Fragile Or Sensitive (e.g., Glass Mirror) Patents (Class 206/454)
  • Patent number: 10947006
    Abstract: A packaging box includes a shelf portion which partitions an interior of the packaging box into an upper space and a lower space, an inner flap which is located above the shelf portion as an inner lid and which is bendable to a closed position where the inner flap faces the shelf portion while extending parallel thereto, and a hold-down piece which is disposed at a position facing the inner flap at the closed position in the shelf portion and which has a first bent portion bendable to protrude outward in a middle portion of the hold-down piece, the hold-down piece formed by cutting and raising the shelf portion to be capable of standing in a tilted state where a distal end side thereof extends toward a first side portion.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: March 16, 2021
    Assignee: JVC KENWOOD CORPORATION
    Inventors: Toshiyuki Yakabe, Hideki Samata, Noriyuki Hara, Makiko Katsuyama, Akemi Ichiyanagi, Kazuhiro Kuramoto, Norio Sato, Shinichi Sakano
  • Patent number: 10934074
    Abstract: The present disclosure provides a buffer structure and a packaging box, the buffer structure includes a fixing frame, the fixing frame includes a mounting plate and a supporting plate, the mounting plate connects to the box body, the supporting plate includes a first surface and a second surface arranged opposite to each other, and includes an adjusting hole running through the first surface and the second surface; an adjusting component, the adjusting component includes an adjusting member, and a fixing member, the adjusting component passes through the adjusting hole, the fixing member connects to an end of the adjusting member and stops against the first surface, the other end of the adjusting member abuts the second surface; and a buffer member, the buffer member connects to a surface of the adjusting member away from the supporting plate.
    Type: Grant
    Filed: February 17, 2019
    Date of Patent: March 2, 2021
    Assignees: HKC Corporation Limited, Chongqing HKC Optoelectronics Technology Co., Ltd.
    Inventor: Xiaogang Hu
  • Patent number: 10913589
    Abstract: The compression resistant package for wall and ceiling tile includes a first container having a box portion and a cover. An L-shaped corner protection member is provided inside the box portion at each of the tour corners of the box portion. Each of the L-shaped corner protection members have two intersecting legs that respectively extend alongside predetermined portions of the interior wall surfaces of the box portion. The corner protection members have a height that extends upwardly from the floor of the box portion to the height of the walls of the box portion. The corner protection members are formed of a compression resistant material that prevents any overlying containers from imposing pressure on a stack of tiles inside the first container when the stack height of the tiles inside the first container is less than the height of the corner protection members.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: February 9, 2021
    Inventors: Steve George, Sun Qiong
  • Patent number: 10910247
    Abstract: A substrate container including a casing, a rack, a casing holder, a casing lifting mechanism, a lid, and a lid holder. When holding of substrates with the rack shifts to holding of the substrates with the casing holder and the lid holder, the casing lifting mechanism moves the casing holder upward, whereby the casing holder moves the substrates upward. When the holding of the substrates with the casing holder and the lid holder shifts to the holding of the substrates with the rack, the casing lifting mechanism moves the casing holder downward, whereby the casing holder moves the substrates downward.
    Type: Grant
    Filed: July 28, 2015
    Date of Patent: February 2, 2021
    Inventors: Kazuhiro Honsho, Mitsukazu Takahashi, Akito Hatano, Koji Hashimoto
  • Patent number: 10908497
    Abstract: A reticle cassette includes a bottom panel, a frame arranged on the bottom panel, and a top cover arranged on the frame, the bottom panel, the frame and the top cover defining a chamber with an opening, the reticle cassette further providing a door panel at one side of the opening. The bottom panel is provided thereon with a plurality of reticle supporting posts each separated from the frame by a lateral gap, and the frame has a longitudinal cross-section comprising H-shaped structures. A web and a bottom surface of the first vertical wall are separated from the bottom panel by vertical gaps. The gaps are arranged between the reticle supporting posts and the frame so as to make the reticle cassette suitable for use with both vacuum suction type and physical clamping type handling forks to pick up the reticle.
