Abstract: A method for producing long-term bendable glass material includes: bending a glass material in a bending radius in a range of 1 mm to 107 mm; storing the bent glass material for a time period of at least 1 day; inspecting at least a portion of the bent glass material for damage after the storing; and classifying the inspected bent glass material as a reject if damage is detected or as a long-term bendable glass material if no damage is detected.

Abstract: A top-opening substrate carrier comprises a container body, a door member and at least one latching mechanism. The latching mechanism includes a rotary drive member, a first driven cam, a second driven cam, a first connecting rod, a second connecting rod, two longitudinal latching arms and two lateral latching arms. The first driven cam and the second driven cam are disposed at two sides of the rotary drive member. When the rotary drive member is rotated by force, it links and activates the first connecting rod and the second connecting rod to synchronously drive the first driven cam and the second driven cam to rotate, thereby driving the two longitudinal latching arms and the two lateral latching arms to project towards locking holes of the container body and locked, or retract from the locking holes of the container body and unlocked.

Abstract: A substrate storing container includes: a container main body including a tubular wall portion, the container main body having a substrate storing space which is formed by an inner face of the wall portion, is able to store a plurality of substrates, and communicates with the container main body opening portion; a lid body which is removably attached to the container main body opening portion and is able to close the container main body opening portion; a ventilation passage which allows the substrate storing space and an external space of the container main body to communicate with each other, wherein the ventilation passage is formed in a ventilation passage forming unit which is insert-molded with the container main body.

Abstract: A packaging filler insert includes a first packaging filler insert end and a second packaging filler insert end. A first packaging filler insert side extends from the first packaging filler insert end to the second packaging filler insert end and a second packaging filler side extends from the first packaging filler insert end to the second packaging filler insert end. An outer packaging filler insert face has at least one tab, and an inner packaging filler insert face located and positioned opposite from the outer packaging filler face. A pair of filler inserts are positioned between upper and lower portions of an item that is shipped in a carton, to provide support for the upper portion, such as via engagement with corner posts positioned between the filler inserts and adjacent corners of the carton.

Abstract: Provided herein are apparatus, systems and methods for processing reticle blanks. A reticle processing system includes a support assembly having a plate coupled to a frame, and a carrier base assembly supported on the support assembly. The carrier base assembly comprises a wall extending from a top surface of the carrier base and defining a containment region for a reticle.

Abstract: A reticle pod with a spoiler structure includes a body and a cover. A reticle allocation area is centrally disposed at the body. The cover covers the body. A peripheral area of the cover and a peripheral area of the body are fitted together by a protruding portion and a dented portion. The dented portion and the protruding portion jointly form a spoiler structure surrounding the reticle allocation area. The spoiler structure includes a spoiler passage between the dented portion and the protruding portion. The body has at least one sidewall corresponding in position to the spoiler passage to form a particle-collecting space. Particles carried by external air current which enters the spoiler passage end up in the particle-collecting space and thus are denied entry into the reticle allocation area.

Abstract: A container includes: a storage member having a bottom-surface member and a side-surface member; and two protectors disposed at two corners adjacent to each other, the two corners belonging to four corners of a storage space. Each of the two protectors has a support portion detachably fitted in a corresponding one of two cuts, a first reception portion having a first reception surface facing an end surface of a housed object, and a second reception portion having a second reception surface facing an end surface of the housed object. The first and/or second reception portion is integral with the support portion. The second reception portion has, in at least a part adjacent to a bottom surface, an evacuation portion in which a distance between the second reception surface and a side surface of the side-surface member facing the second reception surface increases along with approach to the bottom surface.

Abstract: A substrate storage container includes a container main body having an opening at the front, a support portion for supporting a substrate in the interior thereof, and a substrate receiving portion positioned more toward a rear wall than the support portion, an a lid on which a substrate pressing portion for pressing the substrate is formed. The substrate receiving portion and the substrate pressing portion are present within a range of greater than or equal to 0 mm and less than or equal to 80 mm in the horizontal direction from a vertical center line that passes through the center of the container main body when the lid is viewed from the front.

Abstract: Described herein is a packaging system comprising a sleeve having a plurality of sides, an open top, and an open bottom, each of the sides having an inner surface, an inner liner located on the inner surfaces of the sides of the sleeve, the inner liner having an inner surface that defines a cavity, a plurality of building panels located in the cavity, and an outer wrapping surrounding at least a portion of the sleeve and at least a portion of the plurality of building panels.

