Abstract: A substrate processing apparatus collectively processes a plurality of substrates with the plurality of substrates immersing in a processing liquid. The substrate processing apparatus includes a processing tank, a camera, and a controller. The processing tank stores the processing liquid. The camera is provided vertically higher above the processing tank and captures the inside of the processing tank to generate a plurality of items of captured image data. The controller generates smoothed image data obtained by smoothing a brightness distribution of waving caused on a liquid surface of the processing liquid based on integration of the plurality of items of captured image data, and monitors the inside of the processing tank based on the smoothed image data.

Abstract: A development device has a plurality of nozzles and a plurality of pipes. The plurality of nozzles supply a processing liquid to a substrate. Each of the plurality of pipes is connected to one of the plurality of nozzles and supplies a processing liquid to a nozzle to which the pipe is connected. The development device includes a support and a cover member. The support supports portions of the plurality of pipes. The cover member contains part of the plurality of nozzles and the plurality of pipes while allowing supply of the processing liquid to substrates from the plurality of nozzles. When the support moves or rotates, the plurality of nozzles move between a processing position and a waiting position.

Abstract: Techniques are provided for adequately cooling a continuous base material while efficiently drying a pre-processing liquid on the continuous base material before printing using second ink. The printer includes first and second printing units and a dryer located downstream of the first printing unit and including a heating roller. The second printing unit is located downstream of the dryer. The heating roller has a first outer peripheral surface around which the continuous base material is wound, and heats the continuous base material with the first outer peripheral surface being in contact with a second surface of the continuous base material on the side opposite to the first surface. The dryer includes a cooling roller located downstream of the heating roller and having a second outer peripheral surface around which the continuous base material is wound. The second outer peripheral surface has a lower temperature than the first outer peripheral surface.

Abstract: The substrate processing apparatus includes a suction holding mechanism, a rotation mechanism, a plurality of lift pins, a vertical movement mechanism, and a horizontal movement mechanism. The suction holding mechanism sucks and holds a substrate. The rotation mechanism rotates the suction holding mechanism holding the substrate about the rotation axis. The vertical movement mechanism moves the plurality of lift pins in the vertical direction. A sensor measures the eccentric state of the substrate W held by the suction holding mechanism. The vertical movement mechanism supports the substrate from the suction holding mechanism by moving the plurality of lift pins and the horizontal movement mechanism moves the plurality of lift pins based on the eccentric state of the substrate measured by the sensor in a state where the substrate is supported.

Abstract: A printing system including a printing unit and an imaging unit is provided with: a defect detection unit that detects a defect included in a captured image; a defective nozzle position candidate extraction unit that extracts N position candidates as candidates for a position of a defective nozzle based on the position of the defect; a first correction unit that performs a defect correction process; and a defective nozzle identification unit that identifies the defective nozzle. The first correction unit performs the defect correction process while sequentially setting only N nozzles corresponding to the N position candidates one by one as a correction target nozzle. The defective nozzle identification unit identifies the defective nozzle based on the position of the defect detected by the defect detection unit based on the corrected image.

Abstract: A light diffusion plate is placed on an upper surface of an upper chamber window. A blasting process is applied to a lower surface of the light diffusion plate to provide the lower surface in the form of frosted glass. When the light diffusion plate is placed on the upper surface of the upper chamber window, the light diffusion plate and the upper chamber window do not closely adhere to each other. The frosted glass releases a mass of air entering between contact surfaces of the light diffusion plate and the upper chamber window to the outside even if the mass of air thermally expands during heat treatment. This restrains the occurrence of a phenomenon in which a thin layer of air is trapped between the light diffusion plate and the upper chamber window to prevent the sliding of the light diffusion plate resulting from the air layer.

