member. Wherein one side of the metal photomask box is disposed with at least a movable connecting mechanism for connecting the metal upper cover member and the metal lower cover member, and an opposite side of the movable connecting mechanism is disposed with at least a latch piece for latching the metal upper cover member and the metal lower cover member.
The present invention then provides a metal photomask box composed of a metal upper cover member and a metal lower cover member. Wherein one side of the metal photomask box is disposed with at least a movable connecting mechanism for connecting the metal upper cover member and the metal lower cover member, and an opposite side of the movable connecting mechanism is disposed with at least a latch piece for latching the metal upper cover member and the metal lower cover member. Moreover, a ring-shaped airtight washer is further disposed between the metal upper cover member and the metal lower cover member.
The present invention further provides a metal photomask box composed of a metal upper cover member and a metal lower cover member. Wherein one side of the metal photomask box is disposed with at least a movable connecting mechanism for connecting the metal upper cover member and the metal lower cover member, and an opposite side of the movable connecting mechanism is disposed with at least a latch piece for latching the metal upper cover member and the metal lower cover member. Moreover, the photomask box is further disposed with a ring-shaped airtight washer between the metal upper cover member and the metal lower cover member, and a plurality of valve pieces are disposed on the metal upper cover member or the metal lower cover member.
The present invention further provides a metal photomask box composed of a metal upper cover member and a metal lower cover member. Wherein one side of the metal photomask box is disposed with at least a movable connecting mechanism for connecting the metal upper cover member and the metal lower cover member, and an opposite side of the movable connecting mechanism is disposed with at least a latch piece for latching the metal upper cover member and the metal lower cover member. Moreover, the photomask box is further disposed with a ring-shaped airtight washer between the metal upper cover member and the metal lower cover member, a plurality of valve pieces on the metal upper cover member or the metal lower cover member, and a vibration detecting device on the metal lower cover member.
The present invention then provides a metal photomask box structure, comprising a metal lower cover member, two sides of which being respectively disposed with a locking device and a restricting device being disposed on one adjacent side of the locking devices to form a structure shaped like a upside-down U, the locking devices further comprising valve stoppers and holders; a metal upper cover member, connected with the metal lower cover member by a movable connecting mechanism; a plurality of pressing buckles, fixedly connected to each corner of the metal upper cover member through a plurality of supporting points; and a guiding locking piece removably disposed on one side of the metal upper cover member opposite to the opening of the structure shaped like an upside-down U; a ring-shaped airtight washer, disposed between the metal upper cover member and the metal lower cover member; at least a latch piece, disposed on one opposite side of the movable connecting mechanism; a plurality of air valve pieces, disposed on the metal upper cover member or on the metal lower cover member; and a vibration detecting device disposed on the metal lower cover member.
By using the design disclosed by the present invention, not only can the photomask be smoothly and easily led into the photomask box and effectively locked, but ESD and EMI can also be prevented and thus extend the duration of the photomask. Moreover, the metal photomask box with air filling function provided by the present invention also offers an airtight space to protect the photomask and prevent from fogging effect on the photomask.
The present invention discloses a structure for metal photomask boxes. Some detailed procedures for fabricating or processing the photomask or photomask box applied in the present invention are accomplished by using current techniques and will not be completely described in the following description. And the drawings in the following are not drawn according to actual sizes, the function of which is only to illustrate features related to the present invention.
First, referring to
The metal photomask box 10 according to the present invention can be made of a kind of metal material, and this kind of metal material can be iron, copper, aluminum, stainless steel, or alloy of the aforementioned materials; in the present embodiment, the material of stainless steel is a preferred choice. Moreover, the interior of the metal photomask box 10 is surface-treated, and the number of particles that may be produced by the metal photomask box 10 itself can thus be minimized. In addition, the ring-shaped airtight washer 13 according to the present embodiment can be a flexible airtight washer made of polymer resin such as Epoxy resin. Thus, the latching of the latch device 14 can press-fits the flexible airtight washer and the airtight effect can be ensured. Moreover, since the ring-shaped airtight washer 13 has a certain thickness, a latch piece with a movable axis is used as the latch device 14 in the present embodiment to press and buckle the metal photomask box 10.
Furthermore, in order to improve the EMI resistance of the metal photomask box 10, the ring-shaped airtight washer 13 in the present embodiment can also be an airtight washer made of a kind of conductive adhesive film. Thus, when the metal photomask box 10 is covered by the airtight washer made of conductive adhesive film, the metal photomask 10 can become like a metal shielding mask and therefore can effectively protect the photomask 20 in the metal photomask box 10. Meanwhile, the airtight washer made of conductive adhesive film can also be used to eliminate the static electricity on the metal photomask box 10.
In order to extend the time of storage of the metal photomask box, some inert gas needs to be filled into the metal photomask box; moreover, in order to keep the cleanliness in the metal photomask box, the air that has already existed in the metal photomask box needs to be discharged or exhausted, such air including the atmosphere, air outgassed by the metal photomask box itself, and volatile gas produced by small quantity of chemical solution remaining on the surface of the photomask. Thus, at least an air filling device and at least an air exhausting device are needed to be disposed on the metal photomask box so that the metal photomask box can be equipped with air filling function.