Abstract: According to various embodiments, a frame cassette includes a housing and a mounting structure within the housing. The mounting structure includes a plurality of tape-frame slots, each tape-frame slot configured to receive a tape-frame. The housing includes an opening configured to introduce a tape-frame into a tape-frame slot of the plurality of tape-frame slots, or to remove the tape frame from the tape-frame slot of the plurality of tape-frame slots. The housing also includes an electrostatic discharge protection. A corresponding automatic transportation system and method of automatic transportation of semiconductor wafers is also provided.

Abstract: A reticle pod includes an outer pod, an inner pod cover and an inner base plate. A reticle is supported on the base and is contained within the environment created by the inner pod cover and the inner pod base. The inner pod cover can include a plurality of reticle retainers configured to contact a side wall of the reticle and limit movement of the reticle in a horizontal direction.

Abstract: A substrate container system comprises a container body having a bottom face, a front opening that enables passage of a substrate, and a back opening opposing the front opening, the back opening having a width smaller than that of the front opening; and a back cover that covers the back opening and establishes sealing engagement with the container body, wherein the back cover comprises a first gas inlet structure that bendingly extends under the bottom face of the container body upon assembly; wherein the first gas inlet structure comprises a downward facing gas intake port opposing the bottom face of the container body.

Abstract: A substrate storage container and a gas replacement unit capable of reducing variations in humidity or concentration of gas in a space above a substrate are provided. The substrate storage container comprises a container body having an opening and is capable of containing substrates, a lid, at least one intake valve for supplying gas to the inside of the container body, and at least one gas replacement unit which blows out the supplied gas wherein the at least one intake valve is attached to the back, bottom surface of the container body. The gas replacement unit includes a housing member and a cover member. The housing member has a plurality of first group blowout holes in the vertical direction, and the opening area of the top first group blowout hole is larger than the opening area of the second of the first group blowout holes.

Abstract: A reticle retaining system including an inner pod and an outer pod is described. The inner pod includes an inner base configured to receive a workpiece; an inner cover configured to couple to the inner base, thereby forming an interior for housing the workpiece; and a hold down pin movably arranged through the inner cover and configured to press the workpiece. The outer pod includes an outer base configured to receive the inner base, an outer cover configured to couple to the outer base, and a pushing element arranged on the outer cover. The hold down pin, the outer cover and the pushing element have a charge dissipation property. When the pushing element pushes the hold down pin to press the workpiece, a charge dissipation path is established from the received workpiece, through the hold down pin and the pushing element, to the outer cover.

Abstract: A carrier assembly configured to facilitate manufacture of a printed circuit board assembly includes a bottom frame defining a generally rectangular configuration and having a length and a width. The bottom frame is adjustable to vary at least one of the length or the width thereof. The assembly further includes a core releasably positionable on the bottom frame and configured to support a circuit board thereon. A carrier assembly system includes the bottom frame and a plurality of cores.

Abstract: A cover glass tray including a body portion having a lower surface, a first guide portion disposed on the lower surface of the body portion, a second guide portion spaced apart from the first guide portion, and a support portion disposed between the first guide portion and the second guide portion, and having one surface extending in a first direction, in which the first guide portion includes a first protrusion extending in the first direction and a first bent portion bent from one end of the first protrusion in a second direction different from the first direction, and the second guide portion includes a second protrusion extending in the first direction and a second bent portion bent from one end of the second protrusion in the second direction.

Abstract: A moisture resistant pad for a liquid crystal panel, including at least one moisture resistant construction including a central region and an edge region disposed around the central region, wherein the edge region includes a first undulation structure disposed around the central region, the first undulation structure being a closed structure for blocking water vapor out of the central region. In the moisture resistant pad for a liquid crystal panel, channels formed within a surface of a product that needs to be moisture resistant are isolated from the external environment so that water vapor in the external environment cannot contact the product surface through the channels. As a result, the pad has good moisture resistance, suitable in transportation environments or in packaging container environments.

Abstract: A substrate storage container includes an annular packing provided between a container body for storing substrates and a lid. The container body has a seal surface which is in contact with the packing. The lid is provided with an attachment groove for attaching the packing. The packing is formed of a main body fitted in the attachment groove and an extended piece extending from the main body. The extended piece has a protrusion protruding toward the lid in the closing direction of the lid. A seal portion is located at an end beyond the protrusion. The seal portion is inverted to a side of the seal surface and a side of the main body and comes into contact with the seal surface.

