Fragile Or Sensitive (e.g., Glass Mirror) Patents (Class 206/454)
  • Patent number: 11352193
    Abstract: A moisture resistant pad for a liquid crystal panel, including at least one moisture resistant construction including a central region and an edge region disposed around the central region, wherein the edge region includes a first undulation structure disposed around the central region, the first undulation structure being a closed structure for blocking water vapor out of the central region. In the moisture resistant pad for a liquid crystal panel, channels formed within a surface of a product that needs to be moisture resistant are isolated from the external environment so that water vapor in the external environment cannot contact the product surface through the channels. As a result, the pad has good moisture resistance, suitable in transportation environments or in packaging container environments.
    Type: Grant
    Filed: September 29, 2017
    Date of Patent: June 7, 2022
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Chao Lv, Hui Dong, Ran Zhang, Xinwei Jiao, Baoyong Nie, Le Guo, Jun Zhang, Hengzhen Liang
  • Patent number: 11302548
    Abstract: A substrate storage container includes an annular packing provided between a container body for storing substrates and a lid. The container body has a seal surface which is in contact with the packing. The lid is provided with an attachment groove for attaching the packing. The packing is formed of a main body fitted in the attachment groove and an extended piece extending from the main body. The extended piece has a protrusion protruding toward the lid in the closing direction of the lid. A seal portion is located at an end beyond the protrusion. The seal portion is inverted to a side of the seal surface and a side of the main body and comes into contact with the seal surface.
    Type: Grant
    Filed: May 25, 2018
    Date of Patent: April 12, 2022
    Assignee: Shin-Etsu Polymer Co., Ltd.
    Inventor: Osamu Ogawa
  • Patent number: 11249392
    Abstract: An EUV reticle pod is provided. The pod includes an inner and an outer box assembly. The inner box assembly contained in the outer box assembly includes a base and a cover. The base has an upper surface and a surrounding wall. The upper surface includes a carry surface, at least one trench, and a first contacting surface. The EUV reticle is carried above the carry surface. The trench has a circular loop structure and its bottom is lower than the carry surface. The carry surface, the trench, and the first contacting surface are sequentially distributed from the center of the upper surface towards the surrounding wall. The cover has a concave for accommodating the EUV reticle and a second contacting surface for cooperating with the first contacting surface to form an air-tight seal. The trench captures and traps particles to reduce the particle contamination on the reticle.
    Type: Grant
    Filed: April 24, 2020
    Date of Patent: February 15, 2022
    Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD
    Inventors: Hsin-Min Hsueh, Chia-Ho Chuang, Cheng-Ju Lee, Jeng-Jie Huang
  • Patent number: 11225366
    Abstract: Described herein is a packaging system comprising a sleeve having a plurality of sides, an open top, and an open bottom, each of the sides having an inner surface, an inner liner located on the inner surfaces of the sides of the sleeve, the inner liner having an inner surface that defines a cavity, a plurality of building panels located in the cavity, and an outer wrapping surrounding at least a portion of the sleeve and at least a portion of the plurality of building panels.
    Type: Grant
    Filed: January 24, 2019
    Date of Patent: January 18, 2022
    Assignee: AWI Licensing LLC
    Inventors: Amanda Worley Coble, James R. Johnson, Gary A. Grinsted
  • Patent number: 11222800
    Abstract: A substrate storing container provided with a container main body, a lid body, a lateral substrate support portion, a lid body side substrate support portion, and a back side substrate support portion includes a casting-off portion that casts off a substrate in a state being supported by the back side substrate support portion and the lid body side substrate support portion from at least one of the back side substrate support portion or the lid body side substrate support portion. When the lid body is opened from the container main body opening portion from a state in which the container main body opening portion is closed by the lid body.
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: January 11, 2022
    Assignee: MTRAIAL CO., LTD.
    Inventor: Chiaki Matsutori
  • Patent number: 11161670
    Abstract: A shipping system for shipping planar substrates includes a plurality of planar substrates stacked to form a pack and a plurality of interleaving material including substantially spherical beads positioned between the substrates of the pack and configured to carry a load. Substantially all of the beads have a diameter within 25% of Dmax, where Dmax is a diameter corresponding to a size of an opening of an upper limit sieve used in the shipping system. Also disclosed are a spacer for use in a shipping system for shipping planar substrates, a wrapped system for shipping planar substrates, a method of wrapping a system for shipping planar substrates, and a powder applicator.
    Type: Grant
    Filed: January 24, 2020
    Date of Patent: November 2, 2021
    Assignee: Vitro, S.A.B. de C.V.
