MICRO-ELECTROMECHANICAL NOZZLE ARRANGEMENT HAVING CANTILEVERED ACTUATOR

Abstract

A micro-electromechanical nozzle arrangement for an inkjet printhead includes a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel defined by the substrate, said substrate having a layer of CMOS drive circuitry; a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber; a plurality of actuators fast with and displaceable with respect to the roof structure, the actuators radially spaced about the nozzle rim between the guide rails, each actuator having a serpentine heater element configured to expand thermally upon receiving current from the drive circuitry thereby moving said actuators into the chamber and increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle, wherein each actuator is cantilevered to a heater element in a bendable manner; and a central arm which having metal and PTFE portions to provide structural support for the actuators.

Description

CROSS REFERENCES TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No. 12/205,911 filed Sep. 7, 2008, which is a continuation application of U.S. Ser. No. 11/965,722 filed on Dec. 27, 2007, now issued U.S. Pat. No. 7,438,391, which is a continuation application of U.S. Ser. No. 11/442,126 filed on May 30, 2006, now issued as U.S. Pat. No. 7,326,357, which is a continuation application of U.S. Ser. No. 10/728,924 filed on Dec. 8, 2003, now issued as U.S. Pat. No. 7,179,395, which is a continuation application of U.S. Ser. No. 10/303,291 filed on Nov. 23, 2002, now U.S. Pat. No. 6,672,708, which is a continuation application of U.S. Ser. No. 09/855,093 filed on May 14, 2001, now U.S. Pat. No. 6,505,912 which is a continuation application of U.S. Ser. No. 09/112,806 filed 10 Jul. 1998, now U.S. Pat. No. 6,247,790. The disclosure of U.S. Pat. No. 6,672,708, U.S. Pat. No. 6,505,912 and U.S. Pat. No. 6,247,790 is specifically incorporated herein by reference.

