Abstract: A substrate processing apparatus includes a processing bath, a first lid member, an outer bath, a processing liquid introduction unit, a first gas supply unit, and a second gas supply unit. The processing bath stores a processing liquid in which a substrate is immersed. The first lid member covers an upper opening of the processing bath. The outer bath is provided outside of the processing bath and a processing liquid overflowing out of the processing liquid from the processing bath flows into the outer bath. The processing liquid introduction unit is able to introduce the processing liquid stored in the outer bath into the processing bath. The first gas supply unit supplies a first inert gas to the processing liquid stored in the processing bath. The second gas supply unit supplies a second inert gas into the outer bath.

Abstract: A marking region image is obtained by cutting out the part corresponding to a marking region from an article image obtained by imaging an article to be inspected. Then, whether or not the marking is properly provided is determined by performing a character recognition of a marking part for a marking region image. Further, an image of an article having no marking and no defect is stored as a reference image, whereas a marking periphery image obtained by removing the image of the marking part from the marking region image is compared to the reference image. By that comparison, whether or not any defect is included in the marking peripheral part of the marking region except the marking part is determined.

Abstract: Both end parts of a cord are fixed to a maintenance mounting frame, and an intermediate part of the cord is laid on a first body-side rotating member, a head-side rotating member and a second body-side rotating member. Here, when a motor is driven, the movement restriction of the cord is released and a movement of a head mounting frame is restricted, whereby only the maintenance mounting frame moves together with a maintenance part while the movement of the head mounting frame is restricted. Further, when the motor is driven, a movement of the cord is restricted and the movement restriction of the head mounting frame is released, whereby only the head mounting frame moves together with a discharge head while a movement of the maintenance part is restricted.

Abstract: An ink-jet printer includes: a base material transport mechanism for transporting a base material along a transport path in a transport direction; an ink ejection head having a lower surface opposed to the transport path, and an ink ejection port for ejecting ink toward the transport path; and a base plate having a lower surface opposed to the transport path over the transport path, and a mounting hole open in the lower surface, the ink ejection head being mounted in the mounting hole. The base plate includes an air flow hole that is a though hole penetrating through the base plate. The air flow hole has an air outlet open in a location downstream of the ink ejection port in the lower surface. Air passing through the air flow hole is ejected from the air outlet toward the transport path.

Abstract: A substrate processing device according to the present invention is a substrate processing device that performs substrate processing with a processing solution and includes inspection means for inspecting degradation of components constituting the substrate processing device. The inspection means includes: capturing means for acquiring image data of the components; color information acquisition means for acquiring color information of an inspection target component from the image data acquired by the capturing means; and degradation determination means for determining a degradation degree of the inspection target component based on the acquired color information.

Abstract: First relational equations which represent characteristics of respective sample colors are obtained, and for the respective sample colors, prediction values of spectral characteristics of characteristics-acquired gradation values for a prediction target color are obtained using the first relational equations. Difference values between the prediction values and actual measurement values are obtained, and a sample color for which a minimum difference value is obtained is selected as a reference color. A second relational equation that represents characteristics of the reference color is obtained, and a prediction value of spectral characteristics of a prediction target gradation value for the prediction target color is obtained using the second relational equation.

Abstract: A printing system including a printer that sends a printed print medium to a post-processing machine is provided with: a job sorting unit that sorts a plurality of jobs into a plurality of groups; a required printing time calculation unit that calculates a required printing time per set required for printing for each job; a short job determination unit that determines, as a short job, a job for which the required printing time is shorter than a minimum processing time that is a minimum time required for processing for one set in the post-processing machine; and a job group generation unit that generates, on the basis of a plurality of jobs sorted into the same group, a job group obtained by grouping standard jobs (jobs not determined as short jobs) and a job group obtained by grouping short jobs.