    Inventors: Farzad Behafarid, Erin A. Casci, Adam D. Polcyn, Lewis P. Bevans
  • Patent number: 11133215
    Abstract: A glass substrate is laminated with a substrate containing silicon to thereby form a laminated substrate. The glass substrate has a concave surface and a convex surface and has one or more marks that distinguish between the concave surface and the convex surface.
    Type: Grant
    Filed: January 23, 2018
    Date of Patent: September 28, 2021
    Assignee: AGC Inc.
    Inventors: Yu Hanawa, Shuhei Nomura, Kazutaka Ono, Nobuhiko Takeshita, Keisuke Hanashima
  • Patent number: 11121013
    Abstract: A semiconductor wafer container includes two outer shells in a substantially flat and identical form. Each outer shell vertically overlaps so as to accommodate a single semiconductor wafer therein. Each outer shell has a main body, a wafer retaining device and an external wall forming device. The wafer retaining device accommodates and fixedly holds the wafer in such a manner that upper and bottom surfaces of the wafer are not substantially in contact with the outer shells. The wafer retaining device includes: an inclined surface; a wafer contact surface; and a shallow gap portion. The external wall forming device has a hanging portion formed on an outer peripheral edge of the bottom surface of the outer shell so as to externally constitute a closed external wall relative to the wafer when each outer shell vertically overlaps to store the wafer.
    Type: Grant
    Filed: February 6, 2018
    Date of Patent: September 14, 2021
    Assignee: ACHILLES CORPORATION
    Inventors: Masayuki Nishijima, Kenichi Hirose, James Christie
  • Patent number: 11117729
    Abstract: A bottom surface member of a container defines an xy-plane, and a side surface member defines an xz-plane and aan yz-plane. A protective member includes a receiving part that has a first receiving surface parallel to the xz-plane and a second receiving surface parallel to the yz-plane, and a supporting part formed with the receiving part. The supporting part has a first flat plate section parallel to the xz-plane, a second flat plate section parallel to the yz-plane, and a third flat plate section parallel to the xy-plane. The receiving part has a fourth flat plate section that has the first receiving surface and is parallel to the xz-plane, a fifth flat plate section parallel to the yz-plane, a sixth flat plate section facing the fourth flat plate section with a gap therebetween, and a seventh flat plate section that has the second receiving surface.
    Type: Grant
    Filed: September 8, 2017
    Date of Patent: September 14, 2021
    Assignee: SAKAI DISPLAY PRODUCTS CORPORATION
    Inventor: Takashi Uchida
  • Patent number: 11084643
    Abstract: An inflatable packaging structure, including at least one end panel made of a plurality of layers of thermoplastic material and arranged along a longitudinal axis, the at least one end panel includes a plurality of fluid chambers arranged perpendicularly to the longitudinal axis, whereas a one-way check valve is incorporated into at least one of the plurality of fluid chambers, an air supply line, configured to commonly communicate with each of the one-way check valves to supply fluid into the fluid chambers and a plurality of weld lines formed through at least two of the plurality of layers of thermoplastic material and configured to form at least two openings within the at least one end panel when the fluid is supplied into the plurality of fluid chambers.
    Type: Grant
    Filed: December 2, 2019
    Date of Patent: August 10, 2021
    Assignee: Aeris Protective Packaging, Inc.
    Inventor: Michael Leiberman
  • Patent number: 11087999
    Abstract: The present invention relates to a buffer chamber unit for wafer processing equipment.
    Type: Grant
    Filed: November 10, 2017
    Date of Patent: August 10, 2021
    Assignee: SNW COMPANY LIMITED
    Inventor: Taehoon Kim
  • Patent number: 11084539
    Abstract: Examples provide a method and apparatus for transporting equipment using a stackable transport frame. A set of adjustable brackets are removably attached to a portion of the stackable transport frame. The set of adjustable brackets are oriented in a downward and vertical configuration which is perpendicular to the transport frame to removably secure the stackable transport frame to a trailer. A set of parallel frame members define a wheel securing aperture to accommodate one or more wheels on the equipment being transported. A support member on the transported equipment sits within a longitudinal channel. A set of stacking brackets are configured to support a set of stackable transport frames in a vertical stacked configuration during storage.
    Type: Grant
    Filed: March 27, 2020
    Date of Patent: August 10, 2021
    Assignee: T-Mobile USA, Inc.
