Cover for substrate holding chuck

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Description

FIG. 1 is an enlarged perspective view of a cover for substrate holding chuck showing my new design;

FIG. 2 is a front view thereof;

FIG. 3 is a back view thereof;

FIG. 4 is a top view thereof;

FIG. 5 is a bottom view thereof;

FIG. 6 is a right side view thereof, the left side view thereof being a mirror image;

FIG. 7 is an enlarged view of the section indicated by line 7-7 of FIG. 4; and,

FIG. 8 is an enlarged cross-sectional view thereof, taken along line 8-8 of FIG. 7.

The dash-dash broken lines shown in the figures are for illustrative purposes only and form no part of the claimed design. The dot-dash broken lines shown in the figures are to indicate a boundary between a claimed design and disclaimed portion, and those are not a part of a claimed design or disclaimed portion.

Claims

The ornamental design for a cover for substrate holding chuck, as shown and described.

Referenced Cited
U.S. Patent Documents
2852264 September 1958 Granata
3627338 December 1971 Thompson
D268414 March 29, 1983 Cleary
D811451 February 27, 2018 Ishino
D811452 February 27, 2018 Ishino
D829778 October 2, 2018 Ishino
20260002927 January 1, 2026 Urakawa
Patent History
Patent number: D1132346
Type: Grant
Filed: Mar 19, 2025
Date of Patent: Jun 30, 2026
Assignee: SCREEN Holdings Co., Ltd. (Kyoto)
Inventor: Ryo Okabe (Kyoto)
Primary Examiner: Amber R Stiles
Assistant Examiner: Eidiol Ghigliotty Torres
Application Number: 29/994,137
Classifications
Current U.S. Class: Tool Or Work Holder (D15/140)