EDGE BARRIER FILM FOR ELECTRONIC DEVICES
In some embodiments, a first product is provided. The first product may include a substrate, a device having a device footprint disposed over the substrate, and a barrier film disposed over the substrate and substantially along a side of the device footprint. The barrier film may comprise a mixture of a polymeric material and non-polymeric material. The barrier film may have a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint.
Latest Universal Display Corporation Patents:
Opto-electronic devices that make use of organic materials are becoming increasingly desirable for a number of reasons. Many of the materials used to make such devices are relatively inexpensive, so organic opto-electronic devices have the potential for cost advantages over inorganic devices. In addition, the inherent properties of organic materials, such as their flexibility, may make them well suited for particular applications such as fabrication on a flexible substrate. Examples of organic opto-electronic devices include organic light emitting devices (OLEDs), organic phototransistors, organic photovoltaic cells, and organic photodetectors. For OLEDs, the organic materials may have performance advantages over conventional materials. For example, the wavelength at which an organic emissive layer emits light may generally be readily tuned with appropriate dopants.
OLEDs make use of thin organic films that emit light when voltage is applied across the device. OLEDs are becoming an increasingly interesting technology for use in applications such as flat panel displays, illumination, and backlighting. Several OLED materials and configurations are described in U.S. Pat. Nos. 5,844,363, 6,303,238, and 5,707,745, which are incorporated herein by reference in their entirety.
One application for phosphorescent emissive molecules is a full color display. Industry standards for such a display call for pixels adapted to emit particular colors, referred to as “saturated” colors. In particular, these standards call for saturated red, green, and blue pixels. Color may be measured using CIE coordinates, which are well known to the art.
One example of a green emissive molecule is tris(2-phenylpyridine) iridium, denoted Ir(ppy)3, which has the structure of Formula I:
In this, and later figures herein, we depict the dative bond from nitrogen to metal (here, Ir) as a straight line.
As used herein, the term “organic” includes polymeric materials as well as small molecule organic materials that may be used to fabricate organic opto-electronic devices. “Small molecule” refers to any organic material that is not a polymer, and “small molecules” may actually be quite large. Small molecules may include repeat units in some circumstances. For example, using a long chain alkyl group as a substituent does not remove a molecule from the “small molecule” class. Small molecules may also be incorporated into polymers, for example as a pendent group on a polymer backbone or as a part of the backbone. Small molecules may also serve as the core moiety of a dendrimer, which consists of a series of chemical shells built on the core moiety. The core moiety of a dendrimer may be a fluorescent or phosphorescent small molecule emitter. A dendrimer may be a “small molecule,” and it is believed that all dendrimers currently used in the field of OLEDs are small molecules.
As used herein, “top” means furthest away from the substrate, while “bottom” means closest to the substrate. Where a first layer is described as “disposed over” a second layer, the first layer is disposed further away from substrate. There may be other layers between the first and second layer, unless it is specified that the first layer is “in contact with” the second layer. For example, a cathode may be described as “disposed over” an anode, even though there are various organic layers in between.
As used herein, “solution processible” means capable of being dissolved, dispersed, or transported in and/or deposited from a liquid medium, either in solution or suspension form.
A ligand may be referred to as “photoactive” when it is believed that the ligand directly contributes to the photoactive properties of an emissive material. A ligand may be referred to as “ancillary” when it is believed that the ligand does not contribute to the photoactive properties of an emissive material, although an ancillary ligand may alter the properties of a photoactive ligand.
As used herein, and as would be generally understood by one skilled in the art, a first “Highest Occupied Molecular Orbital” (HOMO) or “Lowest Unoccupied Molecular Orbital” (LUMO) energy level is “greater than” or “higher than” a second HOMO or LUMO energy level if the first energy level is closer to the vacuum energy level. Since ionization potentials (IP) are measured as a negative energy relative to a vacuum level, a higher HOMO energy level corresponds to an IP having a smaller absolute value (an IP that is less negative). Similarly, a higher LUMO energy level corresponds to an electron affinity (EA) having a smaller absolute value (an EA that is less negative). On a conventional energy level diagram, with the vacuum level at the top, the LUMO energy level of a material is higher than the HOMO energy level of the same material. A “higher” HOMO or LUMO energy level appears closer to the top of such a diagram than a “lower” HOMO or LUMO energy level.
As used herein, and as would be generally understood by one skilled in the art, a first work function is “greater than” or “higher than” a second work function if the first work function has a higher absolute value. Because work functions are generally measured as negative numbers relative to vacuum level, this means that a “higher” work function is more negative. On a conventional energy level diagram, with the vacuum level at the top, a “higher” work function is illustrated as further away from the vacuum level in the downward direction. Thus, the definitions of HOMO and LUMO energy levels follow a different convention than work functions.
More details on OLEDs, and the definitions described above, can be found in U.S. Pat. No. 7,279,704, which is incorporated herein by reference in its entirety.
BRIEF SUMMARY OF THE INVENTIONSome embodiments provided herein may comprise products, and methods of manufacturing products, that comprise a barrier film (i.e. an edge sealant film or layer) that may decrease the degradation of a device and protect sensitive components from ingress of environmental contaminants such as water vapor (e.g. the barrier film may be utilized in electronic devices that consist of atmosphere sensitive components, such as electrodes or organic layers). The barrier film may be used in conjunction with any form of top encapsulation (such as a thin film encapsulation or glass encapsulation) and may provide an edge seal to increase the shelf lifetime of the encapsulated device. Moreover, the barrier film that forms the edge seal may have dimensions that are smaller than traditional edge sealant layers, thereby reducing the size of the border area (dead space) of the product.
In some embodiments, a first product is provided. The first product may include a substrate, a device having a device footprint disposed over the substrate, and a barrier film disposed over the substrate and substantially along a side of the device footprint. The barrier film may comprise a mixture of a polymeric material and non-polymeric material. The barrier film may have a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint.
In some embodiments, in the first product as described above, the device footprint may comprise an active device area and an inactive device area. In some embodiments, the barrier film may have a perpendicular length that is less than or equal to 3.0 mm from the side of the inactive device area. In some embodiments, the barrier film may not extend to a distance of greater than 3.0 mm from a side of the active device area.
In some embodiments, in the first product as described above, the device footprint may comprise an active device area, and the barrier film may have a perpendicular length that is less than or equal to 3.0 mm from the side of the active device area.
In some embodiments, in the first product as described above, the barrier film may comprise a mixture of a polymeric silicon and inorganic silicon. In some embodiments, the mixture of polymeric silicon and inorganic silicon is substantially uniform across the layer.
In some embodiments, in the first product as described above, the barrier film may have a perpendicular length that is less than or equal to 2.0 mm from the side of the device footprint. In some embodiments, the barrier film may have a perpendicular length that is less than or equal to 1.0 mm from the side of the device footprint.
In some embodiments, in the first product as described above, the barrier film may not have a perpendicular length that is greater than 3.0 mm from the side of the device footprint. In some embodiments, the barrier film may not have a perpendicular length that is greater than 2.0 mm from the side of the device footprint. In some embodiments, the barrier film does not have a perpendicular length that is greater than 1.0 mm from the side of the device footprint.
In some embodiments, in the first product as described above, the barrier film may not have a perpendicular length that is greater than 3.0 mm or less than 1.0 mm from the side of the device footprint. In some embodiments, the barrier film may not have a perpendicular length that is greater than 2.0 mm or less than 0.5 mm from the side of the device footprint.
In some embodiments, in the first product as described above, the barrier film may comprise a substantially uniform material. In some embodiments, the barrier film may comprise a uniform material.
In some embodiments, in the first product as described above, the barrier film may comprise a mixture of an oxide and polymeric silicone. In some embodiments, the barrier film may comprise at least 40% inorganic silicon. In some embodiments, the barrier film may comprise at least 60% inorganic silicon. In some embodiments, the barrier film may comprise at least 80% inorganic silicon.
In some embodiments, in the first product as described above, a surface of the barrier film may be disposed adjacent to a surface of the substrate to form a first interface, and the ratio of the index of refraction of the bulk of the barrier film and the index of refraction of a portion of the barrier film that is within 10 nm of the interface is between 0.9993 and 0.9247.
In some embodiments, in the first product as described above, where a surface of the barrier film is disposed adjacent to a surface of the substrate to form a first interface, the index of refraction of a portion of the barrier film that is within 10 nm of the interface may be between 1.35 and 1.459.
In some embodiments, in the first product as described above, where a surface of the barrier film is disposed adjacent to a surface of the substrate to form a first interface, the barrier film may comprise a material having a bulk diffusion coefficient of water vapor of less than 10−13 cm2/sec. In some embodiments, the diffusion coefficient of water vapor at the first interface may be between 10−8 cm2/sec and 10−13 cm2/sec when exposed to an ambient temperate of 65° C. and relative humidity of 85%.
In some embodiments, in the first product as described above, where a surface of the barrier film is disposed adjacent to a surface of the substrate to form a first interface, the barrier film may comprise a material having a bulk diffusion coefficient of water vapor. The ratio of the bulk diffusion coefficient of water vapor of the barrier film and a diffusion coefficient of water vapor near the first interface may be between 1 and 10−5. In some embodiments, the ratio of the bulk diffusion coefficient of water vapor of the barrier film and a diffusion coefficient of water vapor within 10 nm of the first interface may be between 1 and 10−5.
In some embodiments, in the first product as described above, the device may further comprise a conductive layer disposed over the active device area. In some embodiments, a portion of the barrier film may be disposed at least partially over the conductive layer. In some embodiments, a portion of the barrier film may be disposed over the entire conductive layer.
In some embodiments, in the first product as described above where the device comprises a conductive layer disposed over the active device area, a top sealant layer may be disposed over the conductive layer. The top sealant layer and the barrier film may comprise different materials.
In some embodiments, in the first product as described above, the first product may comprise a border area (i.e. dead space). The border area may have a thickness that is less than 3.0 mm.