    Inventor: Christopher C. Coltrain
  • Patent number: 11061339
    Abstract: An apparatus for containing a substrate and a method of manufacturing the apparatus are provided. The apparatus for containing a substrate includes: a base having a periphery and an upward-facing top horizontal planar surface with a plurality of contact elements, the contact elements being used for engaging the substrate to hold the substrate upon the upward-facing top horizontal planar surface, an upward-facing frame-like support surface extending from the upward-facing top horizontal planar surface and surrounding the contact elements at a position proximate to the periphery of the base; and a cover having a downward-facing frame-like support surface being in large-area contact with the upward-facing frame-like support surface to define a cavity for containing the substrate between the base and the cover. The downward-facing and upward-facing frame-like support surfaces in contact with each other are not at the same level as the upward-facing top horizontal planar surface.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: July 13, 2021
    Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
    Inventors: Chia-Ho Chuang, Hsin-Min Hsueh, Ming-Chien Chiu
  • Patent number: 11031046
    Abstract: Disclosed herein is a container for shipping disk-shaped articles. The container comprises a cassette comprising a top opening, a plurality of dividers that define slots therebetween for receiving disk-shaped articles and constraining lateral movement of the disk-shaped articles, and pads for supporting the disk-shaped articles and constraining downward vertical movement of the disk-shaped articles. The container also comprises a top lid coupleable to the cassette over the top opening and comprising resiliently flexible fins. When the top lid is fully coupled to the cassette, the disk-shaped articles are supported on the pads, and the container is not shrink-wrapped, an unoccupied gap is defined between the resiliently flexible fins and the disk-shaped articles. When the top lid is fully coupled to the cassette, the disk-shaped articles are supported on the pads, and the container is shrink-wrapped, the resiliently flexible fins contact and are flexed against the disk-shaped articles.
    Type: Grant
    Filed: March 7, 2019
    Date of Patent: June 8, 2021
    Assignee: WESTERN DIGITAL TECHNOLOGIES, INC.
    Inventors: Tony Jarrami, David Lenguyen, Andreas Parks
  • Patent number: 11008150
    Abstract: A storage container includes: a storage portion having a rectangular bottom portion, a side wall, and a hollow region; positioning members positioning a rectangular plate-like structural body inside the hollow region; positioning members positioning a rectangular plate-like structural body inside the hollow region; and grooves formed in the storage portion, each of the grooves being formed in the inner side surface at an inner corner of the bottom surface, and two of the grooves being formed at two inner corners adjacent to each other. Each of the positioning members is detachably fitted into the storage portion into corresponding one of grooves. Each of the positioning members includes a joint member in contact with one of the grooves and a contact member detachably fitted into each other. The contact member includes an engaged portion, a contact portion, and an intervening portion integrally formed with the contact portion.
    Type: Grant
    Filed: May 18, 2016
    Date of Patent: May 18, 2021
    Assignee: SAKAI DISPLAY PRODUCTS CORPORATION
    Inventor: Kazuki Nakamichi
  • Patent number: 10947006
    Abstract: A packaging box includes a shelf portion which partitions an interior of the packaging box into an upper space and a lower space, an inner flap which is located above the shelf portion as an inner lid and which is bendable to a closed position where the inner flap faces the shelf portion while extending parallel thereto, and a hold-down piece which is disposed at a position facing the inner flap at the closed position in the shelf portion and which has a first bent portion bendable to protrude outward in a middle portion of the hold-down piece, the hold-down piece formed by cutting and raising the shelf portion to be capable of standing in a tilted state where a distal end side thereof extends toward a first side portion.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: March 16, 2021
    Assignee: JVC KENWOOD CORPORATION
    Inventors: Toshiyuki Yakabe, Hideki Samata, Noriyuki Hara, Makiko Katsuyama, Akemi Ichiyanagi, Kazuhiro Kuramoto, Norio Sato, Shinichi Sakano
  • Patent number: 10934074
    Abstract: The present disclosure provides a buffer structure and a packaging box, the buffer structure includes a fixing frame, the fixing frame includes a mounting plate and a supporting plate, the mounting plate connects to the box body, the supporting plate includes a first surface and a second surface arranged opposite to each other, and includes an adjusting hole running through the first surface and the second surface; an adjusting component, the adjusting component includes an adjusting member, and a fixing member, the adjusting component passes through the adjusting hole, the fixing member connects to an end of the adjusting member and stops against the first surface, the other end of the adjusting member abuts the second surface; and a buffer member, the buffer member connects to a surface of the adjusting member away from the supporting plate.
    Type: Grant
    Filed: February 17, 2019
    Date of Patent: March 2, 2021
    Assignees: HKC Corporation Limited, Chongqing HKC Optoelectronics Technology Co., Ltd.