Abstract: An EUV reticle pod is provided. The pod includes an inner and an outer box assembly. The inner box assembly contained in the outer box assembly includes a base and a cover. The base has an upper surface and a surrounding wall. The upper surface includes a carry surface, at least one trench, and a first contacting surface. The EUV reticle is carried above the carry surface. The trench has a circular loop structure and its bottom is lower than the carry surface. The carry surface, the trench, and the first contacting surface are sequentially distributed from the center of the upper surface towards the surrounding wall. The cover has a concave for accommodating the EUV reticle and a second contacting surface for cooperating with the first contacting surface to form an air-tight seal. The trench captures and traps particles to reduce the particle contamination on the reticle.

Abstract: Described herein is a packaging system comprising a sleeve having a plurality of sides, an open top, and an open bottom, each of the sides having an inner surface, an inner liner located on the inner surfaces of the sides of the sleeve, the inner liner having an inner surface that defines a cavity, a plurality of building panels located in the cavity, and an outer wrapping surrounding at least a portion of the sleeve and at least a portion of the plurality of building panels.

Abstract: A substrate storing container provided with a container main body, a lid body, a lateral substrate support portion, a lid body side substrate support portion, and a back side substrate support portion includes a casting-off portion that casts off a substrate in a state being supported by the back side substrate support portion and the lid body side substrate support portion from at least one of the back side substrate support portion or the lid body side substrate support portion. When the lid body is opened from the container main body opening portion from a state in which the container main body opening portion is closed by the lid body.

Abstract: A shipping system for shipping planar substrates includes a plurality of planar substrates stacked to form a pack and a plurality of interleaving material including substantially spherical beads positioned between the substrates of the pack and configured to carry a load. Substantially all of the beads have a diameter within 25% of Dmax, where Dmax is a diameter corresponding to a size of an opening of an upper limit sieve used in the shipping system. Also disclosed are a spacer for use in a shipping system for shipping planar substrates, a wrapped system for shipping planar substrates, a method of wrapping a system for shipping planar substrates, and a powder applicator.

Abstract: A glass substrate is laminated with a substrate containing silicon to thereby form a laminated substrate. The glass substrate has a concave surface and a convex surface and has one or more marks that distinguish between the concave surface and the convex surface.

Abstract: A bottom surface member of a container defines an xy-plane, and a side surface member defines an xz-plane and aan yz-plane. A protective member includes a receiving part that has a first receiving surface parallel to the xz-plane and a second receiving surface parallel to the yz-plane, and a supporting part formed with the receiving part. The supporting part has a first flat plate section parallel to the xz-plane, a second flat plate section parallel to the yz-plane, and a third flat plate section parallel to the xy-plane. The receiving part has a fourth flat plate section that has the first receiving surface and is parallel to the xz-plane, a fifth flat plate section parallel to the yz-plane, a sixth flat plate section facing the fourth flat plate section with a gap therebetween, and a seventh flat plate section that has the second receiving surface.

Abstract: A semiconductor wafer container includes two outer shells in a substantially flat and identical form. Each outer shell vertically overlaps so as to accommodate a single semiconductor wafer therein. Each outer shell has a main body, a wafer retaining device and an external wall forming device. The wafer retaining device accommodates and fixedly holds the wafer in such a manner that upper and bottom surfaces of the wafer are not substantially in contact with the outer shells. The wafer retaining device includes: an inclined surface; a wafer contact surface; and a shallow gap portion. The external wall forming device has a hanging portion formed on an outer peripheral edge of the bottom surface of the outer shell so as to externally constitute a closed external wall relative to the wafer when each outer shell vertically overlaps to store the wafer.

Abstract: An inflatable packaging structure, including at least one end panel made of a plurality of layers of thermoplastic material and arranged along a longitudinal axis, the at least one end panel includes a plurality of fluid chambers arranged perpendicularly to the longitudinal axis, whereas a one-way check valve is incorporated into at least one of the plurality of fluid chambers, an air supply line, configured to commonly communicate with each of the one-way check valves to supply fluid into the fluid chambers and a plurality of weld lines formed through at least two of the plurality of layers of thermoplastic material and configured to form at least two openings within the at least one end panel when the fluid is supplied into the plurality of fluid chambers.