In some embodiments, in the first product as described above, where the first product comprises a border area, the border area may have a thickness that is less than 2.0 mm. In some embodiments, the border area may have a thickness that is less than 1.0 mm.
In some embodiments, the first product as described above may comprise a consumer device. In some embodiments, the first product may comprise anyone of: a solar cell, a thin film battery, an organic electronic device, a lighting panel or a lighting source having a lighting panel, a display or an electronic device having a display, a mobile phone, a notebook computer, a tablet computer, or a television.
In some embodiments, in the first product as described above, the device may comprise an organic layer. In some embodiments, the organic layer may comprise an electro-luminescent material. In some embodiments, the device may comprise an OLED.
In some embodiments, a first method may be provided. The first method may comprise the steps of providing a substrate having a device having a device footprint disposed over the substrate, and fabricating a barrier film over the substrate and substantially along a side of the device footprint, where the barrier film may be fabricated so as to have a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint.
In some embodiments, in the first method as described above, the device footprint may comprise an organic layer. In some embodiments, the organic layer may comprise an electroluminescent (EL) material. In some embodiments, the device may comprise an OLED.
In some embodiments, in the first method as described above, the barrier film may be fabricated so as to have a perpendicular length that is less than or equal to 2.0 mm from the side of the device footprint. In some embodiments, the barrier film may be fabricated so as to have a perpendicular length that is less than or equal to 1.0 mm from the side of the device footprint.
In some embodiments, in the first method as described above, the step of fabricating the barrier film may comprise chemical vapor deposition. In some embodiments, the step of fabricating the barrier film may utilize an organosilicon precursor.
In some embodiments, in the first method as decried above, the step of fabricating the barrier film so as to have a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint may comprise depositing the barrier film through a mask such that the perpendicular length is less than or equal to 3.0 mm from the side of the device footprint.
In some embodiments, in the first method as described above, the step of fabricating the barrier film so as to have a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint may comprise the steps of: depositing a barrier film over the substrate and substantially along a side of the device footprint, wherein the barrier film is deposited so as to have a perpendicular length that is greater than or equal to 3.0 mm from the side of the device footprint, and, after depositing the barrier film, breaking the barrier film such that the barrier film has a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint. In some embodiments, the step of breaking the barrier film may be accomplished by, or in combination with, breaking the substrate.
In some embodiments, a first product prepared by a process may be provided. The process for preparing the first product may comprise the steps of providing a substrate having a device disposed over the substrate, where the device has a device footprint, and fabricating a barrier film over the substrate and substantially along a side of the device footprint, where the barrier film may be fabricated so as to have a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint.
In some embodiments, in the first product prepared by a process as described above, the device may comprise an organic layer. In some embodiments, the organic layer may comprise an organic electroluminescent (EL) material. In some embodiments, the device may comprise an OLED.
In some embodiments, in the first product prepared by a process as described above, the barrier film may be fabricated so as to have perpendicular length that is less than or equal to 2.0 mm from the side of the device footprint. In some embodiments, the barrier film is fabricated so as to have perpendicular length that is less than or equal to 1.0 mm from the side of the device footprint.
In some embodiments, in the first product prepared by a process as described above, the step of fabricating the barrier film may comprises depositing the first barrier film using an organosilicon precursor. In some embodiments, the step of fabricating the barrier film may comprise chemical vapor deposition. In some embodiments, the step of fabricating the barrier film may comprise plasma enhance chemical vapor deposition (PE-CVD). In some embodiments, the barrier film consists essentially of a mixture of polymeric silicon and inorganic silicon, where the weight ratio of polymeric silicon to inorganic silicon is in the range of 95:5 to 5:95, and where the polymeric silicon and the inorganic silicon are created from the same precursor material. In some embodiments, at least an 0.1 μm thickness of the barrier film is deposited under the same reaction conditions for all the reaction conditions in the deposition process and the water vapor transmission rate is less than 10−6 g/m2/day through the at least 0.1 μm thickness of the barrier film.
In some embodiments, in the first product prepared by a process as described above, where the step of fabricating the barrier film comprises depositing the first barrier film using an organosilicon precursor, the precursor material may comprise hexamethyl disiloxane or dimethyl siloxane. In some embodiments, the precursor material may comprise a single organosilicon compound. In some embodiments, the precursor material may comprise a mixture of organosilicon compounds.
In some embodiments, in the first product prepared by a process as described above, the step of fabricating the barrier film may comprise depositing the barrier film through a mask such that the perpendicular length is less than or equal to 3.0 mm from the side of the device footprint. In some embodiments, the perpendicular length may be less than or equal to 1.0 mm from the side of the device footprint.
Generally, an OLED comprises at least one organic layer disposed between and electrically connected to an anode and a cathode. When a current is applied, the anode injects holes and the cathode injects electrons into the organic layer(s). The injected holes and electrons each migrate toward the oppositely charged electrode. When an electron and hole localize on the same molecule, an “exciton,” which is a localized electron-hole pair having an excited energy state, is formed. Light is emitted when the exciton relaxes via a photoemissive mechanism. In some cases, the exciton may be localized on an excimer or an exciplex. Non-radiative mechanisms, such as thermal relaxation, may also occur, but are generally considered undesirable.
The initial OLEDs used emissive molecules that emitted light from their singlet states (“fluorescence”) as disclosed, for example, in U.S. Pat. No. 4,769,292, which is incorporated by reference in its entirety. Fluorescent emission generally occurs in a time frame of less than 10 nanoseconds.
More recently, OLEDs having emissive materials that emit light from triplet states (“phosphorescence”) have been demonstrated. Baldo et al., “Highly Efficient Phosphorescent Emission from Organic Electroluminescent Devices,” Nature, vol. 395, 151-154, 1998; (“Baldo-I”) and Baldo et al., “Very high-efficiency green organic light-emitting devices based on electrophosphorescence,” Appl. Phys. Lett., vol. 75, No. 3, 4-6 (1999) (“Baldo-II”), which are incorporated by reference in their entireties. Phosphorescence is described in more detail in U.S. Pat. No. 7,279,704 at cols. 5-6, which are incorporated by reference.
More examples for each of these layers are available. For example, a flexible and transparent substrate-anode combination is disclosed in U.S. Pat. No. 5,844,363, which is incorporated by reference in its entirety. An example of a p-doped hole transport layer is m-MTDATA doped with F.sub.4-TCNQ at a molar ratio of 50:1, as disclosed in U.S. Patent Application Publication No. 2003/0230980, which is incorporated by reference in its entirety. Examples of emissive and host materials are disclosed in U.S. Pat. No. 6,303,238 to Thompson et al., which is incorporated by reference in its entirety. An example of an n-doped electron transport layer is BPhen doped with Li at a molar ratio of 1:1, as disclosed in U.S. Patent Application Publication No. 2003/0230980, which is incorporated by reference in its entirety. U.S. Pat. Nos. 5,703,436 and 5,707,745, which are incorporated by reference in their entireties, disclose examples of cathodes including compound cathodes having a thin layer of metal such as Mg:Ag with an overlying transparent, electrically-conductive, sputter-deposited ITO layer. The theory and use of blocking layers is described in more detail in U.S. Pat. No. 6,097,147 and U.S. Patent Application Publication No. 2003/0230980, which are incorporated by reference in their entireties. Examples of injection layers are provided in U.S. Patent Application Publication No. 2004/0174116, which is incorporated by reference in its entirety. A description of protective layers may be found in U.S. Patent Application Publication No. 2004/0174116, which is incorporated by reference in its entirety.
The simple layered structure illustrated in
Structures and materials not specifically described may also be used, such as OLEDs comprised of polymeric materials (PLEDs) such as disclosed in U.S. Pat. No. 5,247,190 to Friend et al., which is incorporated by reference in its entirety. By way of further example, OLEDs having a single organic layer may be used. OLEDs may be stacked, for example as described in U.S. Pat. No. 5,707,745 to Forrest et al, which is incorporated by reference in its entirety. The OLED structure may deviate from the simple layered structure illustrated in
Unless otherwise specified, any of the layers of the various embodiments may be deposited by any suitable method. For the organic layers, preferred methods include thermal evaporation, ink-jet, such as described in U.S. Pat. Nos. 6,013,982 and 6,087,196, which are incorporated by reference in their entireties, organic vapor phase deposition (OVPD), such as described in U.S. Pat. No. 6,337,102 to Forrest et al., which is incorporated by reference in its entirety, and deposition by organic vapor jet printing (OVJP), such as described in U.S. patent application Ser. No. 10/233,470, which is incorporated by reference in its entirety. Other suitable deposition methods include spin coating and other solution based processes. Solution based processes are preferably carried out in nitrogen or an inert atmosphere. For the other layers, preferred methods include thermal evaporation. Preferred patterning methods include deposition through a mask, cold welding such as described in U.S. Pat. Nos. 6,294,398 and 6,468,819, which are incorporated by reference in their entireties, and patterning associated with some of the deposition methods such as ink jet and OVJP. Other methods may also be used. The materials to be deposited may be modified to make them compatible with a particular deposition method. For example, substituents such as alkyl and aryl groups, branched or unbranched, and preferably containing at least 3 carbons, may be used in small molecules to enhance their ability to undergo solution processing. Substituents having 20 carbons or more may be used, and 3-20 carbons is a preferred range. Materials with asymmetric structures may have better solution processibility than those having symmetric structures, because asymmetric materials may have a lower tendency to recrystallize. Dendrimer substituents may be used to enhance the ability of small molecules to undergo solution processing.
Devices fabricated in accordance with embodiments of the invention may be incorporated into a wide variety of consumer products, including flat panel displays, computer monitors, televisions, billboards, lights for interior or exterior illumination and/or signaling, heads up displays, fully transparent displays, flexible displays, laser printers, telephones, cell phones, personal digital assistants (PDAs), laptop computers, digital cameras, camcorders, viewfinders, micro-displays, vehicles, a large area wall, theater or stadium screen, lighting fixtures, or a sign. Various control mechanisms may be used to control devices fabricated in accordance with the present invention, including passive matrix and active matrix. Many of the devices are intended for use in a temperature range comfortable to humans, such as 18 degrees C. to 30 degrees C., and more preferably at room temperature (20-25 degrees C.).