    Type: Grant
    Filed: November 15, 2017
    Date of Patent: February 2, 2021
    Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    Inventors: Gang Wang, Rongjun Zhang, Dongliang Huang
  • Patent number: 10870523
    Abstract: A corner protector having a pocket for the receipt of an object. The corner protector includes a window in communication with the pocket for the receipt of a portion of the object, and an undulated gripping member that provides a friction fit of the corner protector against the object.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: December 22, 2020
    Assignee: WESTROCK CONTAINER, LLC
    Inventor: Joseph Neale
  • Patent number: 10831112
    Abstract: Provided herein are approaches for processing reticle blanks. In one approach, a reticle processing system includes a support assembly having a plate coupled to a frame, and a carrier assembly coupled to the support assembly. In one approach, the carrier assembly includes a carrier base coupled to the plate, a reticle disposed over the carrier base, and a carrier shield disposed over the reticle, wherein the carrier shield may include a central opening formed therein, allowing for placement and extraction of the reticle. In one approach, when the carrier assembly is placed atop the support assembly, a plurality of pins extend from the plate through corresponding openings in the carrier base, the plurality of pins supporting the carrier assembly so the carrier base, the reticle, and the carrier shield are each independently supported and vertically separated from one another.
    Type: Grant
    Filed: February 21, 2019
    Date of Patent: November 10, 2020
    Assignee: Applied Materials, Inc.
    Inventors: James Strassner, Charles Carlson, Robert Brent Vopat, Jeffrey Blahnik
  • Patent number: 10825714
    Abstract: A substrate retention plate system for holding a substrate for processing in an electronic device manufacturing process is described. The retention plate system includes a top plate and a bottom plate to sandwich a flexible substrate. Additionally, the top plate includes a number of cams to stretch the flexible substrate across the bottom plate.
    Type: Grant
    Filed: April 2, 2016
    Date of Patent: November 3, 2020
    Assignee: INTEL CORPORATION
    Inventors: Daniel Chavez-Clemente, Joshua D. Heppner, Naida Duranovic
  • Patent number: 10796016
    Abstract: A method is disclosed. The method includes receiving, at a computing system, from a user, a request for an access code and one or more constraints on a use of the access code, and identifying a portable device to be associated with the access code. The method also includes obtaining, using the portable device, authorization for one or more potential interactions using the access code. Upon obtaining authorization for the one or more interactions, the method includes generating the access code, which includes an identifier that causes an access request that includes the access code be routed to the computing system. The method also includes receiving, from an access device, an access request comprising the access code in an interaction. Upon determining that the interaction complies with the one or more transaction constraints, the computing system provides an indication to the access device that the interaction is authorized.
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: October 6, 2020
    Assignee: Visa International Service Association
    Inventor: Matthew Aaron Legler
  • Patent number: 10727099
    Abstract: A substrate storage container with increased mounting force of the conveyance component is provided. The substrate storage container comprises a container body having an opening closed by a lid and capable of storing a plurality of substrates, and a conveyance component detachably attached to the container body via a mounting mechanism, wherein the mounting mechanism includes at least one first mounting portion on the opening side of the container body and at least one second mounting portion on the side away from the opening. Furthermore, the conveyance component has at least one engaging portion to be engaged with the mounting mechanism, and the at least one engaging portion includes at least one first engaging portions displaced and engaged in a predetermined direction and at least one second engaging portion displaced and engaged in a direction different from the predetermined direction.
    Type: Grant
    Filed: July 20, 2017
    Date of Patent: July 28, 2020
    Assignee: Shin-Etsu Polymer Co., Ltd.
    Inventors: Hiroshi Mimura, Junya Toda
  • Patent number: 10723539
    Abstract: The invention is directed to a shipping container 1 for transporting works of art 2 comprising an enclosing section 3 obtained by injection moulding and a cover section 7 obtained by injection moulding, retaining means 9 to secure the cover section 7 to the wall sections of the enclosing section 3. The retaining means 9 are not present on at least one wall section 10. The one wall section 10 is not provided with retaining means 9 and is provided with one or more support strips 11 along the length of the side wall 10. The interior of the flat rectangular wall segment and the four wall sections of the enclosing section and at the interior of the cover section a vacuum insulation panel 26 is positioned comprising an air tight envelope and one or more layers of an aerogel core.
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: July 28, 2020
    Assignee: TURTLE B.V.