    Inventor: Xiaogang Hu
  • Patent number: 10913589
    Abstract: The compression resistant package for wall and ceiling tile includes a first container having a box portion and a cover. An L-shaped corner protection member is provided inside the box portion at each of the tour corners of the box portion. Each of the L-shaped corner protection members have two intersecting legs that respectively extend alongside predetermined portions of the interior wall surfaces of the box portion. The corner protection members have a height that extends upwardly from the floor of the box portion to the height of the walls of the box portion. The corner protection members are formed of a compression resistant material that prevents any overlying containers from imposing pressure on a stack of tiles inside the first container when the stack height of the tiles inside the first container is less than the height of the corner protection members.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: February 9, 2021
    Inventors: Steve George, Sun Qiong
  • Patent number: 10908497
    Abstract: A reticle cassette includes a bottom panel, a frame arranged on the bottom panel, and a top cover arranged on the frame, the bottom panel, the frame and the top cover defining a chamber with an opening, the reticle cassette further providing a door panel at one side of the opening. The bottom panel is provided thereon with a plurality of reticle supporting posts each separated from the frame by a lateral gap, and the frame has a longitudinal cross-section comprising H-shaped structures. A web and a bottom surface of the first vertical wall are separated from the bottom panel by vertical gaps. The gaps are arranged between the reticle supporting posts and the frame so as to make the reticle cassette suitable for use with both vacuum suction type and physical clamping type handling forks to pick up the reticle.
    Type: Grant
    Filed: November 15, 2017
    Date of Patent: February 2, 2021
    Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    Inventors: Gang Wang, Rongjun Zhang, Dongliang Huang
  • Patent number: 10910247
    Abstract: A substrate container including a casing, a rack, a casing holder, a casing lifting mechanism, a lid, and a lid holder. When holding of substrates with the rack shifts to holding of the substrates with the casing holder and the lid holder, the casing lifting mechanism moves the casing holder upward, whereby the casing holder moves the substrates upward. When the holding of the substrates with the casing holder and the lid holder shifts to the holding of the substrates with the rack, the casing lifting mechanism moves the casing holder downward, whereby the casing holder moves the substrates downward.
    Type: Grant
    Filed: July 28, 2015
    Date of Patent: February 2, 2021
    Inventors: Kazuhiro Honsho, Mitsukazu Takahashi, Akito Hatano, Koji Hashimoto
  • Patent number: 10870523
    Abstract: A corner protector having a pocket for the receipt of an object. The corner protector includes a window in communication with the pocket for the receipt of a portion of the object, and an undulated gripping member that provides a friction fit of the corner protector against the object.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: December 22, 2020
    Assignee: WESTROCK CONTAINER, LLC
    Inventor: Joseph Neale
  • Patent number: 10831112
    Abstract: Provided herein are approaches for processing reticle blanks. In one approach, a reticle processing system includes a support assembly having a plate coupled to a frame, and a carrier assembly coupled to the support assembly. In one approach, the carrier assembly includes a carrier base coupled to the plate, a reticle disposed over the carrier base, and a carrier shield disposed over the reticle, wherein the carrier shield may include a central opening formed therein, allowing for placement and extraction of the reticle. In one approach, when the carrier assembly is placed atop the support assembly, a plurality of pins extend from the plate through corresponding openings in the carrier base, the plurality of pins supporting the carrier assembly so the carrier base, the reticle, and the carrier shield are each independently supported and vertically separated from one another.
    Type: Grant
    Filed: February 21, 2019
    Date of Patent: November 10, 2020
    Assignee: Applied Materials, Inc.
    Inventors: James Strassner, Charles Carlson, Robert Brent Vopat, Jeffrey Blahnik
  • Patent number: 10825714
    Abstract: A substrate retention plate system for holding a substrate for processing in an electronic device manufacturing process is described. The retention plate system includes a top plate and a bottom plate to sandwich a flexible substrate. Additionally, the top plate includes a number of cams to stretch the flexible substrate across the bottom plate.
    Type: Grant
    Filed: April 2, 2016
    Date of Patent: November 3, 2020
    Assignee: INTEL CORPORATION
    Inventors: Daniel Chavez-Clemente, Joshua D. Heppner, Naida Duranovic
  • Patent number: 10796016
    Abstract: A method is disclosed. The method includes receiving, at a computing system, from a user, a request for an access code and one or more constraints on a use of the access code, and identifying a portable device to be associated with the access code. The method also includes obtaining, using the portable device, authorization for one or more potential interactions using the access code. Upon obtaining authorization for the one or more interactions, the method includes generating the access code, which includes an identifier that causes an access request that includes the access code be routed to the computing system. The method also includes receiving, from an access device, an access request comprising the access code in an interaction. Upon determining that the interaction complies with the one or more transaction constraints, the computing system provides an indication to the access device that the interaction is authorized.