CROSS-
REFERENCED
AUSTRALIAN	US PATENT/PATENT APPLICATION
Provisional Patent	(Claiming Right of Priority from
Application No.	Australian Provisional Application)	Docket No.
PO7991	6,750,901	ART01US
PO8505	6,476,863	ART02US
PO7988	6,788,336	ART03US
PO9395	6,322,181	ART04US
PO8017	6,597,817	ART06US
PO8014	6,227,648	ART07US
PO8025	6,727,948	ART08US
PO8032	6,690,419	ART09US
PO7999	6,727,951	ART10US
PO8030	6,196,541	ART13US
PO7997	6,195,150	ART15US
PO7979	6,362,868	ART16US
PO7978	6,831,681	ART18US
PO7982	6,431,669	ART19US
PO7989	6,362,869	ART20US
PO8019	6,472,052	ART21US
PO7980	6,356,715	ART22US
PO8018	6,894,694	ART24US
PO7938	6,636,216	ART25US
PO8016	6,366,693	ART26US
PO8024	6,329,990	ART27US
PO7939	6,459,495	ART29US
PO8501	6,137,500	ART30US
PO8500	6,690,416	ART31US
PO7987	7,050,143	ART32US
PO8022	6,398,328	ART33US
PO8497	7,110,024	ART34US
PO8020	6,431,704	ART38US
PO8504	6,879,341	ART42US
PO8000	6,415,054	ART43US
PO7934	6,665,454	ART45US
PO7990	6,542,645	ART46US
PO8499	6,486,886	ART47US
PO8502	6,381,361	ART48US
PO7981	6,317,192	ART50US
PO7986	6,850,274	ART51US
PO8026	6,646,757	ART53US
PO8028	6,624,848	ART56US
PO9394	6,357,135	ART57US
PO9397	6,271,931	ART59US
PO9398	6,353,772	ART60US
PO9399	6,106,147	ART61US
PO9400	6,665,008	ART62US
PO9401	6,304,291	ART63US
PO9403	6,305,770	ART65US
PO9405	6,289,262	ART66US
PP0959	6,315,200	ART68US
PP1397	6,217,165	ART69US
PP2370	6,786,420	DOT01US
PO8003	6,350,023	Fluid01US
PO8005	6,318,849	Fluid02US
PO8066	6,227,652	IJ01US
PO8072	6,213,588	IJ02US
PO8040	6,213,589	IJ03US
PO8071	6,231,163	IJ04US
PO8047	6,247,795	IJ05US
PO8035	6,394,581	IJ06US
PO8044	6,244,691	IJ07US
PO8063	6,257,704	IJ08US
PO8057	6,416,168	IJ09US
PO8056	6,220,694	IJ10US
PO8069	6,257,705	IJ11US
PO8049	6,247,794	IJ12US
PO8036	6,234,610	IJ13US
PO8048	6,247,793	IJ14US
PO8070	6,264,306	IJ15US
PO8067	6,241,342	IJ16US
PO8001	6,247,792	IJ17US
PO8038	6,264,307	IJ18US
PO8033	6,254,220	IJ19US
PO8002	6,234,611	IJ20US
PO8068	6,302,528	IJ21US
PO8062	6,283,582	IJ22US
PO8034	6,239,821	IJ23US
PO8039	6,338,547	IJ24US
PO8041	6,247,796	IJ25US
PO8004	6,557,977	IJ26US
PO8037	6,390,603	IJ27US
PO8043	6,362,843	IJ28US
PO8042	6,293,653	IJ29US
PO8064	6,312,107	IJ30US
PO9389	6,227,653	IJ31US
PO9391	6,234,609	IJ32US
PP0888	6,238,040	IJ33US
PP0891	6,188,415	IJ34US
PP0890	6,227,654	IJ35US
PP0873	6,209,989	IJ36US
PP0993	6,247,791	IJ37US
PP0890	6,336,710	IJ38US
PP1398	6,217,153	IJ39US
PP2592	6,416,167	IJ40US
PP2593	6,243,113	IJ41US
PP3991	6,283,581	IJ42US
PP3987	6,247,790	IJ43US
PP3985	6,260,953	IJ44US
PP3983	6,267,469	IJ45US
PO7935	6,224,780	IJM01US
PO7936	6,235,212	IJM02US
PO7937	6,280,643	IJM03US
PO8061	6,284,147	IJM04US
PO8054	6,214,244	IJM05US
PO8065	6,071,750	IJM06US
PO8055	6,267,905	IJM07US
PO8053	6,251,298	IJM08US
PO8078	6,258,285	IJM09US
PO7933	6,225,138	IJM10US
PO7950	6,241,904	IJM11US
PO7949	6,299,786	IJM12US
PO8060	6,866,789	IJM13US
PO8059	6,231,773	IJM14US
PO8073	6,190,931	IJM15US
PO8076	6,248,249	IJM16US
PO8075	6,290,862	IJM17US
PO8079	6,241,906	IJM18US
PO8050	6,565,762	IJM19US
PO8052	6,241,905	IJM20US
PO7948	6,451,216	IJM21US
PO7951	6,231,772	IJM22US
PO8074	6,274,056	IJM23US
PO7941	6,290,861	IJM24US
PO8077	6,248,248	IJM25US
PO8058	6,306,671	IJM26US
PO8051	6,331,258	IJM27US
PO8045	6,110,754	IJM28US
PO7952	6,294,101	IJM29US
PO8046	6,416,679	IJM30US
PO9390	6,264,849	IJM31US
PO9392	6,254,793	IJM32US
PP0889	6,235,211	IJM35US
PP0887	6,491,833	IJM36US
PP0882	6,264,850	IJM37US
PP0874	6,258,284	IJM38US
PP1396	6,312,615	IJM39US
PP3989	6,228,668	IJM40US
PP2591	6,180,427	IJM41US
PP3990	6,171,875	IJM42US
PP3986	6,267,904	IJM43US
PP3984	6,245,247	IJM44US
PP3982	6,315,914	IJM45US
PP0895	6,231,148	IR01US
PP0869	6,293,658	IR04US
PP0887	6,614,560	IR05US
PP0885	6,238,033	IR06US
PP0884	6,312,070	IR10US
PP0886	6,238,111	IR12US
PP0877	6,378,970	IR16US
PP0878	6,196,739	IR17US
PP0883	6,270,182	IR19US
PP0880	6,152,619	IR20US
PO8006	6,087,638	MEMS02US
PO8007	6,340,222	MEMS03US
PO8010	6,041,600	MEMS05US
PO8011	6,299,300	MEMS06US
PO7947	6,067,797	MEMS07US
PO7944	6,286,935	MEMS09US
PO7946	6,044,646	MEMS10US
PP0894	6,382,769	MEMS13US