    Inventor: Hizkia Van Kralingen
  • Patent number: 10665486
    Abstract: Substrate carrier can have drainage area leading the liquid away from the substrates, so that liquid droplet can be channeled away from the substrate area. The drainage area can include tilted lines and surfaces toward the ground away from the substrates. The carrier can further have drainage area leading the liquid to an end of the carrier, which then can be channeled to the ground without being free fall to the ground.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: May 26, 2020
    Assignee: BROOKS CCS, GmbH
    Inventor: Lutz Rebstock
  • Patent number: 10634991
    Abstract: There is provided a pellicle container for storing a pellicle used in lithography, having a tray and a cover between which the pellicle is stored, and the tray has a pellicle mount section on which the pellicle is used to be mounted, but the tray of this container further has a plane plate, preferably a quartz plane plate, having a flatness of 10 micrometers or smaller provided on top of the pellicle mount so as to stabilize the flatness of the pellicle, especially its agglutinant layer.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: April 28, 2020
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventor: Toru Shirasaki
  • Patent number: 10611546
    Abstract: A shipping system for shipping planar substrates includes a plurality of planar substrates stacked to form a pack and a plurality of interleaving material including substantially spherical beads positioned between the substrates of the pack and configured to carry a load. Substantially all of the beads have a diameter within 25% of Dmax, where Dmax is a diameter corresponding to a size of an opening of an upper limit sieve used in the shipping system. Also disclosed are a spacer for use in a shipping system for shipping planar substrates, a wrapped system for shipping planar substrates, a method of wrapping a system for shipping planar substrates, and a powder applicator.
    Type: Grant
    Filed: September 22, 2017
    Date of Patent: April 7, 2020
    Assignee: Vitro, S.A.B. de C.V.
    Inventors: Farzad Behafarid, Erin A. Casci, Adam D. Polcyn, Lewis P. Bevans
  • Patent number: 10607871
    Abstract: A reticle pressing unit and an EUV reticle pod using the same are provided. An inner assembly includes an upper cover and a lower cover. The lower cover includes a supporting element for supporting the reticle. A pressing unit for pressing the reticle is disposed on the upper cover and includes a pressing element and a limiting cap. The pressing element has oppositely arranged pressing part and pressure receiving part. The pressing part extends through the upper cover to press against the reticle. The pressing element is covered by the limiting cap and is protruded outwardly from a top surface of the limiting cap. An outer cover has a pushing surface for forming a surface-to-surface contact with the pressure receiving part and for simultaneously pressing against the pressure receiving part and the top surface to solve the problems relating to the reticle which is applied with uneven forces.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: March 31, 2020
    Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD
    Inventors: Ming-Chien Chiu, Chia-Ho Chuang, Hsin-Min Hsueh
  • Patent number: 10562671
    Abstract: A packing container for accommodating a display panel is described. The packing container includes a packing main body having a receiving recess, which includes a first receiving zone and a second receiving zone, and a limiting element disposed on the second receiving zone, wherein the limiting element and the sidewall of the second receiving zone form a limiting accommodating space to constrain and accommodate a circuit board of the display panel.
    Type: Grant
    Filed: June 23, 2017
    Date of Patent: February 18, 2020
    Assignees: HKC Corporation Limited, Chongqing HKC Optoelectronics Technology Co., Ltd.
    Inventor: Shuozhen Liang
  • Patent number: 10566225
    Abstract: Substrate containers and/or portions thereof for use in the semiconductor manufacturing industry can be formed by injection molding metal slurries. More particularly, such substrate containers and/or portions thereof can be formed by injection molding metal slurries containing magnesium or magnesium alloys. Substrate containers, wherein at least a portion of the substrate container is injection molded from a metal slurry containing magnesium or magnesium alloy can exhibit improved permeation control of moisture and oxygen over, and as compared to, comparable substrate carriers formed of polymer based materials. Exemplary substrate containers can include wafer containers, reticle pods, disk shippers and/or work-in-process boxes.
    Type: Grant
    Filed: July 13, 2016
    Date of Patent: February 18, 2020
    Assignee: ENTEGRIS, INC.
    Inventors: Gary Gallagher, Stephen Sumner
  • Patent number: 10559484
    Abstract: [Problem] To reduce a sliding trace in a vicinity of a substrate end surface, while maintaining smooth vertical movement of a substrate in a groove of the holding section in a substrate storage container, said sliding trace being made with the holding section. [Solution] The present invention relates to a substrate storage container (1) that is provided with: a container main body (2), which stores a substrate (W), and which has at least one side open; and a removable cover body (3) capable of opening/closing an opening (5) of the container main body (2).
    Type: Grant
    Filed: February 22, 2016
    Date of Patent: February 11, 2020
    Assignee: SHIN-ETSU POLYMER CO., LTD.