The materials and structures described herein may have applications in devices other than OLEDs. For example, other optoelectronic devices such as organic solar cells and organic photodetectors may employ the materials and structures. More generally, organic devices, such as organic transistors, may employ the materials and structures.
The terms halo, halogen, alkyl, cycloalkyl, alkenyl, alkynyl, arylkyl, heterocyclic group, aryl, aromatic group, and heteroaryl are known to the art, and are defined in U.S. Pat. No. 7,279,704 at cols. 31-32, which are incorporated herein by reference.
As used herein, the “active device area” of a device may refer to the portion of the device in which electrons, holes, and/or photons are generated or absorbed and may comprise one or more organic and/or semi-conductor materials (such as organic semi-conductors or doped silicon). For organic electronic devices, the active device area may comprise one or more organic layers. For example, the active device area of an OLED may refer to the emissive area of the device (i.e. the portion of the device that emits light) and may include an organic electro-luminescent material. The active device area of a solar cell may refer to the portion of the device where photons are absorbed and electrons are released (e.g. it may refer to the portion of the device that comprises a semi-conductor material). For a thin film battery, the active device area may refer to the electrolyte and may comprise, for example, lithium phosphorus oxynitride. These are just a few examples of active device areas of exemplary devices, and it should be appreciated that embodiments disclosed herein are not so limited.
As used herein, a “barrier film” or “barrier layer” may refer to a layer of material that may be utilized to decrease the permeation of gases, vapors, and/or moisture (or other environmental particulates) into the active device area of the device so as to increase lifetime and/or reduce performance degradation. In some embodiments, the barrier film may comprise a hybrid layer comprising a mixture of a polymeric material and a non-polymeric material. As used herein, the term “non-polymeric” refers to a material made of molecules having a well-defined chemical formula with a single, well-defined molecular weight. A “nonpolymeric” molecule can have a significantly large molecular weight. In some circumstances, a non-polymeric molecule may include repeat units. As used herein, the term “polymeric” refers to a material made of molecules that have repeating subunits that are covalently linked, and that has a molecular weight that may vary from molecule to molecule because the polymerizing reaction may result in different numbers of repeat units for each molecule. For example, in some embodiments, the barrier film may comprise a mixture of polymeric silicon and inorganic silicon. Examples of barrier films are described in more detail below.
As used herein, the “border area” (i.e. dead space) of the device may comprise the combination of the “inactive device area” and the “non-device edge area.” As used in this context, the “thickness” of the border area may refer to the distance from the device footprint to the edge of the border area (which may also comprise the edge of the substrate in some embodiments) in a direction that is perpendicular to a side of the device footprint.
As used herein, the term “comprising” is not intended to be limiting, but may be a transitional term synonymous with “including,” “containing,” or “characterized by.” The term “comprising” may thereby be inclusive or open-ended and does not exclude additional, unrecited elements or method steps when used in a claim. For instance, in describing a method, “comprising” indicates that the claim is open-ended and allows for additional steps. In describing a device, “comprising” may mean that a named element(s) may be essential for an embodiment, but other elements may be added and still form a construct within the scope of a claim. In contrast, the transitional phrase “consisting of” excludes any element, step, or ingredient not specified in a claim. This is consistent with the use of the term throughout the specification.
As used herein, the “inactive device area” of a device may refer to portions of the device that comprises one or more layers of materials (such as organic layers) that are also included in the active area, but which does not comprise a part of the device where electrons, holes, and/or photons are generated or absorbed (i.e. it is not a part of the active device area of the device). For example, with regard to an OLED, the inactive device area may include one or more organic layers and/or a portion of an electrode, but this portion of the device may not include one or more of the other organic layers (or one or more electrodes) and therefore does not emit light. The inactive device area is often, but not always, the result of depositing an organic layer so as to extend beyond the edges of one of the electrodes to prevent or reduce the likelihood of shorting. In some instances, an insulating layer (e.g. “grid layer”) may be disposed over the substrate and a portion of an electrode so as to electrically insulate the conductive layers of the device (see, e.g.,
As used herein, the “device footprint” may refer to the total area of the “active device area” of the device and the “inactive device area” of the device. With reference to an organic device for illustration purposes, the device footprint may refer to the portion of the device in which one or more organic layers (i.e. the organic footprint) and/or one or more insulating grid layers are disposed over the substrate.
As used herein, a “non-device edge area” may refer to the area around the device footprint—that is, the portion of a product that does not include the “active device area” or the “inactive device area” of the device. For example, the non-device edge area may not comprise one or more of the layers that of the active device area of the device. With reference to organic electronic devices, the non-device edge area may refer to the portion of product that typically does not comprise an organic layer or an insulating layer (such as a grid layer that is disposed over one of the electrodes of the OLED). For instance, the non-device edge area may refer to the non-emitting areas of the OLED that do not comprise a part of the inactive device area. The non-device edge area may include the portions of the product in which one or more barrier films or layers are disposed along a side of the device footprint.
As used herein, the “perpendicular length” of the barrier film may refer to the distance from a portion of the barrier film that is disposed closest to the device footprint (e.g. adjacent to the active device area or inactive device area) to another portion of the barrier film that is disposed farthest away from the device footprint (e.g. an edge of the barrier film) in a direction that is perpendicular to the side of the device footprint and parallel to the surface of the substrate that the barrier film is disposed over. In other words, the perpendicular length may be a measure of the distance that the barrier film extends away from the device footprint (i.e. the footprint of the barrier film beyond the device footprint). The reason for utilizing the “side” of the device footprint as determining the perpendicular length is to generally exclude the corner effects, where the length of the barrier film may vary because of the shape of the device footprint. Thus, in general, the perpendicular length may correspond to the length of the barrier film disposed so as to provide resistance to the horizontal ingress of moisture (and other contaminants) into the active device area. In some embodiments, the perpendicular length may also correspond to the length of the barrier film adjacent to the substrate; however, embodiments are not limited such as when one or more conductive layers may extend beyond the device footprint (e.g. to make electrical connections), examples of which are illustrated in
It should be noted that although embodiments described below may make reference to organic devices such as OLEDs, embodiments are not so limited. The inventors have found that barrier films comprising a mixture of a polymeric material and a non-polymeric material as an edge sealant may be generally used in any thin film electronic device, particularly those that may have a component (or components) that is sensitive to environmental permeants such as water vapor. Moreover, the inventors have found that the exemplary barrier film may be used as an edge sealant having a perpendicular length (as described above) that is less than 3.0 mm (preferably less than 2.0 mm; and more preferably less than 1.0 mm) while still providing adequate device performance and lifetime. This reduction in the size of the edge sealant may reduce the size of the non-active edge areas of such devices and thereby potentially reduce the border area and/or the overall size of a product (such as an electronic device) that comprises the exemplary barrier film as an edge sealant.
In general, electronic devices having moisture sensitive electronic components (such as water vapor sensitive electrodes) may degrade upon storage because of the atmospheric conditions. The degradation may be in the form of dark spots caused by the ingress of water vapor and oxygen vertically through the bulk of a thin film encapsulation (TFE) (or through particles embedded in the TFE), or by the ingress of water vapor and oxygen horizontally through the edge of the TFE. The TFE may also be referred to herein as a barrier layer or barrier film. The edge ingress of the water vapor typically occurs either via the horizontal permeation of the permeants (e.g. water vapor molecules) through the TFE itself (see, e.g.,
Previous edge seals that were widely in use utilized multilayer barriers. For example, many devices comprised multilayer barriers that consisted of alternate layers of inorganic and polymer films. These barriers work on the principle of delaying the permeant molecules from reaching the device by forming a long and tortuous diffusion path. Some examples of these multilayer barriers will be described below.
One of the prior methods for encapsulating a device with a multilayer barrier utilizes the same mask for both the inorganic and the polymer films; however, the size of the mask is larger than the footprint of a device so as to provide some edge ingress barrier (and also to allow for mask alignment tolerance). Assuming an alignment tolerance of 500 μm (which is reasonable for most fabrication processes) for both the device mask (e.g. the mask that may be used to deposit the layers that forth the active device area, inactive device area, and/or other components such as electrodes) and the encapsulation mask (e.g. the mask used to deposit the inorganic and the polymer films), this implies that the encapsulation mask should be about 1.0 mm larger than the device mask so as to prevent any device exposure when both the deposition of the device and the alignment of the encapsulation mask is off in the worst case scenario. It may also be assumed that the thickness of the inorganic film of the multilayer barrier is about 50 nm, and the thickness of the polymer film of multilayer barrier is about 800 nm, as is typically the case for such devices.