TECHNICAL FIELD

The present invention relates to the field of inkjet printing and, in particular, discloses an inverted radial back-curling thermoelastic ink jet printing mechanism.

BACKGROUND

Many different types of printing mechanisms have been invented, a large number of which are presently in use. The known forms of printers have a variety of methods for marking the print media with a relevant marking media. Commonly used forms of printing include offset printing, laser printing and copying devices, dot matrix type impact printers, thermal paper printers, film recorders, thermal wax printers, dye sublimation printers and ink jet printers both of the drop on demand and continuous flow type. Each type of printer has its own advantages and problems when considering cost, speed, quality, reliability, simplicity of construction and operation etc.

In recent years the field of ink jet printing, wherein each individual pixel of ink is derived from one or more ink nozzles, has become increasingly popular primarily due to its inexpensive and versatile nature.

Many different techniques of ink jet printing have been invented. For a survey of the field, reference is made to an article by J Moore, “Non-Impact Printing: Introduction and Historical Perspective”, Output Hard Copy Devices, Editors R Dubeck and S Sherr, pages 207-220 (1988).

Ink Jet printers themselves come in many different forms. The utilization of a continuous stream of ink in ink jet printing appears to date back to at least 1929 wherein U.S. Pat. No. 1,941,001 by Hansell discloses a simple form of continuous stream electro-static ink jet printing.

U.S. Pat. No. 3,596,275 by Sweet also discloses a process of a continuous ink jet printing including a step wherein the ink jet stream is modulated by a high frequency electro-static field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also U.S. Pat. No. 3,373,437 by Sweet et al).

Piezoelectric ink jet printers are also one form of commonly utilized ink jet printing device. Piezoelectric systems are disclosed by Kyser et. al. in U.S. Pat. No. 3,946,398 (1970) which utilizes a diaphragm mode of operation, by Zolten in U.S. Pat. No. 3,683,212 (1970) which discloses a squeeze mode form of operation of a piezoelectric crystal, Stemme in U.S. Pat. No. 3,747,120 (1972) which discloses a bend mode of piezoelectric operation, Howkins in U.S. Pat. No. 4,459,601 which discloses a piezoelectric push mode actuation of the ink jet stream and Fischbeck in U.S. Pat. No. 4,584,590 which discloses a shear mode type of piezoelectric transducer element.

Recently, thermal ink jet printing has become an extremely popular form of ink jet printing. The ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979) and Vaught et al in U.S. Pat. No. 4,490,728. Both the aforementioned references disclose ink jet printing techniques which rely on the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media. Printing devices utilizing the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.

As can be seen from the foregoing, many different types of printing technologies are available. Ideally, a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction and operation, durability and consumables.

SUMMARY

According to an aspect of the present disclosure, a micro-electromechanical nozzle arrangement for an inkjet printhead includes a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel defined by the substrate, said substrate having a layer of CMOS drive circuitry; a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber; a plurality of actuators fast with and displaceable with respect to the roof structure, the actuators radially spaced about the nozzle rim between the guide rails, each actuator having a serpentine heater element configured to expand thermally upon receiving current from the drive circuitry thereby moving said actuators into the chamber and increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle, wherein each actuator is cantilevered to a heater element in a bendable manner; and a central arm which having metal and PTFE portions to provide structural support for the actuators.