    Inventors: Katsuhiko Kato, Hiroshi Mimura, Masaru Hagano
  • Patent number: 10535541
    Abstract: The present disclosure relates to a wafer cassette system having an adaptive inset configured to enable wafers having a first diameter to be held by a wafer cassette configured to hold wafers having a second diameter larger than the first diameter. The wafer cassette system includes a wafer cassette having a first plurality of wafer slots configured to receive one or more wafers having a first diameter. An adaptive inset is arranged in an interior cavity of the wafer cassette. The adaptive inset has a second plurality of wafer slots configured to receive one or more wafers having a second diameter that is less than the first diameter. The adaptive inset allows for the wafer cassette to hold wafers having the second diameter, thereby enabling semiconductor processing tools to processes wafer having a different diameter than those able to be held by wafer cassettes that the tools can receive.
    Type: Grant
    Filed: October 7, 2016
    Date of Patent: January 14, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Yuan Chen, Hung-Jen Lu, Ming-Hsien Lee, Po-Tao Chu
  • Patent number: 10490433
    Abstract: The plurality of protective grooves 225 has openings 2231 wider than thicknesses of the edge portions of the substrates W to allow the edge portions of the substrates W to be inserted. The edge portions of the substrates W are inserted into the protective grooves 225 in a non-contact state in which a space is formed between the edge portions of the substrates W and a groove forming surface 2221 of the substrate edge portion protective portion 222 on which the protective grooves 225 are formed when the container main body opening portion is closed by the lid body and the edge portions of the substrates W are not in contact with the groove forming surface 2221.
    Type: Grant
    Filed: July 3, 2015
    Date of Patent: November 26, 2019
    Assignee: MIRAIAL CO., LTD
    Inventors: Makoto Yokoyama, Kouji Kubota, Arisa Sasaki
  • Patent number: 10475682
    Abstract: A substrate support assembly for a substrate container. The assembly may include a pair of substrate support columns each including a stack of a plurality of shelf members and a plurality of support rods inserted through the stack for securing the stack together. Each shelf member may include a blade portion having first and second opposing surfaces and an inner and outer periphery. Each surface of the blade portion may include a rib structure and a plurality of bosses positioned towards the outer periphery and extending from a forward portion to a rearward portion of the blade portion. Interlocking features may be defined on the rib structures. The stack of the shelf members may include each shelf member stacked with one or more adjacent shelf members via the rib structures, thereby interlocking each shelf member with the one or more adjacent shelf members via the interlocking features.
    Type: Grant
    Filed: August 24, 2016
    Date of Patent: November 12, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: Matthew Fuller, Colton Harr
  • Patent number: 10392176
    Abstract: The present disclosure provides a buffer structure and a packaging box, the buffer structure includes a fixing frame and at least one adjusting component, the adjusting component includes at least one adjusting rod, a first locking member, and a second locking member, the adjusting rod passes through the adjusting hole along the extending direction of the adjusting rod, and includes a plurality of connecting parts arranged in parallel along the extending direction, the first locking member and the second locking member are respectively connected to one of connecting parts and clamp the supporting plate; and a buffer member connected to an end face of the adjusting rod and located on a side of the second locking member away from the supporting plate.
    Type: Grant
    Filed: February 17, 2019
    Date of Patent: August 27, 2019
    Assignees: HKC Corporation Limited, CHONGQING HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventor: Xiaogang Hu
  • Patent number: 10392154
    Abstract: A laminated package for solid products in powder or grain form, includes a set of stiffening notches, a dispensing mouth with a seal, valves for loading inert gas, in which the lateral folds of the upper face are folded inwards under the front and rear flaps, and the lateral folds of the lower face are folded outward and folded and stuck on the lower face over the front and rear flaps, and a method for forming the package.
    Type: Grant
    Filed: May 5, 2016
    Date of Patent: August 27, 2019
    Assignee: Lubuag Ltd.
    Inventor: Luís Burgos Agudo
  • Patent number: 10381249
    Abstract: A substrate container includes a casing, a rack, a lid, a lid holder, and a substrate separating mechanism. The casing has on its front face an opening. The substrate separating mechanism has a contact part that directly contacts substrates. The contact part is movable relative to the lid holder. The lid moves forward to the opening, and the contact part moves backward relative to the lid holder, whereby the lid holder holds ends of the substrates. The lid moves backward from the opening, and the contact part moves forward to the lid holder, whereby the substrate separating mechanism separates the substrates from the lid holder.