The value of the diffusion constant of water vapor in polyacrylate polymer (a commonly used encapsulation material) at 25° C. can be calculated by using the diffusion constant (“D”) of polyacrylate polymer at 38° C. as calculated by G. L. Graff, R. E. Williford, and P. E. Burrows, Mechanisms of vapor permeation through multilayer barrier films: Lag time versus equilibrium permeation, J. Appl. Phys., 96 (4), pp. 1840-1849 (2004) (i.e. the diffusion constant (D) at 38° C.˜8.5×10−9 cm2/sec), which is incorporated herein by reference in its entirety, and utilizing the activation energy of water vapor in such a polymer as was calculated by Z. Chen, Q. Gu, H. Zou, T. Zhao, H. WANG, Molecular Dynamics Simulation of Water Diffusion Inside an Amorphous Polyacrylate Latex Film, Journal of Polymer Science: Part B: Polymer Physics, Vol. 45, 884-891 (2007) (found to be approximately equal to 13 kJ/mole), which is also incorporated herein by reference in its entirety. In this manner, the diffusion constant of water vapor in polyacrylate polymer at 25° C. can be estimated to be ˜6.8×10−9 cm2/sec. Using this diffusion constant, the lag time of water vapor diffusion through Path-1 (304) for the device 300 shown in
Another approach using a multilayer barrier to encapsulate the device of a product is shown in
Yet another approach using a multilayer barrier design for a product is shown in
However, even though the thickness of the polymer film per unit stack in the horizontal direction (typically ˜1.0 mm each as shown in
Although two ingress paths were described above—i.e. horizontal Path-1 (504) and vertical Path-3 (507)—there is another potential ingress path for permeants (Path-2 shown by the arrow 505). Path-2 (505) corresponds to water vapor permeation along the interface of the inorganic film with the substrate 510. However, even if the interface permeation along Path-2 (505) for the inorganic film is worse than bulk permeation in the inorganic film, the length of the ingress path is rather large across the interface (e.g. approximately 5.0 mm as shown in
The inventors have discovered a barrier film material that comprises a mixture of a polymeric material and a non-polymeric material that can be used as an edge sealant. It should be noted that, in general, the barrier film comprising a mixture of a polymeric material and a non-polymeric material when used as an edge sealant can also be used in conjunction with a, for example, single layer barrier (i.e. a single layer barrier film), multilayer barrier (e.g. using multiple barrier layers comprising different materials), or glass encapsulation and epoxy. This barrier film 606 functioning as an edge sealant may be deposited in any suitable manner, including through the use of a single chamber PE-CVD system.
A cross-section of the barrier film 606 that comprises a mixture of a polymeric material and a non-polymeric on a product 600 is shown in
As was described above, with reference to
The inventors have tested an exemplary barrier film comprising a mixture of a polymeric material and a non-polymeric material when used as the top encapsulation layer and found that OLEDs encapsulated with this exemplary barrier film operate at 100% performance (i.e. with no degradation based on environmental conditions) for more than 500 hrs of storage at 85° C. and 85% RH.
The inventors then tested the exemplary barrier film's edge sealing ability by using different perpendicular lengths (i.e. edge lengths or footprints, such as (l) shown in
The exemplary devices tested in
As was noted above, the horizontal bulk permeation across a 1.0 mm length of the exemplary barrier film comprising a mixture of a polymeric material and a non-polymeric material would likely not be possible in such a short duration of time. Therefore, the edge degradation of these exemplary devices, which was generally held at acceptable levels for approximately 1,000 hrs, is likely the result of ingress at the interface (i.e. the ingress across the interface between the barrier film and the substrate across Path-2 discussed above). By further using the lag time calculation, the interface diffusion coefficient for water vapor for this particular exemplary barrier film comprising a mixture of a polymeric material and a non-polymeric material (as used on test devices tested in
The inventors have further found that the interface diffusion coefficient for products utilizing a barrier film comprising a mixture of a polymeric material and a non-polymeric material as an edge seal may be controlled in some instance by applying one or more techniques. For example, one such technique may be to change the nucleation density. The nucleation density is the thin film growth technique that determines the thickness by which the growing film becomes dense and coherent. In general, before the film becomes dense it remains porous, and hence permeable. The refractive index of the film prior to it becoming completely dense and coherent will be lower than that of the bulk film. L. S. Pan, D. R. Kania, Diamond: Electronic Properties and Applications, Springer, pp. 104-107, (1995), which is incorporated herein by reference in its entirety, describes that the nucleation density is inversely proportional to the square of film thickness by which a film becomes dense. That means that to form a coherent and continuous film of thickness (d), the nucleation density (Nd)˜1/d2. Thus, for a nucleation density of 1010 cm−2, the film would become continuous when it reaches 100 nm.
In another similar experiment, the results of which are shown in
The exemplary devices tested in
In the exemplary devices described above, the barrier film that was deposited used HMDSO as the deposition precursor gas and oxygen as the non-deposition gas (i.e. a gas which will not deposit any film when run through the plasma by itself) in a PE-CVD system. However, as described in more detail below, other siloxanes or silazanes (or organosilicons in general), for example, can be used as precursors. The exemplary barrier film may be an intimate mixture of oxide with a little residual silicone, which may be unoxidized precursor. The refractive index for the exemplary barrier film may be a measure of its composition and to some extent density. A refractive index close to that of thermal SiO2 would mean the film is more oxide like with high density. Exemplary deposition process and conditions and similar considerations are known in the art based patent applications U.S. Pat. No. U.S. Prov. Ser. No. 61/086,047 and U.S. Pat. No. 7,968,146, which are each herein incorporated by reference in their entireties. With increased nucleation density, even a thinner film may become continuous. Nucleation density can be controlled by various factors, such as deposition power, pressure, substrate temperature, and gas flow rates and ratio. Performing some surface treatment before the actual film deposition may also affect the interface. For examples, nitrogen plasma may leave some nitride bonds on the surface of a substrate and then a growing thin film may bond better to those bonds rather than with the substrate directly.
Composition and Fabrication of Exemplary Barrier FilmProvided below are exemplary compositions (and methods of fabricating such compositions) of barrier film molecules and materials that may be used as an edge sealant in some embodiments as described above. In this regard, exemplary embodiments of materials (and deposition processes) that may be used as an edge sealant are described in detail in U.S. Pat. No. 7,968,146 entitled “Hybrid Layers for Use in Coatings on Electronic Devices or Other Articles,” which is hereby incorporated by references in its entirety for all purposes. The inventors have found that the materials and methods described in U.S. Pat. No. 7,968,146, some of which are provided below, may provide a barrier film that may be preferred for use as an edge sealant for electronic devices. However, embodiments are not necessarily limited to the molecules and methods described therein.
In this regard, and as was noted above, in some embodiments, the barrier film may comprise a hybrid layer comprising a mixture of a polymeric material and a non-polymeric material. The hybrid layer may have a single phase or multiple phases.
As used herein, the term “non-polymeric” may refer to a material made of molecules having a well-defined chemical formula with a single, well-defined molecular weight. A “nonpolymeric” molecule may have a significantly large molecular weight. In some circumstances, a non-polymeric molecule may include repeat units. As used herein, the term “polymeric” may refer to a material made of molecules that have repeating subunits that are covalently linked, and that has a molecular weight that may vary from molecule to molecule because the polymerizing reaction may result in different numbers of repeat units for each molecule. Polymers may include, but are not limited to, homopolymers and copolymers such as block, graft, random, or alternating copolymers, as well as blends and modifications thereof. Polymers include, but are not limited to, polymers of carbon or silicon.
As used herein, a “mixture of a polymeric material and a non-polymeric material” may refer to a composition that one of ordinary skill in the art would understand to be neither purely polymeric nor purely non-polymeric. The term “mixture” is intended to exclude any polymeric materials that contain incidental amounts of non-polymeric material (that may, for example, be present in the interstices of polymeric materials as a matter of course), but one of ordinary skill in the art would nevertheless consider to be purely polymeric. Likewise, this is intended to exclude any non-polymeric materials that contain incidental amounts of polymeric material, but one of ordinary skill in the art would nevertheless consider to be purely non-polymeric. In some cases, the weight ratio of polymeric to non-polymeric material in the hybrid layer is in the range of 95:5 to 5:95, and preferably in the range of 90:10 to 10:90, and more preferably, in the range of 25:75 to 10:90.
The polymeric/non-polymeric composition of a layer may be determined using various techniques, including wetting contact angles of water droplets, IR absorption, hardness, and flexibility. In certain instances, the hybrid layer has a wetting contact angle in the range 30° to 85°, and preferably, in the range of 30° to 60°, and more preferably, in the range of 36° to 60°. Note that the wetting contact angle is a measure of composition if determined on the surface of an as-deposited film. Because the wetting contact angle can vary greatly by post-deposition treatments, measurements taken after such treatments may not accurately reflect the layer's composition. It is believed that these wetting contact angles are applicable to a wide range of layers formed from organo-silicon precursors. In certain instances, the hybrid layer has a nano-indentation hardness in the range 3 to 20 GPa, and preferably, in the range of 10 to 18 GPa. In certain instances, the hybrid layer has a surface roughness (root-mean-square) in the range of 0.1 nm to 10 nm, and preferably, in the range of 0.2 nm to 0.35 nm. In certain instances, the hybrid layer, when deposited as a 4 mm thick layer on a 50 mm thick polyimide foil substrate, is sufficiently flexible that no microstructural changes are observed after at least 55,000 rolling cycles on a 1 inch diameter roll at a tensile strain (e) of 0.2%. In certain instances, the hybrid layer is sufficiently flexible that no cracks appear under a tensile strain (e) of at least 0.35% (typically a tensile strain level which would normally crack a 4 mm pure silicon oxide layer, as considered by a person of ordinary skill in the art).
It should be noted that the term “mixture” is intended to include compositions having a single phase as well as compositions having multiple phases. Therefore, a “mixture” excludes subsequently deposited alternating polymeric and non-polymeric layers. Put another way, to be considered a “mixture,” a layer should be deposited under the same reaction conditions and/or at the same time.
The hybrid layer may be formed by chemical vapor deposition using a single precursor material (e.g. from a single source or multiple sources). As used herein, a “single source” of precursor material may refer to a source that provides all the precursor materials that are necessary to form both the polymeric and non-polymeric materials when the precursor material is deposited by CVD, with or without a reactant gas. This is intended to exclude methods where the polymeric material is formed using one precursor material, and the non-polymeric material is formed using a different precursor material. As would be appreciated by one of skill in the art, a “single source” of precursor material may include one or more containers (e.g. crucibles) that may be used during the process to heat or mix the chemicals that may form or contain a single precursor material. For instance, a single precursor material may be mixed or located in a plurality of containers and then vapor deposited. In general, by using a single precursor material, the deposition process may be simplified. For example, a single precursor material will obviate the need for separate streams of precursor materials and the attendant need to supply and control the separate streams.