BRIEF DESCRIPTION OF THE DRAWINGS

Notwithstanding any other forms which may fall within the scope of the present invention, preferred forms of the invention will now be described, by way of example only, with reference to the accompanying drawings in which:

FIGS. 1-3 are schematic sectional views illustrating the operational principles of the preferred embodiment;

FIG. 4(a) and FIG. 4(b) are again schematic sections illustrating the operational principles of the thermal actuator device;

FIG. 5 is a side perspective view, partly in section, of a single nozzle arrangement constructed in accordance with the preferred embodiments;

FIGS. 6-13 are side perspective views, partly in section, illustrating the manufacturing steps of the preferred embodiments;

FIG. 14 illustrates an array of ink jet nozzles formed in accordance with the manufacturing procedures of the preferred embodiment;

FIG. 15 provides a legend of the materials indicated in FIGS. 16 to 23; and

FIG. 16 to FIG. 23 illustrate sectional views of the manufacturing steps in one form of construction of a nozzle arrangement in accordance with the invention.

DESCRIPTION OF PREFERRED AND OTHER EMBODIMENTS

In the preferred embodiment, ink is ejected out of a nozzle chamber via an ink ejection port using a series of radially positioned thermal actuator devices that are arranged about the ink ejection port and are activated to pressurize the ink within the nozzle chamber thereby causing the ejection of ink through the ejection port.

Turning now to FIGS. 1, 2 and 3, there is illustrated the basic operational principles of the preferred embodiment. FIG. 1 illustrates a single nozzle arrangement 1 in its quiescent state. The arrangement 1 includes a nozzle chamber 2 which is normally filled with ink so as to form a meniscus 3 in an ink ejection port 4. The nozzle chamber 2 is formed within a wafer 5. The nozzle chamber 2 is supplied with ink via an ink supply channel 6 which is etched through the wafer 5 with a highly isotropic plasma etching system. A suitable etcher can be the Advance Silicon Etch (ASE) system available from Surface Technology Systems of the United Kingdom.

A top of the nozzle arrangement 1 includes a series of radially positioned actuators 8, 9. These actuators comprise a polytetrafluoroethylene (PTFE) layer and an internal serpentine copper core 17. Upon heating of the copper core 17, the surrounding PTFE expands rapidly resulting in a generally downward movement of the actuators 8, 9. Hence, when it is desired to eject ink from the ink ejection port 4, a current is passed through the actuators 8, 9 which results in them bending generally downwards as illustrated in FIG. 2. The downward bending movement of the actuators 8, 9 results in a substantial increase in pressure within the nozzle chamber 2. The increase in pressure in the nozzle chamber 2 results in an expansion of the meniscus 3 as illustrated in FIG. 2.

The actuators 8, 9 are activated only briefly and subsequently deactivated. Consequently, the situation is as illustrated in FIG. 3 with the actuators 8, 9 returning to their original positions. This results in a general inflow of ink back into the nozzle chamber 2 and a necking and breaking of the meniscus 3 resulting in the ejection of a drop 12. The necking and breaking of the meniscus 3 is a consequence of the forward momentum of the ink associated with drop 12 and the backward pressure experienced as a result of the return of the actuators 8, 9 to their original positions. The return of the actuators 8,9 also results in a general inflow of ink from the channel 6 as a result of surface tension effects and, eventually, the state returns to the quiescent position as illustrated in FIG. 1.

FIGS. 4(a) and 4(b) illustrate the principle of operation of the thermal actuator. The thermal actuator is preferably constructed from a material 14 having a high coefficient of thermal expansion. Embedded within the material 14 are a series of heater elements 15 which can be a series of conductive elements designed to carry a current. The conductive elements 15 are heated by passing a current through the elements 15 with the heating resulting in a general increase in temperature in the area around the heating elements 15. The position of the elements 15 is such that uneven heating of the material 14 occurs. The uneven increase in temperature causes a corresponding uneven expansion of the material 14. Hence, as illustrated in FIG. 4(b), the PTFE is bent generally in the direction shown.

