Nano-Textured Attenuator for Use with Laser Beam Profiling and Laser Beam Characterization Systems and Method of Use
The present application discloses a nano-textured attenuator which includes a body defining in in the aperture, a measurement aperture, at least one beam dump aperture, at least one coupling fixture may be formed on or positioned on the body, a first nano-textured beamsplitter is positioned within the body and configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one partially attenuated signal, at least a second nano-textured beamsplitter is positioned within the body and is configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one attenuated measurement signal, and at least one camera is communication with the measurement aperture be configured to measure at least one optical characteristic of the attenuated measurement signal.
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The present application claims priority to U.S. Provisional Patent Application Ser. No. 62/865,160, filed on Jun. 22, 2019 and entitled “Nano-Textured Attenuator for Use with Laser Beam Profiling and Laser Beam Characterization Systems and Methods of Use,” the entire contents of which are incorporated by reference herein.
BACKGROUNDIncreasingly, laser systems offering high output powers from about 500 W to 5000 W or more are being implemented in various fields. Often, laser measurement is be used to monitor the performance of laser systems. Typically, these measurements, which include beam profiling, spectral observations, temporal observations, or intensity observations are performed by creating a sample of the intensity map at a plane transverse to the propagation axis of the laser beam.
While laser output measurements including beam profiling and laser beam characterization has proven useful in monitoring the performance of low power laser systems, a number of shortcomings have been identified when these systems are used to monitor the performance of high power laser systems. For example, 2-D matrix sensors such as CCD devices, CMOS devices, pyroelectric devices, and/or InGaAs devices are saturated at fluences several magnitudes less than the fluences of the output signals of the high-power laser systems under test. As a result, presently available beam profiling systems, high laser power measurement systems, and similar laser power measurement systems utilize one or more thin-film coated attenuators to reduce output signal fluence. Unfortunately, the power densities of many high-power laser system output signals exceed the damage threshold of thin-film reflective coatings used in making thin-film coated attenuators. As such, the performance of thin-film coated attenuators tends to degrade thereby permitting potentially damaging fluence to be incident on sensitive cameras and sensors used in laser beam profiling systems and/or measurement systems.
In light of the foregoing, there is an ongoing need for durable attenuator devices for use in high laser power beam profiling systems and laser beam characterization systems.
SUMMARYThe present application discloses various embodiments of a nano-textured attenuator for use with a variety of laser beam profiling systems, laser power measurement systems, and various other systems configured to measure or otherwise characterize laser output signals or beams. In one embodiment, the nano-textured attenuators disclosed herein are well-suited for use with laser outputs in excess of about 200 W to 5000 W (i.e. high power) or more, although those skilled in the art will appreciate that the various embodiments of the nano-textured attenuator disclosed herein may be used at any variety of laser powers.
In one embodiment, the nano-textured attenuator includes a body defining in in the aperture, a measurement aperture, at least one beam dump aperture. At least one coupling fixture may be formed on or positioned on the body. In one embodiment, the coupling fixture is positioned proximate to the measurement aperture. A first nano-textured beamsplitter is positioned within the body. During use, the first nano-textured beamsplitter is configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one partially attenuated signal. At least a second nano-textured beamsplitter is positioned within the body. During use, the second nano-textured beamsplitter is configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one attenuated measurement signal. At least one camera communication with the measurement aperture be configured to measure at least one optical characteristic of the attenuated measurement signal.
In another embodiment, the nano-textured attenuator includes a body defining in in the aperture, a measurement aperture, at least one beam dump aperture. At least one coupling fixture may be formed on or positioned on the body. In one embodiment, the coupling fixture is positioned proximate to the measurement aperture. A nano-textured beamsplitter is positioned within the body. During use, the nano-textured beamsplitter is configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one partially attenuated signal. A at least one nano-textured optical component is positioned within the body. During use, the nano-textured optical component is configured to transmit 85% to 99.9999% of the partially attenuated signal therethrough while reflecting 0.0001% to form at least one attenuated measurement signal. At least one camera communication with the measurement aperture be configured to measure at least one optical characteristic of the attenuated measurement signal.