    Type: Grant
    Filed: July 28, 2015
    Date of Patent: August 13, 2019
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Kazuhiro Honsho, Mitsukazu Takahashi, Akito Hatano, Koji Hashimoto
  • Patent number: 10287083
    Abstract: A liquid-crystal-glass packing case comprises a case body, which includes a bottom and side walls integrated connecting around the bottom, wherein, a filter screen assembly is fixed on the case body, and the case body is capable of communicating inside and outside by the filter screen assembly. Wherein, a slot is disposed at a gap arranged on the side walls, and the filter screen assembly is interposed in the slot. Also, a hole slot is penetrating from the side walls of the case body to the bottom, and the filter screen assembly is interposed in the hole slot to provide solid supporting efficiency. The invention also provides a moisture-proof packing structure. The invention overcomes a prejudice of moisture-proof and sealing from people, provides a thought of putting into and dispersing out, and applies a utility of liquid-crystal-glass packing case and moisture-proof packing structure to get a better moisture-proof efficiency.
    Type: Grant
    Filed: October 23, 2014
    Date of Patent: May 14, 2019
    Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
    Inventors: Zhilin Zhao, Shihhsiang Chen
  • Patent number: 10276414
    Abstract: An improved wafer support mechanism in a wafer container useful for carrying a plurality of axially aligned thin mostly circular wafer substrates. The container includes a cassette that has a plurality of adjacently disposed teeth for receiving the substrates, wherein each rib member is continuous from the cassette open top to the cassette open bottom, a removable top cover portion, a removable bottom cover portion, a cushion assembly removably attached to the container top cover, and another cushion assembly removably located in the container bottom cover and held in place by the weight of the wafer cassette. The top cushions are formed of individual segments having an extended lead-in feature at the end of each segment, spring sections in each segment and each segment has a V-shaped cross section to receive the wafer edge. The top and bottom cushions are installed in the top and bottom container covers, respectively, and extend the wafer support to approximately the entire circumference of each wafer.
    Type: Grant
    Filed: September 19, 2016
    Date of Patent: April 30, 2019
    Assignee: Entegris, Inc.
    Inventors: Barry Gregerson, Jason Todd Steffens, Russ V. Raschke
  • Patent number: 10153187
    Abstract: Embodiments method and apparatus for transferring a substrate are provided herein. In some embodiments, a substrate cassette includes a body having an upper portion and a lower portion, the upper portion and the lower portion defining an interior volume when the upper portion is coupled to the lower portion; a locking mechanism moveable between a locked position, in which the upper and lower portions are coupled, and an unlocked position, in which the lower portion can be separated from the upper portion; and a load distribution plate coupled to an upper surface of the upper portion along an edge of the upper portion to distribute a load applied to the load distribution plate.
    Type: Grant
    Filed: November 5, 2015
    Date of Patent: December 11, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula, Ellie Y. Yieh
  • Patent number: 10103045
    Abstract: A vertical fixing transmission box used for transmitting a container is disclosed. The transmission box includes a carrier substrate and an elastic component, wherein the carrier substrate is utilized to carry the container, and the elastic component may be switched between an opening state and a fixing state. When the container is carried by the carrier substrate and the elastic component is switched to the opening state, the elastic component provides a vertical elastic force to abut against the container downwardly and fix the container. Also, the transmission box may be transported by an automatic material handling system.
    Type: Grant
    Filed: December 20, 2016
    Date of Patent: October 16, 2018
    Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
    Inventors: Kuan-Chun Liu, Wei-Yen Chen, Chia-Ho Chuang, Ming-Chien Chiu
  • Patent number: 10068787
    Abstract: Methods for processing semiconductor wafers, methods for loading semiconductor wafers into wafer carriers, and semiconductor wafer carriers. The methods and wafer carriers can be used for increasing the rigidity of wafers, e.g., large and thin wafers, by intentionally bowing the wafers to an extent that does not break the wafers. In some examples, a method for processing semiconductor wafers includes loading each semiconductor wafer into a respective semiconductor wafer slot of a semiconductor wafer carrier, horizontally bowing each semiconductor wafer, and moving the semiconductor wafer carrier into a processing station and processing the semiconductor wafers at the processing station while the semiconductor wafers are loaded into the semiconductor wafer carrier and horizontally bowed.
    Type: Grant
    Filed: December 30, 2016
    Date of Patent: September 4, 2018
    Assignee: SUNPOWER CORPORATION
    Inventor: Emmanuel Chua Abas
  • Patent number: 10062589
    Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate.
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: August 28, 2018
    Assignee: Lam Research Corporation
    Inventors: Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo, Marc Estoque
  • Patent number: 10062590
    Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate.
    Type: Grant
    Filed: August 14, 2017
    Date of Patent: August 28, 2018
    Assignee: Lam Research Corporation
    Inventors: Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo, Marc Estoque
  • Patent number: 10043695
    Abstract: Apparatus for carrying and shielding wafers includes a wafer container, a plurality of wafer cassettes disposed in the wafer container, and an engaging lock that prevents the wafer cassettes from shifting, the engaging lock being in direct contact with walls of the wafer cassettes.