Abstract: Examples provide a method and apparatus for transporting equipment using a stackable transport frame. A set of adjustable brackets are removably attached to a portion of the stackable transport frame. The set of adjustable brackets are oriented in a downward and vertical configuration which is perpendicular to the transport frame to removably secure the stackable transport frame to a trailer. A set of parallel frame members define a wheel securing aperture to accommodate one or more wheels on the equipment being transported. A support member on the transported equipment sits within a longitudinal channel. A set of stacking brackets are configured to support a set of stackable transport frames in a vertical stacked configuration during storage.

Abstract: The present invention relates to a buffer chamber unit for wafer processing equipment.

Abstract: An apparatus for containing a substrate and a method of manufacturing the apparatus are provided. The apparatus for containing a substrate includes: a base having a periphery and an upward-facing top horizontal planar surface with a plurality of contact elements, the contact elements being used for engaging the substrate to hold the substrate upon the upward-facing top horizontal planar surface, an upward-facing frame-like support surface extending from the upward-facing top horizontal planar surface and surrounding the contact elements at a position proximate to the periphery of the base; and a cover having a downward-facing frame-like support surface being in large-area contact with the upward-facing frame-like support surface to define a cavity for containing the substrate between the base and the cover. The downward-facing and upward-facing frame-like support surfaces in contact with each other are not at the same level as the upward-facing top horizontal planar surface.

Abstract: Disclosed herein is a container for shipping disk-shaped articles. The container comprises a cassette comprising a top opening, a plurality of dividers that define slots therebetween for receiving disk-shaped articles and constraining lateral movement of the disk-shaped articles, and pads for supporting the disk-shaped articles and constraining downward vertical movement of the disk-shaped articles. The container also comprises a top lid coupleable to the cassette over the top opening and comprising resiliently flexible fins. When the top lid is fully coupled to the cassette, the disk-shaped articles are supported on the pads, and the container is not shrink-wrapped, an unoccupied gap is defined between the resiliently flexible fins and the disk-shaped articles. When the top lid is fully coupled to the cassette, the disk-shaped articles are supported on the pads, and the container is shrink-wrapped, the resiliently flexible fins contact and are flexed against the disk-shaped articles.

Abstract: A storage container includes: a storage portion having a rectangular bottom portion, a side wall, and a hollow region; positioning members positioning a rectangular plate-like structural body inside the hollow region; positioning members positioning a rectangular plate-like structural body inside the hollow region; and grooves formed in the storage portion, each of the grooves being formed in the inner side surface at an inner corner of the bottom surface, and two of the grooves being formed at two inner corners adjacent to each other. Each of the positioning members is detachably fitted into the storage portion into corresponding one of grooves. Each of the positioning members includes a joint member in contact with one of the grooves and a contact member detachably fitted into each other. The contact member includes an engaged portion, a contact portion, and an intervening portion integrally formed with the contact portion.

Abstract: A packaging box includes a shelf portion which partitions an interior of the packaging box into an upper space and a lower space, an inner flap which is located above the shelf portion as an inner lid and which is bendable to a closed position where the inner flap faces the shelf portion while extending parallel thereto, and a hold-down piece which is disposed at a position facing the inner flap at the closed position in the shelf portion and which has a first bent portion bendable to protrude outward in a middle portion of the hold-down piece, the hold-down piece formed by cutting and raising the shelf portion to be capable of standing in a tilted state where a distal end side thereof extends toward a first side portion.

Abstract: The present disclosure provides a buffer structure and a packaging box, the buffer structure includes a fixing frame, the fixing frame includes a mounting plate and a supporting plate, the mounting plate connects to the box body, the supporting plate includes a first surface and a second surface arranged opposite to each other, and includes an adjusting hole running through the first surface and the second surface; an adjusting component, the adjusting component includes an adjusting member, and a fixing member, the adjusting component passes through the adjusting hole, the fixing member connects to an end of the adjusting member and stops against the first surface, the other end of the adjusting member abuts the second surface; and a buffer member, the buffer member connects to a surface of the adjusting member away from the supporting plate.