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: October 6, 2020
    Assignee: Visa International Service Association
    Inventor: Matthew Aaron Legler
  • Patent number: 10723539
    Abstract: The invention is directed to a shipping container 1 for transporting works of art 2 comprising an enclosing section 3 obtained by injection moulding and a cover section 7 obtained by injection moulding, retaining means 9 to secure the cover section 7 to the wall sections of the enclosing section 3. The retaining means 9 are not present on at least one wall section 10. The one wall section 10 is not provided with retaining means 9 and is provided with one or more support strips 11 along the length of the side wall 10. The interior of the flat rectangular wall segment and the four wall sections of the enclosing section and at the interior of the cover section a vacuum insulation panel 26 is positioned comprising an air tight envelope and one or more layers of an aerogel core.
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: July 28, 2020
    Assignee: TURTLE B.V.
    Inventor: Hizkia Van Kralingen
  • Patent number: 10727099
    Abstract: A substrate storage container with increased mounting force of the conveyance component is provided. The substrate storage container comprises a container body having an opening closed by a lid and capable of storing a plurality of substrates, and a conveyance component detachably attached to the container body via a mounting mechanism, wherein the mounting mechanism includes at least one first mounting portion on the opening side of the container body and at least one second mounting portion on the side away from the opening. Furthermore, the conveyance component has at least one engaging portion to be engaged with the mounting mechanism, and the at least one engaging portion includes at least one first engaging portions displaced and engaged in a predetermined direction and at least one second engaging portion displaced and engaged in a direction different from the predetermined direction.
    Type: Grant
    Filed: July 20, 2017
    Date of Patent: July 28, 2020
    Assignee: Shin-Etsu Polymer Co., Ltd.
    Inventors: Hiroshi Mimura, Junya Toda
  • Patent number: 10665486
    Abstract: Substrate carrier can have drainage area leading the liquid away from the substrates, so that liquid droplet can be channeled away from the substrate area. The drainage area can include tilted lines and surfaces toward the ground away from the substrates. The carrier can further have drainage area leading the liquid to an end of the carrier, which then can be channeled to the ground without being free fall to the ground.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: May 26, 2020
    Assignee: BROOKS CCS, GmbH
    Inventor: Lutz Rebstock
  • Patent number: 10634991
    Abstract: There is provided a pellicle container for storing a pellicle used in lithography, having a tray and a cover between which the pellicle is stored, and the tray has a pellicle mount section on which the pellicle is used to be mounted, but the tray of this container further has a plane plate, preferably a quartz plane plate, having a flatness of 10 micrometers or smaller provided on top of the pellicle mount so as to stabilize the flatness of the pellicle, especially its agglutinant layer.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: April 28, 2020
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventor: Toru Shirasaki
  • Patent number: 10611546
    Abstract: A shipping system for shipping planar substrates includes a plurality of planar substrates stacked to form a pack and a plurality of interleaving material including substantially spherical beads positioned between the substrates of the pack and configured to carry a load. Substantially all of the beads have a diameter within 25% of Dmax, where Dmax is a diameter corresponding to a size of an opening of an upper limit sieve used in the shipping system. Also disclosed are a spacer for use in a shipping system for shipping planar substrates, a wrapped system for shipping planar substrates, a method of wrapping a system for shipping planar substrates, and a powder applicator.
    Type: Grant
    Filed: September 22, 2017
    Date of Patent: April 7, 2020
    Assignee: Vitro, S.A.B. de C.V.
    Inventors: Farzad Behafarid, Erin A. Casci, Adam D. Polcyn, Lewis P. Bevans
  • Patent number: 10607871
    Abstract: A reticle pressing unit and an EUV reticle pod using the same are provided. An inner assembly includes an upper cover and a lower cover. The lower cover includes a supporting element for supporting the reticle. A pressing unit for pressing the reticle is disposed on the upper cover and includes a pressing element and a limiting cap. The pressing element has oppositely arranged pressing part and pressure receiving part. The pressing part extends through the upper cover to press against the reticle. The pressing element is covered by the limiting cap and is protruded outwardly from a top surface of the limiting cap. An outer cover has a pushing surface for forming a surface-to-surface contact with the pressure receiving part and for simultaneously pressing against the pressure receiving part and the top surface to solve the problems relating to the reticle which is applied with uneven forces.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: March 31, 2020
    Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD
    Inventors: Ming-Chien Chiu, Chia-Ho Chuang, Hsin-Min Hsueh
  • Patent number: 10562671
    Abstract: A packing container for accommodating a display panel is described. The packing container includes a packing main body having a receiving recess, which includes a first receiving zone and a second receiving zone, and a limiting element disposed on the second receiving zone, wherein the limiting element and the sidewall of the second receiving zone form a limiting accommodating space to constrain and accommodate a circuit board of the display panel.
    Type: Grant
    Filed: June 23, 2017
    Date of Patent: February 18, 2020
    Assignees: HKC Corporation Limited, Chongqing HKC Optoelectronics Technology Co., Ltd.