In general, the precursor material may be a single compound or a mixture of compounds. Where the precursor material is a mixture of compounds, in some cases, each of the different compounds in the mixture is, by itself, able to independently serve as a precursor material. For example, the precursor material may be a mixture of hexamethyl disiloxane (HMDSO) and dimethyl siloxane (DMSO). Other precursors may also be utilized such as tetraethoxysilane (TEOS) or dimethyl siloxane (DMSO) or octamethylcyclotetrasiloxane orhexamethyldisilazane or other organosilanes or organosiloxanes and organosilazanes or their mixtures.
In some cases, plasma-enhanced CVD (PE-CVD) may be used for deposition of the hybrid layer. PE-CVD may be desirable for various reasons, including low temperature deposition, uniform coating formation, and controllable process parameters. Various PE-CVD processes that are suitable for use in forming a hybrid layer that may comprise a barrier layer for an edge sealant are known in the art, including those that use RF energy to generate the plasma.
The precursor material may be a material that is capable of forming both a polymeric material and a non-polymeric material when deposited by chemical vapor deposition. Various such precursor materials are suitable for use in providing a barrier film comprising a hybrid layer and may be chosen for their various characteristics. For example, a precursor material may be chosen for its content of chemical elements, its stoichiometric ratios of the chemical elements, and/or the polymeric and non-polymeric materials that are formed under CVD. For instance, organo-silicon compounds, such as siloxanes, are a class of compounds suitable for use as the precursor material. Representative examples of siloxane compounds include hexamethyl disiloxane (HMDSO) and dimethyl siloxane (DMSO). When deposited by CVD, these siloxane compounds are able to form polymeric materials, such as silicone polymers, and non-polymeric materials, such as silicon oxide. The precursor material may also be chosen for various other characteristics such as cost, non-toxicity, handling characteristics, ability to maintain liquid phase at room temperature, volatility, molecular weight, etc.
Other organo-silicon compounds suitable for use as a precursor material include methylsilane; dimethylsilane; vinyl trimethylsilane; trimethylsilane; tetramethylsilane; ethylsilane; disilanomethane; bis(methylsilano)methane; 1,2-disilanoethane; 1,2-bis(methylsilano)ethane; 2,2-disilanopropane; 1,3,5-trisilano-2,4,6-trimethylene, and fluorinated derivatives of these compounds. Phenyl-containing organo-silicon compounds suitable for use as a precursor material include: dimethylphenylsilane and diphenylmethylsilane. Oxygen containing organo-silicon compounds suitable for use as a precursor material include: dimethyldimethoxysilane; 1,3,5,7-tetramethylcyclotetrasiloxane; 1,3-dimethyldisiloxane; 1,1,3,3-tetramethyldisiloxane; 1,3-bis(silanomethylene)disiloxane; bis(1-methyldisiloxanyl)methane; 2,2-bis(1-methyldisiloxanyl)propane; 2,4,6,8-tetramethylcyclotetrasiloxane; octamethylcyclotetrasiloxane; 2,4,6,8,10-pentamethylcyclopentasiloxane; 1,3,5,7-tetrasilano-2,6-dioxy-4,8-dimethylene; hexamethylcyclotrisiloxane; 1,3,5,7,9-pentamethylcyclopentasiloxane; hexamethoxydisiloxane, and fluorinated derivatives of these compounds. Nitrogen-containing organosilicon compounds suitable for use as a precursor material include: hexamethyldisilazane; divinyltetramethyldisilizane; hexamethylcyclotrisilazane; dimethylbis(N-methylacetamido) silane; dimethylbis-(N-ethylacetamido)silane; methylvinylbis(N-methylacetamido)silane; methylvinylbis(Nbutylacetamido) silane; methyltris(N-phenylacetamido) silane; vinyltris(N-ethylacetamido)silane; tetrakis(Nmethylacetamido)silane; diphenylbis(diethylaminoxy)silane; methyltris(diethylaminoxy)silane; and bis(trimethylsilyl)carbodiimide.
When deposited by CVD, the precursor material may form various types of polymeric materials in various amounts, depending upon the type of precursor material, the presence of any reactant gases, and other reaction conditions. The polymeric material may be inorganic or organic. For example, where organo-silicon compounds are used as the precursor material, the deposited hybrid layer may include polymer chains of Si—O bonds, Si—C bonds, or Si—O—C bonds to form polysiloxanes, polycarbosilanes, and polysilanes, as well as organic polymers.
When deposited by CVD, the precursor material may form various types of non-polymeric materials in various amounts, depending upon the type of precursor material, the presence of any reactant gases, and other reaction conditions. The non-polymeric material may be inorganic or organic. For example, where organo-silicon compounds are used as the precursor material in combination with an oxygen-containing reactant gas, the non-polymeric material may include silicon oxides, such as SiO, SiO2, and mixed-valence oxides SiOx. When deposited with a nitrogen-containing reactant gas, the non-polymeric material may include silicon nitrides (SiNx). Other non-polymeric materials that may be formed in some instances include silicon oxycarbide and silicon oxynitrides.
When using PE-CVD, the precursor material may be used in conjunction with a reactant gas that reacts with the precursor material in the PE-CVD process. The use of reactant gases in PE-CVD is known in the art and various reactant gases are suitable for use in the present invention, including oxygen containing gases (e.g., 02, ozone, water) and nitrogen-containing gases (e.g., ammonia). The reactant gas may be used to vary the stoichiometric ratios of the chemical elements present in the reaction mixture. For example, when a siloxane precursor material is used with an oxygen or nitrogen-containing reactant gas, the reactant gas will change the stoichiometric ratios of oxygen or nitrogen in relation to silicon and carbon in the reaction mixture. This stoichiometric relation between the various chemical elements (e.g., silicon, carbon, oxygen, nitrogen) in the reaction mixture may be varied in several ways. One way is to vary the concentration of the precursor material or the reactant gas in the reaction. Another way is to vary the flow rates of the precursor material or the reactant gas into the reaction. Another way is to vary the type of precursor material or reactant gas used in the reaction.
Changing the stoichiometric ratios of the elements in the reaction mixture can affect the properties and relative amounts of the polymeric and non-polymeric materials in the deposited hybrid layer. For example, a siloxane gas may be combined with varying amounts of oxygen to adjust the amount of non-polymeric material relative to the polymeric material in the hybrid layer. By increasing the stoichiometric ratio of oxygen in relation to the silicon or carbon, the amount of non-polymeric material, such as silicon oxides, may be increased. Similarly, by reducing the stoichiometric ratio of oxygen, the amount of silicon and carbon-containing polymeric material may be increased. The composition of the hybrid layer may also be varied by adjusting other reaction conditions. For example, in the case of PE-CVD, process parameters such as RF power and frequency, deposition pressure, deposition time, and gas flow rates can be varied.
Thus, by using the exemplary methods as described above, it is possible to form a hybrid layer of hybrid polymeric/non-polymeric character and having characteristics suitable for use in various applications, particular as a barrier film to reduce edge ingress of permeates. Such characteristics of the barrier film may include optical transparency (e.g., in some cases, the hybrid layer may be optically transparent or semi-transparent), impermeability, flexibility, thickness, adhesion, and other mechanical properties. For example, one or more of these characteristics may be adjusted by varying the weight % of polymeric material in the hybrid layer, with the remainder being non-polymeric material. For instance, to achieve a desired level of flexibility and impermeability, the wt % of polymeric material may preferably be in the range of 5 to 95%, and more preferably in the range of 10 to 25%. However, other ranges are also possible depending upon the application.
Exemplary EmbodimentsDescribed below are exemplary embodiments of products that comprise a barrier film comprising a mixture of a polymeric material and a non-polymeric material as an edge sealant. The embodiments described herein are for illustration purposes only and are not thereby intended to be limiting. After reading this disclosure, it may be apparent to a person of ordinary skill in the art that various components and/or features as described below may be combined or omitted in certain embodiments, while still practicing the principles described herein.
In some embodiments, a first product is provided. The first product may include a substrate, a device having a device footprint disposed over the substrate, and a barrier film disposed over the substrate and substantially along a side of the active area. The barrier film may comprise a mixture of a polymeric material and non-polymeric material. The barrier film may have a perpendicular length that is less than or equal to 3 mm from the side of the device footprint.
As described above, the “perpendicular length” of the barrier film may refer to the distance from a portion of the barrier film that is disposed closest to the footprint of the device (e.g. adjacent to the active device area or inactive device area) to another portion of the barrier film that is disposed farthest away from the device footprint (e.g. the edge of the barrier film) in a direction that is perpendicular to the side of the device footprint and parallel to the surface of the substrate that the barrier film is disposed over.
As used in this context, “substantially along a side” of the device footprint does not necessarily require that the barrier film be disposed directly adjacent to the device footprint. Moreover, this does not preclude the barrier film from being disposed in other locations relative to the device, including embodiments where a portion of the barrier film may be disposed over one or more layers (such as a cathode, electron transport layer, hole transport layer, etc. of an OLED) of the device.
The use of the term “a perpendicular length” in the phrase “a barrier film may have a perpendicular length” is generally meant to cover embodiments where one portion of the barrier film may be deposited or otherwise fabricated so as to have a perpendicular length that is greater than 3.0 mm, so long as the edge of any portion of the barrier film is disposed so as at have a perpendicular distance that is less than 3.0 mm from a side of the footprint of the device. As was described above, the lifetime and performance of a device based on the ingress of contamination by outside particulates typically depends on the shortest or lease resistive path of ingress into the sensitive components of a device. The barrier film provided herein may be utilized such that the shortest part of horizontal ingress may be less than 3.0 mm (preferably less than 2.0 mm, and more preferably less than 1.0 mm).