Abstract: A substrate treatment device is provided, including a substrate holding unit holding a substrate and rotating the substrate; plural nozzles each having a discharge port and discharging a treatment liquid from the discharge port at a treatment position; a camera imaging an imaging region from an imaging position to acquire captured images, the imaging region containing the treatment liquid discharged from the discharge port of each nozzle positioned at the treatment position, and the imaging position being above the substrate held on the substrate holding unit and in a plan view, the imaging position being positioned at a central side of the substrate with respect to the nozzles and at an upstream side in a rotation direction of the substrate holding unit with respect to the nozzles; and an image processing unit determining a discharge state of the treatment liquid based on the captured images.

Abstract: A base material processing apparatus includes a tension detector that detects tension on a base material that is being transported, an encoder that detects the amounts of rotational drive of rollers that transport the base material, edge position detectors that detect the position of an edge of the base material in the width direction, and a transport displacement calculation part that calculates a transport displacement of the base material in the transport direction. The transport displacement calculation part includes an operation unit that has completed learning through machine learning and outputs the transport displacement on the basis of at least one of the result of detecting the tension, the result of detecting the amounts of rotational drive of the rollers, and the result of detecting the position of the edge. Accordingly, the transport displacement can be detected with high accuracy and low cost.

Abstract: A printing apparatus includes a head part, an encoder, a tension sensor, a head part temperature sensor, an edge sensor, an estimation part, a storage, and an output part. The estimation part estimates print quality in terms of a page printed by the head part on the basis of variation elements detected by the encoder, the tension sensor, the head part temperature sensor, and the edge sensor. The storage stores print quality information containing the printed page and the print quality estimated by the estimation part in association with each other. The output part outputs the print quality information to a display, a post-processing device, and a printer controller section.

Abstract: When pressure in a chamber is brought to atmospheric pressure and the chamber is filled with an inert gas atmosphere, the atmosphere in the chamber is sucked into an oxygen concentration analyzer through a sampling line such that oxygen concentration in the chamber is measured by the oxygen concentration analyzer. When the pressure in the chamber is reduced to less than atmospheric pressure, nitrogen gas is supplied to the oxygen concentration analyzer through an inert gas supply line simultaneously with suspending the measurement of oxygen concentration in the chamber. Even when the measurement of oxygen concentration in the chamber is suspended, reverse flow to the oxygen concentration analyzer from a gas exhaust pipe can be prevented, and the oxygen concentration analyzer can be prevented from being exposed to exhaust from the chamber. The configuration results in maintaining measurement accuracy of the oxygen concentration analyzer in a low oxygen concentration range.

Abstract: The disclosure provides a substrate processing apparatus that processes a surface of a substrate with a processing fluid in a supercritical state, in which the substrate is protected from the pressure fluctuation caused by partial vaporization of the processing fluid in the flow path. A substrate processing apparatus which processes a surface of a substrate with a processing fluid in a supercritical state includes a chamber housing provided therein with a processing space capable of housing the substrate and a flow path which receives the processing fluid from outside and guides the processing fluid to the processing space, and a fluid supply part which pressure-feeds the processing fluid to the flow path, wherein a plurality of bent parts which change a flow direction of the processing fluid are provided in the flow path.

Abstract: A substrate processing method includes a preprocessing forming step of forming a preprocessing film on a surface of a substrate having the surface on which a first region and a second region in which different substances are exposed are present, a preprocessing film separating step of separating the preprocessing film from the surface of the substrate with a stripping liquid, a processing film forming step of forming a processing film on the surface of the substrate after the preprocessing film separating step, and a processing film separating step of separating the processing film from the surface of the substrate with the stripping liquid.