    Type: Grant
    Filed: March 10, 2017
    Date of Patent: August 7, 2018
    Assignee: Himax Technologies Limited
    Inventor: Jui Tang Chang
  • Patent number: 10007875
    Abstract: A point-of-sale security activation card is provided. The card includes first and second card panels, a security element selectively interposed between the card panels, and machine readable content carried by either or both of the card panels. An inside panel surface of the first card panel is characterized by a revealable information field comprised of revealable information. The second card panel includes a tab, the tab overlying an end portion of the revealable information field of the first card panel. The security element includes a body, and a head extending therefrom. The head underlies the tab of the second card panel, the body overlying a substantial portion of the revealable information and intersecting with the machine readable content. Manipulation of the tab in furtherance of revealing the revealable information results in corruption of the machine readable content by the security element.
    Type: Grant
    Filed: May 3, 2017
    Date of Patent: June 26, 2018
    Assignee: The Meyers Printing Companies, Inc.
    Inventors: Timm R. Anderson, Matthew J. Evers, Bryce A. C. Loney, David P. McConnon, Kent A. Madson, Michael Charles Pollock, Gregg R. Temple, James R. Meis
  • Patent number: 10008402
    Abstract: A vertical wafer boat includes a top plate, a bottom plate, three support posts, and wafer support parts. The support posts include a first and a second support posts arranged in right and left sides of a starting end side of a wafer inserting direction, and a third support post arranged in a center of a terminal end side of the wafer inserting direction. The wafer support parts include a first, second and third wafer support parts protruding in the horizontal direction from side surfaces of the first, second and third support posts, respectively. A total of horizontal sectional areas of the first wafer support part and the first support post, or the second wafer support part and the second support post, and a total of horizontal sectional areas of the third wafer support part and the third support post have a specific relationship.
    Type: Grant
    Filed: February 14, 2018
    Date of Patent: June 26, 2018
    Assignee: COORSTEK KK
    Inventor: Takeshi Ogitsu
  • Patent number: 9997388
    Abstract: A breather assembly mounted to the purge port of a substrate carrier for coupling with a tool port. In various embodiments, the breather assembly comprises a grommet that presents either a planar or a concave mounting face for coupling to the tool port. In one embodiment, the grommet is of a “solid compliant” construction, wherein the mounting face complies with the mouth of the tool port without substantially changing shape. In other embodiments, the grommet is of a “flexible compliant” construction, wherein the grommet changes shape when engaged with the tool port. The grommet can be configured so that the force (pressure-area product) exerted in the direction towards the tool port is greater than the force exerted in the direction away from the tool port, thereby enhancing the seal between the grommet and the tool port.
    Type: Grant
    Filed: November 20, 2013
    Date of Patent: June 12, 2018
    Assignee: ENTEGRIS, INC.
    Inventors: Mark V. Smith, John Burns
  • Patent number: 9978623
    Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.
    Type: Grant
    Filed: August 10, 2015
    Date of Patent: May 22, 2018
    Assignee: Brooks Automation, Inc.
    Inventors: Daniel Babbs, William Fosnight, Robert C. May, William Weaver
  • Patent number: 9960064
    Abstract: The lateral substrate support part has: a plurality of plate parts, which have a parallel positional relationship, and support end portions of a plurality of substrates; and a plate-part support part, which supports the plate part, and is fixed to a side wall. The plate-part support part has: a groove-forming portion having a groove formed therein, said groove linearly extending over the whole plate parts in the direction intersecting the plate parts; a protrusion, which is formed in the groove, and which protrudes such that the protrusion reduces the width of the groove in the direction orthogonal to the direction in which the groove extends; and a positioned part that is formed at a center portion of the groove in the direction in which the groove extends.
    Type: Grant
    Filed: June 19, 2013
    Date of Patent: May 1, 2018
    Assignees: Miraial Co., Ltd., Shin-Etsu Polymer Co., Ltd.
    Inventor: Yuta Kanamori
  • Patent number: 9958772
    Abstract: A reticle pod is provided for receiving a reticle, the reticle pod comprises: a plurality of positioning modules, which are disposed on at least one vertex portions of a substrate of the reticle pod. The positioning module includes an elastic member, and an abutting member which disposed above the positioning module, wherein when the reticle is received in the reticle pod and the cover of the reticle pod is engaged to the substrate, the cover contacts and provides a downward pressure to the abutting member, and forcing the abutting member to compress the elastic member. The compressed elastic member deforms extensively along a transverse direction and contacts with the reticle.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: May 1, 2018
    Assignee: Gudeng Precision Industrial Co., Ltd.