    Inventor: Shuozhen Liang
  • Patent number: 10566225
    Abstract: Substrate containers and/or portions thereof for use in the semiconductor manufacturing industry can be formed by injection molding metal slurries. More particularly, such substrate containers and/or portions thereof can be formed by injection molding metal slurries containing magnesium or magnesium alloys. Substrate containers, wherein at least a portion of the substrate container is injection molded from a metal slurry containing magnesium or magnesium alloy can exhibit improved permeation control of moisture and oxygen over, and as compared to, comparable substrate carriers formed of polymer based materials. Exemplary substrate containers can include wafer containers, reticle pods, disk shippers and/or work-in-process boxes.
    Type: Grant
    Filed: July 13, 2016
    Date of Patent: February 18, 2020
    Assignee: ENTEGRIS, INC.
    Inventors: Gary Gallagher, Stephen Sumner
  • Patent number: 10559484
    Abstract: [Problem] To reduce a sliding trace in a vicinity of a substrate end surface, while maintaining smooth vertical movement of a substrate in a groove of the holding section in a substrate storage container, said sliding trace being made with the holding section. [Solution] The present invention relates to a substrate storage container (1) that is provided with: a container main body (2), which stores a substrate (W), and which has at least one side open; and a removable cover body (3) capable of opening/closing an opening (5) of the container main body (2).
    Type: Grant
    Filed: February 22, 2016
    Date of Patent: February 11, 2020
    Assignee: SHIN-ETSU POLYMER CO., LTD.
    Inventors: Katsuhiko Kato, Hiroshi Mimura, Masaru Hagano
  • Patent number: 10535541
    Abstract: The present disclosure relates to a wafer cassette system having an adaptive inset configured to enable wafers having a first diameter to be held by a wafer cassette configured to hold wafers having a second diameter larger than the first diameter. The wafer cassette system includes a wafer cassette having a first plurality of wafer slots configured to receive one or more wafers having a first diameter. An adaptive inset is arranged in an interior cavity of the wafer cassette. The adaptive inset has a second plurality of wafer slots configured to receive one or more wafers having a second diameter that is less than the first diameter. The adaptive inset allows for the wafer cassette to hold wafers having the second diameter, thereby enabling semiconductor processing tools to processes wafer having a different diameter than those able to be held by wafer cassettes that the tools can receive.
    Type: Grant
    Filed: October 7, 2016
    Date of Patent: January 14, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Yuan Chen, Hung-Jen Lu, Ming-Hsien Lee, Po-Tao Chu
  • Patent number: 10490433
    Abstract: The plurality of protective grooves 225 has openings 2231 wider than thicknesses of the edge portions of the substrates W to allow the edge portions of the substrates W to be inserted. The edge portions of the substrates W are inserted into the protective grooves 225 in a non-contact state in which a space is formed between the edge portions of the substrates W and a groove forming surface 2221 of the substrate edge portion protective portion 222 on which the protective grooves 225 are formed when the container main body opening portion is closed by the lid body and the edge portions of the substrates W are not in contact with the groove forming surface 2221.
    Type: Grant
    Filed: July 3, 2015
    Date of Patent: November 26, 2019
    Assignee: MIRAIAL CO., LTD
    Inventors: Makoto Yokoyama, Kouji Kubota, Arisa Sasaki
  • Patent number: 10475682
    Abstract: A substrate support assembly for a substrate container. The assembly may include a pair of substrate support columns each including a stack of a plurality of shelf members and a plurality of support rods inserted through the stack for securing the stack together. Each shelf member may include a blade portion having first and second opposing surfaces and an inner and outer periphery. Each surface of the blade portion may include a rib structure and a plurality of bosses positioned towards the outer periphery and extending from a forward portion to a rearward portion of the blade portion. Interlocking features may be defined on the rib structures. The stack of the shelf members may include each shelf member stacked with one or more adjacent shelf members via the rib structures, thereby interlocking each shelf member with the one or more adjacent shelf members via the interlocking features.
    Type: Grant
    Filed: August 24, 2016
    Date of Patent: November 12, 2019
    Assignee: ENTEGRIS, INC.
    Inventors: Matthew Fuller, Colton Harr
  • Patent number: 10392154
    Abstract: A laminated package for solid products in powder or grain form, includes a set of stiffening notches, a dispensing mouth with a seal, valves for loading inert gas, in which the lateral folds of the upper face are folded inwards under the front and rear flaps, and the lateral folds of the lower face are folded outward and folded and stuck on the lower face over the front and rear flaps, and a method for forming the package.
    Type: Grant
    Filed: May 5, 2016
    Date of Patent: August 27, 2019
    Assignee: Lubuag Ltd.