In general, products that reduce the size of the barrier film that forms the edge seal (i.e. that reduce the perpendicular length) may provide for a reduction in the amount of border area (e.g. “dead space”) of the device. Moreover, through the use of exemplary barrier film materials, embodiments provided herein may reduce the size of the non-active edge area without substantially affecting device performance or degradation. The exemplary barrier film may restrict both horizontal bulk permeation and permeation across the interface between the barrier film and the substrate. Reducing the non-active edge area of a device created by an edge seal may provide additional space for other electronic components of the device, larger displays, a reduction in the border area between emitting devices (which may make such areas less noticeable when, for instance, multiple displays or panels are tiled), or otherwise increase the efficiency of manufacturing or layout of such devices. Moreover, embodiments that utilize a single barrier film layer (e.g. that may be deposited in a single deposition step) to encapsulate the device may provide a more efficient and less time consuming fabrication process in comparison to products that utilize multilayer barriers (such as those described above with reference to
In some embodiments, in the first product as described above, the device footprint may comprise an active device area and an inactive device area. In some embodiments, the barrier film may have a perpendicular length that is less than or equal to 3.0 mm from the side of the inactive device area. That is, the barrier film may be disposed so as to be adjacent to a side of the inactive device area and extend in a direction perpendicular to the side of the inactive area (and thereby the side of the device footprint of the device) by less than 3.0 mm (preferably less than 2.0 mm, and more preferably less than 1.0 mm). In some embodiments, the barrier film may not extend to a distance of greater than 3.0 mm from a side of the active device area. That is, in some instances, the barrier film may not be disposed adjacent to the side of the active device area (e.g. because the active device area may be surrounded by inactive device area) and thereby the perpendicular length of the barrier film may not correspond to the distance that the edge of the barrier film is disposed away from the side of the active device area. In some such embodiments, the total distance of the perpendicular length of the barrier film and the thickness of the inactive device area may be less than 3.0 mm from a side of the active area (preferably less than 2.0 mm; and more preferably less than 1.0 mm). In this manner, the border area of the device may be less than 3.0 mm (preferably less than 2.0 mm and more preferably less than 1.0 mm).
In some embodiments, in the first product as described above, the device footprint may comprise an active device area, and the barrier film may have a perpendicular length that is less than or equal to 3.0 mm from the side of the active device area (preferably less than 2.0 mm and more preferably less than 1.0 mm). That is, in some embodiments, the device may not comprise an inactive device area (or at least a portion of the device may not comprise an inactive device area), and thereby the barrier film may extend from the side of the active device area.
Examples of these concepts are illustrated in
The device further comprises organic layers 1545 that are partially disposed within the active device area 1550 and the inactive device area 1551 of the device. The device further comprises a grid layer 1546 (which could comprise organic or inorganic material) that is shown as comprising a part of the inactive device area 1551, and a barrier film 1506 that is shown as comprising the non-device edge area 1553, as well as being disposed over the device and portions of the anode contact 1541 and cathode contact 1544. The non-device edge area 1553 and the inactive device area 1551 are shown as comprising the border (dead space) area 1552.
With reference to
As shown in
With reference to
It should be noted that some of the additional detail and components shown in
In some embodiments, in the first product as described above, the barrier film may comprise a mixture of a polymeric silicon and inorganic silicon. The “mixture of polymeric silicon and inorganic silicon” was described above in detail, particular with reference to U.S. Pat. No. 7,968,146. The inventors have found that such a mixture may provide a barrier film that may be capable of restricting ingress of moisture or water vapor (or other environmental contaminants) while maintaining relatively small dimensions for the film. In the case of an edge sealant, the inventors have discovered that such materials may provide adequate performance while having a perpendicular length of less than 3.0 mm (preferably less than 2.0 mm; and more preferably less than 1.0 mm) from the side of the device footprint. Previously, edge seals often comprised multiple layers to achieve adequate performance, which is typically inefficient both to manufacture such devices and also creates relatively large non-active edge areas (and thereby border areas) on a product.
In some embodiments, the mixture of polymeric silicon and inorganic silicon may be substantially uniform across the layer. By “substantially,” it is generally meant that the film comprises a mixture that does not vary by more than 5% across the layer. As noted above, the barrier film may be deposited in a single process, which may increase manufacturing efficiency. The 5% variance may account for minor fluctuations across the product that may occur during the manufacturing processes. For products that comprise a light emitting device (such as a lighting panel or display), a uniform layer may be preferred because it may reduce micro-cavity effects or other effects associated with multiple layers having different optical properties. However, embodiments are not so limited, and in some instances, the barrier film may vary across the layer (such as a graded layer), which could, for instance, increase the resistance to ingress across the bulk of the barrier layer.
In some embodiments, in the first product as described above, the barrier film may have a perpendicular length that is less than or equal to 2.0 mm. In some embodiments, the barrier film may have a perpendicular length that is less than or equal to 1.0 mm. As was described above, the barrier film comprising a mixture of a polymeric material and a non-polymeric material when utilized as an edge seal may reduce the size of the non-active edge area of the product in at least one direction, while still providing for adequate lifetime and performance of the device. In particular, the inventors have found that using the barrier film comprising a mixture of a polymeric material and non-polymeric material provides good performance when having a perpendicular length of less than 2.0 mm (and may even have similar performance at less than 1.0 mm). This is a substantial improvement over the distances typically required by multilayer products that were previously used, such as those shown in
In some embodiments, in the first product as described above, the barrier film may not have a perpendicular length that is greater than 3.0 mm. That is, some embodiments may not have a portion of the barrier film that is deposited or disposed at a location on the substrate so as to have a perpendicular distance that is greater than 3.0 mm from the side of the device footprint. For example, the barrier film comprising a mixture of a polymeric material and a non-polymeric material may be deposited around all of the sides of the device footprint at a distance of less than 3.0 mm. This may provide products that have a minimum amount of non-active edge area over the substrate, thereby allowing, for example, a display or lighting panel to extend closer to the edge of the product. Moreover, the inventors have unexpectedly found that such barrier films used as edge sealants have comparable performance when the barrier film may not have a perpendicular length that is greater than 2.0 mm (and preferably when the barrier film does not have a perpendicular length that is greater than 1 mm) from the side of the device footprint. Despite the reduction in the length of ingress path for such embodiments, as described with reference to
In some embodiments, in the first product as described above, the barrier film may not have a perpendicular length that is greater than 3.0 mm or less than 1.0 mm. In some embodiments, the barrier film may not have a perpendicular length that is greater than 2.0 mm or less than 0.5 mm. That is, some embodiments of products may have an edge sealant having a range of perpendicular lengths around the device footprint, but in general it may be preferred that the range be great enough to provide adequate performance for the device, but sill have small enough dimensions so as to reduce the non-active edge area of the product.
In some embodiments, in the first product as described above, the barrier film may comprise a substantially uniform material. As used in this context, “uniform” may refer to when the material of the barrier layer comprises the same materials or concentration of materials across the layer. That is, “uniform” does not require that the film necessarily comprise only a single material, but could comprise a layer that has the same, or substantially the same, mixture across the layer. The use of the term “substantially” in this context is to account for minor variations that may occur based on manufacturing error or imperfections, but generally refers to uniformity that does not vary by more than 5% across the film. In some embodiments, the barrier film may comprise a uniform material—that is, there may be less than 1% variation across the film. The use of uniform (or substantially uniform) barrier films as edge sealants may be the result of using a single deposition process for depositing the film, which may reduce the costs of the fabrication process by reducing the number of fabrication steps/conditions.
In some embodiments, in the first product as described above, the barrier film may comprise a mixture of an oxide and polymeric silicone. In some embodiments, the barrier film may comprise at least 40% inorganic silicon. The inventors have found that the use of organic silicon and polymeric silicon may provide properties that are well-suited for forming an edge seal to prevent the ingress of contaminants in the device. It should be noted that the use of the term “at least” in this context does not require that the mixture or composition of the film be uniform—so long as there are no portions of the layer that comprise less than 40% inorganic silicon. In some embodiments, the barrier film may comprise at least 60% inorganic silicon. In some embodiments, the barrier film may comprise at least 80% inorganic silicon. As was noted above, the mixture concentrations and materials may be fine-tuned or selected to have desired characteristics so that the edge seal may be determined based on the particular application and environmental conditions expected for the device, as would be understood by one of ordinary skill in the art after reading this disclosure.
In this regard, in some embodiments, in the first product as described above, a surface of the barrier film may be disposed adjacent to a surface of the substrate to form a first interface.
The ratio of the index of refraction of the bulk of the barrier film and the index of refraction of a portion of the barrier film that is within 10 nm of the interface may be between 0.9993 and 0.9247. The “index of refraction of the bulk” of the barrier film may refer to the index of refraction across the barrier film layer (i.e. index of refraction across the film in a direction corresponding to a path that light that is perpendicularly incident on the film propagates through the layer). In general, the inventors have found that for products that may comprise a light emitting active area (such as an OLED) or any other transparent or semi-transparent device, it may be beneficial to deposit a barrier film such that the index of refraction of the film is similar to the substrate (particularly near the interface with the substrate). This may reduce the amount of light that may be trapped between the barrier film and the substrate and thereby increase the efficiency of the device. Moreover, less light may be color shifted or otherwise distorted when passing through the edge seal and then the substrate.
In some embodiments, in the first product as described above, where a surface of the barrier film is disposed adjacent to a surface of the substrate to form a first interface, the index of refraction of a portion of the barrier film that is within 10 nm of the interface may be between 1.35 and 1.459. In many embodiments, the substrate material may be transparent or semi-transparent such as a glass or plastic material and will typically have an index of refraction between 1.35 and 1.459. As was noted above, it is generally preferred (at least for devices comprising an emissive active area) that the index of refraction of the barrier film and the substrate are similar.