In FIG. 5, there is illustrated a side perspective view of one embodiment of a nozzle arrangement constructed in accordance with the principles previously outlined. The nozzle chamber 2 is formed with an isotropic surface etch of the wafer 5. The wafer 5 can include a CMOS layer including all the required power and drive circuits. Further, the actuators 8, 9 each have a leaf or petal formation which extends towards a nozzle rim 28 defining the ejection port 4. The normally inner end of each leaf or petal formation is displaceable with respect to the nozzle rim 28. Each activator 8, 9 has an internal copper core 17 defining the element 15. The core 17 winds in a serpentine manner to provide for substantially unhindered expansion of the actuators 8, 9. The operation of the actuators 8, 9 is as illustrated in FIG. 4(a) and FIG. 4(b) such that, upon activation, the actuators 8 bend as previously described resulting in a displacement of each petal formation away from the nozzle rim 28 and into the nozzle chamber 2. The ink supply channel 6 can be created via a deep silicon back edge of the wafer 5 utilizing a plasma etcher or the like. The copper or aluminium core 17 can provide a complete circuit. A central arm 18 which can include both metal and PTFE portions provides the main structural support for the actuators 8, 9.

Turning now to FIG. 6 to FIG. 13, one form of manufacture of the nozzle arrangement 1 in accordance with the principles of the preferred embodiment is shown. The nozzle arrangement 1 is preferably manufactured using microelectromechanical (MEMS) techniques and can include the following construction techniques:

As shown initially in FIG. 6, the initial processing starting material is a standard semi-conductor wafer 20 having a complete CMOS level 21 to a first level of metal. The first level of metal includes portions 22 which are utilized for providing power to the thermal actuators 8, 9.

The first step, as illustrated in FIG. 7, is to etch a nozzle region down to the silicon wafer 20 utilizing an appropriate mask.

Next, as illustrated in FIG. 8, a 2 μm layer of polytetrafluoroethylene (PTFE) is deposited and etched so as to define vias 24 for interconnecting multiple levels.

Next, as illustrated in FIG. 9, the second level metal layer is deposited, masked and etched to define a heater structure 25. The heater structure 25 includes via 26 interconnected with a lower aluminium layer.

Next, as illustrated in FIG. 10, a further 2 μm layer of PTFE is deposited and etched to the depth of 1 μm utilizing a nozzle rim mask to define the nozzle rim 28 in addition to ink flow guide rails 29 which generally restrain any wicking along the surface of the PTFE layer. The guide rails 29 surround small thin slots and, as such, surface tension effects are a lot higher around these slots which in turn results in minimal outflow of ink during operation.

Next, as illustrated in FIG. 11, the PTFE is etched utilizing a nozzle and actuator mask to define a port portion 30 and slots 31 and 32.

Next, as illustrated in FIG. 12, the wafer is crystallographically etched on a <111> plane utilizing a standard crystallographic etchant such as KOH. The etching forms a chamber 33, directly below the port portion 30.

In FIG. 13, the ink supply channel 34 can be etched from the back of the wafer utilizing a highly anisotropic etcher such as the STS etcher from Silicon Technology Systems of United Kingdom. An array of ink jet nozzles can be formed simultaneously with a portion of an array 36 being illustrated in FIG. 14. A portion of the printhead is formed simultaneously and diced by the STS etching process. The array 36 shown provides for four column printing with each separate column attached to a different colour ink supply channel being supplied from the back of the wafer. Bond pads 37 provide for electrical control of the ejection mechanism.

In this manner, large pagewidth printheads can be fabricated so as to provide for a drop-on-demand ink ejection mechanism.