    Inventor: Luís Burgos Agudo
  • Patent number: 10392176
    Abstract: The present disclosure provides a buffer structure and a packaging box, the buffer structure includes a fixing frame and at least one adjusting component, the adjusting component includes at least one adjusting rod, a first locking member, and a second locking member, the adjusting rod passes through the adjusting hole along the extending direction of the adjusting rod, and includes a plurality of connecting parts arranged in parallel along the extending direction, the first locking member and the second locking member are respectively connected to one of connecting parts and clamp the supporting plate; and a buffer member connected to an end face of the adjusting rod and located on a side of the second locking member away from the supporting plate.
    Type: Grant
    Filed: February 17, 2019
    Date of Patent: August 27, 2019
    Assignees: HKC Corporation Limited, CHONGQING HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventor: Xiaogang Hu
  • Patent number: 10381249
    Abstract: A substrate container includes a casing, a rack, a lid, a lid holder, and a substrate separating mechanism. The casing has on its front face an opening. The substrate separating mechanism has a contact part that directly contacts substrates. The contact part is movable relative to the lid holder. The lid moves forward to the opening, and the contact part moves backward relative to the lid holder, whereby the lid holder holds ends of the substrates. The lid moves backward from the opening, and the contact part moves forward to the lid holder, whereby the substrate separating mechanism separates the substrates from the lid holder.
    Type: Grant
    Filed: July 28, 2015
    Date of Patent: August 13, 2019
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Kazuhiro Honsho, Mitsukazu Takahashi, Akito Hatano, Koji Hashimoto
  • Patent number: 10287083
    Abstract: A liquid-crystal-glass packing case comprises a case body, which includes a bottom and side walls integrated connecting around the bottom, wherein, a filter screen assembly is fixed on the case body, and the case body is capable of communicating inside and outside by the filter screen assembly. Wherein, a slot is disposed at a gap arranged on the side walls, and the filter screen assembly is interposed in the slot. Also, a hole slot is penetrating from the side walls of the case body to the bottom, and the filter screen assembly is interposed in the hole slot to provide solid supporting efficiency. The invention also provides a moisture-proof packing structure. The invention overcomes a prejudice of moisture-proof and sealing from people, provides a thought of putting into and dispersing out, and applies a utility of liquid-crystal-glass packing case and moisture-proof packing structure to get a better moisture-proof efficiency.
    Type: Grant
    Filed: October 23, 2014
    Date of Patent: May 14, 2019
    Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
    Inventors: Zhilin Zhao, Shihhsiang Chen
  • Patent number: 10276414
    Abstract: An improved wafer support mechanism in a wafer container useful for carrying a plurality of axially aligned thin mostly circular wafer substrates. The container includes a cassette that has a plurality of adjacently disposed teeth for receiving the substrates, wherein each rib member is continuous from the cassette open top to the cassette open bottom, a removable top cover portion, a removable bottom cover portion, a cushion assembly removably attached to the container top cover, and another cushion assembly removably located in the container bottom cover and held in place by the weight of the wafer cassette. The top cushions are formed of individual segments having an extended lead-in feature at the end of each segment, spring sections in each segment and each segment has a V-shaped cross section to receive the wafer edge. The top and bottom cushions are installed in the top and bottom container covers, respectively, and extend the wafer support to approximately the entire circumference of each wafer.
    Type: Grant
    Filed: September 19, 2016
    Date of Patent: April 30, 2019
    Assignee: Entegris, Inc.
    Inventors: Barry Gregerson, Jason Todd Steffens, Russ V. Raschke
  • Patent number: 10153187
    Abstract: Embodiments method and apparatus for transferring a substrate are provided herein. In some embodiments, a substrate cassette includes a body having an upper portion and a lower portion, the upper portion and the lower portion defining an interior volume when the upper portion is coupled to the lower portion; a locking mechanism moveable between a locked position, in which the upper and lower portions are coupled, and an unlocked position, in which the lower portion can be separated from the upper portion; and a load distribution plate coupled to an upper surface of the upper portion along an edge of the upper portion to distribute a load applied to the load distribution plate.
    Type: Grant
    Filed: November 5, 2015
    Date of Patent: December 11, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula, Ellie Y. Yieh
  • Patent number: 10103045
    Abstract: A vertical fixing transmission box used for transmitting a container is disclosed. The transmission box includes a carrier substrate and an elastic component, wherein the carrier substrate is utilized to carry the container, and the elastic component may be switched between an opening state and a fixing state. When the container is carried by the carrier substrate and the elastic component is switched to the opening state, the elastic component provides a vertical elastic force to abut against the container downwardly and fix the container. Also, the transmission box may be transported by an automatic material handling system.