    Inventors: Hsin-Min Hsueh, Chia-Ho Chuang, Cheng-Ju Lee, Jeng-Jie Huang
  • Patent number: 9929032
    Abstract: A front opening wafer container suitable, for large diameter wafers, 300 mm and above, utilizes a removable robotic flange that attaches vertically, without separate fasteners, using detents having resilient bending members that extend vertically to attach to an upwardly extending flange on the top wall of the container portion. A multiplicity of upwardly and outwardly extending strengthening ribs extend upwardly from the top wall of the container portion and extend along the top wall toward the left and right sides and the back side of the container portion, ad each of all four sides of the attachment flange. A further locking piece or core may be inserted and retained at the neck of the robotic flange to lock the resilient deflectable portions in their retention position. The locking piece further may be secured in place with a detent mechanism formed by part of the core and flanges.
    Type: Grant
    Filed: May 3, 2016
    Date of Patent: March 27, 2018
    Assignee: ENTEGRIS, INC.
    Inventor: Barry Gregerson
  • Patent number: 9908678
    Abstract: The invention is a protective container for transporting an enclosed object such as a flat screen television or other flat screen monitor. The protective covering includes two flaps and a base having soft padding material on their inner surfaces. An open configuration is essentially flat, allowing a monitor to be easily positioned on the covering. The flaps fold up to transform the protective container into a closed configuration, with straps or other connectors holding the flaps in place. The protective container has various features making it convenient to move manually and to transport in a delivery truck. The protective container is more convenient to use than the prior art, and can be manufactured from relatively inexpensive materials.
    Type: Grant
    Filed: May 29, 2013
    Date of Patent: March 6, 2018
    Assignee: BBY SOLUTIONS, INC.
    Inventors: James R. Hanson, Kevin Florence, Nathan Omann, Fredrick Larson, Bryan Skaudis
  • Patent number: 9881820
    Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate.
    Type: Grant
    Filed: April 25, 2016
    Date of Patent: January 30, 2018
    Assignee: Lam Research Corporation
    Inventors: Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo, Marc Estoque
  • Patent number: 9878453
    Abstract: A workpiece container stores at least one workpiece having a bottom surface and a peripheral edge. In one embodiment, a workpiece support structure is located within the container enclosure, which forms multiple vertically stacked storage shelves within the enclosure. Each storage shelf includes, in one embodiment, a first tine and a second tine for supporting the workpiece in a substantially horizontal orientation. The bottom surface and peripheral edge of a workpiece seated on a storage shelf extends beyond the outer edge of both the first tine and the second tine. An end effector may engage these extended portions or “grip zones” of the workpiece.
    Type: Grant
    Filed: August 5, 2014
    Date of Patent: January 30, 2018
    Assignee: Brooks Automation, Inc.
    Inventor: Anthony C. Bonora
  • Patent number: 9837466
    Abstract: To protect a plurality of semiconductor chips of a sawn wafer housed in a shipping case and a method of manufacturing a semiconductor device includes a step of vacuum packing a sawn wafer while being housed in a shipping case; the shipping case has the following structure: the shipping case has a lid portion that covers the upper surface of the sawn wafer and a body portion that covers the lower surface of the sawn wafer, the lid portion has a recess portion that covers a plurality of semiconductor chips and a ventilation route communicated with the recess portion. In a step of reducing pressure in the shipping case, a gas in the shipping case is discharged outside via a ventilation route.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: December 5, 2017
    Assignee: Renesas Electronics Corporation
    Inventor: Shintaro Matsuda
  • Patent number: 9802859
    Abstract: Provided is a method for forming a coating containing an organic acid in a glass sheet production line while controlling an increase in the haze ratio of the glass. The method of the present invention is a method for producing a coated glass sheet, the method including the steps of cutting a glass ribbon to form a plurality of glass sheets in a glass sheet production line; and applying a solution onto the glass ribbon or the plurality of glass sheets in the glass sheet production line, the solution containing an organic acid and at least one selected from a water-soluble polymer and a polyphosphoric acid salt. The water-soluble polymer is preferably a water-soluble high-molecular-weight polymer, and more preferably a water-soluble copolymer. A preferred water-soluble copolymer contains a vinylpyrrolidone unit.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: October 31, 2017
    Assignee: NIPPON SHEET GLASS COMPANY, LIMITED
    Inventors: Masahiro Hori, Shinya Okamoto, Yasuhiro Saito, Kazutaka Kamitani, Paul Arthur Holmes
  • Patent number: 9768045
    Abstract: The lid body side wafer support parts allow flexibility to be exhibited and supports the wafers. If a closed state substrate is defined as being a wafer which is stored in the substrate storing space in a container main body in a state wherein the container main body opening portion is closed by the lid body, and a closed time center is defined as being the center of a closed state substrate, the back side substrate support portion, when a closed state substrate is viewed in the thickness direction, are disposed in a pair about a depth direction reference line and support the wafer. A center angle which the back side substrate support portion form toward the depth direction with respect to a left/right direction reference line when a closed state substrate is viewed in the thickness direction is 20-55°.