One form of detailed manufacturing process which can be used to fabricate monolithic ink jet printheads operating in accordance with the principles taught by the present embodiment can proceed utilizing the following steps:

• • 1. Using a double-sided polished wafer 60, complete a 0.5 micron, one poly, 2 metal CMOS process 61. This step is shown in FIG. 16. For clarity, these diagrams may not be to scale, and may not represent a cross section though any single plane of the nozzle. FIG. 15 is a key to representations of various materials in these manufacturing diagrams, and those of other cross referenced ink jet configurations.
  • 2. Etch the CMOS oxide layers down to silicon or second level metal using Mask 1. This mask defines the nozzle cavity and the edge of the chips. This step is shown in FIG. 16.
  • 3. Deposit a thin layer (not shown) of a hydrophilic polymer, and treat the surface of this polymer for PTFE adherence.
  • 4. Deposit 1.5 microns of polytetrafluoroethylene (PTFE) 62.
  • 5. Etch the PTFE and CMOS oxide layers to second level metal using Mask 2. This mask defines the contact vias for the heater electrodes. This step is shown in FIG. 17.
  • 6. Deposit and pattern 0.5 microns of gold 63 using a lift-off process using Mask 3. This mask defines the heater pattern. This step is shown in FIG. 18.
  • 7. Deposit 1.5 microns of PTFE 64.
  • 8. Etch 1 micron of PTFE using Mask 4. This mask defines the nozzle rim 65 and the rim at the edge 66 of the nozzle chamber. This step is shown in FIG. 19.
  • 9. Etch both layers of PTFE and the thin hydrophilic layer down to silicon using Mask 5. This mask defines a gap 67 at inner edges of the actuators, and the edge of the chips. It also forms the mask for a subsequent crystallographic etch. This step is shown in FIG. 20.
  • 10. Crystallographically etch the exposed silicon using KOH. This etch stops on <111> crystallographic planes 68, forming an inverted square pyramid with sidewall angles of 54.74 degrees. This step is shown in FIG. 21.
  • 11. Back-etch through the silicon wafer (with, for example, an ASE Advanced Silicon Etcher from Surface Technology Systems) using Mask 6. This mask defines the ink inlets 69 which are etched through the wafer. The wafer is also diced by this etch. This step is shown in FIG. 22.
  • 12. Mount the printheads in their packaging, which may be a molded plastic former incorporating ink channels which supply the appropriate color ink to the ink inlets 69 at the back of the wafer.
  • 13. Connect the printheads to their interconnect systems. For a low profile connection with minimum disruption of airflow, TAB may be used. Wire bonding may also be used if the printer is to be operated with sufficient clearance to the paper.
  • 14. Fill the completed print heads with ink 70 and test them. A filled nozzle is shown in FIG. 23.

The presently disclosed ink jet printing technology is potentially suited to a wide range of printing systems including: color and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers high speed pagewidth printers, notebook computers with inbuilt pagewidth printers, portable color and monochrome printers, color and monochrome copiers, color and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic “minilabs”, video printers, PHOTO CD (PHOTO CD is a registered trade mark of the Eastman Kodak Company) printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.

It would be appreciated by a person skilled in the art that numerous variations and/or modifications may be made to the present invention as shown in the specific embodiments without departing from the spirit or scope of the invention as broadly described. The present embodiments are, therefore, to be considered in all respects to be illustrative and not restrictive.

Claims

1. A micro-electromechanical nozzle arrangement for an inkjet printhead, said arrangement comprising:

a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel defined by the substrate, said substrate having a layer of CMOS drive circuitry;

a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber;

a plurality of actuators fast with and displaceable with respect to the roof structure, the actuators radially spaced about the nozzle rim between the guide rails, each actuator having a serpentine heater element configured to expand thermally upon receiving current from the drive circuitry thereby moving said actuators into the chamber and increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle, wherein each actuator is cantilevered to a heater element in a bendable manner; and

a central arm which having metal and PTFE portions to provide structural support for the actuators.

2. The nozzle arrangement of claim 1, further comprising a series of struts interspersed between the actuators to support the nozzle rim.

3. The nozzle arrangement of claim 1, wherein the serpentine heater element is made from gold.

4. The nozzle arrangement of claim 1, wherein the roof structure includes ink flow guide rails to minimize wicking along the nozzle rim according to surface tension effects of ink in the chamber.

5. The nozzle arrangement of claim 1, wherein the actuators include a polytetrafluoroethylene (PTFE) layer.

6. The nozzle arrangement of claim 1, wherein the ink supply channel is created by means of a deep silicon back etch of the substrate utilizing a plasma etcher.