    Type: Grant
    Filed: December 20, 2016
    Date of Patent: October 16, 2018
    Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
    Inventors: Kuan-Chun Liu, Wei-Yen Chen, Chia-Ho Chuang, Ming-Chien Chiu
  • Patent number: 10068787
    Abstract: Methods for processing semiconductor wafers, methods for loading semiconductor wafers into wafer carriers, and semiconductor wafer carriers. The methods and wafer carriers can be used for increasing the rigidity of wafers, e.g., large and thin wafers, by intentionally bowing the wafers to an extent that does not break the wafers. In some examples, a method for processing semiconductor wafers includes loading each semiconductor wafer into a respective semiconductor wafer slot of a semiconductor wafer carrier, horizontally bowing each semiconductor wafer, and moving the semiconductor wafer carrier into a processing station and processing the semiconductor wafers at the processing station while the semiconductor wafers are loaded into the semiconductor wafer carrier and horizontally bowed.
    Type: Grant
    Filed: December 30, 2016
    Date of Patent: September 4, 2018
    Assignee: SUNPOWER CORPORATION
    Inventor: Emmanuel Chua Abas
  • Patent number: 10062589
    Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate.
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: August 28, 2018
    Assignee: Lam Research Corporation
    Inventors: Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo, Marc Estoque
  • Patent number: 10062590
    Abstract: A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate.
    Type: Grant
    Filed: August 14, 2017
    Date of Patent: August 28, 2018
    Assignee: Lam Research Corporation
    Inventors: Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Richard H. Gould, Austin Ngo, Marc Estoque
  • Patent number: 10043695
    Abstract: Apparatus for carrying and shielding wafers includes a wafer container, a plurality of wafer cassettes disposed in the wafer container, and an engaging lock that prevents the wafer cassettes from shifting, the engaging lock being in direct contact with walls of the wafer cassettes.
    Type: Grant
    Filed: March 10, 2017
    Date of Patent: August 7, 2018
    Assignee: Himax Technologies Limited
    Inventor: Jui Tang Chang
  • Patent number: 10008402
    Abstract: A vertical wafer boat includes a top plate, a bottom plate, three support posts, and wafer support parts. The support posts include a first and a second support posts arranged in right and left sides of a starting end side of a wafer inserting direction, and a third support post arranged in a center of a terminal end side of the wafer inserting direction. The wafer support parts include a first, second and third wafer support parts protruding in the horizontal direction from side surfaces of the first, second and third support posts, respectively. A total of horizontal sectional areas of the first wafer support part and the first support post, or the second wafer support part and the second support post, and a total of horizontal sectional areas of the third wafer support part and the third support post have a specific relationship.
    Type: Grant
    Filed: February 14, 2018
    Date of Patent: June 26, 2018
    Assignee: COORSTEK KK
    Inventor: Takeshi Ogitsu
  • Patent number: 10007875
    Abstract: A point-of-sale security activation card is provided. The card includes first and second card panels, a security element selectively interposed between the card panels, and machine readable content carried by either or both of the card panels. An inside panel surface of the first card panel is characterized by a revealable information field comprised of revealable information. The second card panel includes a tab, the tab overlying an end portion of the revealable information field of the first card panel. The security element includes a body, and a head extending therefrom. The head underlies the tab of the second card panel, the body overlying a substantial portion of the revealable information and intersecting with the machine readable content. Manipulation of the tab in furtherance of revealing the revealable information results in corruption of the machine readable content by the security element.
    Type: Grant
    Filed: May 3, 2017
    Date of Patent: June 26, 2018
    Assignee: The Meyers Printing Companies, Inc.
    Inventors: Timm R. Anderson, Matthew J. Evers, Bryce A. C. Loney, David P. McConnon, Kent A. Madson, Michael Charles Pollock, Gregg R. Temple, James R. Meis
  • Patent number: 9997388
    Abstract: A breather assembly mounted to the purge port of a substrate carrier for coupling with a tool port. In various embodiments, the breather assembly comprises a grommet that presents either a planar or a concave mounting face for coupling to the tool port. In one embodiment, the grommet is of a “solid compliant” construction, wherein the mounting face complies with the mouth of the tool port without substantially changing shape. In other embodiments, the grommet is of a “flexible compliant” construction, wherein the grommet changes shape when engaged with the tool port. The grommet can be configured so that the force (pressure-area product) exerted in the direction towards the tool port is greater than the force exerted in the direction away from the tool port, thereby enhancing the seal between the grommet and the tool port.
    Type: Grant
    Filed: November 20, 2013
    Date of Patent: June 12, 2018
    Assignee: ENTEGRIS, INC.
    Inventors: Mark V. Smith, John Burns