Abstract: A valve is closed while a cleaning liquid is fed into a tubular body of a cleaning nozzle, and a piezoelectric element applies vibrations to the cleaning liquid. This causes droplets of the cleaning liquid to be produced and discharged from a plurality of discharge holes. The droplet diameter of the discharged droplets is in the range from 15 to 200 ?m, and the distribution of the droplet diameter is such that the value of where a value of 3? does not exceed 10% of the average droplet diameter. The droplet speed is in the range from 20 to 100 meters per second, and the distribution of the droplet speed is such that the value of where a value of 3? does not exceed 10% of the average droplet speed. The droplet flow rate is not less than 10 milliliters per minute. Discharging the droplets of the cleaning liquid from the cleaning nozzle toward a substrate while satisfying these discharge conditions improves cleaning efficiency without damages to the substrate.

Abstract: A similarity calculation apparatus according to the present invention includes: a name acquisition unit configured to acquire a first group name to which each word belonging to a first synonym group belongs and a second group name to which each word belonging to a second synonym group belongs; a name set generation unit configured to generate a first group name set and a second group name set; and a similarity calculation unit configured to calculate similarity between the first group name set and the second group name set. Therefore, even when a plurality of synonym groups are created, terms can be effectively unified.

Abstract: An image is printed on the front surface M1 by discharging the inks to the front surface M from the discharge heads 321 (first head) facing the front surface M1 (recording surface) of the printing medium M from above. Thus, the inks discharged from the discharge heads 321 partially become mist to possibly produce ink mist. Accordingly, the ink cover 51 (first cover) is arranged between the discharge heads 321 and the front surface M1 of the printing medium M before the discharge heads 321 discharges the inks to the printing medium M. By providing the ink cover 51 for the front surface M1 of the printing medium M before printing in this way, the adhesion of the ink mist to this front surface M1 can be suppressed.

Abstract: A printing system including a first printer and a second printer is provided with: a job group creation unit that creates a job group defining a plurality of jobs to be grouped and a print order thereof; a job group storage unit that stores information on the print order of the plurality of jobs; a job group updating unit that updates the information on the print order stored in the job group storage unit based on information on an output order when printing is executed by the second printer; and a print instruction unit that instructs the first printer to execute printing based on the plurality of jobs in the print order stored in the job group storage unit.

Abstract: The wind velocity of the air injected by the air-blow dryers 7a, 7b is lower than that of the air injected by the air-blow dryers 7c, 7d. That is, since a large amount of moisture remains on the front surface M1 of the printing medium M passing through the air-blow dryers 7a, 7b, the printing medium M is dried while the flow of the aqueous inks is suppressed by injecting the air at a lower wind velocity. On the other hand, the moisture decreases on the front surface M1 of the printing medium M dried by the air-blow dryers 7a, 7b and the fluidity of the aqueous inks is reduced. Accordingly, the drying of the printing medium M is promoted by injecting the air at a high wind velocity to the printing medium M passing through the air-blow dryers 7c, 7d.

Abstract: The illumination optical system includes a beam shaper which converts an intensity distribution of a laser beam in each of a short axis direction and a long axis direction, which is a Gaussian distribution, into an intensity distribution of a parallel beam on a modulation surface of the optical modulator in each of the short axis direction and the long axis direction, which is a top hat distribution. The modulation surface and an irradiated surface are optically conjugated with respect to the long axis direction by a third lens and a fourth lens. Further, the modulation surface and a front focus position of the fourth lens are optically conjugated with respect to the short axis direction by a first lens, a second lens, and the third lens. The fourth lens condenses a beam having a top hat distribution at the front focus position onto the irradiated surface.

Abstract: A substrate processing apparatus processes a surface of a substrate with a processing fluid and includes a support tray in which a concave part for housing the substrate is provided on an upper surface thereof; a storage container in which a cavity is formed, wherein the support tray may be stored in a horizontal posture in the cavity; and a fluid supply part supplying the processing fluid to the cavity, wherein the storage container has a flow path which receives the processing fluid and discharges the processing fluid in a horizontal direction into the cavity from a discharge port that opens on a side wall surface of the cavity and toward the cavity, and a lower end position of the discharge port in a vertical direction is the same as or higher than a position of the upper surface of the support tray stored in the cavity.