Abstract: The anti-drop members 7l and 7r are provided to each of the air turn bars 6u and 6l, and the respective anti-drop peripheral surfaces 711 of the anti-drop members 7l and 7r adjoin the support peripheral surface 611 of each of the air turn bars 6u and 6l. In this configuration, on the occurrence of oblique traveling of the printing medium M, the printing medium M is deviated from the support peripheral surface 611 of each of the air turn bars 6u and 6l to the anti-drop peripheral surface 711 of the anti-drop member 7l or 7r. Specifically, the anti-drop peripheral surface 711 of each of the anti-drop members 7l and 7r allows the printing medium M to be supported while providing the clearance ? from the front surface M1 of the printing medium M deviated by the oblique traveling.

Abstract: An image processing method according to the invention comprises: obtaining three-dimensional image data representing a three-dimensional image of a fertilized egg in a cleavage stage obtained by imaging the fertilized egg by optical coherence tomography; extracting a blastomere region corresponding to an individual blastomere in the three-dimensional image for each blastomere based on the three-dimensional image data; counting a number of the blastomere region extracted in the three-dimensional image; obtaining a volume of each blastomere region based on the three-dimensional image data; and determining a number X of the extracted blastomere regions is expressed by a following inequality: 2N<X<2N+1 (N is a natural number) and when the inequality holds, dividing each of (2N+1?X) blastomere regions having a largest volume out of the X blastomere regions equally into two blastomere regions.

Abstract: Disclosed is a substrate treating apparatus for performing a predetermined treatment on a substrate. The apparatus includes: a spin table configured to be rotatable around a vertical axis; a rotational driving device having a grounded rotary shaft connected to a center portion of the spin table and configured to rotate the spin table in a horizontal plane; a holding mechanism having a plurality of support pins, provided on a top face of the spin table adjacent to an outer circumference and made of a conductive material, and configured to hold a substrate in a horizontal posture while the substrate is spaced apart from the top face of the spin table; and a ground line having conductivity, constituting a part of the spin table, and electrically connecting the plurality of support pins and the rotary shaft.

Abstract: A state detection device includes at least one chuck pin for holding a substrate, a photographing unit configured to photograph the chuck pin, and set at least one image to be obtained as a target image, a matching coordinate calculation unit, namely a data matching calculator, configured to perform matching processing between the target image and a reference image which is at least one image showing the chuck pin, and calculate matching coordinates, which are coordinates indicating a position of the reference image in the target image when a matching score between the reference image and the target image is the highest, and a detection unit, namely a detector, configured to detect an open/closed state of the chuck pin based on the matching coordinates. Therefore, the open/closed state of the chuck pin can be detected while maintaining high detection accuracy.

Abstract: A substrate processing method that includes a processing liquid supplying step which supplies a processing liquid to a surface of a substrate, a processing film forming step in which the processing liquid on the surface of the substrate is solidified or cured to form a processing film that holds removal objects present on the surface of the substrate, and a removing step in which a removing liquid is supplied to the surface of the substrate to thereby remove the processing film from the surface of the substrate in a state that the removal objects are held by the processing film. The processing liquid contains a dissolution component which dissolves at least one of a front layer of the substrate and the removal objects as a dissolution object. The processing liquid supplying step includes a dissolution step which partially dissolves the dissolution object by the dissolution component in the processing liquid supplied to the surface of the substrate.

Abstract: A silicon etching solution includes a mixed solution comprising a quaternary alkylammonium hydroxide and water and further comprises a compound represented by the following formula (1): R1O—(CmH2mO)n—R2??(1) wherein R1 is a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, R2 is a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, m is an integer of 2 to 6, and n is 1 or 2.

Abstract: A learned model generating method includes: acquiring learning data; and generating a learned model for estimating a factor of an abnormality of a processing target substrate after processing using a processing fluid by performing machine learning of the learning data. The learning data includes a feature quantity and abnormality factor information. The abnormality factor information represents a factor of an abnormality of a learning target substrate after processing using the processing fluid. The feature quantity includes first feature quantity information representing a feature of a time transition of section data in time series data representing a physical quantity of an object used by a substrate processing device that processes the learning target substrate using the processing fluid. The first feature quantity information is represented using times.