In still another embodiment, the present application discloses a nano-textured attenuator which includes a body defining in in the aperture, a measurement aperture, at least one beam dump aperture. At least one coupling fixture may be formed on or positioned on the body. In one embodiment, the coupling fixture is positioned proximate to the measurement aperture. A first nano-textured beamsplitter is positioned within the body. During use, the first nano-textured beamsplitter is configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one partially attenuated signal. At least a second nano-textured beamsplitter is positioned within the body. During use, the second nano-textured beamsplitter is configured to transmit 85% to 99.9999% of an input signal therethrough while reflecting 0.0001% to form at least one attenuated measurement signal. At least one attenuator/filter body having at least filter coupled thereto may be selectively positionable within the optical beam path of the attenuated measurement signal. Thereafter, at least one camera communication with the measurement aperture be configured to measure at least one optical characteristic of the attenuated measurement signal
the present application also discloses a method of measuring high laser power optical signal which includes directing at least one input laser signal to a first nano-textured beamsplitter. A portion of the input laser signal is reflected with the first nano-textured beamsplitter to form at least one partially attenuated signal. The partially attenuated signal has 0.0001% to 15% of the power of the laser input signal while transmitting 85% to 99.9999% of the laser input signal through the first nano-textured beamsplitter. Thereafter, a portion of the partially attenuated signal from the first nano-textured beamsplitter is reflected by at least a second nano-textured beamsplitter to form at least one attenuated measurement signal. The attenuated measurement signal has 0.0001% to 15% of the power of the partially attenuated signal while transmitting 85% to 99.9999% of the laser input signal through the second nano-textured beamsplitter. Finally, at least one optical characteristic of the attenuated measurement signal may be measured with at least one sensor system.
13. The method of claim 12 further comprising selectively inserting at least one attenuator/filter body between at least one of the first nano-textured beamsplitter, the second nano-textured beamsplitter, and the at least one sensor system.
Other features and advantages of the nano-textured attenuator for use with laser beam profiling and laser beam characterization systems as described herein will become more apparent from a consideration of the following detailed description.
The novel aspects of the embodiments of a nano-textured attenuator for use with laser beam profiling laser beam characterization systems as disclosed herein will be more apparent by consideration of the following figures, wherein:
The present application discloses various embodiments of a nano-textured attenuator for use with a variety of laser beam profiling systems, laser power measurement systems, and various other systems configured to measure or otherwise characterize laser output signals or beams. In one embodiment, the nano-textured attenuator disclosed herein is well-suited for use with laser outputs in excess of about 200 W to 5000 W (i.e. high power) or more, although those skilled in the art will appreciate that the various embodiments of the nano-textured attenuator disclosed herein may be used at any variety of laser powers. Further, those skilled in the art will appreciate that the physical dimensions and configuration of the embodiments of the nano-textured attenuator disclosed herein are intended to illustrate the operation of the nano-textured attenuator and are not intended to limit the components and characteristics of the nan-textured attenuator to those embodiments disclosed.
Referring again to
As shown in
As shown in
As described above, the nano-textured attenuator 10 may be configured to be coupled to and/or be positioned proximate to at least one camera, sensor, characterization system, or similar device.
As shown in
Referring again to
As shown in
Optionally, the nano-textured attenuator 10 may include a single nano-textured beamsplitter, prism, or optical element within the body 12. For example,
Referring again to
It is appreciated by persons skilled in the art that the present invention is not limited by what has been particularly shown and described hereinabove. Rather the scope of the present invention includes both combinations and subcombinations of various features described hereinabove as well as variations and modifications thereto which would occur to a person of skill in the art upon reading the above description and which are not in the prior art.
Claims
1. A nano-textured attenuator for use in laser beam characterization systems, comprising:
- a body defining at least one input aperture, at least one measurement aperture, and at least one beam dump aperture;
- at least one coupling fixture positioned on the body, the coupling fixture positioned proximate to the at least one measurement aperture;
- a first nano-textured beamsplitter positioned within the body, the first nano-textured beamsplitter configured to transmit 85% to 99.9999% of an input signal therethrough and reflect 15% to 0.0001% of the input signal to form at least one partially attenuated signal;
- at least a second nano-textured beamsplitter positioned within the body, the second nano-textured beamsplitter configured to transmit 85% to 99.9999% of the partially attenuated signal therethrough and reflect 15% to 0.0001% of the partially attenuated signal to form at least one attenuated measurement signal; and
- at least one camera system coupled to the body, the at least one camera system configured to receive the at least one attenuated measurement signal and measure at least one characteristics of the at least one attenuated measurement signal.
2. The nano-textured attenuator of claim 1 further comprising at least one attenuator/filter body configured to receive and retain at least one attenuator or optical filter therein, the at least one attenuator/filter body configured to be selectively positionable within the body between at least one input aperture and at least one measurement aperture.
3. The nano-textured attenuator of claim 2 further comprising:
- a first attenuator/filter body having at least a first filter coupled thereto, the first attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal; and
- a second attenuator/filter body having at least a second filter coupled thereto, the second attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal.