    Type: Grant
    Filed: November 20, 2012
    Date of Patent: September 19, 2017
    Assignees: MIRAIAL CO., LTD., SHIN-ETSU POLYMER CO., LTD.
    Inventors: Chiaki Matsutori, Tsuyoshi Nagashima, Takaharu Oyama, Shuichi Inoue, Hiroyuki Shida, Hiroki Yamagishi, Kazumasa Ohnuki
  • Patent number: 9761470
    Abstract: A wafer carrier 1 includes a lower unit 2 on which a semiconductor wafer 100 is placed, and an upper unit 3 detachably attached to the lower unit 2, and forming a sealed chamber 4 for housing the semiconductor wafer 100 between the upper unit 3 and the lower unit 2. The upper unit 3 is provided with plural lock mechanisms 5 that fix the lower unit 2 to the upper unit 3 by abutting on a side surface of the lower unit 2.
    Type: Grant
    Filed: April 29, 2015
    Date of Patent: September 12, 2017
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventor: Nobuhira Abe
  • Patent number: 9745119
    Abstract: A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.
    Type: Grant
    Filed: December 23, 2013
    Date of Patent: August 29, 2017
    Assignee: Entegris, Inc.
    Inventors: Steven P. Kolbow, Kevin McMullen, Anthony M. Tieben, Matthew Kusz, David L. Halbmaier, John Lystad
  • Patent number: 9748127
    Abstract: The upper wall is provided with a recess indented from the outside toward the inside of the container main body, and a protrusion projecting outward on the inside of the recess. The top flange is provided with an insertion part which can be inserted into the recess from the outside of the upper wall. The insertion part is provided with a through-hole capable of penetrating from the side further from the upper wall to the side nearer the upper wall. With the recess in the upper wall opening upward and the insertion part of the top flange inserted into the recess, a molten resin poured into the through-hole of the insertion part from above fills the recess from the bottom surface thereof up to the outer peripheral surface of the protrusion and the inner peripheral surface of the through-hole.
    Type: Grant
    Filed: December 4, 2012
    Date of Patent: August 29, 2017
    Assignee: MIRAIAL CO., LTD.
    Inventor: Ryuuji Fukuda
  • Patent number: 9666468
    Abstract: A tray for storing a wafer with a tape frame in a storage container includes a ring-shaped frame, a dicing tape and a semiconductor wafer. The dicing tape is stuck on the rear surface of the ring-shaped frame, and the semiconductor wafer is supported on the dicing tape. The tray has a substantially circular shape and is positioned on the upper side and the lower side of the wafer with tape frame. The front surface of the tray has a flat portion for mounting the wafer, and at least a portion of the outer peripheral portion of the front surface of the tray includes a convex portion. A projecting portion is formed on the rear surface so that the projection portion is positioned outside the outer periphery of the semiconductor wafer of the wafer with the tape frame when the tray is positioned on the wafer with tape frame.
    Type: Grant
    Filed: February 7, 2014
    Date of Patent: May 30, 2017
    Assignee: ACHILLES CORPORATION
    Inventor: Masayuki Nishijima
  • Patent number: 9657720
    Abstract: A sensor device for measuring aerodynamic loads of a rotor blade for a wind power installation. The sensor device includes a reflector arranged in a cavity of the rotor blade which signals a signal evaluation device arranged at a distance from the reflector. The signal evaluation device detects and quantifies physical changes of the rotor blade from the reflected signal. A cleaning device for the reflector is arranged on the reflector for activation by a centrifugal force generated during the rotation of the rotor to clean the reflector.
    Type: Grant
    Filed: February 22, 2012
    Date of Patent: May 23, 2017
    Assignee: SSB Wind Systems GmbH & Co. KG
    Inventors: Fabio Bertolotti, Norbert Kötting