In some embodiments, in the first product as described above, where a surface of the barrier film is disposed adjacent to a surface of the substrate to form a first interface, the barrier film may comprise a material having a bulk diffusion coefficient of water vapor of less than 10−13 cm2/sec. The bulk diffusion coefficient of the barrier film may refer to the rate of ingress of water vapor in the horizontal direction across the film (e.g. along Path-1 (704) in
In some embodiments, in the first product as described above, where a surface of the barrier film is disposed adjacent to a surface of the substrate to form a first interface, the barrier film may comprise a material having a bulk diffusion coefficient of water vapor. The ratio of the bulk diffusion coefficient of water vapor of the barrier film and a diffusion coefficient of water vapor near the first interface may be between 1 and 10−5. That is, for instance, the bulk diffusion coefficient for the barrier film (e.g. the ingress rate along Path-1 (704) in
In some embodiments, in the first product as described above, the first product may further comprise a conductive layer disposed over the device (such as a layer of the device—e.g. an electrode). In some embodiments, a portion of the barrier film may be disposed at least partially over the conductive layer. In some embodiments, a portion of the barrier film may be disposed over the entire conductive layer. That is, for instance and as shown in FIGS. 7 and 15-17, in some embodiments, the barrier film may be used both as an edge seal and as an encapsulation layer over the entire device. This may reduce the cost and complexity of the fabrication process, as the barrier film could be deposited in a single step using a mask that is larger than the mask used for depositing the device footprint. Moreover, as noted above, the barrier film comprising a mixture of a polymeric material and non-polymeric material may have a low ingress rate based on the bulk diffusion coefficient and may thereby be utilized as an encapsulation layer for the device.
However, embodiments are not so limited, and in some instances, in the first product as described above where the device comprises a conductive layer disposed over one or more device layers, a top sealant layer may be disposed over the conductive layer. The top sealant layer and the barrier film may comprise different materials. Thus, the barrier film comprising a mixture of a polymeric material and non-polymeric material may be used in conjunction with other materials to encapsulate the device of the product. Examples of such embodiments are shown in
In some embodiments, in the first product as described above, the first product may comprise a border area. The border area may have a thickness that is less than 3.0 mm (preferably less than 2.0 mm; and more preferably less than 1.0 mm) and may depend at least in part on the size of the barrier film and the size of the inactive device area. As was noted above, embodiments described herein that utilize a barrier film comprising a mixture of a polymeric material and non-polymeric material may have an effective edge seal against the ingress of environmental contaminants such that the size of the edge seal may be reduced. This may thereby allow for products to have smaller non-device edge areas around the active device area and inactive device areas of the device (thereby decreasing the size of the border area). Thus, as noted above, in some embodiments, in the first product as described above, where the first product comprises a non-device edge area, the non-device edge area may have a thickness that is less than 3.0 mm. In some embodiments, the non-active edge area may have a thickness that is less than 2.0 mm (preferably less than 1.0 mm).
In some embodiments, the first product as described above may comprise a consumer device. In some embodiments, the first product may comprise anyone of: a solar cell, a thin film battery, an organic electronic device, a lighting panel or a lighting source having a lighting panel, a display or an electronic device having a display, a mobile phone, a notebook computer, a tablet computer, or a television. In general, any product that uses a thin film to encapsulate or protect sensitive components may use the barrier film described herein comprising a mixture of polymeric material and non-polymeric material as an edge seal.
In some embodiments, in the first product as described above, the device may comprise an organic layer. In some embodiments, the organic layer may comprise an electro-luminescent material. In some embodiments, the device may comprise an OLED. However, as noted above, while the inventors have found that the barrier film may perform particularly well as an edge sealant for an organic device (and thereby some of the examples and descriptions provided herein may reference OLEDs), embodiments are not so limited.
As was noted above, the barrier film that may be used as an edge sealant film may also be used in some embodiments as a top encapsulation film as shown in the exemplary embodiment in
As shown in
As shown in
However, in some instances, the epoxy cannot be deposited directly on top of the device (or the layers disposed thereon). This is illustrated in
In some embodiments, a product may comprise a water vapor sensitive electronic component or layer (e.g. an electrode) that has an edge sealant barrier film deposited in a single chamber PE-CVD system using an organosilicon precursor. The composition of the edge sealant barrier film may not change substantially when observed moving away from the device footprint of the device, parallel to the substrate, from the inner edge to the outer edge of the barrier film, along the entire thickness of the barrier film, including the interface of the barrier film with the substrate. In some embodiments, the length of the interface of the barrier film with the substrate in a direction perpendicular to a side of the device footprint may be less than or equal to 3.0 mm. In some embodiments, the length of the interface of the barrier film with the substrate in a direction perpendicular to a side of the device footprint may be less than or equal to 2.0 mm. In some embodiments, the length of the interface of the barrier film with the substrate in a direction perpendicular to a side of the device footprint may be less than or equal to 1.0 mm.
In some embodiments, a product may be provide that comprises a water vapor sensitive electronic component or layer (such as an electrode) with an edge sealant comprising a barrier film deposited in a single chamber PE-CVD system using organosilicon precursor. The composition of the edge sealant barrier film may not change substantially when observed moving away from the device footprint, parallel to the substrate, from the inner edge to the outer edge of the barrier film, along the entire thickness of the barrier film, including the interface of the barrier film with the substrate. The composition and density of the edge sealant barrier film may be such that the ratio of the refractive index of the interface region of the barrier film close the substrate (i.e. within 10 nm) with that of the bulk of the barrier film is less than or equal to 0.9993 but greater than or equal to 0.9247.
In some embodiments, a product may be provided that comprises a water vapor sensitive electronic component or layer (such as an electrode) with an edge sealant barrier film deposited in a single chamber PE-CVD system using organosilicon precursor. The composition of the edge sealant barrier film may not change substantially when observed moving away from the device footprint of the device, parallel to the substrate, from the inner edge to the outer edge of the barrier film, along the entire thickness of the barrier film, including the interface of the barrier with the substrate. The composition and density of the barrier film may be such that the refractive index of the interface region close to the substrate (i.e. with in 10 nm) is more than 1.35 but less than 1.459.
In some embodiments, the bulk diffusion coefficient of water vapor in the barrier film may be less than 10−13 cm2/sec and the diffusion coefficient of water vapor at the interface of the barrier film with the substrate may be less than or equal to 10−8, but greater than or equal to 10−13 cm2/sec when the external environment is at 65° C. and 85% RH. In some embodiments, the ratio of the bulk diffusion coefficient of water vapor in the barrier film compared to the diffusion coefficient along the interface of the barrier film with the substrate may be less than or equal to 1.0 (i.e. they may be the same) but greater than or equal to 10−5. In some embodiments, the device may not show any edge shrinkage of the active area for 1,000 hrs of storage at 65° C. and 85% RH.
In addition to the products described above, the inventors have also found methods of manufacturing such products. In this regard, in some embodiments, a first method may comprise the steps of providing a substrate having a device disposed over the substrate having a device footprint, and fabricating a barrier film over the substrate and substantially along a side of the device footprint, where the barrier film may be fabricated so as to have a perpendicular length that is less than or equal to 3.0 mm (preferably less than 2.0 mm, and more preferably less than 1.0 mm) from the side of the device footprint. In some embodiments, the barrier film may comprise a mixture of a polymeric material and non-polymeric material.
The term “providing” is generally used in this context to be an inclusive term and encompass any manner of obtaining or making available a substrate having a device disposed over the substrate for use in such methods. For instance, in some embodiments, the substrate and the device (and/or components thereof) may be acquired, such as by purchase from a third party. In some embodiments, the substrate and/or active area could be fabricated, manufactured, or otherwise assembled, or the components could be provided to a third party that may then fabricate or assemble the substrate having a device disposed thereon.
Similarly, the term “fabricating” is also intended to be an inclusive term, and may comprise any suitable deposition process or other technique for disposing the barrier film over the substrate. This could include, by way of example only, vacuum depositing a blanket layer of barrier film over the substrate and etching, cutting, or ablating portions of the barrier film so that it has a perpendicular length that is less than 3.0 mm; deposition of the barrier film through a mask such that it has a perpendicular length that is less than 3.0 mm, or any other suitable method known in the art.
In some embodiments, in the first method as described above, the device may comprise an organic layer. In some embodiments, the organic layer may comprise an electroluminescent (EL) material. In some embodiments, the device may comprise an OLED. As noted above, although the inventors have found that the use of a barrier film having a perpendicular length that is less than 3.0 mm (such as when the barrier film comprises a mixture of a polymeric material and non-polymeric material) provide benefits to organic devices including increasing display and panel sizes (e.g. by decreasing border area (dead space)), embodiments are not so limited.
In some embodiments, in the first method as described above, the barrier film may be fabricated so as to have a perpendicular length that is less than or equal to 2.0 mm from the side of the device footprint. In some embodiments, the barrier film may be fabricated so as to have a perpendicular length that is less than or equal to 1.0 mm from the side of the device footprint. As noted above, in general a smaller perpendicular length for the barrier film may allow for a smaller border area of the product, thereby reducing the size of the product or reducing the inefficient use of space. As was described above with reference to an exemplary product, in some embodiments, the barrier film may be fabricated or disposed so that it does not have any perpendicular lengths from the side of the device footprint that are greater than 3.0 mm (preferably 2.0 mm, and more preferable greater than 1.0 mm).
In some embodiments, in the first method as described above, the step of fabricating the barrier film may comprise chemical vapor deposition. In some embodiments, the step of fabricating the barrier film may utilize an organosilicon precursor. However, as described above, the inventors have found that a variety of precursors may be used to fabricate barrier films that have desired properties to form an edge seal, and may be selected based on the particular application or device that the barrier film is being applied thereto.
In some embodiments, in the first method as decried above, the step of fabricating the barrier film so as to have a perpendicular length that is less than or equal to 3.0 mm from a side of the device footprint may comprise depositing the barrier film through a mask such that the perpendicular length is less than or equal to 3.0 mm from the side of the device footprint. The deposition may be performed in a vacuum process, such as CVD or PE-CVD.
In some embodiments, in the first method as described above, the step of fabricating the barrier film so as to have a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint may comprise the steps of: depositing a barrier film over the substrate and substantially along a side of the device footprint, wherein the barrier film is deposited so as to have a perpendicular length that is greater than or equal to 3.0 mm from the side of the device footprint, and, after depositing the barrier film, breaking the barrier film such that the barrier film has a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint. In some embodiments, the step of breaking the barrier film may be accomplished by, or in combination with, breaking the substrate. This exemplary fabrication method may provide for increased efficiencies (particularly where the barrier film is also disposed over device) because the barrier film may be deposited as a blanket layer over the substrate (e.g. a mask need not be precisely aligned for the deposition process). The substrate may be scribed (or ablated) at a predetermined location (e.g. within 3.0 mm, preferably within 2.0 mm, and more preferably within 1.0 mm of the side of the device footprint) so as to be broken along the scribe. When the substrate is broken, the size of the barrier film disposed on the portion of the substrate that the device footprint is also disposed on may be reduced.