Abstract: The compression resistant package for wall and ceiling tile includes a first container having a box portion and a cover. An L-shaped corner protection member is provided inside the box portion at each of the tour corners of the box portion. Each of the L-shaped corner protection members have two intersecting legs that respectively extend alongside predetermined portions of the interior wall surfaces of the box portion. The corner protection members have a height that extends upwardly from the floor of the box portion to the height of the walls of the box portion. The corner protection members are formed of a compression resistant material that prevents any overlying containers from imposing pressure on a stack of tiles inside the first container when the stack height of the tiles inside the first container is less than the height of the corner protection members.

Abstract: A substrate container including a casing, a rack, a casing holder, a casing lifting mechanism, a lid, and a lid holder. When holding of substrates with the rack shifts to holding of the substrates with the casing holder and the lid holder, the casing lifting mechanism moves the casing holder upward, whereby the casing holder moves the substrates upward. When the holding of the substrates with the casing holder and the lid holder shifts to the holding of the substrates with the rack, the casing lifting mechanism moves the casing holder downward, whereby the casing holder moves the substrates downward.

Abstract: A reticle cassette includes a bottom panel, a frame arranged on the bottom panel, and a top cover arranged on the frame, the bottom panel, the frame and the top cover defining a chamber with an opening, the reticle cassette further providing a door panel at one side of the opening. The bottom panel is provided thereon with a plurality of reticle supporting posts each separated from the frame by a lateral gap, and the frame has a longitudinal cross-section comprising H-shaped structures. A web and a bottom surface of the first vertical wall are separated from the bottom panel by vertical gaps. The gaps are arranged between the reticle supporting posts and the frame so as to make the reticle cassette suitable for use with both vacuum suction type and physical clamping type handling forks to pick up the reticle.

Abstract: A corner protector having a pocket for the receipt of an object. The corner protector includes a window in communication with the pocket for the receipt of a portion of the object, and an undulated gripping member that provides a friction fit of the corner protector against the object.

Abstract: Provided herein are approaches for processing reticle blanks. In one approach, a reticle processing system includes a support assembly having a plate coupled to a frame, and a carrier assembly coupled to the support assembly. In one approach, the carrier assembly includes a carrier base coupled to the plate, a reticle disposed over the carrier base, and a carrier shield disposed over the reticle, wherein the carrier shield may include a central opening formed therein, allowing for placement and extraction of the reticle. In one approach, when the carrier assembly is placed atop the support assembly, a plurality of pins extend from the plate through corresponding openings in the carrier base, the plurality of pins supporting the carrier assembly so the carrier base, the reticle, and the carrier shield are each independently supported and vertically separated from one another.

Abstract: A substrate retention plate system for holding a substrate for processing in an electronic device manufacturing process is described. The retention plate system includes a top plate and a bottom plate to sandwich a flexible substrate. Additionally, the top plate includes a number of cams to stretch the flexible substrate across the bottom plate.

Abstract: A method is disclosed. The method includes receiving, at a computing system, from a user, a request for an access code and one or more constraints on a use of the access code, and identifying a portable device to be associated with the access code. The method also includes obtaining, using the portable device, authorization for one or more potential interactions using the access code. Upon obtaining authorization for the one or more interactions, the method includes generating the access code, which includes an identifier that causes an access request that includes the access code be routed to the computing system. The method also includes receiving, from an access device, an access request comprising the access code in an interaction. Upon determining that the interaction complies with the one or more transaction constraints, the computing system provides an indication to the access device that the interaction is authorized.

Abstract: A substrate storage container with increased mounting force of the conveyance component is provided. The substrate storage container comprises a container body having an opening closed by a lid and capable of storing a plurality of substrates, and a conveyance component detachably attached to the container body via a mounting mechanism, wherein the mounting mechanism includes at least one first mounting portion on the opening side of the container body and at least one second mounting portion on the side away from the opening. Furthermore, the conveyance component has at least one engaging portion to be engaged with the mounting mechanism, and the at least one engaging portion includes at least one first engaging portions displaced and engaged in a predetermined direction and at least one second engaging portion displaced and engaged in a direction different from the predetermined direction.

Abstract: The invention is directed to a shipping container 1 for transporting works of art 2 comprising an enclosing section 3 obtained by injection moulding and a cover section 7 obtained by injection moulding, retaining means 9 to secure the cover section 7 to the wall sections of the enclosing section 3. The retaining means 9 are not present on at least one wall section 10. The one wall section 10 is not provided with retaining means 9 and is provided with one or more support strips 11 along the length of the side wall 10. The interior of the flat rectangular wall segment and the four wall sections of the enclosing section and at the interior of the cover section a vacuum insulation panel 26 is positioned comprising an air tight envelope and one or more layers of an aerogel core.