4. The nano-textured attenuator of claim 1 further comprising at least one selectively movable mount configured to adjustably support at least one of the first nano-textured beamsplitter and the second nano-textured beamsplitter.
5. The nano-textured attenuator of claim 1 wherein at least one of the at least one input aperture, at least one measurement aperture, and at least one beam dump aperture includes protective window.
6. A nano-textured attenuator for use in laser beam characterization systems, comprising:
- a body defining at least one input aperture, at least one measurement aperture, and at least one beam dump aperture;
- at least one coupling fixture positioned on the body, the coupling fixture positioned proximate to the at least one measurement aperture;
- a nano-textured beamsplitter positioned within the body, the nano-textured beamsplitter configured to transmit 85% to 99.9999% of an input signal therethrough and reflect 15% to 0.0001% of the input signal to form at least one partially attenuated signal;
- at least one nano-textured optical element positioned within the body, the at least one nano-textured optical element configured to transmit 85% to 99.9999% of the partially attenuated signal therethrough and reflect 15% to 0.0001% of the partially attenuated signal to form at least one attenuated measurement signal; and
- at least one camera system coupled to the body, the at least one camera system configured to receive the at least one attenuated measurement signal and measure at least one characteristics of the at least one attenuated measurement signal.
7. The nano-textured attenuator of claim 6 further comprising at least one attenuator/filter body configured to receive and retain at least one attenuator or optical filter therein, the at least one attenuator/filter body configured to be selectively positionable within the body between at least one input aperture and at least one measurement aperture.
8. The nano-textured attenuator of claim 7 further comprising:
- a first attenuator/filter body having at least a first filter coupled thereto, the first attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal; and
- a second attenuator/filter body having at least a second filter coupled thereto, the second attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal.
9. The nano-textured attenuator of claim 6 further comprising at least one selectively movable mount configured to adjustably support at least one of the nano-textured beamsplitter and the at least one nano-textured optical element.
10. The nano-textured attenuator of claim 6 wherein at least one of the at least one input aperture, at least one measurement aperture, and at least one beam dump aperture includes protective window.
11. A nano-textured attenuator for use in laser beam characterization systems, comprising:
- a body defining at least one input aperture, at least one measurement aperture, and at least one beam dump aperture;
- at least one coupling fixture positioned on the body, the coupling fixture positioned proximate to the at least one measurement aperture;
- a first nano-textured beamsplitter positioned within the body, the first nano-textured beamsplitter configured to transmit 85% to 99.9999% of an input signal therethrough and reflect 15% to 0.0001% of the input signal to form at least one partially attenuated signal;
- at least a second nano-textured beamsplitter positioned within the body, the second nano-textured beamsplitter configured to transmit 85% to 99.9999% of the partially attenuated signal therethrough and reflect 15% to 0.0001% of the partially attenuated signal to form at least one attenuated measurement signal;
- at least one camera system coupled to the body, the at least one camera system configured to receive the at least one attenuated measurement signal and measure at least one characteristics of the at least one attenuated measurement signal;
- a first attenuator/filter body having at least a first filter coupled thereto, the first attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal; and
- a second attenuator/filter body having at least a second filter coupled thereto, the second attenuator/filter body selectively positionable within an optical beam path of the at least one attenuated measurement signal.
12. A method of measuring high laser power optical signal comprising:
- directing at least one input laser signal to a first nano-textured beamsplitter;
- reflecting a portion of the input laser signal with the first nano-textured beamsplitter to form at least one partially attenuated signal, the at least one partially attenuated signal having 0.0001% to 15% of the power of the laser input signal while transmitting 85% to 99.9999% of the laser input signal through the first nano-textured beamsplitter;
- reflecting a portion of the at least one partially attenuated signal from the first nano-textured beamsplitter with at least a second nano-textured beamsplitter to form at least one attenuated measurement signal, the at least one attenuated measurement signal having 0.0001% to 15% of the power of the at least one partially attenuated signal while transmitting 85% to 99.9999% of the laser input signal through the second nano-textured beamsplitter; and
- measuring at least one optical characteristic of the at least one attenuated measurement signal with at least one sensor system.
13. The method of claim 12 further comprising selectively inserting at least one attenuator/filter body between at least one of the first nano-textured beamsplitter, the second nano-textured beamsplitter, and the at least one sensor system.
Type: Application
Filed: Jun 19, 2020
Publication Date: Dec 24, 2020
Applicant: MKS Instruments, Inc. (North Andover, MA)
Inventors: Kevin Kirkham (Richmond, UT), Kenneth Ferree (North Logan, UT)
Application Number: 16/906,335