It should be appreciated that the various characteristics described above with reference to the components of the first product may apply equally to the components described with respect to the first method, as would be understood by one of skill in the art. For example, the various descriptions of the composition of the barrier film, the fabrication of other components (such as top sealant or encapsulation layers) etc., may also be performed in accordance with the first method.
In some embodiments, a first product prepared by a process may be provided. The process for preparing the first product may comprise the steps of providing a substrate having a device disposed over the substrate having a device footprint, and fabricating a barrier film over the substrate and substantially along a side of the device footprint, where the barrier film may be fabricated so as to have a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint. In some embodiments, the barrier film may comprise a mixture of a polymeric material and non-polymeric material.
In some embodiments, in the first device prepared by a process as described above, the device may comprise an organic layer. In some embodiments, the organic layer may comprise an organic electroluminescent (EL) material. In some embodiments, the device may be an OLED.
In some embodiments, in the first product prepared by a process as described above, the barrier film may be fabricated so as to have perpendicular length that is less than or equal to 2.0 mm from the side of the device footprint. In some embodiments, the barrier film may be fabricated so as to have perpendicular length that is less than or equal to 1.0 mm from the side of the device footprint.
In some embodiments, in the first product prepared by a process as described above, the step of fabricating the barrier film may comprise depositing the first barrier film using an organosilicon precursor. As noted above, the inventors have found that the use of an organosilicon precursor may provide a barrier film that has particular properties that may be well-suited for use as an edge seal, which properties may be fine tuned based on the various deposition conditions and methods, as described above and would be appreciated by a person of ordinary skill in the art after reading this disclosure. However, any suitable precursor material may be utilized for some embodiments.
In some embodiments, the step of fabricating the barrier film may comprise chemical vapor deposition. In some embodiments, the step of fabricating the barrier film may comprise plasma enhance chemical vapor deposition (PE-CVD). In some embodiments, the barrier film consists essentially of a mixture of polymeric silicon and inorganic silicon, where the weight ratio of polymeric silicon to inorganic silicon is in the range of 95:5 to 5:95, and where the polymeric silicon and the inorganic silicon are created from the same precursor material. In some embodiments, at least an 0.1 μm thickness of the barrier film is deposited under the same reaction conditions for all the reaction conditions in the deposition process and the water vapor transmission rate is less than 10−6 g/m2/day through the at least 0.1 μm thickness of the barrier film.
In some embodiments, in the first product prepared by a process as described above, where the step of fabricating the barrier film comprises depositing the first barrier film using an organosilicon precursor, the precursor material may comprise hexamethyl disiloxane or dimethyl siloxane. In some embodiments, the precursor material may comprise a single organosilicon compound. In some embodiments, the precursor material may comprise a mixture of organosilicon compounds.
In some embodiments, in the first product prepared by a process as described above, the step of fabricating the barrier film may comprise depositing the barrier film through a mask such that the perpendicular length is less than or equal to 3.0 mm from the side of the device footprint. In some embodiments, the perpendicular length may be less than or equal to 2.0 mm (and preferable less than 1.0 mm) from the side of the device footprint.
It should be appreciated that the various characteristics described above with reference to the components of the first product and the first method may apply equally to the embodiments that comprise the first product prepared by a process, as would be understood by one of skill in the art. This includes the various materials used, the structures created, and the characteristics of the product and/or the barrier film.
CONCLUSIONIt is understood that the various embodiments described herein are by way of example only, and are not intended to limit the scope of the invention. For example, many of the materials and structures described herein may be substituted with other materials and structures without deviating from the spirit of the invention. The present invention as claimed may therefore include variations from the particular examples and preferred embodiments described herein, as will be apparent to one of skill in the art. It is understood that various theories as to why the invention works are not intended to be limiting.
The above description is illustrative and is not restrictive. Many variations of the invention will become apparent to those skilled in the art upon review of the disclosure. The scope of the invention should, therefore, be determined not with reference to the above description, but instead should be determined with reference to the pending claims along with their full scope or equivalents.
Although many embodiments were described above as comprising different features and/or combination of features, a person of ordinary skill in the art after reading this disclosure may understand that in some instances, one or more of these components could be combined with any of the components or features described above. That is, one or more features from any embodiment can be combined with one or more features of any other embodiment without departing from the scope of the invention.
As noted previously, all measurements, dimensions, and materials provided herein within the specification or within the figures are by way of example only.
A recitation of “a,” “an,” or “the” is intended to mean “one or more” unless specifically indicated to the contrary. Reference to a “first” component does not necessarily require that a second component be provided. Moreover reference to a “first” or a “second” component does not limit the referenced component to a particular location unless expressly stated.
All publications mentioned herein are incorporated herein by reference to disclose and describe the methods and/or materials in connection with which the publications are cited. The publications discussed herein are provided solely for their disclosure prior to the filing date of the present application. Nothing herein is to be construed as an admission that the present invention is not entitled to antedate such publication by virtue of prior invention. Further, the dates of publication provided may be different from the actual publication dates, which may need to be independently confirmed.
Claims
1.-61. (canceled)
62. A first product comprising:
- a substrate;
- a device disposed over the substrate having a device footprint; and
- a barrier film disposed over the substrate and substantially along a side of the device footprint; wherein the barrier film comprises a mixture of a polymeric material and non-polymeric material; and wherein the barrier film has a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint.
63. The first product of claim 62,
- wherein the device footprint comprises an active device area and an inactive device area; and
- wherein the barrier film has a perpendicular length that is less than or equal to 3.0 mm from the side of the inactive device area.
64. The first product of claim 62,
- wherein the device footprint comprises an active device area and an inactive device area; and
- wherein the barrier film does not extend to a distance of greater than 3.0 mm from a side of the active device area.
65. The first product of claim 62,
- wherein the device footprint comprises an active device area, and
- wherein the barrier film has a perpendicular length that is less than or equal to 3.0 mm from the side of the active device area.
66. The first product of claim 62, wherein the barrier film comprises a mixture of a polymeric silicon and inorganic silicon.
67. The first product of claim 66, wherein the mixture of polymeric silicon and inorganic silicon is substantially uniform across the layer.
68. The first product of claim 62, wherein the barrier film does not have a perpendicular length that is greater than 3.0 mm.
69. The first product of claim 62, wherein the barrier film has a perpendicular length that is less than or equal to 1.0 mm.
70. The first product of claim 62, wherein the barrier film does not have a perpendicular length that is greater than 1.0 mm.
71. The first product of claim 62, wherein the barrier film does not have a perpendicular length that is greater than 3.0 mm or less than 1.0 mm.
72. The first product of claim 62, wherein the barrier film comprises a uniform material.
73. The first product of claim 62, wherein the barrier film comprises a mixture of an oxide and polymeric silicone.
74. The first product of claim 62, wherein the barrier film comprises at least 40% inorganic silicon.
75. The first product of claim 62, further comprising a conductive layer disposed over the active device area, wherein a portion of the barrier film is disposed at least partially over the conductive layer.
76. The first product of claim 62, further comprising a conductive layer disposed over the active device area;
- wherein a top sealant layer is disposed over the conductive layer; and
- wherein the top sealant layer and the barrier film comprise different materials.
77. The first product of claim 62, wherein the first product comprises anyone of: a consumer device, a solar cell, a thin film battery, an organic electronic device, a lighting panel or a lighting source having a lighting panel, a display or an electronic device having a display, a mobile phone, a notebook computer, a tablet computer, a television, or an OLED.
78. A first method comprising:
- providing a substrate having a device disposed over the substrate having a device footprint; and
- fabricating a barrier film over the substrate and substantially along a side of the device footprint, wherein the barrier film is fabricated so as to have a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint.
79. The first method of claim 78, wherein the step of fabricating the barrier film comprises chemical vapor deposition.
80. The first method of claim 79, wherein the step of fabricating the bather film utilizes an organosilicon precursor.
81. A first product prepared by a process comprising the steps of:
- providing a substrate having a device disposed over the substrate, wherein the device has a device footprint; and
- fabricating a barrier film over the substrate and substantially along a side of the device footprint, wherein the barrier film is fabricated so as to have a perpendicular length that is less than or equal to 3.0 mm from the side of the device footprint.
82. The first product of claim 81, wherein the step of fabricating the barrier film comprises depositing the first barrier film using an organosilicon precursor.
83. The first product of claim 82, wherein the step of fabricating the barrier film comprises chemical vapor deposition.
84. The first product of claim 82,
- wherein the barrier film consists essentially of a mixture of polymeric silicon and inorganic silicon;
- wherein the weight ratio of polymeric silicon to inorganic silicon is in the range of 95:5 to 5:95; and
- wherein the polymeric silicon and the inorganic silicon are created from the same precursor material.
85. The first product of claim 84,
- wherein at least an 0.1 μm thickness of the barrier film is deposited under the same reaction conditions for all the reaction conditions in the deposition process; and
- wherein the water vapor transmission rate is less than 10−6 g/m2/day through the at least 0.1 μm thickness of the barrier film.
Type: Application
Filed: Mar 16, 2012
Publication Date: Sep 19, 2013
Patent Grant number: 9312511
Applicant: Universal Display Corporation (Ewing, NJ)
Inventors: Prashant Mandlik (Lawrenceville, NJ), Ruiqing Ma (Morristown, NJ), Julia J. Brown (Yardley, PA)
Application Number: 13/422,926
International Classification: B32B 3/02 (20060101); C23C 16/44 (20060101); B05D 5/00 (20060101); H01M 10/04 (20060101); B32B 9/00 (20060101);