Abstract: Substrate carrier can have drainage area leading the liquid away from the substrates, so that liquid droplet can be channeled away from the substrate area. The drainage area can include tilted lines and surfaces toward the ground away from the substrates. The carrier can further have drainage area leading the liquid to an end of the carrier, which then can be channeled to the ground without being free fall to the ground.

Abstract: There is provided a pellicle container for storing a pellicle used in lithography, having a tray and a cover between which the pellicle is stored, and the tray has a pellicle mount section on which the pellicle is used to be mounted, but the tray of this container further has a plane plate, preferably a quartz plane plate, having a flatness of 10 micrometers or smaller provided on top of the pellicle mount so as to stabilize the flatness of the pellicle, especially its agglutinant layer.

Abstract: A shipping system for shipping planar substrates includes a plurality of planar substrates stacked to form a pack and a plurality of interleaving material including substantially spherical beads positioned between the substrates of the pack and configured to carry a load. Substantially all of the beads have a diameter within 25% of Dmax, where Dmax is a diameter corresponding to a size of an opening of an upper limit sieve used in the shipping system. Also disclosed are a spacer for use in a shipping system for shipping planar substrates, a wrapped system for shipping planar substrates, a method of wrapping a system for shipping planar substrates, and a powder applicator.

Abstract: A reticle pressing unit and an EUV reticle pod using the same are provided. An inner assembly includes an upper cover and a lower cover. The lower cover includes a supporting element for supporting the reticle. A pressing unit for pressing the reticle is disposed on the upper cover and includes a pressing element and a limiting cap. The pressing element has oppositely arranged pressing part and pressure receiving part. The pressing part extends through the upper cover to press against the reticle. The pressing element is covered by the limiting cap and is protruded outwardly from a top surface of the limiting cap. An outer cover has a pushing surface for forming a surface-to-surface contact with the pressure receiving part and for simultaneously pressing against the pressure receiving part and the top surface to solve the problems relating to the reticle which is applied with uneven forces.

Abstract: A packing container for accommodating a display panel is described. The packing container includes a packing main body having a receiving recess, which includes a first receiving zone and a second receiving zone, and a limiting element disposed on the second receiving zone, wherein the limiting element and the sidewall of the second receiving zone form a limiting accommodating space to constrain and accommodate a circuit board of the display panel.

Abstract: Substrate containers and/or portions thereof for use in the semiconductor manufacturing industry can be formed by injection molding metal slurries. More particularly, such substrate containers and/or portions thereof can be formed by injection molding metal slurries containing magnesium or magnesium alloys. Substrate containers, wherein at least a portion of the substrate container is injection molded from a metal slurry containing magnesium or magnesium alloy can exhibit improved permeation control of moisture and oxygen over, and as compared to, comparable substrate carriers formed of polymer based materials. Exemplary substrate containers can include wafer containers, reticle pods, disk shippers and/or work-in-process boxes.

Abstract: [Problem] To reduce a sliding trace in a vicinity of a substrate end surface, while maintaining smooth vertical movement of a substrate in a groove of the holding section in a substrate storage container, said sliding trace being made with the holding section. [Solution] The present invention relates to a substrate storage container (1) that is provided with: a container main body (2), which stores a substrate (W), and which has at least one side open; and a removable cover body (3) capable of opening/closing an opening (5) of the container main body (2).

Abstract: The present disclosure relates to a wafer cassette system having an adaptive inset configured to enable wafers having a first diameter to be held by a wafer cassette configured to hold wafers having a second diameter larger than the first diameter. The wafer cassette system includes a wafer cassette having a first plurality of wafer slots configured to receive one or more wafers having a first diameter. An adaptive inset is arranged in an interior cavity of the wafer cassette. The adaptive inset has a second plurality of wafer slots configured to receive one or more wafers having a second diameter that is less than the first diameter. The adaptive inset allows for the wafer cassette to hold wafers having the second diameter, thereby enabling semiconductor processing tools to processes wafer having a different diameter than those able to be held by wafer cassettes that the tools can receive.