Abstract: A data processing method includes a step of obtaining evaluated values of the time-series data by comparing the time-series data with reference data, a step of classifying the evaluated values into a plurality of levels, a step of displaying an evaluation result screen including a display area including a first graph showing an occurrence rate of each level of the evaluated values, the evaluation result screen including the display area with respect to each of the two or more processing units. A history screen displaying a history in which the evaluated values have been obtained and a trend screen including graphs showing temporal change in the evaluated values in addition to the evaluation result screen is hierarchically displayed. A mark is attached at a position corresponding to a processing result selected in the history screen in a graph in the trend screen.

Abstract: Disclosed is a printing apparatus in which web paper is transported to a printing face contact roller in a swirling form while a direction thereof is turned by first to fourth turning rollers. Heating units are arranged so as to face a printing face of the web paper between the two first and second turning rollers, between the two third and fourth turning rollers, and between the fourth turning roller and the printing face contact roller individually. Such arrangement can achieve a compact drying mechanism. The heating units each directly heat inks on the printing face, and thus do not overheat the web paper. Moreover, the heating units are not directed upward. This avoids contact of the web paper to a front side face of each of the heating units when the web paper slackens.

Abstract: A substrate processing apparatus includes a substrate holding device, a brush arm, a plurality of brush devices, a brush storage device, and a brush liquid supply system. The tip portion of the brush arm is configured as a brush holder to which the brush device can be attached and detached. A substrate held by the substrate holding device is cleaned with the brush device. The brush storage device stores unprocessed brush devices. The used brush device is removed from the brush holder. An unprocessed brush device stored in the brush storage device is attached to the brush holder. The brush storage device is configured so that a cleaning surface of the stored brush device is maintained in a state of being wetted with a processing liquid supplied from the brush liquid supply system.

Abstract: A chuck pin includes a holding portion and a fixing portion and holds a substrate. The holding portion has an inner circumferential surface and an outer circumferential surface capable of abutting against the substrate. The inner circumferential surface of the holding portion is formed with a protruding portion that protrudes inward. The fixing portion includes a pressing portion, a pressed portion, and an urging portion, and detachably fixes the holding portion. The pressing portion has a side wall portion in which a first opening portion is formed. The pressed portion has a side wall portion in which a second opening portion is formed. The urging portion urges the pressing portion in a rotation direction with respect to the pressed portion. The protruding portion formed on the inner circumferential surface of the holding portion is sandwiched between the pressing portion and the pressed portion at the first and second opening portions.

Abstract: A substrate is held in a horizontal attitude by a substrate holder. At a processing position, a lower surface of the substrate held by the substrate holder is cleaned by a lower-surface brush. The lower-surface brush is cleaned by a brush cleaner at a waiting position that overlaps with the substrate held by the substrate holder in an up-and-down direction and is below a processing position. The lower-surface brush is lifted and lowered by a lower-surface brush lifting-lowering driver between the processing position and the waiting position.

Abstract: A technique for making the amount of ink to be calculated appropriate in accordance with the amount of ink to be ejected from heads is provided. An inkjet printing apparatus includes a supply tank, a return tank, a first connecting pipe, a second connecting pipe, a head, a pressure-difference producer, an ejection-amount predictor, and a pressure controller. The first connecting pipe transfers ink in the supply tank to the return tank. The second connecting pipe returns ink in the return tank to the supply tank. The head is interposed in the first connecting pipe. The pressure-difference producer sends ink from the supply tank to the return tank through the first connecting pipe. The ejection-amount predictor predicts the amount of ink to be ejected at a time to come after the present time from the head.

Abstract: A substrate processing method is provided. The substrate processing method includes: (S7) supplying a water repellent agent (SMT) to a substrate (W); (S11) supplying dilute isopropyl alcohol (dIPA) to the substrate (W) after the supplying a water repellent agent (SMT), the dilute isopropyl alcohol (dIPA) being obtained by diluting isopropyl alcohol; and (S12) drying the substrate (W) after the supplying dilute isopropyl alcohol (dIPA).