Then, refer to
Then, refer to
Since a photomask box needs to be transported between equipments and machines during the process, and particularly in advanced semiconductor Fabs., the pick-and-place, transportation, and storage of a photomask box are all carried out by a robot arm or transporting apparatus. Therefore it is often difficult to know whether any accidental collisions such as dropping down, momentary cessation, or a direct collision have happened during the transporting process and caused possible damages to the photomask stored in the metal photomask box. Therefore, in order to monitor whether any accidental collisions have happened during the transporting process of the photomask box, a vibration detector 19, and more particularly, a directional vibration detector as shown in
When the metal photomask box has been used for storage for a while and needs to be picked out and reused, or when a metal photomask box that has been used for storage needs to be selected for composing another new process, the ability to quickly find out the location of each metal photomask box is required. For this purpose, referring to
Furthermore, in order to effectively lock the photomask in the metal photomask box, the present invention further provides another embodiment, referring to
What are described above are only preferred embodiments of the present invention and should not be used to limit the claims of the present invention; moreover, the above description can be understood and put into practice by those who are skilled in the present technical field, therefore equivalent changes or modifications made without departing from the spirit disclosed by the present invention should still be included in the appended claims.
Claims
1. A metal photomask box, comprising:
- a metal upper cover member;
- a metal lower cover member;
- at least a movable connecting mechanism disposed on one side of said metal photomask box for connecting said metal upper cover member and said metal lower cover member; and
- at least a latch piece, disposed on the other side of said metal photomask box, being opposite to said movable connecting mechanism for latching said metal upper cover member and said metal lower cover member.
2. The metal photomask box according to claim 1, wherein said metal photomask box is made of stainless steel series or aluminum alloy or magnesium alloy.
3. The metal photomask box according to claim 1, further comprising a ring-shaped airtight washer which is disposed between said metal upper cover member and said metal lower cover member.
4. The metal photomask box according to claim 3, wherein the material of said ring-shaped airtight washer is a polymer resin.
5. The metal photomask box according to claim 3, wherein the material of said ring-shaped airtight washer is a conductive adhesive film.
6. A metal photomask box, comprising:
- a metal upper cover member;
- a metal lower cover member;
- at least a movable connecting mechanism disposed on one side of said metal photomask box for connecting said metal upper cover member and said metal lower cover member;
- at least a latch piece, disposed on the other side of said metal photomask box, being opposite to said movable connecting mechanism for latching said metal upper cover member and said metal lower cover member;
- a ring-shaped airtight washer disposed between said metal upper cover member and said metal lower cover member; and
- a plurality of air valve devices disposed on said metal upper cover member or said metal lower cover member.
7. The metal photomask box according to claim 6, wherein said metal photomask box is made of stainless steel series or aluminum alloy or magnesium alloy.
8. The metal photomask box according to claim 6, wherein the material of said ring-shaped airtight washer is a polymer resin.
9. The metal photomask box according to claim 6, wherein said air valve device comprises at least an air filling valve devices and at least an air exhausting valve devices.
10. The metal photomask box according to claim 6, wherein said air filing valve devices and said air exhausting valve devices further comprisies a flexible baffle plate for air filling valve and a flexible baffle plate for air exhausting valve, respectively.
11. The metal photomask box according to claim 6, wherein a longer side can be formed on said plurality of valve devices and the distance of said longer side is 170 mm.
12. The metal photomask box according to claim 6, wherein a shorter side can be formed on said plurality of valve devices and the distance of said shorter side is 110 mm.
13. The metal photomask box according to claim 6, further comprising a vibration detecting device which is disposed on said metal upper cover member or said metal lower cover member.
14. The metal photomask box according to claim 6, further comprising a RFID which is disposed on any side of said metal upper cover member or said metal lower cover member.
15. The metal photomask box according to claim 6, further comprising a plurality of pressing buckles which are disposed on each corner of said metal upper cover member and said metal lower cover member.
16. The metal photomask box according to claim 15, wherein said pressing buckles comprises:
- a base body fixedly connected to each corner of said upper cover member of said photomask box through a plurality of supporting points;
- a flexible bending member, for one bent pole of the member connected to said base body and the other bent pole positioned between said one or plurality of supporting points in flexible floating state, further comprising a top supporting surface and a pressing buckling surface;
- wherein said top supporting surface and said pressing buckling surface of said flexible bending member contact and lock said photomask, when said photomask box covers a photomask.
17. A metal photomask box, comprising:
- a metal upper cover member;
- a metal lower cover member;
- at least a movable connecting mechanism being disposed on one side of said metal photomask box for connecting said metal upper cover member and said metal lower cover member;
- at least a latch piece, disposed on the other side of said metal photomask box, being opposite to said movable connecting mechanism for latching said metal upper cover member and said metal lower cover member;
- a ring-shaped airtight washer, disposed between said metal upper cover member and said metal lower cover member; and
- a plurality of air valve devices being disposed on one side of said metal upper cover member or one side of said metal lower cover member.
18. The metal photomask box according to claim 17, further comprising a vibration detecting device which is disposed on said metal upper cover member or said metal lower cover member.
19. The metal photomask box according to claim 17, further comprising a RFID which is disposed on any side of said metal upper cover member or said metal lower cover member.
20. The metal photomask box according to claim 17, further comprising a plurality of pressing buckles which are disposed on each corner of said metal upper cover member and said metal lower cover member.
Type: Application
Filed: Dec 19, 2006
Publication Date: Feb 14, 2008
Applicant:
Inventors: Ming-Lung Chiu (Taipei County), Chien Feng Wang (Taipei County)
Application Number: 11/640,887
International Classification: B65D 85/48 (20060101);